Murata; Hitoshi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Murata; Hitoshi.The latest application filed is for "method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device".

Company Profile

9.32.27

Murata; Hitoshi - Toyama JP
MURATA; Hitoshi - Toyama-shi JP
Murata; Hitoshi - Okayama JP
Murata; Hitoshi - Tokyo JP
Murata; Hitoshi - Kyoto JP
Murata; Hitoshi - Kanagawa JP
Murata, Hitoshi - Souraku-gun JP
Murata; Hitoshi - Zama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus, heater and method of manufacturing semiconductor device Grant 11,359,285 - Murata , et al. June 14, 2	2022-06-14
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor Device App 20220122858 - MURATA; Hitoshi ; et al.	2022-04-21
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor Device App 20220122859 - MURATA; Hitoshi ; et al.	2022-04-21
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20210407865 - SHINOZAKI; Kenji ; et al.	2021-12-30
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater App 20210313205 - SUGIURA; Shinobu ; et al.	2021-10-07
Cooling unit, heat insulating structure, and substrate processing apparatus Grant 11,043,402 - Kosugi , et al. June 22, 2	2021-06-22
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus App 20210181033 - AKAO; Tokunobu ; et al.	2021-06-17
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device App 20200173024 - MURATA; Hitoshi ; et al.	2020-06-04
Substrate processing apparatus, heater and method of manufacturing semiconductor device Grant 10,597,780 - Murata , et al.	2020-03-24
Substrate Processing Apparatus And Ceiling Heater App 20190284696 - KOSUGI; Tetsuya ; et al.	2019-09-19
Electric furnace for substrate processing apparatus Grant D860,419 - Kosugi , et al. Sept	2019-09-17
Electric furnace for substrate processing apparatus Grant D860,420 - Kosugi , et al. Sept	2019-09-17
Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device Grant 10,340,151 - Kosugi , et al.	2019-07-02
Cooling Unit, Heat Insulating Structure, And Substrate Processing Apparatus App 20190080941 - KOSUGI; Tetsuya ; et al.	2019-03-14
Substrate Processing Apparatus And Substrate Retainer App 20190024232 - KOSUGI; Tetsuya ; et al.	2019-01-24
Gene Expression Cassette And Product Thereof App 20180265894 - Sakaguchi; Masakiyo ; et al.	2018-09-20
Protector tube for thermocouple Grant D819,463 - Akao , et al. June 5, 2	2018-06-05
Protector tube for thermocouple Grant D818,850 - Akao , et al. May 29, 2	2018-05-29
Substrate processing apparatus and heating unit Grant 9,957,616 - Murata , et al. May 1, 2	2018-05-01
Substrate Processing Apparatus, Heater and Method of Manufacturing Semiconductor Device App 20170335458 - MURATA; Hitoshi ; et al.	2017-11-23
Heater supporting device Grant 9,779,970 - Kosugi , et al. October 3, 2	2017-10-03
Heater for semiconductor thermal process Grant D795,209 - Murata , et al. August 22, 2	2017-08-22
Heater for semiconductor thermal process Grant D793,974 - Murata , et al. August 8, 2	2017-08-08
Heater for semiconductor thermal process Grant D793,975 - Murata , et al. August 8, 2	2017-08-08
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate Grant 9,695,511 - Murata , et al. July 4, 2	2017-07-04
Insulation structure and method of manufacturing semiconductor device Grant 9,587,884 - Kosugi , et al. March 7, 2	2017-03-07
Substrate processing apparatus and heating equipment Grant 9,460,946 - Murata , et al. October 4, 2	2016-10-04
Method of manufacturing semiconductor device using meander-shaped heating element Grant 9,449,849 - Murata , et al. September 20, 2	2016-09-20
Substrate Processing Apparatus And Heating Unit App 20160244878 - MURATA; Hitoshi ; et al.	2016-08-25
Substrate Processing Apparatus, Heating Apparatus, Ceiling Heat Insulator, And Method Of Manufacturing Semiconductor Device App 20150221532 - KOSUGI; Tetsuya ; et al.	2015-08-06
Heating device, substrate processing apparatus, and method of manufacturing semiconductor device Grant 9,064,912 - Murata , et al. June 23, 2	2015-06-23
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate App 20150093909 - MURATA; Hitoshi ; et al.	2015-04-02
Method Of Manufacturing Semiconductor Device App 20140322926 - Murata; Hitoshi ; et al.	2014-10-30
Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same Grant 8,847,124 - Murata , et al. September 30, 2	2014-09-30
Insulation Structure And Method Of Manufacturing Semiconductor Device App 20140287375 - KOSUGI; Tetsuya ; et al.	2014-09-25
Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part Grant 8,535,444 - Murata , et al. September 17, 2	2013-09-17
CVD apparatus and method of cleaning the CVD apparatus Grant 8,277,560 - Sakai , et al. October 2, 2	2012-10-02
Substrate Processing Apparatus And Heating Equipment App 20120006506 - MURATA; Hitoshi ; et al.	2012-01-12
Heater Supporting Device App 20110281226 - KOSUGI; Tetsuya ; et al.	2011-11-17
Device for cleaning CVD device and method of cleaning CVD device Grant 8,043,438 - Sakai , et al. October 25, 2	2011-10-25
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20110021038 - MURATA; Hitoshi ; et al.	2011-01-27
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20110021039 - MURATA; Hitoshi ; et al.	2011-01-27
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Ceiling Insulating Part App 20090209113 - MURATA; Hitoshi ; et al.	2009-08-20
Device for cleaning cvd device and method of cleaning cvd device App 20060207630 - Sakai; Katsuo ; et al.	2006-09-21
Cvd apparatus and method for cleaning cvd apparatus App 20060201533 - Wani; Etsuo ; et al.	2006-09-14
Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas App 20050252451 - Beppu, Tatsuro ; et al.	2005-11-17
Method of cleaning CVD device and cleaning device therefor Grant 6,935,351 - Shibata , et al. August 30, 2	2005-08-30
Cvd apparatus and method of cleaning the cvd apparatus App 20040250775 - Sakai, Katsuo ; et al.	2004-12-16
Heat treatment apparatus and cleaning method of the same Grant 6,807,971 - Saito , et al. October 26, 2	2004-10-26
Method of cleaning cvd device and cleaning device therefor App 20030079757 - Shibata, Koji ; et al.	2003-05-01
Heat treatment apparatus and cleaning method of the same App 20020073923 - Saito, Yukimasa ; et al.	2002-06-20
Heat treatment apparatus and cleaning method of the same Grant 6,383,300 - Saito , et al. May 7, 2	2002-05-07
Method for automatically attaching sub-assembly to main assembly and system thereof using industrial robots Grant 4,604,797 - Kitamura , et al. August 12, 1	1986-08-12
Method and system for automatically attaching sub-assembly to main assembly using industrial robots Grant 4,575,934 - Kitamura , et al. March 18, 1	1986-03-18

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