MULKENS; Johannes Catharinus Hubertus

Patent Applications and Registrations

Patent applications and USPTO patent grants for MULKENS; Johannes Catharinus Hubertus.The latest application filed is for "a method for characterizing a manufacturing process of semiconductor devices".

Company Profile

35.200.200

MULKENS; Johannes Catharinus Hubertus - Valkenswaard NL
Mulkens; Johannes Catharinus Hubertus - Maastricht NL
Mulkens; Johannes Catharinus Hubertus - Waalre NL
Mulkens; Johannes Catharinus Hubertus - Waalrc NL
MULKENS; Johannes Catharinus Hubertus - Veldhoven NL
Mulkens; Johannes Catharinus Hubertus - Waarle NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
A Method For Characterizing A Manufacturing Process Of Semiconductor Devices App 20220100098 - TEL; Wim Tjibbo ; et al.	2022-03-31
Method And Apparatus For Inspection App 20210375581 - KASTRUP; Bernardo ; et al.	2021-12-02
Computational Wafer Inspection App 20210357570 - FOUQUET; Christophe David ; et al.	2021-11-18
Method and apparatus for inspection Grant 11,094,502 - Kastrup , et al. August 17, 2	2021-08-17
Computational wafer inspection Grant 11,080,459 - Fouquet , et al. August 3, 2	2021-08-03
Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program Grant 11,048,174 - Kubis , et al. June 29, 2	2021-06-29
Lithographic Apparatus And Device Manufacturing Method App 20210096476 - MULKENS; Johannes Catharinus Hubertus ; et al.	2021-04-01
Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2	2021-03-30
Method and apparatus to correct for patterning process error Grant 10,915,689 - Ten Berge , et al. February 9, 2	2021-02-09
Lithographic apparatus and device manufacturing method Grant 10,866,530 - Mulkens , et al. December 15, 2	2020-12-15
Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2	2020-09-29
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets Grant 10,761,438 - Streefkerk , et al. Sep	2020-09-01
Lithographic apparatus and device manufacturing method Grant 10,739,684 - Streefkerk , et al. A	2020-08-11
Method Of Controlling A Patterning Process, Lithographic Apparatus, Metrology Apparatus Lithographic Cell And Associated Compute App 20200233311 - KUBIS; Michael ; et al.	2020-07-23
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ; et al.	2020-07-16
Computational Wafer Inspection App 20200218849 - Fouquet; Christophe David ; et al.	2020-07-09
Lithographic apparatus and device manufacturing method Grant 10,705,432 - Kolesnychenko , et al.	2020-07-07
Lithographic apparatus Grant 10,649,341 - Van Den Dungen , et al.	2020-05-12
Computational wafer inspection Grant 10,579,772 - Fouquet , et al.	2020-03-03
Lithographic apparatus and device manufacturing method Grant 10,527,955 - Hoogendam , et al. J	2020-01-07
Lithographic apparatus and device manufacturing method Grant 10,509,326 - Jansen , et al. Dec	2019-12-17
Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec	2019-12-10
Lithographic apparatus and device manufacturing method Grant 10,495,980 - Mulkens , et al. De	2019-12-03
Lithographic apparatus and device manufacturing method Grant 10,495,981 - Mulkens , et al. De	2019-12-03
Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No	2019-11-05
Lithographic Apparatus And Device Manufacturing Method App 20190324374 - STREEFKERK; Bob ; et al.	2019-10-24
Lithographic Apparatus And Device Manufacturing Method App 20190317411 - STREEFKERK; Bob ; et al.	2019-10-17
Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ; et al.	2019-10-03
Lithographic Apparatus And Device Manufacturing Method App 20190271920 - Mulkens; Johannes Catharinus Hubertus ; et al.	2019-09-05
Lithographic Apparatus And Device Manufacturing Method App 20190265596 - LOF; Joeri ; et al.	2019-08-29
Lithographic Apparatus And Device Manufacturing Method App 20190227444 - HOOGENDAM; Christiaan Alexander ; et al.	2019-07-25
Lithographic Apparatus And Device Manufacturing Method App 20190212662 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2019-07-11
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ; et al.	2019-07-11
Method And Apparatus To Monitor A Process Apparatus App 20190214318 - MASLOW; Mark John ; et al.	2019-07-11
Lithographic apparatus and device manufacturing method Grant 10,345,712 - Streefkerk , et al. July 9, 2	2019-07-09
Lithographic apparatus and device manufacturing method Grant 10,338,478 - Streefkerk , et al.	2019-07-02
Lithographic projection apparatus and device manufacturing method Grant 10,303,066 - Mulkens	2019-05-28
Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al.	2019-04-16
Lithographic apparatus and device manufacturing method Grant 10,248,034 - Hoogendam , et al.	2019-04-02
Lithographic Apparatus And Device Manufacturing Method App 20190086819 - LOOPSTRA; Erik Roelof ; et al.	2019-03-21
Lithographic apparatus and device manufacturing method Grant 10,234,768 - Kolesnychenko , et al.	2019-03-19
Lithographic apparatus and device manufacturing method Grant 10,222,706 - Lof , et al.	2019-03-05
Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating Grant 10,197,927 - Mulkens , et al. Fe	2019-02-05
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja	2019-01-29
Method And Apparatus For Inspection App 20190006147 - KASTRUP; Bernardo ; et al.	2019-01-03
Computational Wafer Inspection App 20180365369 - FOUQUET; Christophe David ; et al.	2018-12-20
Lithographic apparatus and device manufacturing method Grant 10,146,142 - Loopstra , et al. De	2018-12-04
Method And Apparatus To Correct For Patterning Process Error App 20180314149 - MULKENS; Johannes Catharinus Hubertus	2018-11-01
Method And Apparatus To Correct For Patterning Process Error App 20180307135 - TEN BERGE; Peter ; et al.	2018-10-25
Method And Apparatus To Correct For Patterning Process Error App 20180299770 - TEN BERGE; Peter ; et al.	2018-10-18
Lithographic Apparatus And Device Manufacturing Method App 20180246418 - Kolesnychenko; Aleksey Yurievich ; et al.	2018-08-30
Lithographic Apparatus And Device Manufacturing Method App 20180203364 - STREEFKERK; Bob ; et al.	2018-07-19
Lithographic apparatus and device manufacturing method Grant 9,989,861 - Kolesnychenko , et al. June 5, 2	2018-06-05
Computational wafer inspection Grant 9,990,462 - Fouquet , et al. June 5, 2	2018-06-05
Lithographic Apparatus And Device Manufacturing Method App 20180129143 - HOOGENDAM; Christiaan Alexander ; et al.	2018-05-10
Lithographic apparatus and device manufacturing method Grant 9,952,515 - Streefkerk , et al. April 24, 2	2018-04-24
Lithographic Apparatus And Device Manufacturing Method App 20180081282 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2018-03-22
Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ; et al.	2018-02-15
Lithographic apparatus and device manufacturing method Grant 9,885,965 - Hoogendam , et al. February 6, 2	2018-02-06
Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ; et al.	2017-11-30
Lithographic apparatus and device manufacturing method Grant 9,829,799 - Kolesnychenko , et al. November 28, 2	2017-11-28
Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2	2017-10-24
Lithographic Apparatus And Device Manufacturing Method App 20170242347 - HOOGENDAM; Christiaan Alexander ; et al.	2017-08-24
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2	2017-08-22
Active Drying Station And Method To Remove Immersion Liquid Using Gas Flow Supply With Gas Outlet Between Two Gas Inlets App 20170235236 - STREEFKERK; Bob ; et al.	2017-08-17
Lithographic Projection Apparatus And Device Manufacturing Method App 20170227857 - MULKENS; Johannes Catharinus Hubertus	2017-08-10
Lithographic Apparatus And Device Manufacturing Method App 20170205714 - MULKENS; Johannes Catharinus Hubertus ; et al.	2017-07-20
Lithographic apparatus and device manufacturing method Grant 9,703,210 - Jansen , et al. July 11, 2	2017-07-11
Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process Grant 9,696,635 - Engelen , et al. July 4, 2	2017-07-04
Lithographic Apparatus And Device Manufacturing Method App 20170160650 - LOOPSTRA; Erik Roelof ; et al.	2017-06-08
Lithographic Apparatus And Device Manufacturing Method App 20170153557 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2017-06-01
Illumination system and lithographic apparatus Grant 9,651,875 - Mulder , et al. May 16, 2	2017-05-16
Lithographic projection apparatus and device manufacturing method Grant 9,639,006 - Mulkens May 2, 2	2017-05-02
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets Grant 9,623,436 - Streefkerk , et al. April 18, 2	2017-04-18
Lithographic apparatus and device manufacturing method Grant 9,606,448 - Loopstra , et al. March 28, 2	2017-03-28
Lithographic apparatus and device manufacturing method Grant 9,588,442 - Hoogendam , et al. March 7, 2	2017-03-07
Computational Wafer Inspection App 20170046473 - FOUQUET; Christophe David ; et al.	2017-02-16
Lithographic Apparatus And Device Manufacturing Method App 20170045830 - HOOGENDAM; Christiaan Alexander ; et al.	2017-02-16
Lithographic apparatus and device manufacturing method Grant 9,568,840 - Kolesnychenko , et al. February 14, 2	2017-02-14
Lithographic Apparatus App 20170023870 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al.	2017-01-26
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ; et al.	2017-01-12
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2	2017-01-10
Computational wafer inspection Grant 9,507,907 - Fouquet , et al. November 29, 2	2016-11-29
Lithographic apparatus and device manufacturing method Grant 9,482,966 - Lof , et al. November 1, 2	2016-11-01
Lithographic apparatus and device manufacturing method Grant 9,482,962 - Hoogendam , et al. November 1, 2	2016-11-01
Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2	2016-10-25
Lithographic apparatus and device manufacturing method Grant 9,477,159 - Mulkens , et al. October 25, 2	2016-10-25
Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ; et al.	2016-10-13
System and method to ensure source and image stability Grant 9,459,537 - Cao , et al. October 4, 2	2016-10-04
Lithographic Apparatus And Device Manufacturing Method App 20160274473 - HOOGENDAM; Christiaan Alexander ; et al.	2016-09-22
Lithographic apparatus and device manufacturing method Grant 9,442,388 - Loopstra , et al. September 13, 2	2016-09-13
Lithographic apparatus, device manufacturing method, and method of correcting a mask Grant 9,417,519 - Mulkens August 16, 2	2016-08-16
Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2	2016-06-14
Lithographic apparatus and device manufacturing method Grant 9,360,765 - Hoogendam , et al. June 7, 2	2016-06-07
Lithographic apparatus, fluid combining unit and device manufacturing method Grant 9,330,912 - Mulkens , et al. May 3, 2	2016-05-03
Lithographic Apparatus And Device Manufacturing Method App 20160085161 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2016-03-24
Lithographic apparatus and device manufacturing method Grant 9,285,685 - Streefkerk , et al. March 15, 2	2016-03-15
Lithographic Apparatus And Device Manufacturing Method App 20160062248 - LOF; Joeri ; et al.	2016-03-03
Lithography Cluster, Method and Control Unit for Automatic Rework of Exposed Substrates App 20160041478 - MULKENS; Johannes Catharinus Hubertus	2016-02-11
Lithographic Apparatus And Device Manufacturing Method App 20160026095 - MULKENS; Johannes Catharinus Hubertus ; et al.	2016-01-28
Lithographic Apparatus And Device Manufacturing Method App 20160004171 - STREEFKERK; Bob ; et al.	2016-01-07
Lithographic Apparatus And Device Manufacturing Method App 20150362844 - LOF; Joeri ; et al.	2015-12-17
Computational Wafer Inspection App 20150356233 - FOUQUET; Christophe David ; et al.	2015-12-10
Lithographic apparatus and device manufacturing method involving a groove to collect liquid Grant 9,207,543 - Kolesnychenko , et al. December 8, 2	2015-12-08
Lithographic Apparatus And Device Manufacturing Method App 20150338748 - HOOGENDAM; Christiaan Alexander ; et al.	2015-11-26
Lithographic apparatus and device manufacturing method Grant 9,195,153 - Lof , et al. November 24, 2	2015-11-24
Lithographic Apparatus And Device Manufacturing Method App 20150316858 - STREEFKERK; Bob ; et al.	2015-11-05
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2	2015-10-06
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ; et al.	2015-09-17
Lithographic apparatus and device manufacturing method Grant 9,134,623 - Streefkerk , et al. September 15, 2	2015-09-15
Lithographic apparatus and device manufacturing method Grant 9,134,622 - Streefkerk , et al. September 15, 2	2015-09-15
Illumination System And Lithographic Apparatus App 20150241792 - MULDER; Heine Melle ; et al.	2015-08-27
Illumination system and lithographic apparatus Grant 9,116,439 - Mulder , et al. August 25, 2	2015-08-25
Lithographic Apparatus App 20150234294 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al.	2015-08-20
Lithographic apparatus having a liquid detection system Grant 9,104,117 - Streefkerk , et al. August 11, 2	2015-08-11
Lithographic apparatus and device manufacturing method Grant 9,097,987 - Hoogendam , et al. August 4, 2	2015-08-04
Lithographic apparatus and method involving a fluid inlet and a fluid outlet Grant 9,091,940 - Derksen , et al. July 28, 2	2015-07-28
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2	2015-07-14
Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ; et al.	2015-06-18
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2	2015-06-16
Lithographic Projection Apparatus And Device Manufacturing Method App 20150160567 - MULKENS; Johannes Catharinus Hubertus	2015-06-11
Lithographic apparatus Grant 9,036,127 - Van den Dungen , et al. May 19, 2	2015-05-19
Lithographic Apparatus And Device Manufacturing Method App 20150116675 - JANSEN; Hans ; et al.	2015-04-30
Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2	2015-02-24
Immersion lithographic apparatus and device manufacturing method with a projection system having a part movable relative to another part Grant 8,964,163 - Mulkens February 24, 2	2015-02-24
Lithographic apparatus, device manufacturing method, and substrate exchanging method Grant 8,947,636 - Cadee , et al. February 3, 2	2015-02-03
Lithographic apparatus and device manufacturing method Grant 8,941,811 - Jansen , et al. January 27, 2	2015-01-27
Lithographic Apparatus And Device Manufacturing Method App 20140375972 - HOOGENDAM; Christiaan Alexander ; et al.	2014-12-25
Lithographic Apparatus And Device Manufacturing Method App 20140347642 - LOOPSTRA; Erik Roelof ; et al.	2014-11-27
Lithographic apparatus and device manufacturing method Grant 8,860,923 - Hoogendam , et al. October 14, 2	2014-10-14
Lithographic Apparatus And Device Manufacturing Method App 20140293248 - STREEFKERK; Bob ; et al.	2014-10-02
Lithographic apparatus and device manufacturing method Grant 8,848,162 - Mulkens September 30, 2	2014-09-30
Lithographic Apparatus And Device Manufacturing Method App 20140253890 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2014-09-11
Lithographic Apparatus And Device Manufacturing Method App 20140233004 - Streefkerk; Bob ; et al.	2014-08-21
Active Drying Station And Method To Remove Immersion Liquid Using Gas Flow Supply With Gas Outlet Between Two Gas Inlets App 20140224173 - STREEFKERK; Bob ; et al.	2014-08-14
Lithographic apparatus and device manufacturing method Grant 8,804,097 - Loopstra , et al. August 12, 2	2014-08-12
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure Grant 8,797,503 - Lof , et al. August 5, 2	2014-08-05
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,755,033 - Kolesnychenko , et al. June 17, 2	2014-06-17
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid Grant 8,755,027 - Lipson , et al. June 17, 2	2014-06-17
Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2	2014-05-13
Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2	2014-05-13
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 8,711,326 - Van Der Ham , et al. April 29, 2	2014-04-29
Lithographic apparatus and device manufacturing method Grant 8,711,330 - Streefkerk , et al. April 29, 2	2014-04-29
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid Grant 8,704,998 - Kolesnychenko , et al. April 22, 2	2014-04-22
Lithographic Apparatus And Device Manufacturing Method App 20140071420 - Loopstra; Erik Roelof ; et al.	2014-03-13
Lithographic apparatus and device manufacturing method Grant 8,638,419 - Jansen , et al. January 28, 2	2014-01-28
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets Grant 8,638,415 - Streefkerk , et al. January 28, 2	2014-01-28
Lithographic apparatus Grant 8,638,418 - Hoogendam , et al. January 28, 2	2014-01-28
Lithographic apparatus and device manufacturing method Grant 8,634,056 - Streefkerk , et al. January 21, 2	2014-01-21
Immersion lithographic apparatus with immersion fluid re-circulating system Grant 8,629,970 - Sewell , et al. January 14, 2	2014-01-14
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply Grant 8,614,784 - Riepen , et al. December 24, 2	2013-12-24
Lithographic Apparatus And Device Manufacturing Method App 20130308110 - Mulkens; Johannes Catharinus Hubertus ; et al.	2013-11-21
Methods relating to immersion lithography and an immersion lithographic apparatus Grant 8,587,762 - Streefkerk , et al. November 19, 2	2013-11-19
Lithographic Apparatus And Device Manufacturing Method App 20130301017 - Derksen; Antonius Theodorus Anna Maria ; et al.	2013-11-14
Lithographic apparatus and device manufacturing method Grant 8,570,486 - Mulkens , et al. October 29, 2	2013-10-29
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2	2013-10-15
Lithographic apparatus and device manufacturing method Grant 8,547,519 - Streefkerk , et al. October 1, 2	2013-10-01
Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ; et al.	2013-09-26
Lithographic apparatus and device manufacturing method Grant 8,542,344 - Hoogendam , et al. September 24, 2	2013-09-24
Lithographic apparatus Grant 8,542,343 - Hoogendam , et al. September 24, 2	2013-09-24
Lithographic Apparatus And Device Manufacturing Method App 20130235358 - HOOGENDAM; Christiaan Alexander ; et al.	2013-09-12
Lithographic apparatus and device manufacturing method Grant 8,514,369 - Mulkens , et al. August 20, 2	2013-08-20
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2	2013-07-09
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2	2013-06-25
Lithographic apparatus and device manufacturing method Grant 8,472,006 - Streefkerk , et al. June 25, 2	2013-06-25
Lithographic Apparatus And Device Manufacturing Method App 20130135595 - STREEFKERK; Bob ; et al.	2013-05-30
Lithographic Apparatus And Device Manufacturing Method App 20130128256 - LOF; Joeri ; et al.	2013-05-23
Lithographic apparatus and device manufacturing method Grant 8,446,568 - Derksen , et al. May 21, 2	2013-05-21
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method Grant 8,405,817 - Stavenga , et al. March 26, 2	2013-03-26
Lithographic apparatus and device manufacturing method Grant 8,400,615 - Streefkerk , et al. March 19, 2	2013-03-19
Lithographic Projection Apparatus And Device Manufacturing Method App 20130057841 - MULKENS; Johannes Catharinus Hubertus	2013-03-07
Lithographic apparatus and device manufacturing method Grant 8,354,209 - Streefkerk , et al. January 15, 2	2013-01-15
System and Method to Ensure Source and Image Stability App 20120327383 - Cao; Yu ; et al.	2012-12-27
Immersion lithographic apparatus and device manufacturing method detecting residual liquid Grant 8,319,939 - Streefkerk , et al. November 27, 2	2012-11-27
Lithographic Apparatus And Device Manufacturing Method App 20120257178 - HOOGENDAM; Christiaan Alexander ; et al.	2012-10-11
Lithographic Apparatus, Device Manufacturing Method, And Method Of Correcting A Mask App 20120257184 - MULKENS; Johannes Catharinus Hubertus	2012-10-11
Method Of Controlling A Lithographic Apparatus, Device Manufacturing Method, Lithographic Apparatus, Computer Program Product And Method Of Improving A Mathematical Model Of A Lithographic Process App 20120229786 - ENGELEN; Adrianus Franciscus Petrus ; et al.	2012-09-13
Lithographic apparatus and device manufacturing method Grant 8,259,289 - Mulkens , et al. September 4, 2	2012-09-04
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 8,237,912 - Boom , et al. August 7, 2	2012-08-07
Immersion lithographic apparatus with a projection system having an isolated or movable part Grant 8,218,125 - Mulkens July 10, 2	2012-07-10
Lithographic apparatus and device manufacturing method Grant 8,208,123 - Loopstra , et al. June 26, 2	2012-06-26
Lithographic apparatus and device manufacturing method Grant 8,208,124 - Loopstra , et al. June 26, 2	2012-06-26
Lithographic apparatus and device manufacturing method Grant 8,208,120 - Lof , et al. June 26, 2	2012-06-26
Lithographic apparatus and device manufacturing method Grant 8,174,674 - Mulkens , et al. May 8, 2	2012-05-08
Lithographic Apparatus And Device Manufacturing Method App 20120086928 - BASELMANS; Johannes Jacobus Matheus ; et al.	2012-04-12
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2	2012-04-10
Lithographic apparatus and device manufacturing method Grant 8,115,899 - Jansen , et al. February 14, 2	2012-02-14
Lithographic apparatus and device manufacturing method Grant 8,102,507 - Streefkerk , et al. January 24, 2	2012-01-24
Lithographic Apparatus And Device Manufacturing Method App 20120013867 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120013869 - HOOGENDAM; Christiaan Alexander ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120013868 - Loopstra; Erik Roelof ; et al.	2012-01-19
Lithographic Apparatus, Fluid Combining Unit And Device Manufacturing Method App 20120013866 - MULKENS; Johannes Catharinus Hubertus ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20110317138 - LIPSON; Matthew ; et al.	2011-12-29
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20110292357 - Van Der Ham; Ronald ; et al.	2011-12-01
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ; et al.	2011-11-24
Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ; et al.	2011-11-17
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ; et al.	2011-11-17
Lithographic Apparatus And Device Manufacturing Method App 20110273677 - STREEFKERK; Bob ; et al.	2011-11-10
Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ; et al.	2011-11-10
Lithographic apparatus with a fluid combining unit and related device manufacturing method Grant 8,045,135 - Mulkens , et al. October 25, 2	2011-10-25
Lithographic Apparatus, Device Manufacturing Method, And Substrate Exchanging Method App 20110242518 - Cadee; Theodorus Petrus Maria ; et al.	2011-10-06
Lithographic apparatus and device manufacturing method Grant 8,027,026 - Lipson , et al. September 27, 2	2011-09-27
Illumination System And Lithographic Apparatus App 20110228247 - Mulder; Heine Melle ; et al.	2011-09-22
Lithographic Apparatus And Device Manufacturing Method App 20110228241 - LOF; Joeri ; et al.	2011-09-22
Lithographic Apparatus And Scanning Method App 20110216301 - DE LANGE; Gerben Frank ; et al.	2011-09-08
Lithographic Apparatus And Device Manufacturing Method App 20110211181 - STREEFKERK; Bob ; et al.	2011-09-01
Liquid Filled Lens Element, Lithographic Apparatus Comprising Such An Element And Device Manufacturing Method App 20110194096 - BOOM; Herman ; et al.	2011-08-11
Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ; et al.	2011-07-28
Immersion lithographic apparatus and device manufacturing method with gas supply Grant 7,982,850 - Lof , et al. July 19, 2	2011-07-19
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ; et al.	2011-07-14
Lithographic Apparatus App 20110157570 - Hoogendam; Christiaan Alexander ; et al.	2011-06-30
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 7,969,549 - Boom , et al. June 28, 2	2011-06-28
Lithographic Apparatus And Device Manufacturing Method App 20110134402 - LIPSON; Matthew ; et al.	2011-06-09
Lithographic Apparatus And Device Manufacturing Method App 20110122376 - Derksen; Antonius Theodorus Anna Maria ; et al.	2011-05-26
Lithographic Apparatus And Device Manufacturing Method App 20110116061 - KOLESNYCHENKO; Aleksey Yurievich ; et al.	2011-05-19
Lithographic Apparatus And Device Manufacturing Method App 20110109887 - Jansen; Hans ; et al.	2011-05-12
Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2	2011-05-03
Lithographic apparatus and device manufacturing method Grant 7,932,999 - Hoogendam , et al. April 26, 2	2011-04-26
Lithographic Apparatus App 20110090473 - Hoogendam; Christiaan Alexander ; et al.	2011-04-21
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110090472 - RIEPEN; Michel ; et al.	2011-04-21
Lithographic Apparatus And Device Manufacturing Method App 20110058148 - BASELMANS; Johannes Jacobus Matheus ; et al.	2011-03-10
Lithographic apparatus and device manufacturing method Grant 7,898,642 - Kolesnychenko , et al. March 1, 2	2011-03-01
Lithographic apparatus and device manufacturing method Grant 7,894,040 - Lipson , et al. February 22, 2	2011-02-22
Lithographic Apparatus And Device Manufacturing Method App 20110037958 - Mulkens; Johannes Catharinus Hubertus ; et al.	2011-02-17
Lithographic Apparatus And Device Manufacturing Method App 20110025993 - MULKENS; Johannes Catharinus Hubertus	2011-02-03
Lithographic apparatus and device manufacturing method Grant 7,880,860 - Jansen , et al. February 1, 2	2011-02-01
Lithographic Apparatus And Device Manufacturing Method App 20110019168 - STREEFKERK; Bob ; et al.	2011-01-27
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ; et al.	2011-01-13
Lithographic apparatus Grant 7,868,998 - Hoogendam , et al. January 11, 2	2011-01-11
Lithographic Apparatus And Device Manufacturing Method App 20110001944 - BASELMANS; Johannes Jacobus Matheus ; et al.	2011-01-06
Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ; et al.	2011-01-06
Lithographic apparatus and device manufacturing method Grant 7,843,551 - Mulkens , et al. November 30, 2	2010-11-30
Lithographic apparatus and device manufacturing method Grant 7,834,977 - Baselmans , et al. November 16, 2	2010-11-16
Lithographic apparatus and device manufacturing method Grant 7,826,030 - Mulkens November 2, 2	2010-11-02
Lithographic apparatus and device manufacturing method Grant 7,817,245 - Streefkerk , et al. October 19, 2	2010-10-19
Lithographic apparatus and device manufacturing method Grant 7,812,924 - Baselmans , et al. October 12, 2	2010-10-12
Lithographic apparatus and device manufacturing method Grant 7,795,603 - Lof , et al. September 14, 2	2010-09-14
Lithographic Apparatus, Device Manufacturing Method And A Substrate App 20100221660 - DIERICHS; Marcel Mathijs Theodore Marie ; et al.	2010-09-02
Device manufacturing method, top coat material and substrate Grant 7,763,355 - Mulkens , et al. July 27, 2	2010-07-27
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ; et al.	2010-07-01
Lithographic apparatus, device manufacturing method and a substrate Grant 7,746,445 - Dierichs , et al. June 29, 2	2010-06-29
Lithographic Apparatus And Device Manufacturing Method App 20100141915 - Baselmans; Johannes Jacobus Matheus ; et al.	2010-06-10
Lithographic Apparatus And Device Manufacturing Method App 20100134769 - Mulkens; Johannes Catharinus Hubertus ; et al.	2010-06-03
Optical element for correction of aberration, and a lithographic apparatus comprising same Grant 7,715,107 - Loopstra , et al. May 11, 2	2010-05-11
Lithographic apparatus and device manufacturing method Grant 7,670,730 - Streefkerk , et al. March 2, 2	2010-03-02
Lithographic apparatus and device manufacturing method Grant 7,656,502 - Van Der Schoot , et al. February 2, 2	2010-02-02
Lithographic apparatus and device manufacturing method Grant 7,652,751 - Baselmans , et al. January 26, 2	2010-01-26
Lithographic Apparatus And Device Manufacturing Method App 20100014061 - STREEFKERK; Bob ; et al.	2010-01-21
Prewetting of substrate before immersion exposure Grant 7,643,127 - Baselmans , et al. January 5, 2	2010-01-05
Lithographic Apparatus, Alignment Apparatus, Device Manufacturing Method, And A Method Of Converting An Apparatus App 20090296061 - Mulkens; Johannes Catharinus Hubertus ; et al.	2009-12-03
Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ; et al.	2009-11-26
Lithographic apparatus and device manufacturing method Grant 7,616,383 - Streefkerk , et al. November 10, 2	2009-11-10
Lithographic Apparatus and Device Manufacturing Method App 20090263734 - MULKENS; Johannes Catharinus Hubertus ; et al.	2009-10-22
Lithographic Apparatus App 20090262318 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al.	2009-10-22
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2	2009-09-22
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2	2009-09-22
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus Grant 7,589,818 - Mulkens , et al. September 15, 2	2009-09-15
Lithographic Apparatus And Methods App 20090225289 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al.	2009-09-10
Lithographic Apparatus And Device Manufacturing Method App 20090214986 - STREEFKERK; Bob ; et al.	2009-08-27
Lithographic Apparatus And Device Manufacturing Method App 20090207397 - Streefkerk; Bob ; et al.	2009-08-20
Lithographic Projection Apparatus And Device Manufacturing Method App 20090201476 - Mulkens; Johannes Catharinus Hubertus	2009-08-13
Lithographic apparatus and device manufacturing method Grant 7,567,338 - Mulkens , et al. July 28, 2	2009-07-28
Lithographic apparatus and device manufacturing method App 20090184270 - Lof; Joeri ; et al.	2009-07-23
Immersion Lithographic Apparatus With Immersion Fluid Re-circulating System App 20090185149 - SEWELL; Harry ; et al.	2009-07-23
Lithographic apparatus and device manufacturing method Grant 7,545,481 - Streefkerk , et al. June 9, 2	2009-06-09
Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,535,644 - De Boeij , et al. May 19, 2	2009-05-19
Lithographic apparatus and device manufacturing method Grant 7,528,929 - Streefkerk , et al. May 5, 2	2009-05-05
Methods Relating To Immersion Lithography And An Immersion Lithographic Apparatus App 20090086175 - Streefkerk; Bob ; et al.	2009-04-02
Lithographic apparatus and device manufacturing method App 20090079949 - Streefkerk; Bob ; et al.	2009-03-26
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,508,487 - Mulkens , et al. March 24, 2	2009-03-24
Device manufacturing method, top coat material and substrate App 20090075061 - Mulkens; Johannes Catharinus Hubertus ; et al.	2009-03-19
Device manufacturing method, top coat material and substrate Grant 7,491,661 - Mulkens , et al. February 17, 2	2009-02-17
Lithographic apparatus and device manufacturing method Grant 7,482,611 - Lof , et al. January 27, 2	2009-01-27
Lithographic projection apparatus and device manufacturing method Grant 7,483,118 - Mulkens January 27, 2	2009-01-27
Lithographic apparatus and device manufacturing method App 20090021707 - Mulkens; Johannes Catharinus Hubertus ; et al.	2009-01-22
Lithographic apparatus and device manufacturing method Grant 7,463,330 - Streefkerk , et al. December 9, 2	2008-12-09
Lithographic apparatus App 20080278696 - Hoogendam; Christiaan Alexander ; et al.	2008-11-13
Lithographic apparatus and device manufacturing method Grant 7,433,015 - Mulkens , et al. October 7, 2	2008-10-07
Lithographic apparatus and device manufacturing method App 20080218711 - Baselmans; Johannes Jacobus Matheus ; et al.	2008-09-11
Lithographic apparatus and device manufacturing method App 20080218726 - Lof; Joeri ; et al.	2008-09-11
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Lithographic apparatus and device manufacturing method App 20080192219 - Baselmans; Johannes Jacobus Matheus ; et al.	2008-08-14
Lithographic apparatus and device manufacturing method App 20080170215 - Streefkerk; Bob ; et al.	2008-07-17
Lithographic apparatus and device manufacturing method App 20080117392 - Mulkens; Johannes Catharinus Hubertus ; et al.	2008-05-22
Lithographic apparatus and device manufacturing method App 20080074630 - Mulkens; Johannes Catharinus Hubertus ; et al.	2008-03-27
Lithographic apparatus and device manufacturing method App 20080068577 - Streefkerk; Bob ; et al.	2008-03-20
Lithographic apparatus and device manufacturing method App 20080057440 - Mulkens; Johannes Catharinus Hubertus ; et al.	2008-03-06
Lithographic apparatus and device manufacturing method App 20080002162 - Jansen; Hans ; et al.	2008-01-03
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method App 20080002168 - Boom; Herman ; et al.	2008-01-03
Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ; et al.	2007-11-22
Optical element for correction of aberration, and a lithographic apparatus comprising same App 20070247605 - Loopstra; Erik Roelof ; et al.	2007-10-25
Lithographic apparatus and device manufacturing method App 20070201012 - Loopstra; Erik Roelof ; et al.	2007-08-30
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Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ; et al.	2007-06-14
Lithographic apparatus, device manufacturing method and a substrate App 20070103655 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2007-05-10
Lithographic apparatus and device manufacturing method App 20070040133 - Lof; Joeri ; et al.	2007-02-22
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Lithographic apparatus and device manufacturing method App 20070013886 - Baselmans; Johannes Jacobus Matheus ; et al.	2007-01-18
Lithographic apparatus and device manufacturing method App 20060232756 - Lof; Joeri ; et al.	2006-10-19
Lithographic apparatus and device manufacturing method App 20060197927 - Mulkens; Johannes Catharinus Hubertus ; et al.	2006-09-07
Lithographic apparatus and device manufacturing method App 20060187429 - Mulkens; Johannes Catharinus Hubertus ; et al.	2006-08-24
Lithographic apparatus and device manufacturing method App 20060176458 - Maria Derksen; Antonius Theodorus Anna ; et al.	2006-08-10
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Lithographic apparatus and device manufacturing method App 20060147821 - Streefkerk; Bob ; et al.	2006-07-06
Device manufacturing method, top coat material and substrate App 20060138602 - Mulkens; Johannes Catharinus Hubertus ; et al.	2006-06-29
Lithographic apparatus and device manufacturing method App 20060132731 - Jansen; Hans ; et al.	2006-06-22
Lithographic apparatus and device manufacturing method App 20060119807 - Baselmans; Johannes Jacobus Matheus ; et al.	2006-06-08
Sensor shield App 20060119816 - Baselmans; Johannes Jacobus Matheus ; et al.	2006-06-08
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Lithographic apparatus and device manufacturing method App 20060072088 - Lipson; Matthew ; et al.	2006-04-06
Lithographic apparatus and device manufacturing method App 20060023189 - Lof; Joeri ; et al.	2006-02-02
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Lithographic apparatus and device manufacturing method App 20050286032 - Lof, Joeri ; et al.	2005-12-29
Lithographic apparatus App 20050263068 - Hoogendam, Christiaan Alexander ; et al.	2005-12-01
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ; et al.	2005-12-01
Lithographic apparatus and device manufacturing method App 20050259232 - Streefkerk, Bob ; et al.	2005-11-24
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Lithographic apparatus and device manufacturing method App 20050231694 - Kolesnychenko, Aleksey Yurievich ; et al.	2005-10-20
Lithographic apparatus, device manufacturing method and device manufactured thereby App 20050219482 - Baselmans, Johannes Jacobus Matheus ; et al.	2005-10-06
Lithographic apparatus and device manufacturing method App 20050219483 - Baselmans, Johannes Jacobus Matheus ; et al.	2005-10-06
Lithographic apparatus and device manufacturing method App 20050179877 - Mulkens, Johannes Catharinus Hubertus ; et al.	2005-08-18
Lithographic apparatus and device manufacturing method App 20050174550 - Streefkerk, Bob ; et al.	2005-08-11
Lithographic apparatus and device manufacturing method App 20050175776 - Streefkerk, Bod ; et al.	2005-08-11
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus App 20050132914 - Mulkens, Johannes Catharinus Hubertus ; et al.	2005-06-23
Method for exposing a substrate, patterning device, and lithographic apparatus App 20050134820 - Mulder, Heine Melle ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050094114 - Streefkerk, Bob ; et al.	2005-05-05
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Lithographic apparatus and device manufacturing method App 20050036121 - Hoogendam, Christiaan Alexander ; et al.	2005-02-17
Lithographic projection apparatus and device manufacturing method App 20050030498 - Mulkens, Johannes Catharinus Hubertus	2005-02-10
Lithographic apparatus and device manufacturing method App 20050030501 - Mulkens, Johannes Catharinus Hubertus ; et al.	2005-02-10
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Lithographic apparatus and device manufacturing method App 20040207824 - Lof, Joeri ; et al.	2004-10-21
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby App 20040189972 - Mulkens, Johannes Catharinus Hubertus ; et al.	2004-09-30
Lithographic apparatus and device manufacturing method App 20040160582 - Lof, Joeri ; et al.	2004-08-19
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Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020180943 - Mulkens, Johannes Catharinus Hubertus ; et al.	2002-12-05