MOTOYAMA; Yutaka

Patent Applications and Registrations

Patent applications and USPTO patent grants for MOTOYAMA; Yutaka.The latest application filed is for "method for forming silicon film and processing apparatus".

Company Profile

7.13.19

MOTOYAMA; Yutaka - Yamanashi JP
Motoyama; Yutaka - Nirasaki JP
MOTOYAMA; Yutaka - Nirasaki City JP
Motoyama; Yutaka - Oshu JP
Motoyama; Yutaka - Iwate JP
MOTOYAMA; Yutaka - Oshu-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method For Forming Silicon Film And Processing Apparatus App 20220307128 - MATSUNAGA; Akari ; et al.	2022-09-29
Method For Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20220238374 - Motoyama; Yutaka ; et al.	2022-07-28
Method For Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20220189785 - MOTOYAMA; Yutaka ; et al.	2022-06-16
Heat Treatment Apparatus And Dummy Substrate Processing Method App 20220148893 - MOTOYAMA; Yutaka ; et al.	2022-05-12
Film forming method and heat treatment apparatus Grant 11,239,076 - Motoyama , et al. February 1, 2	2022-02-01
Method of forming polysilicon film and film forming apparatus Grant 11,062,904 - Motoyama , et al. July 13, 2	2021-07-13
Film Forming Method And Film Forming Apparatus App 20210202248 - TAKEZAWA; Yoshihiro ; et al.	2021-07-01
Semiconductor film forming method and film forming apparatus Grant 10,957,535 - Motoyama , et al. March 23, 2	2021-03-23
Film Forming Method And Heat Treatment Apparatus App 20200294800 - MOTOYAMA; Yutaka ; et al.	2020-09-17
Exhaust Device, Processing System, And Processing Method App 20200248305 - Kind Code	2020-08-06
Cleaning method and film forming method Grant 10,676,820 - Okada , et al.	2020-06-09
Method Of Forming Polysilicon Film And Film Forming Apparatus App 20200161130 - MOTOYAMA; Yutaka ; et al.	2020-05-21
Semiconductor Film Forming Method and Film Forming Apparatus App 20190348278 - MOTOYAMA; Yutaka ; et al.	2019-11-14
Cleaning Method And Film Forming Method App 20190144994 - OKADA; Mitsuhiro ; et al.	2019-05-16
Substrate processing apparatus having ground electrode Grant 9,970,111 - Fukushima , et al. May 15, 2	2018-05-15
Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus Grant 9,776,202 - Motoyama , et al. October 3, 2	2017-10-03
Dummy wafer Grant D786,810 - Motoyama , et al. May 16, 2	2017-05-16
Dummy wafer Grant D785,576 - Motoyama , et al. May 2, 2	2017-05-02
Dummy wafer Grant D784,937 - Motoyama , et al. April 25, 2	2017-04-25
Operating method of vertical heat treatment apparatus, storage medium, and vertical heat treatment apparatus Grant 9,487,859 - Motoyama , et al. November 8, 2	2016-11-08
Method of operating vertical heat treatment apparatus, vertical heat treatment apparatus and non-transitory recording medium Grant 9,373,498 - Suzuki , et al. June 21, 2	2016-06-21
Film Forming Apparatus App 20160024654 - FUKUSHIMA; Kohei ; et al.	2016-01-28
Vertical Heat Treatment Apparatus And Method Of Operating Vertical Heat Treatment Apparatus App 20150376789 - MOTOYAMA; Yutaka ; et al.	2015-12-31
Film Forming Apparatus Using Gas Nozzles App 20150275368 - MOTOYAMA; Yutaka ; et al.	2015-10-01
Operating Method Of Vertical Heat Treatment Apparatus, Storage Medium, And Vertical Heat Treatment Apparatus App 20150267293 - MOTOYAMA; Yutaka ; et al.	2015-09-24
Vertical Heat Treatment Apparatus, Method Of Operating Vertical Heat Treatment Apparatus, And Storage Medium App 20150259799 - MOTOYAMA; Yutaka ; et al.	2015-09-17
Substrate Processing Apparatus App 20150007772 - FUKUSHIMA; Kohei ; et al.	2015-01-08
Driving Method Of Vertical Heat Treatment Apparatus, Storage Medium And Vertical Heat Treatment Apparatus App 20140295082 - MOTOYAMA; Yutaka ; et al.	2014-10-02
Method Of Operating Vertical Heat Treatment Apparatus, Vertical Heat Treatment Apparatus And Non-transitory Recording Medium App 20140295676 - SUZUKI; Keisuke ; et al.	2014-10-02
Plasma processing apparatus Grant 8,608,902 - Fukushima , et al. December 17, 2	2013-12-17
Plasma Processing Apparatus App 20100186898 - FUKUSHIMA; Kohei ; et al.	2010-07-29

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