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Self-ionized And Inductively-coupled Plasma For Sputtering And Resputtering App 20180327893 - DING; Peijun ;   et al. | 2018-11-15 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering Grant 10,047,430 - Ding , et al. August 14, 2 | 2018-08-14 |
Self-ionized And Inductively-coupled Plasma For Sputtering And Resputtering App 20140305802 - DING; Peijun ;   et al. | 2014-10-16 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering Grant 8,696,875 - Ding , et al. April 15, 2 | 2014-04-15 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering Grant 8,668,816 - Ding , et al. March 11, 2 | 2014-03-11 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device Grant 7,802,480 - Mosely , et al. September 28, 2 | 2010-09-28 |
Cleaning of native oxide with hydrogen-containing radicals Grant 7,604,708 - Wood , et al. October 20, 2 | 2009-10-20 |
Self-ionized And Inductively-coupled Plasma For Sputtering And Resputtering App 20090233438 - DING; Peijun ;   et al. | 2009-09-17 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device App 20090173160 - Mosely; Roderick C. ;   et al. | 2009-07-09 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device Grant 7,497,122 - Montesclaros , et al. March 3, 2 | 2009-03-03 |
Vacuum-type electrical switching apparatus Grant 7,499,255 - Domo , et al. March 3, 2 | 2009-03-03 |
Method and apparatus for the sonic detection of high pressure conditions in a vacuum switching device Grant 7,383,733 - Mosely , et al. June 10, 2 | 2008-06-10 |
Self-ionized And Inductively-coupled Plasma For Sputtering And Resputtering App 20080110747 - DING; Peijun ;   et al. | 2008-05-15 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device App 20080072678 - Montesclaros; Mary Grace ;   et al. | 2008-03-27 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device Grant 7,313,964 - Montesclaros , et al. January 1, 2 | 2008-01-01 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device Grant 7,302,854 - Egermeier, legal representative , et al. Decembe | 2007-12-04 |
Method and apparatus for the sonic detection of high pressure conditions in a vacuum switching device App 20070089521 - Mosely; Roderick C. ;   et al. | 2007-04-26 |
Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device App 20060278010 - Montesclaros; Mary Grace ;   et al. | 2006-12-14 |
Vacuum-type electrical switching apparatus App 20060126257 - Domo; James Francis ;   et al. | 2006-06-15 |
End point detection for sputtering and resputtering Grant 7,048,837 - Somekh , et al. May 23, 2 | 2006-05-23 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering App 20050255691 - Ding, Peijun ;   et al. | 2005-11-17 |
Method of TiSiN deposition using a chemical vapor deposition (CVD) process Grant 6,933,021 - Chou , et al. August 23, 2 | 2005-08-23 |
End point detection for sputtering and resputtering App 20050173239 - Somekh, Sasson R. ;   et al. | 2005-08-11 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering App 20050006222 - Ding, Peijun ;   et al. | 2005-01-13 |
Cleaning of native oxide with hydrogen-containing radicals App 20040219789 - Wood, Bingxi Sun ;   et al. | 2004-11-04 |
Copper interconnect barrier layer structure and formation method Grant 6,607,976 - Chen , et al. August 19, 2 | 2003-08-19 |
Self-ionized and inductively-coupled plasma for sputtering and resputtering App 20030116427 - Ding, Peijun ;   et al. | 2003-06-26 |
Copper interconnect barrier layer structure and formation method App 20030059980 - Chen, Ling ;   et al. | 2003-03-27 |
Method of selective formation of a barrier layer for a contact level via Grant 6,518,176 - Guo , et al. February 11, 2 | 2003-02-11 |
Construction of a film on a semiconductor wafer Grant 6,500,742 - Chern , et al. December 31, 2 | 2002-12-31 |
Method and apparatus for detecting the thickness of copper oxide App 20020186381 - Subrahmanyan, Suchitra ;   et al. | 2002-12-12 |
Single step process for blanket-selective CVD aluminum deposition Grant 6,458,684 - Guo , et al. October 1, 2 | 2002-10-01 |
Construction of a film on a semiconductor wafer Grant 6,444,036 - Chern , et al. September 3, 2 | 2002-09-03 |
Single step process for blanket-selective cvd aluminum deposition App 20020068427 - Guo, Ted ;   et al. | 2002-06-06 |
Interconnect Structure For Use In An Integrated Circuit App 20020033533 - LIAO, MARVIN ;   et al. | 2002-03-21 |
Construction of a film on a semiconductor wafer App 20010025205 - Chern, Chyi ;   et al. | 2001-09-27 |
Contact Level Via And Method Of Selective Formation Of A Barrier Layer For A Contact Level Via App 20010001503 - GUO, TED ;   et al. | 2001-05-24 |
Deposition film orientation and reflectivity improvement using a self-aligning ultra-thin layer Grant 6,120,844 - Chen , et al. September 19, 2 | 2000-09-19 |
Single step process for blanket-selective CVD aluminum deposition Grant 6,077,781 - Guo , et al. June 20, 2 | 2000-06-20 |
Forming tin thin films using remote activated specie generation Grant 6,071,572 - Mosely , et al. June 6, 2 | 2000-06-06 |
Blanket-selective chemical vapor deposition using an ultra-thin nucleation layer Grant 6,066,358 - Guo , et al. May 23, 2 | 2000-05-23 |
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Variable cell size collimator Grant 5,650,052 - Edelstein , et al. July 22, 1 | 1997-07-22 |
Collimation hardware with RF bias rings to enhance sputter and/or substrate cavity ion generation efficiency Grant 5,431,799 - Mosely , et al. July 11, 1 | 1995-07-11 |
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