Moriya; Tsuyoshi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Moriya; Tsuyoshi.The latest application filed is for "plasma processing device, and plasma processing method".

Company Profile

5.119.143

Moriya; Tsuyoshi - Yokohama JP
Moriya; Tsuyoshi - Nirasaki JP
MORIYA; Tsuyoshi - Tokyo JP
MORIYA; Tsuyoshi - Nirasaki-shi Yamanashi
Moriya; Tsuyoshi - Yamanashi JP
MORIYA; Tsuyoshi - Nirasaki City Yamanashi
MORIYA; Tsuyoshi - Yokohama-shi JP
MORIYA; Tsuyoshi - Iwate JP
Moriya; Tsuyoshi - Minato-ku JP
Moriya; Tsuyoshi - Nirasaka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Device for and method of correcting white balance of image Grant 11,457,189 - Moriya September 27, 2	2022-09-27
Plasma processing method Grant 11,450,512 - Iwashita , et al. September 20, 2	2022-09-20
Plasma Processing Device, And Plasma Processing Method App 20220165544 - KAGAYA; Munehito ; et al.	2022-05-26
Carbon Hard Mask, Film Forming Apparatus, And Film Forming Method App 20220042173 - HORI; Masaru ; et al.	2022-02-10
Film Forming Method And Semiconductor Production Apparatus App 20220010424 - SUZUKI; Yusuke ; et al.	2022-01-13
Etching Method App 20210351040 - MITSUNARI; Tadashi ; et al.	2021-11-11
Contaminant Detection System, Contaminant Detecting Method, And Semiconductor Manufacturing Apparatus App 20210327045 - MORIYA; Tsuyoshi ; et al.	2021-10-21
Film Forming Apparatus And Film Forming Method App 20210301402 - SUZUKI; Yusuke ; et al.	2021-09-30
Temperature measurement substrate and temperature measurement system Grant 11,035,741 - Mitsunari , et al. June 15, 2	2021-06-15
Plasma Processing Method App 20210142982 - IWASHITA; Shinya ; et al.	2021-05-13
Device For And Method Of Correcting White Balance Of Image App 20200404235 - MORIYA; Tsuyoshi	2020-12-24
Film forming method Grant 10,872,764 - Iwashita , et al. December 22, 2	2020-12-22
Hard Mask, Substrate Processing Method, And Substrate Processing Apparatus App 20200370172 - MORIYA; Tsuyoshi ; et al.	2020-11-26
Imaging apparatus, imaging method, and computer program product Grant 10,805,526 - Moriya October 13, 2	2020-10-13
Image white balance correction method and electronic device Grant 10,771,754 - Moriya Sep	2020-09-08
Film forming apparatus and film forming method Grant 10,643,839 - Suzuki , et al.	2020-05-05
Film Forming Apparatus App 20190385815 - IWASHITA; Shinya ; et al.	2019-12-19
Image processing apparatus and image processing method Grant 10,491,875 - Moriya Nov	2019-11-26
Image White Balance Correction Method And Electronic Device App 20190289269 - MORIYA; Tsuyoshi	2019-09-19
Imaging Apparatus, Imaging Method, And Computer Program Product App 20190191080 - MORIYA; Tsuyoshi	2019-06-20
Temperature Measurement Substrate And Temperature Measurement System App 20190120703 - MITSUNARI; Tadashi ; et al.	2019-04-25
Film Forming Method App 20190088475 - Iwashita; Shinya ; et al.	2019-03-21
Substrate processing apparatus Grant 10,121,680 - Kagaya , et al. November 6, 2	2018-11-06
Image Processing Apparatus And Image Processing Method App 20180249141 - MORIYA; Tsuyoshi	2018-08-30
Substrate Processing Apparatus App 20180166298 - KAGAYA; Munehito ; et al.	2018-06-14
Film Forming Apparatus And Film Forming Method App 20180158671 - SUZUKI; Ayuta ; et al.	2018-06-07
Gas Supply And Exhaust Structure App 20180155830 - SUZUKI; Ayuta ; et al.	2018-06-07
Image processing apparatus and method Grant 9,661,290 - Moriya May 23, 2	2017-05-23
Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the program Grant 9,627,184 - Moriya , et al. April 18, 2	2017-04-18
Substrate Processing Apparatus, Substrate Processing Method, Maintenance Method Of Substrate Processing Apparatus, And Storage Medium App 20170032983 - MUTA; Koshi ; et al.	2017-02-02
Etching method, etching apparatus, and ring member Grant 9,441,292 - Suzuki , et al. September 13, 2	2016-09-13
Image Processing Apparatus And Method App 20160155217 - MORIYA; Tsuyoshi	2016-06-02
Substrate cleaning method and substrate cleaning device Grant 9,209,010 - Matsui , et al. December 8, 2	2015-12-08
Method For Producing Filtration Filter App 20150246317 - Moriya; Tsuyoshi ; et al.	2015-09-03
Etching Method, Etching Apparatus, And Ring Member App 20150206763 - Suzuki; Ayuta ; et al.	2015-07-23
Filtration filter and production method therefor Grant 9,022,225 - Moriya , et al. May 5, 2	2015-05-05
Vacuum exhaust method and a substrate processing apparatus therefor Grant 8,945,313 - Matsui , et al. February 3, 2	2015-02-03
Etching method, etching apparatus, and ring member Grant 8,945,413 - Suzuki , et al. February 3, 2	2015-02-03
Turbomolecular pump, and particle trap for turbomolecular pump Grant 8,894,355 - Sekita , et al. November 25, 2	2014-11-25
Internal member of a plasma processing vessel Grant 8,877,002 - Mitsuhashi , et al. November 4, 2	2014-11-04
Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring Grant 8,854,625 - Moriya , et al. October 7, 2	2014-10-07
Substrate processing apparatus and substrate processing method Grant 8,845,853 - Yamawaku , et al. September 30, 2	2014-09-30
Particle capture unit, method for manufacturing the same, and substrate processing apparatus Grant 8,821,607 - Moriya , et al. September 2, 2	2014-09-02
Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatus Grant 8,751,196 - Moriya , et al. June 10, 2	2014-06-10
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component Grant 8,727,708 - Moriya , et al. May 20, 2	2014-05-20
Filtration Filter And Production Method Therefor App 20140008290 - Moriya; Tsuyoshi ; et al.	2014-01-09
Particle sticking prevention apparatus and plasma processing apparatus Grant 8,608,422 - Moriya , et al. December 17, 2	2013-12-17
Substrate cleaning method Grant 8,585,831 - Matsui , et al. November 19, 2	2013-11-19
Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method Grant 8,578,952 - Nagaike , et al. November 12, 2	2013-11-12
Internal Member Of A Plasma Processing Vessel App 20130255881 - MITSUHASHI; Kouji ; et al.	2013-10-03
Method For Producing Filtration Filter App 20130240479 - MORIYA; Tsuyoshi ; et al.	2013-09-19
Method For Calculating Bill For Use Of Water Purification System And Water Purification System App 20130226752 - Moriya; Tsuyoshi ; et al.	2013-08-29
Evacuation method and storage medium Grant 8,516,715 - Yamawaku , et al. August 27, 2	2013-08-27
Water Treatment Device And Water Treatment Method App 20130193087 - Moriya; Tsuyoshi ; et al.	2013-08-01
Particle generation factor determining system, charging method and storage medium Grant 8,498,911 - Moriya July 30, 2	2013-07-30
Etching Method, Etching Apparatus, And Ring Member App 20130186858 - SUZUKI; Ayuta ; et al.	2013-07-25
Substrate cleaning method and apparatus Grant 8,475,602 - Matsui , et al. July 2, 2	2013-07-02
Gas purification apparatus and method Grant 8,475,562 - Moriya July 2, 2	2013-07-02
Abnormality Detection Apparatus For Periodic Driving System, Processing Apparatus Including Periodic Driving System, Abnormality Detection Method For Periodic Driving System, And Computer Program App 20130148817 - MORIYA; Tsuyoshi ; et al.	2013-06-13
Internal member of a plasma processing vessel Grant 8,449,715 - Mitsuhashi , et al. May 28, 2	2013-05-28
Vacuum Exhaust Method And A Substrate Processing Apparatus Therefor App 20130092185 - Matsui; Hidefumi ; et al.	2013-04-18
Polishing method Grant 8,419,963 - Moriya April 16, 2	2013-04-16
Plasma processing apparatus and method Grant 8,404,050 - Moriya , et al. March 26, 2	2013-03-26
Substrate Cleaning Method And Substrate Cleaning Device App 20130056033 - Matsui; Hidefumi ; et al.	2013-03-07
Method of cleaning powdery source supply system, storage medium, substrate processing system and substrate processing method Grant 8,389,053 - Moriya , et al. March 5, 2	2013-03-05
Gate valve cleaning method and substrate processing system Grant 8,382,938 - Moriya , et al. February 26, 2	2013-02-26
Optical gas-analysis system and a gas flow cell Grant 8,384,902 - Akiyama , et al. February 26, 2	2013-02-26
Exhaust pump, communicating pipe, and exhaust system Grant 8,356,970 - Sugawara , et al. January 22, 2	2013-01-22
Substrate Accommodation Device App 20120325349 - Moriya; Tsuyoshi	2012-12-27
Method for cleaning elements in vacuum chamber and apparatus for processing substrates Grant 8,337,629 - Moriya , et al. December 25, 2	2012-12-25
Particle removal apparatus and method and plasma processing apparatus Grant 8,323,414 - Moriya , et al. December 4, 2	2012-12-04
Plasma Processing Apparatus And Method App 20120285623 - MORIYA; Tsuyoshi ; et al.	2012-11-15
Cleaning device and cleaning method of semiconductor manufacturing apparatus Grant 8,297,292 - Kokubo , et al. October 30, 2	2012-10-30
Method For Cleaning Elements In Vacuum Chamber And Apparatus For Processing Substrates App 20120247502 - MORIYA; Tsuyoshi ; et al.	2012-10-04
Particle Capture Unit, Method For Manufacturing The Same, And Substrate Processing Apparatus App 20120240533 - Moriya; Tsuyoshi ; et al.	2012-09-27
System and method for detecting particle generation source, and storage medium therefor Grant 8,260,557 - Moriya September 4, 2	2012-09-04
Substrate transfer module and substrate processing system Grant 8,257,498 - Yamawaku , et al. September 4, 2	2012-09-04
Absorption spectrometric apparatus for semiconductor production process Grant 8,253,930 - Akiyama , et al. August 28, 2	2012-08-28
Method and apparatus for detecting foreign materials and storage medium Grant 8,243,265 - Moriya , et al. August 14, 2	2012-08-14
Component cleaning method and storage medium Grant 8,236,109 - Moriya , et al. August 7, 2	2012-08-07
Plasma processing apparatus and method Grant 8,231,800 - Moriya , et al. July 31, 2	2012-07-31
Gas Purification Apparatus And Method App 20120174773 - MORIYA; Tsuyoshi	2012-07-12
Particle monitor system and substrate processing apparatus Grant 8,218,145 - Moriya , et al. July 10, 2	2012-07-10
Method and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage medium Grant 8,210,742 - Moriya , et al. July 3, 2	2012-07-03
Method for cleaning elements in vacuum chamber and apparatus for processing substrates Grant 8,206,513 - Moriya , et al. June 26, 2	2012-06-26
Focusing position determining apparatus, imaging apparatus and focusing position determining method Grant 8,208,802 - Endo , et al. June 26, 2	2012-06-26
Image Processing Apparatus, Image Processing Method, And Program Recording Medium App 20120154625 - MORIYA; Tsuyoshi	2012-06-21
Method of manufacturing semiconductor devices and semiconductor manufacturing apparatus Grant 8,202,394 - Moriya , et al. June 19, 2	2012-06-19
Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program Grant 8,172,949 - Kudo , et al. May 8, 2	2012-05-08
Abnormality Detection System, Abnormality Detection Method, And Recording Medium App 20120109582 - Moriya; Tsuyoshi ; et al.	2012-05-03
Gas purification apparatus and method Grant 8,152,907 - Moriya April 10, 2	2012-04-10
Method for cleaning elements in vacuum chamber and apparatus for processing substrates Grant 8,137,473 - Moriya , et al. March 20, 2	2012-03-20
Substrate processing system and substrate cleaning apparatus including a jetting apparatus Grant 8,132,580 - Moriya , et al. March 13, 2	2012-03-13
Substrate Cleaning Method App 20120055506 - Moriya; Tsuyoshi ; et al.	2012-03-08
Substrate Processing Apparatus And Side Wall Component App 20120037314 - ENDOH; Shosuke ; et al.	2012-02-16
Particle Removal Apparatus And Method And Plasma Processing Apparatus App 20120037182 - MORIYA; Tsuyoshi ; et al.	2012-02-16
Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber Grant 8,113,757 - Moriya , et al. February 14, 2	2012-02-14
Substrate Cleaning Method App 20120031434 - Matsui; Hidefumi ; et al.	2012-02-09
Gate Valve Cleaning Method And Substrate Processing System App 20120012254 - MORIYA; Tsuyoshi ; et al.	2012-01-19
Method and system for diagnosing abnormal plasma discharge Grant 8,082,124 - Miyano , et al. December 20, 2	2011-12-20
Turbomolecular Pump, And Particle Trap For Turbomolecular Pump App 20110293401 - Sekita; Yukiteru ; et al.	2011-12-01
Cleaning method for turbo molecular pump Grant 8,062,432 - Sugawara , et al. November 22, 2	2011-11-22
Components for substrate processing apparatus and manufacturing method thereof Grant 8,058,186 - Moriya , et al. November 15, 2	2011-11-15
Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump Grant 8,052,376 - Yamawaku , et al. November 8, 2	2011-11-08
Particle removal apparatus and method and plasma processing apparatus Grant 8,052,798 - Moriya , et al. November 8, 2	2011-11-08
Gate valve cleaning method and substrate processing system Grant 8,048,235 - Moriya , et al. November 1, 2	2011-11-01
Plasma processing apparatus, ring member and plasma processing method Grant 8,043,971 - Sasaki , et al. October 25, 2	2011-10-25
Substrate Processing System, Substrate Surface Processing Apparatus, Substrate Surface Inspecting Apparatus, Substrate Surface Inspecting Method, And Storage Medium Storing Program For Implementing The Method App 20110242510 - NAGAIKE; Hiroshi ; et al.	2011-10-06
Particle Monitor System And Substrate Processing Apparatus App 20110216322 - MORIYA; Tsuyoshi ; et al.	2011-09-08
Container cleanliness measurement apparatus and method, and substrate processing system Grant 8,012,303 - Moriya , et al. September 6, 2	2011-09-06
Slurry Manufacturing Method, Slurry And Polishing Method And Apparatus Using Slurry App 20110204027 - MORIYA; Tsuyoshi	2011-08-25
Polishing Method App 20110204024 - MORIYA; Tsuyoshi	2011-08-25
Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method Grant 7,976,637 - Nagaike , et al. July 12, 2	2011-07-12
Reflecting Device, Communicating Pipe, Exhausting Pump, Exhaust System, Method For Cleaning The System, Storage Medium Storing Program For Implementing The Method, Substrate Processing Apparatus, And Particle Capturing Component App 20110162678 - MORIYA; Tsuyoshi ; et al.	2011-07-07
Particle monitor system and substrate processing apparatus Grant 7,969,572 - Moriya , et al. June 28, 2	2011-06-28
Cleaning Method Of Processing Apparatus, Program For Performing The Method, And Storage Medium For Storing The Program App 20110126853 - MORIYA; Tsuyoshi ; et al.	2011-06-02
Ceramic sprayed member-cleaning method Grant 7,942,975 - Moriya , et al. May 17, 2	2011-05-17
Charging method for semiconductor device manufacturing apparatus, storage medium storing program for implementing the charging method, and semiconductor device manufacturing apparatus implementing the charging method Grant 7,937,178 - Moriya May 3, 2	2011-05-03
Vacuum Apparatus Including A Particle Monitoring Unit, Particle Monitoring Method And Program, And Window Member For Use In The Particle Monitoring App 20110094680 - Moriya; Tsuyoshi ; et al.	2011-04-28
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component Grant 7,927,066 - Moriya , et al. April 19, 2	2011-04-19
Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium Grant 7,913,702 - Moriya March 29, 2	2011-03-29
Cleaning apparatus and cleaning method Grant 7,913,351 - Moriya March 29, 2	2011-03-29
Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring Grant 7,883,779 - Moriya , et al. February 8, 2	2011-02-08
Particle Generation Factor Determining System, Charging Method And Storage Medium App 20100332364 - Moriya; Tsuyoshi	2010-12-30
Particle monitor system and substrate processing apparatus Grant 7,852,476 - Moriya December 14, 2	2010-12-14
Internal Member Of A Plasma Processing Vessel App 20100307687 - MITSUHASHI; Kouji ; et al.	2010-12-09
Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus Grant 7,837,432 - Moriya , et al. November 23, 2	2010-11-23
Optical Gas-analysis System And A Gas Flow Cell App 20100238446 - AKIYAMA; Osamu ; et al.	2010-09-23
Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring Grant 7,797,984 - Nakayama , et al. September 21, 2	2010-09-21
Absorption Spectrometric Apparatus For Semiconductor Production Process App 20100214557 - Akiyama; Osamu ; et al.	2010-08-26
Work Station App 20100216082 - MORIYA; Tsuyoshi ; et al.	2010-08-26
Internal member of a plasma processing vessel Grant 7,780,786 - Mitsuhashi , et al. August 24, 2	2010-08-24
Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program Grant 7,756,599 - Kudo , et al. July 13, 2	2010-07-13
Particle removal method for a substrate transfer mechanism and apparatus Grant 7,748,138 - Moriya , et al. July 6, 2	2010-07-06
Component Cleaning Method And Storage Medium App 20100154821 - MORIYA; TSUYOSHI ; et al.	2010-06-24
Substrate Processing Apparatus, Program For Performing Operation And Control Method Thereof, And Computer Readable Storage Medium Storing The Program App 20100154995 - KUDO; Tomoyuki ; et al.	2010-06-24
Method For Diagnosing Abnormal Plasma Discharge, Abnormal Plasma Discharge Diagnostics System, And Computer Program App 20100161278 - Miyano; Takaya ; et al.	2010-06-24
Information Processing Device, Information Processing Method And Program App 20100153065 - KAWAMURA; Kazuhiro ; et al.	2010-06-17
Roughness evaluation method and system Grant 7,733,502 - Moriya , et al. June 8, 2	2010-06-08
Method Of Cleaning Powdery Source Supply System, Storage Medium, Substrate Processing System And Substrate Processing Method App 20100136230 - Moriya; Tsuyoshi ; et al.	2010-06-03
Method And Apparatus For Detecting Foreign Materials And Storage Medium App 20100118302 - Moriya; Tsuyoshi ; et al.	2010-05-13
Substrate Cleaning Method And Apparatus App 20100101608 - MATSUI; Hidefumi ; et al.	2010-04-29
Vacuum Exhaust Method And A Substrate Processing Apparatus Therefor App 20100104760 - MATSUI; Hidefumi ; et al.	2010-04-29
Particle Removal Apparatus And Method And Plasma Processing Apparatus App 20100083982 - MORIYA; Tsuyoshi ; et al.	2010-04-08
Substrate Cleaning Method, Substrate Cleaning Apparatus, Substrate Processing System, Substrate Cleaning Program And Storage Medium App 20100071732 - MORIYA; Tsuyoshi	2010-03-25
Method Of Producing Ceramic Spray-coated Member, Program For Conducting The Method, Storage Medium And Ceramic Spray-coated Member App 20100068395 - MORIYA; Tsuyoshi ; et al.	2010-03-18
Focusing Position Determining Apparatus, Imaging Apparatus And Focusing Position Determining Method App 20100054722 - Endo; Yuki ; et al.	2010-03-04
Valve Element, Particle Entry Preventive Mechanism, Exhaust Control Apparatus, And Substrate Processing Apparatus App 20100043894 - Moriya; Tsuyoshi ; et al.	2010-02-25
Substrate processing system, substrate processing method, and storage medium Grant 7,654,010 - Moriya , et al. February 2, 2	2010-02-02
Method And Apparatus For Detecting Foreign Matter Attached To Peripheral Edge Of Substrate, And Storage Medium App 20100018332 - MORIYA; Tsuyoshi ; et al.	2010-01-28
Cleaning Device And Cleaning Method Of Semiconductor Manufacturing Apparatus App 20100018552 - Kokubo; Takayuki ; et al.	2010-01-28
Particle removal apparatus and method and plasma processing apparatus Grant 7,651,586 - Moriya , et al. January 26, 2	2010-01-26
Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium Grant 7,648,581 - Moriya January 19, 2	2010-01-19
Substrate Transfer Device And Cleaning Method Thereof And Substrate Processing System And Cleaning Method Thereof App 20090301516 - MORIYA; Tsuyoshi ; et al.	2009-12-10
Substrate cleaning apparatus and method Grant 7,628,864 - Moriya , et al. December 8, 2	2009-12-08
Method Of Producing Ceramic Spray-coated Member, Program For Conducting The Method, Storage Medium And Ceramic Spray-coated Member App 20090258148 - MORIYA; Tsuyoshi ; et al.	2009-10-15
Plasma Processing Apparatus, Chamber Internal Part, And Method Of Detecting Longevity Of Chamber Internal Part App 20090246406 - Nakayama; Hiroyuki ; et al.	2009-10-01
Member Of Substrate Processing Apparatus And Substrate Processing Apparatus App 20090223450 - Moriya; Tsuyoshi ; et al.	2009-09-10
System And Method For Detecting Particle Generation Source, And Storage Medium Therefor App 20090228215 - MORIYA; Tsuyoshi	2009-09-10
Substrate Processing Method App 20090209108 - MORIYA; Tsuyoshi ; et al.	2009-08-20
Method for removing water molecules from vacuum chamber, program for executing the method, and storage medium storing the program Grant 7,560,083 - Moriya , et al. July 14, 2	2009-07-14
Ceramic Sprayed Member-cleaning Method, Program For Implementing The Method, Storage Medium Storing The Program, And Ceramic Sprayed Member App 20090133717 - MORIYA; Tsuyoshi ; et al.	2009-05-28
Plasma Processing Apparatus And Method App 20090134121 - MORIYA; Tsuyoshi ; et al.	2009-05-28
Exhaust System And Exhausting Pump Connected To A Processing Chamber Of A Substrate Processing Apparatus App 20090136336 - Moriya; Tsuyoshi ; et al.	2009-05-28
Plasma Processing Apparatus, Ring Member And Plasma Processing Method App 20090104781 - Sasaki; Yasuharu ; et al.	2009-04-23
Container Cleanliness Measurement Apparatus And Method, And Substrate Processing System App 20090064760 - MORIYA; Tsuyoshi ; et al.	2009-03-12
Vacuum Apparatus Including A Particle Monitoring Unit, Particle Monitoring Method And Program, And Window Member For Use In The Particle Monitoring App 20090053835 - MORIYA; Tsuyoshi ; et al.	2009-02-26
Gas-tight Module And Exhaust Method Therefor App 20090025631 - MORIYA; Tsuyoshi	2009-01-29
Gas Purification Apparatus And Method App 20090025552 - Moriya; Tsuyoshi	2009-01-29
Substrate Transfer Module And Substrate Processing System App 20090028672 - YAMAWAKU; Jun ; et al.	2009-01-29
Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring Grant 7,464,581 - Moriya , et al. December 16, 2	2008-12-16
Evacuation Method And Storage Medium App 20080301972 - Yamawaku; Jun ; et al.	2008-12-11
Vacuum apparatus including a particle monitoring unit, particle monitoring method, and program Grant 7,458,247 - Moriya , et al. December 2, 2	2008-12-02
Substrate Transfer Member Cleaning Method, Substrate Transfer Apparatus, And Substrate Processing System App 20080273893 - YAMAWAKU; Jun ; et al.	2008-11-06
Method For Cleaning Elements In Vacuum Chamber And Apparatus For Processing Substrates App 20080245389 - Moriya; Tsuyoshi ; et al.	2008-10-09
Method For Cleaning Elements In Vacuum Chamber And Apparatus For Processing Substrates App 20080245388 - Moriya; Tsuyoshi ; et al.	2008-10-09
Method For Cleaning Elements In Vacuum Chamber And Apparatus For Processing Substrates App 20080245387 - Moriya; Tsuyoshi ; et al.	2008-10-09
Cleaning Method For Turbo Molecular Pump App 20080236629 - Sugawara; Eiichi ; et al.	2008-10-02
Substrate Processing System And Substrate Cleaning Apparatus App 20080236634 - MORIYA; Tsuyoshi ; et al.	2008-10-02
Substrate Processing Apparatus And Substrate Processing Method App 20080237182 - YAMAWAKU; Jun ; et al.	2008-10-02
Exhaust Pump, Communicating Pipe, And Exhaust System App 20080240905 - SUGAWARA; Eiichi ; et al.	2008-10-02
Turbo-molecular Pump, Substrate Processing Apparatus, And Method For Suppressing Attachment Of Depositions To Turbo-molecular Pump App 20080240910 - YAMAWAKU; Jun ; et al.	2008-10-02
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles App 20080233756 - Ito; Natsuko ; et al.	2008-09-25
Particle Monitor System And Substrate Processing Apparatus App 20080212093 - Moriya; Tsuyoshi ; et al.	2008-09-04
Gas supply member and plasma processing apparatus Grant 7,416,635 - Moriya , et al. August 26, 2	2008-08-26
Gate Valve Cleaning Method And Substrate Processing System App 20080181750 - Moriya; Tsuyoshi ; et al.	2008-07-31
Particle Monitor System And Substrate Processing Apparatus App 20080170226 - MORIYA; Tsuyoshi	2008-07-17
Roughness Evaluation Method And System App 20080165367 - MORIYA; Tsuyoshi ; et al.	2008-07-10
Processing apparatus and method for removing particles therefrom Grant 7,347,006 - Moriya , et al. March 25, 2	2008-03-25
Charging Method For Semiconductor Device Manufacturing Apparatus, Storage Medium Storing Program For Implementing The Charging Method, And Semiconductor Device Manufacturing Apparatus Implementing The Charging Method App 20080052251 - MORIYA; Tsuyoshi	2008-02-28
Cleaning Apparatus And Cleaning Method App 20080047585 - Moriya; Tsuyoshi	2008-02-28
Intermediate Transfer Chamber, Substrate Processing System, And Exhaust Method For The Intermediate Transfer Chamber App 20080031710 - MORIYA; Tsuyoshi ; et al.	2008-02-07
Substrate processing apparatus and substrate transferring method Grant 7,299,104 - Tezuka , et al. November 20, 2	2007-11-20
Substrate Processing Apparatus And Side Wall Component App 20070227663 - Endoh; Shosuke ; et al.	2007-10-04
Substrate Processing System, Substrate Surface Processing Apparatus, Substrate Surface Inspecting Apparatus, Substrate Surface Inspecting Method, And Storage Medium Storing Program For Implementing The Method App 20070209591 - NAGAIKE; Hiroshi ; et al.	2007-09-13
Substrate Processing System, Substrate Processing Method, And Storage Medium App 20070193062 - MORIYA; Tsuyoshi ; et al.	2007-08-23
Apparatus for inspecting a surface of an object to be processed Grant 7,245,364 - Moriya July 17, 2	2007-07-17
Vacuum Apparatus Including A Particle Monitoring Unit, Particle Monitoring Method And Program, And Window Member For Use In The Particle Monitoring App 20070144670 - MORIYA; Tsuyoshi ; et al.	2007-06-28
Vacuum Apparatus Including A Particle Monitoring Unit, Particle Monitoring Method And Program, And Window Member For Use In The Particle Monitoring App 20070137792 - Moriya; Tsuyoshi ; et al.	2007-06-21
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component App 20060257243 - Moriya; Tsuyoshi ; et al.	2006-11-16
Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program App 20060207971 - Moriya; Tsuyoshi ; et al.	2006-09-21
Method for removing water molecules from vacuum chamber, program for executing the method, and storage medium storing the program App 20060210469 - Moriya; Tsuyoshi ; et al.	2006-09-21
Gas supply member and plasma processing apparatus App 20060196604 - Moriya; Tsuyoshi ; et al.	2006-09-07
Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the program App 20060162742 - Moriya; Tsuyoshi ; et al.	2006-07-27
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles App 20060131272 - Ito; Natsuko ; et al.	2006-06-22
Substrate cleaning method, substrate cleaning apparatus, susbtrate processing system, substrate cleaning program and storage medium App 20060102207 - Moriya; Tsuyoshi	2006-05-18
Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program App 20060105548 - Kudo; Tomoyuki ; et al.	2006-05-18
Particle-removing method for a semiconductor device manufacturing apparatus Grant 7,045,465 - Ito , et al. May 16, 2	2006-05-16
Components for substrate processing apparatus and manufacturing method thereof App 20060096703 - Moriya; Tsuyoshi ; et al.	2006-05-11
Method of producing ceramic spray-coated member, program for conducting the method, storage medium and ceramic spray-coated member App 20060099457 - Moriya; Tsuyoshi ; et al.	2006-05-11
Ceramic sprayed member-cleaning method, program for implementing the method, storage medium storing the program, and ceramic sprayed member App 20060099444 - Moriya; Tsuyoshi ; et al.	2006-05-11
Plasma processing apparatus, abnormal discharge detecting method for the same, program for implementing the method, and storage medium storing the program App 20060100824 - Moriya; Tsuyoshi	2006-05-11
Apparatus for monitoring particles and method of doing the same Grant 7,006,682 - Moriya , et al. February 28, 2	2006-02-28
Substrate transfer device and cleaning method thereof and substrate processing system and cleaning method thereof App 20060011213 - Moriya; Tsuyoshi ; et al.	2006-01-19
Apparatus for inspecting a surface of an object to be processed App 20060001877 - Moriya; Tsuyoshi	2006-01-05
Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring App 20050268694 - Moriya, Tsuyoshi ; et al.	2005-12-08
Plasma processing apparatus and method App 20050272227 - Moriya, Tsuyoshi ; et al.	2005-12-08
Substrate transfer mechanism and subtrate transfer apparatus including same, particle removal method for the subtrate transfer mechanism and apparatus, program for executing the method, and storage medium for storing the program App 20050252455 - Moriya, Tsuyoshi ; et al.	2005-11-17
Substrate cleaning apparatus and method App 20050241770 - Moriya, Tsuyoshi ; et al.	2005-11-03
Processing apparatus and method for removing particles therefrom App 20050189071 - Moriya, Tsuyoshi ; et al.	2005-09-01
Plasma processing apparatus, ring member and plasma processing method App 20050103275 - Sasaki, Yasuharu ; et al.	2005-05-19
Particle sticking prevention apparatus and plasma processing apparatus App 20050087136 - Moriya, Tsuyoshi ; et al.	2005-04-28
Method for cleaning elements in vacuum chamber and apparatus for processing substrates App 20050082000 - Moriya, Tsuyoshi ; et al.	2005-04-21
Particle removal apparatus and method and plasma processing apparatus App 20050039773 - Moriya, Tsuyoshi ; et al.	2005-02-24
Substrate processing apparatus and substrate transferring method App 20040240971 - Tezuka, Kazuyuki ; et al.	2004-12-02
Internal member of a plasma processing vessel App 20040216667 - Mitsuhashi, Kouji ; et al.	2004-11-04
Apparatus and method for detecting an end point of a cleaning process Grant 6,737,666 - Ito , et al. May 18, 2	2004-05-18
Method of manufacturing semiconductor devices and semiconductor manufacturing apparatus App 20030003758 - Moriya, Tsuyoshi ; et al.	2003-01-02
Semiconductor fabrication device and method for preventing the attachment of extraneous particles App 20020036343 - Moriya, Tsuyoshi ; et al.	2002-03-28
Semiconductor device manufacturing apparatus and method for manufacturing a semiconductor device App 20020037652 - Moriya, Tsuyoshi ; et al.	2002-03-28
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles App 20020019141 - Ito, Natsuko ; et al.	2002-02-14
Method And Apparatus For Plasma Etching App 20010041449 - ITO, NATSUKO ; et al.	2001-11-15
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles Grant 6,184,489 - Ito , et al. February 6, 2	2001-02-06
System and method for detecting particles produced in a process chamber by scattering light Grant 6,115,120 - Moriya , et al. September 5, 2	2000-09-05