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Patent applications and USPTO patent grants for Mizukami; Masami.The latest application filed is for "cvd apparatus and cvd method".
Patent | Date |
---|---|
CVD apparatus and CVD method Grant 6,436,203 - Kaizuka , et al. August 20, 2 | 2002-08-20 |
CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed Grant 6,210,486 - Mizukami , et al. April 3, 2 | 2001-04-03 |
CVD apparatus and CVD method Grant 6,089,184 - Kaizuka , et al. July 18, 2 | 2000-07-18 |
Hinge unit for vacuum-processing a semiconductor wafer Grant D424,583 - Mizukami May 9, 2 | 2000-05-09 |
Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus Grant 6,009,667 - Mizukami January 4, 2 | 2000-01-04 |
Multi-chamber system provided with carrier units Grant 5,474,410 - Ozawa , et al. December 12, 1 | 1995-12-12 |
Transfer apparatus Grant 5,333,986 - Mizukami , et al. August 2, 1 | 1994-08-02 |
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