Patent | Date |
---|
Manufacturing Method Of Silicon Carbide Device And Silicon Carbide App 20220093401 - Miyano; Kiyotaka | 2022-03-24 |
Semiconductor device and method for manufacturing the same Grant 10,770,481 - Miyano Sep | 2020-09-08 |
Vapor Phase Growth Apparatus And Vapor Phase Growth Method App 20200115822 - ISHIKAWA; Yoshitaka ;   et al. | 2020-04-16 |
Film forming apparatus and film forming method Grant 10,501,849 - Daigo , et al. Dec | 2019-12-10 |
Vapor phase growth method Grant 10,351,949 - Takahashi , et al. July 16, 2 | 2019-07-16 |
Method Of Manufacturing Semiconductor Device App 20190189450 - MIYANO; Kiyotaka | 2019-06-20 |
Semiconductor Device And Method For Manufacturing The Same App 20190081078 - MIYANO; Kiyotaka | 2019-03-14 |
Vapor Phase Growth Method App 20180171471 - TAKAHASHI; Hideshi ;   et al. | 2018-06-21 |
Film Forming Apparatus And Film Forming Method App 20180119280 - DAIGO; Yoshiaki ;   et al. | 2018-05-03 |
Vapor Phase Growth Apparatus And Vapor Phase Growth Method App 20180066381 - ISHIKAWA; Yoshitaka ;   et al. | 2018-03-08 |
Manufacturing method for semiconductor device, annealing device, and annealing method Grant 9,449,848 - Miyano , et al. September 20, 2 | 2016-09-20 |
Semiconductor device and manufacturing method thereof Grant 8,993,415 - Miyano , et al. March 31, 2 | 2015-03-31 |
Semiconductor device and method of manufacturing the same Grant 8,828,853 - Aoyama , et al. September 9, 2 | 2014-09-09 |
Semiconductor device and method for manufacturing semiconductor device Grant 8,759,205 - Aoyama , et al. June 24, 2 | 2014-06-24 |
Manufacturing Method For Semiconductor Device, Annealing Device, And Annealing Method App 20140087547 - MIYANO; Kiyotaka ;   et al. | 2014-03-27 |
Microwave Annealing Apparatus And Method Of Manufacturing A Semiconductor Device App 20140073065 - OHNO; Hiroshi ;   et al. | 2014-03-13 |
Method of manufacturing semiconductor device Grant 8,658,520 - Aoyama , et al. February 25, 2 | 2014-02-25 |
Manufacturing method of semiconductor device Grant 8,552,411 - Aoyama , et al. October 8, 2 | 2013-10-08 |
Non-volatile Semiconductor Storage Device And Manufacturing Method Of The Same App 20130248977 - MORI; Shinji ;   et al. | 2013-09-26 |
Semiconductor memory device having a circuit formed on a single crystal semiconductor layer with varied germanium concentration Grant 8,476,708 - Fukuzumi , et al. July 2, 2 | 2013-07-02 |
Semiconductor Device And Method For Manufacturing The Same App 20130146884 - Aoyama; Tomonori ;   et al. | 2013-06-13 |
Method of fabricating semiconductor device Grant 8,426,285 - Yoshino , et al. April 23, 2 | 2013-04-23 |
Semiconductor Device And Manufacturing Method Thereof App 20130075844 - Miyano; Kiyotaka ;   et al. | 2013-03-28 |
Semiconductor Device And Manufacturing Method Thereof App 20130075830 - MIYANO; Kiyotaka ;   et al. | 2013-03-28 |
Semiconductor device and method for manufacturing the same Grant 8,383,452 - Aoyama , et al. February 26, 2 | 2013-02-26 |
Method of manufacturing back side illuminated imaging device Grant 8,377,732 - Oshiki , et al. February 19, 2 | 2013-02-19 |
Method Of Manufacturing Semiconductor Device App 20130023102 - Aoyama; Tomonori ;   et al. | 2013-01-24 |
Semiconductor Device And Method Of Manufacturing The Same App 20120273790 - AOYAMA; Tomonori ;   et al. | 2012-11-01 |
Manufacturing Method Of Semiconductor Device App 20120225498 - Aoyama; Tomonori ;   et al. | 2012-09-06 |
Semiconductor Memory Device And Method Of Manufacturing The Same App 20120181602 - Fukuzumi; Yoshiaki ;   et al. | 2012-07-19 |
Manufacturing method for semiconductor device and semiconductor device Grant 8,148,717 - Ito , et al. April 3, 2 | 2012-04-03 |
Semiconductor device and method for manufacturing the same Grant 8,124,464 - Miyano February 28, 2 | 2012-02-28 |
Semiconductor Device And Method For Manufacturing The Same App 20120025200 - Aoyama; Tomonori ;   et al. | 2012-02-02 |
Method of fabricating a semiconductor device Grant 8,093,141 - Aoyama , et al. January 10, 2 | 2012-01-10 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20110215333 - AOYAMA; Tomonori ;   et al. | 2011-09-08 |
Method Of Manufacturing Back Side Illuminated Imaging Device App 20110159634 - Oshiki; Yusuke ;   et al. | 2011-06-30 |
Manufacturing method for semiconductor device and semiconductor device App 20110127578 - Ito; Takayuki ;   et al. | 2011-06-02 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof Grant 7,947,610 - Tsunashima , et al. May 24, 2 | 2011-05-24 |
Method Of Fabricating A Semiconductor Device App 20110111580 - AOYAMA; Tomonori ;   et al. | 2011-05-12 |
Method Of Fabricating Semiconductor Device App 20110076842 - YOSHINO; Kenichi ;   et al. | 2011-03-31 |
Manufacturing method for semiconductor device and semiconductor device Grant 7,902,030 - Ito , et al. March 8, 2 | 2011-03-08 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20110001170 - Ito; Takayuki ;   et al. | 2011-01-06 |
Semiconductor device and method for manufacturing the same App 20100273300 - Miyano; Kiyotaka | 2010-10-28 |
Semiconductor device having an element isolating insulating film Grant 7,772,671 - Suguro , et al. August 10, 2 | 2010-08-10 |
Semiconductor device and method for manufacturing the same Grant 7,772,640 - Miyano August 10, 2 | 2010-08-10 |
Method Of Manufacturing Semiconductor Device App 20100029053 - Itokawa; Hiroshi ;   et al. | 2010-02-04 |
Manufacturing Method For Semiconductor Device And Semiconductor Device App 20090309133 - Ito; Takayuki ;   et al. | 2009-12-17 |
Semiconductor device with recessed channel Grant 7,602,013 - Miyano , et al. October 13, 2 | 2009-10-13 |
Semiconductor Device Having A Gate Insulating Film Structure Including An Insulating Film Containing Metal, Silicon And Oxygen And Manufacturing Method Thereof App 20090233451 - Tsunashima; Yoshitaka ;   et al. | 2009-09-17 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof Grant 7,544,593 - Tsunashima , et al. June 9, 2 | 2009-06-09 |
Semiconductor substrate, manufacturing method therefor, and semiconductor device Grant 7,525,154 - Nagano , et al. April 28, 2 | 2009-04-28 |
Semiconductor memory device Grant 7,459,748 - Shirota , et al. December 2, 2 | 2008-12-02 |
Semiconductor device having an element isolating insulating film App 20080224252 - Suguro; Kyoichi ;   et al. | 2008-09-18 |
Method for manufacturing semiconductor device Grant 7,416,942 - Matsui , et al. August 26, 2 | 2008-08-26 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof App 20080102616 - Tsunashima; Yoshitaka ;   et al. | 2008-05-01 |
Semiconductor device and method of fabricating semiconductor device using oxidation Grant 7,365,362 - Miyano April 29, 2 | 2008-04-29 |
Semiconductor device and method of manufacturing the same Grant 7,361,960 - Tsunashima , et al. April 22, 2 | 2008-04-22 |
Semiconductor device fabrication method App 20070298594 - Mizushima; Ichiro ;   et al. | 2007-12-27 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof Grant 7,306,994 - Tsunashima , et al. December 11, 2 | 2007-12-11 |
Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same Grant 7,294,562 - Nagano , et al. November 13, 2 | 2007-11-13 |
Semiconductor device and method for manufacturing the same App 20070257296 - Miyano; Kiyotaka | 2007-11-08 |
Semiconductor device and manufacturing method of the same App 20070238255 - Miyano; Kiyotaka ;   et al. | 2007-10-11 |
Method for manufacturing semiconductor device App 20070224760 - Matsui; Yukiteru ;   et al. | 2007-09-27 |
Semiconductor device and method for manufacturing the same Grant 7,235,469 - Okayama , et al. June 26, 2 | 2007-06-26 |
Semiconductor device and manufacturing method therefor Grant 7,232,751 - Akasaka , et al. June 19, 2 | 2007-06-19 |
Methods for manufacturing semiconductor devices App 20070111433 - Hirasawa; Shinichi ;   et al. | 2007-05-17 |
Semiconductor Memory Device And Method Of Fabricating The Same App 20070102749 - Shirota; Riichiro ;   et al. | 2007-05-10 |
Semiconductor device and method of manufacturing the same App 20070052026 - Miyano; Kiyotaka | 2007-03-08 |
Semiconductor device and method of manufacturing the same Grant 7,148,130 - Miyano December 12, 2 | 2006-12-12 |
Semiconductor device and method for manufacturing the same Grant 7,148,158 - Ozawa , et al. December 12, 2 | 2006-12-12 |
Semiconductor substrate having a partial SOI structure, method of manufacturing the same, a semiconductor device having a partial SOI structure, and method of manufacturing the same Grant 7,122,864 - Nagano , et al. October 17, 2 | 2006-10-17 |
Semiconductor device and method of fabricating the same App 20060194405 - Nagano; Hajime ;   et al. | 2006-08-31 |
Semiconductor device having trench capacitors and method for making the trench capacitors App 20060141701 - Saida; Shigehiko ;   et al. | 2006-06-29 |
Semiconductor device and method of fabricating the same App 20060138555 - Miyano; Kiyotaka | 2006-06-29 |
Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same App 20060076624 - Nagano; Hajime ;   et al. | 2006-04-13 |
Semiconductor device and method for manufacturing the same App 20060065934 - Okayama; Yasunori ;   et al. | 2006-03-30 |
Method of monitoring selectivity of selective film growth method, and semiconductor device fabrication method App 20060046441 - Miyano; Kiyotaka ;   et al. | 2006-03-02 |
Semiconductor device and method for manufacturing Grant 6,989,316 - Suguro , et al. January 24, 2 | 2006-01-24 |
Semiconductor substrate, manufacturing method therefor, and semiconductor device App 20050205929 - Nagano, Hajime ;   et al. | 2005-09-22 |
Semiconductor device and method of manufacturing the same Grant 6,924,518 - Iinuma , et al. August 2, 2 | 2005-08-02 |
Semiconductor device and manufacturing method therefor App 20050130418 - Akasaka, Yasushi ;   et al. | 2005-06-16 |
Semiconductor device and method of manufacturing the same Grant 6,893,928 - Sato , et al. May 17, 2 | 2005-05-17 |
Semiconductor device and manufacturing method therefor Grant 6,893,980 - Akasaka , et al. May 17, 2 | 2005-05-17 |
Semiconductor device having an injection substance to knock against oxygen and manufacturing method of the same Grant 6,891,232 - Miyano , et al. May 10, 2 | 2005-05-10 |
Semiconductor device and method of manufacturing a semiconductor device App 20050035413 - Miyano, Kiyotaka ;   et al. | 2005-02-17 |
Semiconductor device and method for manufacturing the same App 20050014354 - Ozawa, Yoshio ;   et al. | 2005-01-20 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof App 20050006675 - Tsunashima, Yoshitaka ;   et al. | 2005-01-13 |
Semiconductor device having trench capacitors and method for making the trench capacitors App 20050006686 - Saida, Shigehiko ;   et al. | 2005-01-13 |
Semiconductor device and method of manufacturing the same App 20050006637 - Iinuma, Toshihiko ;   et al. | 2005-01-13 |
Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same App 20040183131 - Nagano, Hajime ;   et al. | 2004-09-23 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof Grant 6,784,508 - Tsunashima , et al. August 31, 2 | 2004-08-31 |
Semiconductor device and method of manufacturing the same App 20040124476 - Miyano, Kiyotaka | 2004-07-01 |
Semiconductor device and method for manufacturing the same App 20040070045 - Suguro, Kyoichi ;   et al. | 2004-04-15 |
Semiconductor device and method for manufacturing App 20030211713 - Suguro, Kyoichi ;   et al. | 2003-11-13 |
Semiconductor device and method of manufacturing the same App 20030173617 - Sato, Tsutomu ;   et al. | 2003-09-18 |
Semiconductor device and method for manufacturing the same Grant 6,617,226 - Suguro , et al. September 9, 2 | 2003-09-09 |
Semiconductor device and method of manufacturing a semiconductor device App 20030141549 - Miyano, Kiyotaka ;   et al. | 2003-07-31 |
Semiconductor device and method for manufacturing the same App 20030127695 - Ozawa, Yoshio ;   et al. | 2003-07-10 |
Method of manufacturing a semiconductor device with oxide mediated epitaxial layer Grant 6,395,621 - Mizushima , et al. May 28, 2 | 2002-05-28 |
Semiconductor device and method of manufacturing the same App 20020034864 - Mizushima, Ichiro ;   et al. | 2002-03-21 |
Semiconductor device with oxide mediated epitaxial layer Grant 6,346,732 - Mizushima , et al. February 12, 2 | 2002-02-12 |
Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor Grant 6,335,251 - Miyano , et al. January 1, 2 | 2002-01-01 |
Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof App 20010023120 - Tsunashima, Yoshitaka ;   et al. | 2001-09-20 |
Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor App 20010023108 - Miyano, Kiyotaka ;   et al. | 2001-09-20 |
Semiconductor device and method of manufacturing the same App 20010010966 - Miyano, Kiyotaka | 2001-08-02 |
Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor Grant 6,232,641 - Miyano , et al. May 15, 2 | 2001-05-15 |
Semiconductor device and manufacturing method therefor Grant 6,162,741 - Akasaka , et al. December 19, 2 | 2000-12-19 |
Semiconductor device and method for manufacturing the same Grant 6,133,150 - Nakajima , et al. October 17, 2 | 2000-10-17 |
Semiconductor device with conductive oxidation preventing film and method for manufacturing the same Grant 5,907,188 - Nakajima , et al. May 25, 1 | 1999-05-25 |