loadpatents
name:-0.044792890548706
name:-0.022958993911743
name:-0.0017480850219727
Miya; Go Patent Filings

Miya; Go

Patent Applications and Registrations

Patent applications and USPTO patent grants for Miya; Go.The latest application filed is for "charged particle beam apparatus".

Company Profile
1.21.35
  • Miya; Go - Tokyo JP
  • Miya; Go - Hachioji JP
  • - Hachioji JP
  • Miya; Go - Ibaraki-ken JP
  • Miya; Go - Ibaraki JP
  • Miya; Go - Chiyoda JP
  • Miya, Go - Niihari-gun JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Charged Particle Beam Apparatus
App 20220028650 - Miwa; Takafumi ;   et al.
2022-01-27
Charged particle beam device
Grant 10,872,742 - Miwa , et al. December 22, 2
2020-12-22
Charged Particle Beam Device
App 20200006032 - MIWA; Takafumi ;   et al.
2020-01-02
Plasma processing apparatus and plasma processing method
Grant 10,128,141 - Tandou , et al. November 13, 2
2018-11-13
Charged particle beam apparatus for measuring surface potential of a sample
Grant 9,799,486 - Kanno , et al. October 24, 2
2017-10-24
Plasma processing apparatus and plasma processing method
Grant 9,704,731 - Miya , et al. July 11, 2
2017-07-11
Electrostatic chuck mechanism and charged particle beam apparatus
Grant 9,401,297 - Ebizuka , et al. July 26, 2
2016-07-26
Charged Particle Beam Apparatus
App 20160013010 - KANNO; Seiichiro ;   et al.
2016-01-14
Electrostatic Chuck Mechanism and Charged Particle Beam Apparatus
App 20150262857 - EBIZUKA; Yasushi ;   et al.
2015-09-17
Plasma Processing Apparatus And Plasma Processing Method
App 20150031213 - MIYA; Go ;   et al.
2015-01-29
Measurement or inspecting apparatus
Grant 8,921,781 - Miya , et al. December 30, 2
2014-12-30
Measurement or inspecting apparatus
Grant 08921781 -
2014-12-30
Plasma Processing Apparatus And Plasma Processing Method
App 20140283534 - Tandou; Takumi ;   et al.
2014-09-25
Charged particle beam device and evaluation method using the charged particle beam device
Grant 8,653,455 - Kitsunai , et al. February 18, 2
2014-02-18
Plasma Processing Apparatus And Plasma Processing Method
App 20140004706 - MIYA; Go ;   et al.
2014-01-02
Semiconductor Inspecting Apparatus
App 20130327939 - MIYA; Go ;   et al.
2013-12-12
Semiconductor inspecting apparatus
Grant 8,519,332 - Miya , et al. August 27, 2
2013-08-27
Plasma Processing Apparatus
App 20120273136 - Edamura; Manabu ;   et al.
2012-11-01
Semiconductor Inspecting Apparatus
App 20120261589 - MIYA; Go ;   et al.
2012-10-18
Plasma processing apparatus
Grant 8,231,759 - Edamura , et al. July 31, 2
2012-07-31
Semiconductor inspecting apparatus
Grant 8,232,522 - Miya , et al. July 31, 2
2012-07-31
Plasma Processing Apparatus
App 20120186745 - MIYA; Go ;   et al.
2012-07-26
Charged Particle Beam Device And Evaluation Method Using The Charged Particle Beam Device
App 20120070066 - Kitsunai; Hiroyuki ;   et al.
2012-03-22
Apparatus and method for plasma etching
Grant 8,083,889 - Miya , et al. December 27, 2
2011-12-27
Vacuum Processing Apparatus
App 20110120649 - SATOU; Kouhei ;   et al.
2011-05-26
Semiconductor Inspecting Apparatus
App 20110095185 - Miya; Go ;   et al.
2011-04-28
Vacuum processing apparatus
Grant 7,887,669 - Satou , et al. February 15, 2
2011-02-15
Plasma Processing Apparatus
App 20100263796 - Edamura; Manabu ;   et al.
2010-10-21
Plasma processing apparatus
Grant 7,744,721 - Edamura , et al. June 29, 2
2010-06-29
Apparatus and method for plasma etching
Grant 7,713,756 - Miya , et al. May 11, 2
2010-05-11
Plasma Processing Apparatus
App 20100078130 - Edamura; Manabu ;   et al.
2010-04-01
Apparatus And Method For Plasma Etching
App 20090223633 - MIYA; Go ;   et al.
2009-09-10
Plasma Etching Apparatus And Plasma Etching Method
App 20090152241 - MIYA; Go ;   et al.
2009-06-18
Apparatus And Method For Plasma Etching
App 20090095423 - MIYA; Go ;   et al.
2009-04-16
Plasma etching apparatus and plasma etching method
Grant 7,396,771 - Miya , et al. July 8, 2
2008-07-08
Vacuum Processing Apparatus
App 20080110400 - Satou; Kouhei ;   et al.
2008-05-15
Plasma Etching Apparatus And Plasma Etching Method
App 20080110569 - Miya; Go ;   et al.
2008-05-15
Plasma etching apparatus and plasma etching method
App 20070209759 - Miya; Go ;   et al.
2007-09-13
Apparatus And Method For Plasma Etching
App 20070184563 - Miya; Go ;   et al.
2007-08-09
Plasma etching apparatus and plasma etching method
App 20070056929 - Miya; Go ;   et al.
2007-03-15
Electrostatic chuck, wafer processing apparatus and plasma processing method
App 20060291132 - Kanno; Seiichiro ;   et al.
2006-12-28
Plasma processing method
Grant 7,147,748 - Miya , et al. December 12, 2
2006-12-12
Plasma processing apparatus and plasma processing method
Grant 7,147,747 - Miya , et al. December 12, 2
2006-12-12
Apparatus and method for processing wafer
App 20060191482 - Kanno; Seiichiro ;   et al.
2006-08-31
Plasma etching apparatus and plasma etching method
App 20060169671 - Miya; Go ;   et al.
2006-08-03
Plasma processing system and method
App 20060043064 - Tanaka; Junichi ;   et al.
2006-03-02
Plasma processing apparatus
App 20050224182 - Edamura, Manabu ;   et al.
2005-10-13
Diagnosis method for semiconductor processing apparatus
Grant 6,899,766 - Miya , et al. May 31, 2
2005-05-31
Semiconductor processing apparatus and a diagnosis method therefor
Grant 6,866,744 - Miya , et al. March 15, 2
2005-03-15
Apparatus and method for plasma etching
App 20050028934 - Miya, Go ;   et al.
2005-02-10
Plasma processing apparatus and plasma processing method
App 20040173309 - Miya, Go ;   et al.
2004-09-09
Plasma processing apparatus
App 20040163595 - Edamura, Manabu ;   et al.
2004-08-26
processing method
App 20040166598 - Miya, Go ;   et al.
2004-08-26
Diagnosis method for semiconductor processing apparatus
App 20040159401 - Miya, Go ;   et al.
2004-08-19
Semiconductor processing apparatus and a diagnosis method therefor
App 20030205326 - Miya, Go ;   et al.
2003-11-06

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