loadpatents
Patent applications and USPTO patent grants for Miya; Go.The latest application filed is for "charged particle beam apparatus".
Patent | Date |
---|---|
Charged Particle Beam Apparatus App 20220028650 - Miwa; Takafumi ;   et al. | 2022-01-27 |
Charged particle beam device Grant 10,872,742 - Miwa , et al. December 22, 2 | 2020-12-22 |
Charged Particle Beam Device App 20200006032 - MIWA; Takafumi ;   et al. | 2020-01-02 |
Plasma processing apparatus and plasma processing method Grant 10,128,141 - Tandou , et al. November 13, 2 | 2018-11-13 |
Charged particle beam apparatus for measuring surface potential of a sample Grant 9,799,486 - Kanno , et al. October 24, 2 | 2017-10-24 |
Plasma processing apparatus and plasma processing method Grant 9,704,731 - Miya , et al. July 11, 2 | 2017-07-11 |
Electrostatic chuck mechanism and charged particle beam apparatus Grant 9,401,297 - Ebizuka , et al. July 26, 2 | 2016-07-26 |
Charged Particle Beam Apparatus App 20160013010 - KANNO; Seiichiro ;   et al. | 2016-01-14 |
Electrostatic Chuck Mechanism and Charged Particle Beam Apparatus App 20150262857 - EBIZUKA; Yasushi ;   et al. | 2015-09-17 |
Plasma Processing Apparatus And Plasma Processing Method App 20150031213 - MIYA; Go ;   et al. | 2015-01-29 |
Measurement or inspecting apparatus Grant 8,921,781 - Miya , et al. December 30, 2 | 2014-12-30 |
Measurement or inspecting apparatus Grant 08921781 - | 2014-12-30 |
Plasma Processing Apparatus And Plasma Processing Method App 20140283534 - Tandou; Takumi ;   et al. | 2014-09-25 |
Charged particle beam device and evaluation method using the charged particle beam device Grant 8,653,455 - Kitsunai , et al. February 18, 2 | 2014-02-18 |
Plasma Processing Apparatus And Plasma Processing Method App 20140004706 - MIYA; Go ;   et al. | 2014-01-02 |
Semiconductor Inspecting Apparatus App 20130327939 - MIYA; Go ;   et al. | 2013-12-12 |
Semiconductor inspecting apparatus Grant 8,519,332 - Miya , et al. August 27, 2 | 2013-08-27 |
Plasma Processing Apparatus App 20120273136 - Edamura; Manabu ;   et al. | 2012-11-01 |
Semiconductor Inspecting Apparatus App 20120261589 - MIYA; Go ;   et al. | 2012-10-18 |
Plasma processing apparatus Grant 8,231,759 - Edamura , et al. July 31, 2 | 2012-07-31 |
Semiconductor inspecting apparatus Grant 8,232,522 - Miya , et al. July 31, 2 | 2012-07-31 |
Plasma Processing Apparatus App 20120186745 - MIYA; Go ;   et al. | 2012-07-26 |
Charged Particle Beam Device And Evaluation Method Using The Charged Particle Beam Device App 20120070066 - Kitsunai; Hiroyuki ;   et al. | 2012-03-22 |
Apparatus and method for plasma etching Grant 8,083,889 - Miya , et al. December 27, 2 | 2011-12-27 |
Vacuum Processing Apparatus App 20110120649 - SATOU; Kouhei ;   et al. | 2011-05-26 |
Semiconductor Inspecting Apparatus App 20110095185 - Miya; Go ;   et al. | 2011-04-28 |
Vacuum processing apparatus Grant 7,887,669 - Satou , et al. February 15, 2 | 2011-02-15 |
Plasma Processing Apparatus App 20100263796 - Edamura; Manabu ;   et al. | 2010-10-21 |
Plasma processing apparatus Grant 7,744,721 - Edamura , et al. June 29, 2 | 2010-06-29 |
Apparatus and method for plasma etching Grant 7,713,756 - Miya , et al. May 11, 2 | 2010-05-11 |
Plasma Processing Apparatus App 20100078130 - Edamura; Manabu ;   et al. | 2010-04-01 |
Apparatus And Method For Plasma Etching App 20090223633 - MIYA; Go ;   et al. | 2009-09-10 |
Plasma Etching Apparatus And Plasma Etching Method App 20090152241 - MIYA; Go ;   et al. | 2009-06-18 |
Apparatus And Method For Plasma Etching App 20090095423 - MIYA; Go ;   et al. | 2009-04-16 |
Plasma etching apparatus and plasma etching method Grant 7,396,771 - Miya , et al. July 8, 2 | 2008-07-08 |
Vacuum Processing Apparatus App 20080110400 - Satou; Kouhei ;   et al. | 2008-05-15 |
Plasma Etching Apparatus And Plasma Etching Method App 20080110569 - Miya; Go ;   et al. | 2008-05-15 |
Plasma etching apparatus and plasma etching method App 20070209759 - Miya; Go ;   et al. | 2007-09-13 |
Apparatus And Method For Plasma Etching App 20070184563 - Miya; Go ;   et al. | 2007-08-09 |
Plasma etching apparatus and plasma etching method App 20070056929 - Miya; Go ;   et al. | 2007-03-15 |
Electrostatic chuck, wafer processing apparatus and plasma processing method App 20060291132 - Kanno; Seiichiro ;   et al. | 2006-12-28 |
Plasma processing method Grant 7,147,748 - Miya , et al. December 12, 2 | 2006-12-12 |
Plasma processing apparatus and plasma processing method Grant 7,147,747 - Miya , et al. December 12, 2 | 2006-12-12 |
Apparatus and method for processing wafer App 20060191482 - Kanno; Seiichiro ;   et al. | 2006-08-31 |
Plasma etching apparatus and plasma etching method App 20060169671 - Miya; Go ;   et al. | 2006-08-03 |
Plasma processing system and method App 20060043064 - Tanaka; Junichi ;   et al. | 2006-03-02 |
Plasma processing apparatus App 20050224182 - Edamura, Manabu ;   et al. | 2005-10-13 |
Diagnosis method for semiconductor processing apparatus Grant 6,899,766 - Miya , et al. May 31, 2 | 2005-05-31 |
Semiconductor processing apparatus and a diagnosis method therefor Grant 6,866,744 - Miya , et al. March 15, 2 | 2005-03-15 |
Apparatus and method for plasma etching App 20050028934 - Miya, Go ;   et al. | 2005-02-10 |
Plasma processing apparatus and plasma processing method App 20040173309 - Miya, Go ;   et al. | 2004-09-09 |
Plasma processing apparatus App 20040163595 - Edamura, Manabu ;   et al. | 2004-08-26 |
processing method App 20040166598 - Miya, Go ;   et al. | 2004-08-26 |
Diagnosis method for semiconductor processing apparatus App 20040159401 - Miya, Go ;   et al. | 2004-08-19 |
Semiconductor processing apparatus and a diagnosis method therefor App 20030205326 - Miya, Go ;   et al. | 2003-11-06 |
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