Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus and device manufacturing method Grant 10,788,755 - Lof , et al. September 29, 2 | 2020-09-29 |
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ;   et al. | 2020-07-16 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ;   et al. | 2019-10-03 |
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ;   et al. | 2019-07-11 |
Lithographic apparatus and device manufacturing method Grant 10,261,428 - Lof , et al. | 2019-04-16 |
Lithographic Apparatus And Device Manufacturing Method App 20190086819 - LOOPSTRA; Erik Roelof ;   et al. | 2019-03-21 |
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Lithographic apparatus and device manufacturing method Grant 10,146,142 - Loopstra , et al. De | 2018-12-04 |
Actuation mechanism, optical apparatus and lithography apparatus Grant 9,927,711 - Hol , et al. March 27, 2 | 2018-03-27 |
Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ;   et al. | 2017-11-30 |
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
Lithographic Apparatus And Device Manufacturing Method App 20170160650 - LOOPSTRA; Erik Roelof ;   et al. | 2017-06-08 |
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic apparatus and device manufacturing method Grant 9,606,448 - Loopstra , et al. March 28, 2 | 2017-03-28 |
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic apparatus and device manufacturing method Grant 9,482,966 - Lof , et al. November 1, 2 | 2016-11-01 |
Lithographic apparatus and device manufacturing method Grant 9,442,388 - Loopstra , et al. September 13, 2 | 2016-09-13 |
Lithographic apparatus and device manufacturing method Grant 9,366,972 - Lof , et al. June 14, 2 | 2016-06-14 |
Lithographic Apparatus And Device Manufacturing Method App 20160062248 - LOF; Joeri ;   et al. | 2016-03-03 |
Lithographic apparatus and device manufacturing method Grant 9,195,153 - Lof , et al. November 24, 2 | 2015-11-24 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ;   et al. | 2015-09-17 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Lithographic Apparatus And Device Manufacturing Method App 20140347642 - LOOPSTRA; Erik Roelof ;   et al. | 2014-11-27 |
Lithographic Apparatus And Device Manufacturing Method App 20140071420 - Loopstra; Erik Roelof ;   et al. | 2014-03-13 |
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ;   et al. | 2013-09-26 |
Lithographic apparatus, method for levelling an object, and lithographic projection method Grant 8,514,368 - Bussink , et al. August 20, 2 | 2013-08-20 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus Grant 8,476,167 - Van Mierlo , et al. July 2, 2 | 2013-07-02 |
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus And Device Manufacturing Method App 20130128256 - LOF; Joeri ;   et al. | 2013-05-23 |
Lithographic apparatus and device manufacturing method Grant 8,344,341 - Lof , et al. January 1, 2 | 2013-01-01 |
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ;   et al. | 2012-11-01 |
Lithographic apparatus and device manufacturing method Grant 8,208,123 - Loopstra , et al. June 26, 2 | 2012-06-26 |
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ;   et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ;   et al. | 2011-07-14 |
Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus Grant 7,960,074 - Mickan , et al. June 14, 2 | 2011-06-14 |
Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp for a Lithographic Apparatus App 20110126406 - VAN MIERLO; Hubert Adriaan ;   et al. | 2011-06-02 |
Illumination system for illuminating a patterning device and method for manufacturing an illumination system Grant 7,889,321 - Van Schoot , et al. February 15, 2 | 2011-02-15 |
Lithographic Apparatus And Device Manufacturing Method App 20110027721 - LOF; JOERI ;   et al. | 2011-02-03 |
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ;   et al. | 2011-01-13 |
Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ;   et al. | 2011-01-06 |
Lithographic Apparatus, Method For Levelling An Object, And Lithographic Projection Method App 20100265484 - Bussink; Peter Gerhardus Wilhelmus ;   et al. | 2010-10-21 |
Lithographic apparatus and device manufacturing method Grant 7,795,603 - Lof , et al. September 14, 2 | 2010-09-14 |
Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ;   et al. | 2009-11-26 |
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method App 20090184270 - Lof; Joeri ;   et al. | 2009-07-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,528,935 - Zaal , et al. May 5, 2 | 2009-05-05 |
System for electrically connecting a mask to earth, a mask Grant 7,514,186 - Meijer , et al. April 7, 2 | 2009-04-07 |
Lithographic apparatus and device manufacturing method Grant 7,482,611 - Lof , et al. January 27, 2 | 2009-01-27 |
Illumination system for illuminating a pattering device and method for manufacturing an illumination system App 20080246940 - Van Schoot; Jan Bernard Plechelmus ;   et al. | 2008-10-09 |
Device manufacturing method and lithographic apparatus Grant 7,426,015 - Meijer , et al. September 16, 2 | 2008-09-16 |
Device Manufacturing Method And Lithographic Apparatus App 20080170210 - Meijer; Hendricus Johannes Maria ;   et al. | 2008-07-17 |
Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ;   et al. | 2007-11-22 |
Lithographic apparatus and patterning device transport Grant 7,248,340 - Ham , et al. July 24, 2 | 2007-07-24 |
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus App 20070139855 - Van Mierlo; Hubert Adriaan ;   et al. | 2007-06-21 |
Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid Grant 7,193,232 - Lof , et al. March 20, 2 | 2007-03-20 |
Lithographic apparatus and device manufacturing method App 20070040133 - Lof; Joeri ;   et al. | 2007-02-22 |
System for electrically connecting a mask to earth, a mask App 20060292457 - Meijer; Hendricus Johannes Maria ;   et al. | 2006-12-28 |
Lithographic apparatus and patterning device transport Grant 7,151,589 - Ham , et al. December 19, 2 | 2006-12-19 |
Lithographic apparatus, device manufacturing method, and angular encoder Grant 7,119,886 - Leenders , et al. October 10, 2 | 2006-10-10 |
Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus App 20060194123 - Mickan; Uwe ;   et al. | 2006-08-31 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060158638 - Maria Zaal; Koen Jacobus Johannes ;   et al. | 2006-07-20 |
Lithographic apparatus and patterning device transport App 20050286041 - Ham, Erik Leonardus ;   et al. | 2005-12-29 |
Lithographic apparatus and patterning device transport App 20050286029 - Ham, Erik Leonardus ;   et al. | 2005-12-29 |
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ;   et al. | 2005-12-01 |
Lithographic apparatus and device manufacturing method App 20050094119 - Loopstra, Erik Roelof ;   et al. | 2005-05-05 |
Lithographic apparatus, device manufacturing method, and angular encoder App 20050018162 - Leenders, Martinus Hendrikus Antonius ;   et al. | 2005-01-27 |
Lithographic apparatus and device manufacturing method App 20040160582 - Lof, Joeri ;   et al. | 2004-08-19 |
Lithographic apparatus and device manufacturing method App 20040136494 - Lof, Joeri ;   et al. | 2004-07-15 |