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Patent applications and USPTO patent grants for Mear; Steven T..The latest application filed is for "ozonation for elimination of bacteria for wet processing systems".
Patent | Date |
---|---|
Ozonation For Elimination Of Bacteria For Wet Processing Systems App 20090044838 - Willing; Bruce ;   et al. | 2009-02-19 |
Carrier head with multiple chambers Grant 7,207,871 - Zuniga , et al. April 24, 2 | 2007-04-24 |
Carrier Head With Multiple Chambers App 20070082589 - Zuniga; Steven M. ;   et al. | 2007-04-12 |
Ozonation for elimination of bacteria for wet processing systems App 20070068552 - Willing; Bruce ;   et al. | 2007-03-29 |
CMP platen with patterned surface App 20040053566 - Tolles, Robert D. ;   et al. | 2004-03-18 |
CMP platen with patterned surface Grant 6,592,438 - Tolles , et al. July 15, 2 | 2003-07-15 |
CMP polishing pad Grant 6,575,825 - Tolles , et al. June 10, 2 | 2003-06-10 |
Carrier head with controllable edge pressure Grant 6,361,419 - Zuniga , et al. March 26, 2 | 2002-03-26 |
CMP polishing pad App 20010008830 - Tolles, Robert D. ;   et al. | 2001-07-19 |
CMP platen with patterned surface App 20010005667 - Tolles, Robert D. ;   et al. | 2001-06-28 |
CMP platen with patterned surface Grant 6,220,942 - Tolles , et al. April 24, 2 | 2001-04-24 |
CMP polishing pad Grant 6,217,426 - Tolles , et al. April 17, 2 | 2001-04-17 |
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