Meagley; Robert P.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Meagley; Robert P..The latest application filed is for "photoactive adhesion promoter".
Company Profile
0.41.57
- Meagley; Robert P. - Beaverton OR US
- Meagley; Robert P. - Emeryville CA
- Meagley; Robert P. - Hillsboro OR
- Meagley; Robert P - Hillsboro OR
- Meagley; Robert P. - Hilsboro OR
- Meagley; Robert P. - Aloha OR
Patent Activity
| Patent | Date |
|---|---|
| Forming semiconductor structures Grant 8,513,111 - Meagley , et al. August 20, 2 | 2013-08-20 |
| Pixelated photoresists Grant 8,003,293 - Meagley , et al. August 23, 2 | 2011-08-23 |
| Helical pixilated photoresist Grant 7,875,415 - Meagley January 25, 2 | 2011-01-25 |
| Photoactive adhesion promoter in a slam Grant 7,723,008 - Meagley , et al. May 25, 2 | 2010-05-25 |
| Photoactive adhesion promoter in a SLAM Grant 7,718,528 - Meagley , et al. May 18, 2 | 2010-05-18 |
| Methods and compositions for providing photoresist with improved properties for contacting liquids Grant 7,678,527 - Meagley , et al. March 16, 2 | 2010-03-16 |
| Sealing porous dielectric materials Grant 7,658,975 - Kloster , et al. February 9, 2 | 2010-02-09 |
| Branching self-assembling photoresist with decomposable backbone Grant 7,615,329 - Meagley November 10, 2 | 2009-11-10 |
| Photoactive resist capping layer Grant 7,615,337 - Meagley , et al. November 10, 2 | 2009-11-10 |
| Photoactive adhesion promoter Grant 7,611,828 - Meagley November 3, 2 | 2009-11-03 |
| Method to modulate etch rate in SLAM Grant 7,572,732 - Goodner , et al. August 11, 2 | 2009-08-11 |
| Sealing porous dielectric materials Grant 7,560,165 - Kloster , et al. July 14, 2 | 2009-07-14 |
| Photoactive Adhesion Promoter App 20090076291 - Meagley; Robert P. | 2009-03-19 |
| Photoactive adhesion promoter Grant 7,501,230 - Meagley March 10, 2 | 2009-03-10 |
| Metal ion separation from aqueous solutions using photoswitchable ionophores Grant 7,452,728 - Leet , et al. November 18, 2 | 2008-11-18 |
| Unidirectionally conductive materials for interconnection Grant 7,405,419 - Golzarian , et al. July 29, 2 | 2008-07-29 |
| Photoresists including amino acid polymers as photoimageable species App 20080160446 - Meagley; Robert P. | 2008-07-03 |
| Reduction Of Line Edge Roughness With A Conformal Coating Of A Sealant App 20080145792 - Chandhok; Manish ; et al. | 2008-06-19 |
| Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity Grant 7,375,030 - Choi , et al. May 20, 2 | 2008-05-20 |
| Anti-reflective coatings Grant 7,361,455 - Clark , et al. April 22, 2 | 2008-04-22 |
| Photosensitive dielectric layer Grant 7,344,972 - Goodner , et al. March 18, 2 | 2008-03-18 |
| Branching self-assembling photoresist with decomposable backbone App 20070207403 - Meagley; Robert P. | 2007-09-06 |
| Electrospray and enhanced electrospray deposition of thin films on semiconductor substrates Grant 7,259,109 - Meagley August 21, 2 | 2007-08-21 |
| Layered films formed by controlled phase segregation Grant 7,241,707 - Meagley , et al. July 10, 2 | 2007-07-10 |
| Basic quencher/developer solutions for photoresists Grant 7,241,560 - Clark , et al. July 10, 2 | 2007-07-10 |
| Helical pixilated photoresist App 20070154836 - Meagley; Robert P. | 2007-07-05 |
| Energy harvesting molecules and photoresist technology Grant 7,235,344 - Meagley , et al. June 26, 2 | 2007-06-26 |
| Photoactive Adhesion Promoter In A Slam App 20070105383 - Meagley; Robert P. ; et al. | 2007-05-10 |
| Using perfluoropoly-ethers to form pellicles Grant 7,214,452 - Powers , et al. May 8, 2 | 2007-05-08 |
| Photoacid generators based on novel superacids Grant 7,192,686 - Meagley March 20, 2 | 2007-03-20 |
| Forming a dielectric layer using a hydrocarbon-containing precursor App 20070032675 - Meagley; Robert P. ; et al. | 2007-02-08 |
| Forming a dielectric layer using porogens Grant 7,169,715 - Ott , et al. January 30, 2 | 2007-01-30 |
| Enabling chain scission of branched photoresist Grant 7,166,413 - Cao , et al. January 23, 2 | 2007-01-23 |
| Electrospray and enhanced electrospray deposition of thin films on semiconductor substrates App 20060267156 - Meagley; Robert P. | 2006-11-30 |
| Forming a dielectric layer using a hydrocarbon-containing precursor Grant 7,138,158 - Meagley , et al. November 21, 2 | 2006-11-21 |
| Forming semiconductor structures App 20060255432 - Meagley; Robert P. ; et al. | 2006-11-16 |
| Line edge roughness reduction Grant 7,135,419 - Chandhok , et al. November 14, 2 | 2006-11-14 |
| Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity App 20060234495 - Choi; Hok-Kin ; et al. | 2006-10-19 |
| Unidirectionally conductive materials for interconnection App 20060228884 - Golzarian; Reza M. ; et al. | 2006-10-12 |
| Photoactive adhesion promoter in a slam App 20060216634 - Meagley; Robert P. ; et al. | 2006-09-28 |
| Method to modulate etch rate in SLAM App 20060205221 - Goodner; Michael D. ; et al. | 2006-09-14 |
| Method to modulate etch rate in SLAM Grant 7,101,798 - Goodner , et al. September 5, 2 | 2006-09-05 |
| Layered films formed by controlled phase segregation App 20060183348 - Meagley; Robert P. ; et al. | 2006-08-17 |
| Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity Grant 7,089,785 - Choi , et al. August 15, 2 | 2006-08-15 |
| Unidirectionally conductive materials for interconnection Grant 7,084,053 - Golzarian , et al. August 1, 2 | 2006-08-01 |
| Ultraviolet light transparent nanoparticles for photoresists App 20060166132 - Meagley; Robert P. | 2006-07-27 |
| Precursors for film formation Grant 7,071,125 - McSwiney , et al. July 4, 2 | 2006-07-04 |
| Pixelated photoresists App 20060068318 - Meagley; Robert P. ; et al. | 2006-03-30 |
| Composite sacrificial material Grant 7,018,920 - Meagley , et al. March 28, 2 | 2006-03-28 |
| Precursors for film formation App 20060063394 - McSwiney; Michael L. ; et al. | 2006-03-23 |
| Controlling resist profiles through substrate modification App 20060057506 - Goodner; Michael D. ; et al. | 2006-03-16 |
| Photoactive resist capping layer App 20060046206 - Meagley; Robert P. ; et al. | 2006-03-02 |
| Basic quencher/developer solutions for photoresists App 20060024616 - Clark; Shan C. ; et al. | 2006-02-02 |
| Controlling resist profiles through substrate modification Grant 6,991,893 - Goodner , et al. January 31, 2 | 2006-01-31 |
| Energy harvesting molecules and photoresist technology App 20060003253 - Meagley; Robert P. ; et al. | 2006-01-05 |
| Metal ion separation from aqueous solutions using photoswitchable ionophores App 20050258107 - Leet, Bob E. ; et al. | 2005-11-24 |
| Substrate imprinting techniques App 20050260790 - Goodner, Michael D. ; et al. | 2005-11-24 |
| Photosensitive dielectric layer App 20050239281 - Goodner, Michael D. ; et al. | 2005-10-27 |
| Sealing porous dielectric materials App 20050227094 - Kloster, Grant ; et al. | 2005-10-13 |
| Photoacid generators based on novel superacids App 20050221220 - Meagley, Robert P. | 2005-10-06 |
| Novel anti-reflective coatings App 20050221218 - Clark, Shan C. ; et al. | 2005-10-06 |
| Immersion liquids for immersion lithography App 20050164502 - Deng, Hai ; et al. | 2005-07-28 |
| Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity App 20050138992 - Choi, Hok-Kin ; et al. | 2005-06-30 |
| Positive photosensitive resin composition, process for its preparation, and semiconductor devices Grant 6,908,717 - Hirano , et al. June 21, 2 | 2005-06-21 |
| Sealing porous dielectric materials App 20050129926 - Kloster, Grant ; et al. | 2005-06-16 |
| Composite sacrificial material App 20050124152 - Meagley, Robert P. ; et al. | 2005-06-09 |
| Method to modulate etch rate in SLAM App 20050106886 - Goodner, Michael D. ; et al. | 2005-05-19 |
| Enabling chain scission of branched photoresist App 20050106498 - Cao, Heidi B. ; et al. | 2005-05-19 |
| Methods and compositions for providing photoresist with improved properties for contacting liquids App 20050084794 - Meagley, Robert P. ; et al. | 2005-04-21 |
| Reducing photoresist line edge roughness using chemically-assisted reflow App 20050084807 - Meagley, Robert P. ; et al. | 2005-04-21 |
| Increasing the etch resistance of photoresists App 20050074981 - Meagley, Robert P. ; et al. | 2005-04-07 |
| Unidirectionally conductive materials for interconnection App 20050070096 - Golzarian, Reza M. ; et al. | 2005-03-31 |
| Enabling chain scission of branched photoresist Grant 6,872,505 - Cao , et al. March 29, 2 | 2005-03-29 |
| Photoresist edge correction Grant 6,872,513 - Meagley March 29, 2 | 2005-03-29 |
| Quantum efficient photoacid generators for photolithographic processes App 20050058933 - Meagley, Robert P. ; et al. | 2005-03-17 |
| Enabling Chain Scission Of Branched Photoresist App 20050058931 - Cao, Heidi B. ; et al. | 2005-03-17 |
| Removing sacrificial material by thermal decomposition App 20050042874 - Meagley, Robert P. ; et al. | 2005-02-24 |
| Composite sacrificial material Grant 6,858,528 - Meagley , et al. February 22, 2 | 2005-02-22 |
| Substrate patterning integration App 20050014378 - Goodner, Michael D. ; et al. | 2005-01-20 |
| Photoactive adhesion promoter App 20050014096 - Meagley, Robert P. | 2005-01-20 |
| Photodefinable polymers for semiconductor applications App 20050008966 - Meagley, Robert P. ; et al. | 2005-01-13 |
| Photoresist performance through control of polymer characteristics App 20040265734 - Yueh, Wang ; et al. | 2004-12-30 |
| Removing sacrificial material by thermal decomposition Grant 6,833,320 - Meagley , et al. December 21, 2 | 2004-12-21 |
| Forming a dielectric layer using porogens App 20040185679 - Ott, Andrew W. ; et al. | 2004-09-23 |
| Composite sacrificial material App 20040183203 - Meagley, Robert P. ; et al. | 2004-09-23 |
| Forming a dielectric layer using a hydrocarbon-containing precursor App 20040170760 - Meagley, Robert P. ; et al. | 2004-09-02 |
| Forming semiconductor structures App 20040145030 - Meagley, Robert P. ; et al. | 2004-07-29 |
| Photodefinable polymers for semiconductor applications App 20040131970 - Meagley, Robert P. ; et al. | 2004-07-08 |
| Photoresist edge correction App 20040101786 - Meagley, Robert P. | 2004-05-27 |
| Stripping cross-linked photoresists App 20040094507 - Goodner, Michael D. ; et al. | 2004-05-20 |
| Using perfluoropoly-ethers to form pellicles App 20040091788 - Powers, James M. ; et al. | 2004-05-13 |
| Controlling resist profiles through substrate modification App 20040086809 - Goodner, Michael D. ; et al. | 2004-05-06 |
| Photoactive adhesion promoter App 20040086800 - Meagley, Robert P. | 2004-05-06 |
| Romoving sacrificial material by thermal decomposition App 20040087060 - Meagley, Robert P. ; et al. | 2004-05-06 |
| Fluorous cleaning solution for lithographic processing App 20040058551 - Meagley, Robert P. ; et al. | 2004-03-25 |
| Line edge roughness reduction App 20040053511 - Chandhok, Manish ; et al. | 2004-03-18 |
| Forming polymer features on a substrate Grant 6,566,280 - Meagley , et al. May 20, 2 | 2003-05-20 |
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