Patent | Date |
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Hybrid edge ring for plasma wafer processing Grant 9,997,381 - McMillin , et al. June 12, 2 | 2018-06-12 |
Method of wet cleaning aluminum chamber parts Grant 9,387,521 - Shih , et al. July 12, 2 | 2016-07-12 |
Pressure control valve assembly of plasma processing chamber and rapid alternating process Grant 9,267,605 - Abatchev , et al. February 23, 2 | 2016-02-23 |
Hybrid Edge Ring For Plasma Wafer Processing App 20140235063 - McMillin; Brian ;   et al. | 2014-08-21 |
Method Of Wet Cleaning Aluminum Chamber Parts App 20140150819 - Shih; Hong ;   et al. | 2014-06-05 |
Method for reduction of voltage potential spike during dechucking Grant 8,628,675 - McMillin , et al. January 14, 2 | 2014-01-14 |
Pressure Control Valve Assembly Of Plasma Processing Chamber And Rapid Alternating Process App 20130115776 - Abatchev; Mirzafer ;   et al. | 2013-05-09 |
Method And Apparatus For Reduction Of Voltage Potential Spike During Dechucking App 20130059447 - McMillin; Brian ;   et al. | 2013-03-07 |
Method and apparatus for reduction of voltage potential spike during dechucking Grant 8,313,612 - McMillin , et al. November 20, 2 | 2012-11-20 |
LED downlight Grant 8,070,328 - Knoble , et al. December 6, 2 | 2011-12-06 |
Method for using an RC circuit to model trapped charge in an electrostatic chuck Grant 8,055,489 - Makhratchev , et al. November 8, 2 | 2011-11-08 |
Method And Apparatus For Reduction Of Voltage Potential Spike During Dechucking App 20100248490 - McMillin; Brian ;   et al. | 2010-09-30 |
Method For Using An Rc Circuit To Model Trapped Charge In An Electrostatic Chuck App 20100085679 - Makhratchev; Konstantin ;   et al. | 2010-04-08 |
Vehicle ignition interlock systems with retesting frequency control Grant 7,481,292 - Mobley , et al. January 27, 2 | 2009-01-27 |
Vehicle ignition interlock systems with mouth alcohol contamination sensor Grant 7,377,352 - Mobley , et al. May 27, 2 | 2008-05-27 |
Vehicle ignition interlock systems having transdermal alcohol sensor Grant 7,299,890 - Mobley , et al. November 27, 2 | 2007-11-27 |
Vehicle ignition interlock systems with multiple alcohol sensors Grant 7,287,617 - Mobley , et al. October 30, 2 | 2007-10-30 |
Vehicle ignition interlock systems that detect the presence of alcohol within vehicles Grant 7,218,236 - Mobley , et al. May 15, 2 | 2007-05-15 |
Control module for breath analyzer ignition interlock device Grant D540,209 - Mobley , et al. April 10, 2 | 2007-04-10 |
Sample head for breath analyzer ignition interlock device Grant D540,208 - Mobley , et al. April 10, 2 | 2007-04-10 |
Multiple zone gas distribution apparatus for thermal control of semiconductor wafer Grant 7,156,951 - Gao , et al. January 2, 2 | 2007-01-02 |
Vehicle ignition interlock systems with multiple alcohol sensors App 20060237254 - Mobley; Larry J. ;   et al. | 2006-10-26 |
Vehicle ignition interlock systems that detect the presence of alcohol within vehicles App 20060238362 - Mobley; Larry J. ;   et al. | 2006-10-26 |
Vehicle ignition interlock systems with retesting frequency control App 20060237253 - Mobley; Larry J. ;   et al. | 2006-10-26 |
Vehicle ignition interlock systems with mouth alcohol contamination sensor App 20060239856 - Mobley; Larry J. ;   et al. | 2006-10-26 |
Vehicle ignition interlock systems having transdermal alcohol sensor App 20060237252 - Mobley; Larry J. ;   et al. | 2006-10-26 |
Wet Cleaning Of Electrostatic Chucks App 20060112969 - Shih; Hong ;   et al. | 2006-06-01 |
Wet cleaning of electrostatic chucks Grant 7,052,553 - Shih , et al. May 30, 2 | 2006-05-30 |
Plasma excitation coil Grant 6,646,385 - Howald , et al. November 11, 2 | 2003-11-11 |
Method of depositing a silicon containing layer on a semiconductor substrate Grant 6,626,185 - Demos , et al. September 30, 2 | 2003-09-30 |
Plasma excitation coil App 20030001511 - Howald, Arthur M. ;   et al. | 2003-01-02 |
Plasma excitation coil Grant 6,441,555 - Howald , et al. August 27, 2 | 2002-08-27 |
Inductively coupled plasma CVD App 20010019903 - Shufflebotham, Paul Kevin ;   et al. | 2001-09-06 |
In-situ Chamber Cleaning Method For Substrate Processing Chamber Using High Density Inductively Coupled Fluorine Plasma App 20010008138 - DEMOS, ALEX ;   et al. | 2001-07-19 |
Inductively coupled plasma CVD Grant 6,184,158 - Shufflebotham , et al. February 6, 2 | 2001-02-06 |
Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing Grant 6,042,687 - Singh , et al. March 28, 2 | 2000-03-28 |
Gas injection system for plasma processing Grant 6,013,155 - McMillin , et al. January 11, 2 | 2000-01-11 |
Variable high temperature chuck for high density plasma chemical vapor deposition Grant 5,835,334 - McMillin , et al. November 10, 1 | 1998-11-10 |