Patent | Date |
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Plasma activated conformal dielectric film deposition Grant 10,043,655 - Swaminathan , et al. August 7, 2 | 2018-08-07 |
Plasma Activated Conformal Dielectric Film Deposition App 20170148628 - Swaminathan; Shankar ;   et al. | 2017-05-25 |
Plasma activated conformal dielectric film deposition Grant 9,570,274 - Swaminathan , et al. February 14, 2 | 2017-02-14 |
Plasma Activated Conformal Dielectric Film Deposition App 20150206719 - Swaminathan; Shankar ;   et al. | 2015-07-23 |
Plasma activated conformal dielectric film deposition Grant 8,999,859 - Swaminathan , et al. April 7, 2 | 2015-04-07 |
Plasma Activated Conformal Dielectric Film Deposition App 20140216337 - Swaminathan; Shankar ;   et al. | 2014-08-07 |
Plasma activated conformal dielectric film deposition Grant 8,637,411 - Swaminathan , et al. January 28, 2 | 2014-01-28 |
Plasma Activated Conformal Dielectric Film Deposition App 20120028454 - Swaminathan; Shankar ;   et al. | 2012-02-02 |
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface Grant 7,087,518 - Farber , et al. August 8, 2 | 2006-08-08 |
Nickel silicide - silicon nitride adhesion through surface passivation App 20050090087 - Lu, Jiong-Ping ;   et al. | 2005-04-28 |
Pre-pattern surface modification of low-k dielectrics Grant 6,861,348 - Kirkpatrick , et al. March 1, 2 | 2005-03-01 |
Chemical treatment of low-k dielectric films Grant 6,838,300 - Jin , et al. January 4, 2 | 2005-01-04 |
Nickel silicide--silicon nitride adhesion through surface passivation Grant 6,831,008 - Lu , et al. December 14, 2 | 2004-12-14 |
Chemical treatment of low-k dielectric films App 20040150012 - Jin, Changming ;   et al. | 2004-08-05 |
Hexamethyldisilazane treatment of low-k dielectric films App 20040152296 - Matz, Phillip D. ;   et al. | 2004-08-05 |
Pre-pattern surface modification for low-k dielectrics using A H2 plasma Grant 6,720,247 - Kirkpatrick , et al. April 13, 2 | 2004-04-13 |
Nickel silicide - silicon nitride adhesion through surface passivation App 20040061184 - Lu, Jiong-Ping ;   et al. | 2004-04-01 |
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface App 20030224585 - Farber, David Gerald ;   et al. | 2003-12-04 |
Plasma treatment of low-k dielectric films to improve patterning Grant 6,620,560 - Jiang , et al. September 16, 2 | 2003-09-16 |
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface App 20030170992 - Farber, David Gerald ;   et al. | 2003-09-11 |
Pre-pattern surface modification for low-k dielectrics using A H2 plasma App 20020111017 - Kirkpatrick, Brian K. ;   et al. | 2002-08-15 |
Pre-pattern surface modification for low-k dielectrics App 20020111037 - Kirkpatrick, Brian K. ;   et al. | 2002-08-15 |
Plasma treatment of low-k dielectric films to improve patterning App 20020090822 - Jiang, Ping ;   et al. | 2002-07-11 |