| Patent | Date |
|---|
Bottom And Middle Edge Rings
App 20220189744 - RATHNASINGHE; Hiran Rajitha ; et al. | 2022-06-16 |
Bottom And Middle Edge Rings
App 20220189745 - RATHNASINGHE; Hiran Rajitha ; et al. | 2022-06-16 |
Edge Ring Arrangement With Moveable Edge Rings
App 20210183687 - Yan; Haoquan ; et al. | 2021-06-17 |
Systems and methods for performing edge ring characterization
Grant 11,011,353 - Musselman , et al. May 18, 2 | 2021-05-18 |
Image based plasma sheath profile detection on plasma processing tools
Grant 10,957,521 - Wang , et al. March 23, 2 | 2021-03-23 |
Systems For Cooling Rf Heated Chamber Components
App 20210050188 - MCCHESNEY; Jon ; et al. | 2021-02-18 |
Systems for cooling RF heated chamber components
Grant 10,825,661 - McChesney , et al. November 3, 2 | 2020-11-03 |
Air Cooled Faraday Shield and Methods for Using the Same
App 20200318852 - Sriraman; Saravanapriyan ; et al. | 2020-10-08 |
Bottom And Middle Edge Rings
App 20200312633 - RATHNASINGHE; Hiran Rajitha ; et al. | 2020-10-01 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,770,339 - Genetti , et al. Sep | 2020-09-08 |
Air cooled faraday shield and methods for using the same
Grant 10,690,374 - Sriraman , et al. | 2020-06-23 |
Moveable edge coupling ring for edge process control during semiconductor wafer processing
Grant 10,658,222 - Yan , et al. | 2020-05-19 |
Systems and methods for tuning to reduce reflected power in multiple states
Grant 10,651,013 - McChesney , et al. | 2020-05-12 |
Temperature control in RF chamber with heater and air amplifier
Grant 10,600,620 - McChesney , et al. | 2020-03-24 |
Edge ring centering method using ring dynamic alignment data
Grant 10,541,168 - Tan , et al. Ja | 2020-01-21 |
Moveable Edge Ring Designs
App 20200020565 - RATHNASINGHE; Hiran Rajitha ; et al. | 2020-01-16 |
Image Based Plasma Sheath Profile Detection On Plasma Processing Tools
App 20190371581 - Wang; Yuhou ; et al. | 2019-12-05 |
Systems And Methods For Tuning To Reduce Reflected Power In Multiple States
App 20190371571 - McChesney; Jon ; et al. | 2019-12-05 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
Grant 10,427,307 - Genetti , et al. October 1, 2 | 2019-10-01 |
Systems and methods for tuning to reduce reflected power in multiple states
Grant 10,410,836 - McChesney , et al. Sept | 2019-09-10 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20190252234 - Genetti; Damon Tyrone ; et al. | 2019-08-15 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,304,717 - Genetti , et al. | 2019-05-28 |
Rotating RF electric field antenna for uniform plasma generation
Grant 10,242,844 - McChesney , et al. | 2019-03-26 |
Moveable Edge Ring Design
App 20190013232 - YAN; Haoquan ; et al. | 2019-01-10 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
Grant 10,124,492 - Genetti , et al. November 13, 2 | 2018-11-13 |
Systems For Cooling Rf Heated Chamber Components
App 20180247796 - MCCHESNEY; Jon ; et al. | 2018-08-30 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,062,599 - Genetti , et al. August 28, 2 | 2018-08-28 |
Systems And Methods For Tuning To Reduce Reflected Power In Multiple States
App 20180240647 - McChesney; Jon ; et al. | 2018-08-23 |
Air Cooled Faraday Shield and Methods for Using the Same
App 20180156489 - Sriraman; Saravanapriyan ; et al. | 2018-06-07 |
Systems for cooling RF heated chamber components
Grant 9,978,565 - McChesney , et al. May 22, 2 | 2018-05-22 |
Edge Ring Centering Method Using Ring Dynamic Alignment Data
App 20180138069 - Tan; Ali Sucipto ; et al. | 2018-05-17 |
Air cooled faraday shield and methods for using the same
Grant 9,885,493 - Sriraman , et al. February 6, 2 | 2018-02-06 |
Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System
App 20170334074 - Genetti; Damon Tyrone ; et al. | 2017-11-23 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20170330786 - Genetti; Damon Tyrone ; et al. | 2017-11-16 |
Systems And Methods For Performing Edge Ring Characterization
App 20170287682 - Musselman; Marcus ; et al. | 2017-10-05 |
Detection System for Tunable/Replaceable Edge Coupling Ring
App 20170263478 - McCHESNEY; Jon ; et al. | 2017-09-14 |
Chamber filler kit for plasma etch chamber useful for fast gas switching
Grant 9,679,751 - McChesney , et al. June 13, 2 | 2017-06-13 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20170117172 - Genetti; Damon Tyrone ; et al. | 2017-04-27 |
Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System
App 20170113355 - Genetti; Damon Tyrone ; et al. | 2017-04-27 |
Temperature Control in RF Chamber with Heater and Air Amplifier
App 20170103875 - McChesney; Jon ; et al. | 2017-04-13 |
Temperature control in RF chamber with heater and air amplifier
Grant 9,530,656 - McChesney , et al. December 27, 2 | 2016-12-27 |
Moveable Edge Coupling Ring For Edge Process Control During Semiconductor Wafer Processing
App 20160211165 - McChesney; Jon ; et al. | 2016-07-21 |
Moveable Edge Coupling Ring For Edge Process Control During Semiconductor Wafer Processing
App 20160211166 - Yan; Haoquan ; et al. | 2016-07-21 |
Rotating RF Electric Field Antenna For Uniform Plasma Generation
App 20160093471 - McChesney; Jon ; et al. | 2016-03-31 |
System and method for testing an electrostatic chuck
Grant 9,082,805 - Shih , et al. July 14, 2 | 2015-07-14 |
Air Cooled Faraday Shield and Methods for Using the Same
App 20150020969 - Sriraman; Saravanapriyan ; et al. | 2015-01-22 |
Protective Coating For A Plasma Processing Chamber Part And A Method Of Use
App 20140065835 - Kadkhodayan; Bobby ; et al. | 2014-03-06 |
Chamber Filler Kit For Plasma Etch Chamber Useful For Fast Gas Switching
App 20130244440 - McChesney; Jon ; et al. | 2013-09-19 |
Temperature Control in RF Chamber with Heater and Air Amplifier
App 20130228283 - McChesney; Jon ; et al. | 2013-09-05 |
Protective coating for a plasma processing chamber part and a method of use
Grant 8,522,716 - Kadkhodayan , et al. September 3, 2 | 2013-09-03 |
Systems For Cooling RF Heated Chamber Components
App 20130087283 - McChesney; Jon ; et al. | 2013-04-11 |
System And Method For Testing An Electrostatic Chuck
App 20120153971 - Shih; Hong ; et al. | 2012-06-21 |
System and method for testing an electrostatic chuck
Grant 8,143,904 - Shih , et al. March 27, 2 | 2012-03-27 |
System And Method For Testing An Electrostatic Chuck
App 20100090711 - Shih; Hong ; et al. | 2010-04-15 |
Protective Coating For A Plasma Processing Chamber Part And A Method Of Use
App 20090200269 - Kadkhodayan; Bobby ; et al. | 2009-08-13 |
Tandem etch chamber plasma processing system
Grant 6,962,644 - Paterson , et al. November 8, 2 | 2005-11-08 |
Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber
Grant 6,727,655 - McChesney , et al. April 27, 2 | 2004-04-27 |
Tandem etch chamber plasma processing system
App 20030176074 - Paterson, Alexander ; et al. | 2003-09-18 |
Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber
App 20030082835 - McChesney, Jon ; et al. | 2003-05-01 |
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