| Patent | Date |
|---|
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing
App 20220310359 - Savas; Stephen E. ; et al. | 2022-09-29 |
Processing of Semiconductors Using Vaporized Solvents
App 20220223405 - Meng; Shuang ; et al. | 2022-07-14 |
Silicon mandrel etch after native oxide punch-through
Grant 11,387,115 - Yan , et al. July 12, 2 | 2022-07-12 |
Processing of workpieces with reactive species generated using alkyl halide
Grant 11,387,111 - Yang , et al. July 12, 2 | 2022-07-12 |
Cooled Shield for ICP Source
App 20220208527 - Long; Maolin | 2022-06-30 |
Grid Assembly for Plasma Processing Apparatus
App 20220208514 - Long; Maolin | 2022-06-30 |
Directly Driven Hybrid ICP-CCP Plasma Source
App 20220208518 - Long; Maolin | 2022-06-30 |
Workpiece Processing Apparatus with Thermal Processing Systems
App 20220208572 - Bremensdorfer; Rolf | 2022-06-30 |
Configurable Faraday Shield
App 20220208529 - Long; Maolin | 2022-06-30 |
Workpiece Processing Apparatus with Outer Gas Channel Insert
App 20220208523 - Long; Maolin ; et al. | 2022-06-30 |
Workpiece Support For A Thermal Processing System
App 20220205478 - Sohn; Manuel ; et al. | 2022-06-30 |
Induction Coil Assembly for Plasma Processing Apparatus
App 20220208512 - Long; Maolin ; et al. | 2022-06-30 |
Electrostatic Chuck Assembly for Plasma Processing Apparatus
App 20220208591 - Long; Maolin | 2022-06-30 |
Workpiece Processing Apparatus with Gas Showerhead Assembly
App 20220195601 - Yang; Michael ; et al. | 2022-06-23 |
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
App 20220199376 - Yang; Michael ; et al. | 2022-06-23 |
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
App 20220189747 - Desai; Dixit ; et al. | 2022-06-16 |
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
App 20220189737 - Hezler; Dieter ; et al. | 2022-06-16 |
Workpiece Processing Apparatus with Thermal Processing Systems
App 20220187021 - Sohn; Manuel ; et al. | 2022-06-16 |
Enhanced ignition in inductively coupled plasmas for workpiece processing
Grant 11,348,784 - Savas , et al. May 31, 2 | 2022-05-31 |
Plasma processing apparatus having a focus ring adjustment assembly
Grant 11,348,767 - Zucker , et al. May 31, 2 | 2022-05-31 |
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
App 20220165614 - Savas; Stephen E. | 2022-05-26 |
Arc Lamp With Forming Gas For Thermal Processing Systems
App 20220165561 - Yang; Michael X. ; et al. | 2022-05-26 |
Processing of workpieces using ozone gas and hydrogen radicals
Grant 11,315,801 - Zhang , et al. April 26, 2 | 2022-04-26 |
Processing of semiconductors using vaporized solvents
Grant 11,289,323 - Meng , et al. March 29, 2 | 2022-03-29 |
Thermal Processing of Closed Shape Workpieces
App 20220090221 - Bremensdorfer; Rolf ; et al. | 2022-03-24 |
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
App 20220084839 - Zhang; Qi ; et al. | 2022-03-17 |
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
App 20220084792 - Savas; Stephen E. ; et al. | 2022-03-17 |
Spacer etching process
Grant 11,276,560 - Sung , et al. March 15, 2 | 2022-03-15 |
Plasma Strip Tool With Movable Insert
App 20220068611 - Long; Maolin ; et al. | 2022-03-03 |
Carbon containing hardmask removal process using sulfur containing process gas
Grant 11,264,249 - Dai , et al. March 1, 2 | 2022-03-01 |
Generation of Hydrogen Reactive Species For Processing of Workpieces
App 20220059321 - Zhang; Qi ; et al. | 2022-02-24 |
Rapid Thermal Processing System With Cooling System
App 20220059371 - Sohn; Manuel ; et al. | 2022-02-24 |
Rapid Thermal Processing System With Cooling System
App 20220059363 - Sohn; Manuel ; et al. | 2022-02-24 |
Methods for processing a workpiece using fluorine radicals
Grant 11,257,680 - Zhang , et al. February 22, 2 | 2022-02-22 |
Systems and methods for workpiece processing
Grant 11,257,696 - Yang , et al. February 22, 2 | 2022-02-22 |
Gas flow control for millisecond anneal system
Grant 11,255,606 - Pfahler , et al. February 22, 2 | 2022-02-22 |
Silicon oxide selective dry etch process
Grant 11,251,050 - Zhang , et al. February 15, 2 | 2022-02-15 |
Material deposition prevention on a workpiece in a process chamber
Grant 11,251,026 - Cue , et al. February 15, 2 | 2022-02-15 |
Systems and methods for workpiece processing using neutral atom beams
Grant 11,251,075 - Savas February 15, 2 | 2022-02-15 |
Plasma Strip Tool with Multiple Gas Injection
App 20210398775 - Ma; Shawming ; et al. | 2021-12-23 |
Surface Smoothing of Workpieces
App 20210391185 - Zhang; Qi ; et al. | 2021-12-16 |
Plasma strip tool with uniformity control
Grant 11,201,036 - Ma , et al. December 14, 2 | 2021-12-14 |
Low thermal budget annealing
Grant 11,195,732 - Timans December 7, 2 | 2021-12-07 |
Pedestal assembly for plasma processing apparatus
Grant 11,195,704 - Zucker , et al. December 7, 2 | 2021-12-07 |
Spacer open process by dual plasma
Grant 11,195,718 - Sung , et al. December 7, 2 | 2021-12-07 |
Thermal processing of closed shape workpieces
Grant 11,193,178 - Bremensdorfer , et al. December 7, 2 | 2021-12-07 |
Variable mode plasma chamber utilizing tunable plasma potential
Grant 11,189,464 - Savas , et al. November 30, 2 | 2021-11-30 |
Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
App 20210366727 - Zhang; Qi ; et al. | 2021-11-25 |
Selective etch process using hydrofluoric acid and ozone gases
Grant 11,183,397 - Zhang , et al. November 23, 2 | 2021-11-23 |
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
App 20210343541 - Ma; Shawming | 2021-11-04 |
Processing of workpieces using hydrogen radicals and ozone gas
Grant 11,164,727 - Xie , et al. November 2, 2 | 2021-11-02 |
Generation of hydrogen reactive species for processing of workpieces
Grant 11,164,725 - Zhang , et al. November 2, 2 | 2021-11-02 |
Selective deposition using methylation treatment
Grant 11,164,742 - Yang , et al. November 2, 2 | 2021-11-02 |
Nitrogen Injection for ARC Lamps
App 20210307115 - Bremensdorfer; Rolf ; et al. | 2021-09-30 |
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
App 20210307151 - Meng; Shuang ; et al. | 2021-09-30 |
Processing of Workpieces Using Flourocarbon Plasma
App 20210305071 - Wang; Shanyu ; et al. | 2021-09-30 |
Support Structure for Thermal Processing Systems
App 20210272839 - Sohn; Manuel ; et al. | 2021-09-02 |
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
App 20210272858 - Storek; Michael ; et al. | 2021-09-02 |
Surface smoothing of workpieces
Grant 11,107,695 - Zhang , et al. August 31, 2 | 2021-08-31 |
Method for high aspect ratio photoresist removal in pure reducing plasma
Grant 11,107,693 - Diao , et al. August 31, 2 | 2021-08-31 |
Pre-heat processes for millisecond anneal system
Grant 11,101,142 - Timans August 24, 2 | 2021-08-24 |
Plasma Processing Apparatus and Methods
App 20210257196 - Ma; Shawming ; et al. | 2021-08-19 |
Surface treatment of substrates using passivation layers
Grant 11,094,528 - Gao , et al. August 17, 2 | 2021-08-17 |
Surface treatment of silicon or silicon germanium surfaces using organic radicals
Grant 11,062,910 - Yang , et al. July 13, 2 | 2021-07-13 |
Atomic layer etch process using plasma in conjunction with a rapid thermal activation process
Grant 11,062,912 - Ma July 13, 2 | 2021-07-13 |
Systems and Methods for Removal of Hardmask
App 20210202231 - Sahay; Jeyta Anand ; et al. | 2021-07-01 |
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
App 20210202214 - Zhang; Qi ; et al. | 2021-07-01 |
Methods for tuning plasma potential using variable mode plasma chamber
Grant 11,049,692 - Savas , et al. June 29, 2 | 2021-06-29 |
Systems and Methods for Workpiece Processing
App 20210193489 - Yang; Michael | 2021-06-24 |
Ozone treatment for selective silicon nitride etch over silicon
Grant 11,043,393 - Wang , et al. June 22, 2 | 2021-06-22 |
Air leak detection in plasma processing apparatus with separation grid
Grant 11,039,527 - Meng , et al. June 15, 2 | 2021-06-15 |
Control System For Adaptive Control Of A Thermal Processing System
App 20210132592 - Yang; Michael X. ; et al. | 2021-05-06 |
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
App 20210118694 - Zhang; Qi ; et al. | 2021-04-22 |
Post Etch Defluorination Process
App 20210111017 - Vaniapura; Vijay ; et al. | 2021-04-15 |
Integration of materials removal and surface treatment in semiconductor device fabrication
Grant 10,964,528 - Yang , et al. March 30, 2 | 2021-03-30 |
Nitrogen injection for ARC lamps
Grant 10,966,286 - Bremensdorfer , et al. March 30, 2 | 2021-03-30 |
Chamber wall heating for a millisecond anneal system
Grant 10,957,563 - Janisch , et al. March 23, 2 | 2021-03-23 |
Methods For The Treatment Of Workpieces
App 20210082724 - Xie; Ting ; et al. | 2021-03-18 |
Method for processing a workpiece
Grant 10,950,428 - Xie , et al. March 16, 2 | 2021-03-16 |
Chamber seasoning to improve etch uniformity by reducing chemistry
Grant 10,950,416 - Zhang , et al. March 16, 2 | 2021-03-16 |
Silicon Oxide Selective Dry Etch Process
App 20210066088 - Zhang; Qi ; et al. | 2021-03-04 |
Method for Processing a Workpiece
App 20210066074 - Xie; Ting ; et al. | 2021-03-04 |
Methods For Processing a Workpiece Using Fluorine Radicals
App 20210066085 - Zhang; Qi ; et al. | 2021-03-04 |
Spacer Etching Process
App 20210066047 - Sung; Tsai Wen ; et al. | 2021-03-04 |
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing
App 20210050213 - Savas; Stephen E. ; et al. | 2021-02-18 |
Surface treatment of carbon containing films using organic radicals
Grant 10,910,228 - Yang , et al. February 2, 2 | 2021-02-02 |
Strip process for high aspect ratio structure
Grant 10,901,321 - Vaniapura , et al. January 26, 2 | 2021-01-26 |
Methods For Tuning Plasma Potential Using Variable Mode Plasma Chamber
App 20210020404 - Savas; Stephen E. ; et al. | 2021-01-21 |
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
App 20210020411 - Savas; Stephen E. ; et al. | 2021-01-21 |
Processing Of Workpieces Using Hydrogen Radicals And Ozone Gas
App 20210020413 - Xie; Ting ; et al. | 2021-01-21 |
Processing Of Workpieces Using Deposition Process And Etch Process
App 20210020445 - Wang; Shanyu ; et al. | 2021-01-21 |
Spacer Open Process By Dual Plasma
App 20210005456 - Sung; Tsai Wen ; et al. | 2021-01-07 |
Plasma Processing Apparatus With Post Plasma Gas Injection
App 20210005431 - Ma; Shawming ; et al. | 2021-01-07 |
Features for Improving Process Uniformity in a Millisecond Anneal System
App 20200402811 - Cosceev; Alexandr ; et al. | 2020-12-24 |
Post etch defluorination process
Grant 10,872,761 - Vaniapura , et al. December 22, 2 | 2020-12-22 |
Thermal Processing System With Transmission Switch Plate
App 20200396798 - Yang; Michael X. ; et al. | 2020-12-17 |
Surface Pretreatment Process To Improve Quality Of Oxide Films Produced By Remote Plasma
App 20200373129 - Xie; Ting ; et al. | 2020-11-26 |
Plasma Processing Apparatus Having A Focus Ring Adjustment Assembly
App 20200365377 - Zucker; Martin L. ; et al. | 2020-11-19 |
Focus Ring Adjustment Assembly Of A System For Processing Workpieces Under Vacuum
App 20200365405 - Zucker; Martin L. ; et al. | 2020-11-19 |
End Effectors For Moving Workpieces And Replaceable Parts Within A System For Processing Workpieces Under Vacuum
App 20200361094 - Zucker; Martin L. ; et al. | 2020-11-19 |
Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus
App 20200365381 - Zucker; Martin L. ; et al. | 2020-11-19 |
Substrate Support in a Millisecond Anneal System
App 20200357671 - Cibere; Joseph | 2020-11-12 |
Hydrogen Assisted Atmospheric Radical Oxidation
App 20200350158 - Yang; Michael X. ; et al. | 2020-11-05 |
Preheat Processes for Millisecond Anneal System
App 20200350217 - Lieberer; Markus ; et al. | 2020-11-05 |
Selective Deposition Using Methylation Treatment
App 20200350161 - Yang; Michael X. ; et al. | 2020-11-05 |
Surface treatment of silicon and carbon containing films by remote plasma with organic precursors
Grant 10,804,109 - Yang , et al. October 13, 2 | 2020-10-13 |
Plasma processing apparatus with post plasma gas injection
Grant 10,790,119 - Ma , et al. September 29, 2 | 2020-09-29 |
Pre-Heat Processes for Millisecond Anneal System
App 20200303206 - Timans; Paul | 2020-09-24 |
Thermal Processing System With Temperature Non-Uniformity Control
App 20200294826 - Yang; Michael X. ; et al. | 2020-09-17 |
Features for improving process uniformity in a millisecond anneal system
Grant 10,770,309 - Cosceev , et al. Sep | 2020-09-08 |
Thermal imaging of heat sources in thermal processing systems
Grant 10,760,976 - Yang Sep | 2020-09-01 |
Gas Supply With Angled Injectors In Plasma Processing Apparatus
App 20200258718A1 - | 2020-08-13 |
Substrate support in a millisecond anneal system
Grant 10,734,262 - Cibere | 2020-08-04 |
Air Leak Detection In Plasma Processing Apparatus With Separation Grid
App 20200245444 - Kind Code | 2020-07-30 |
Post Plasma Gas Injection In A Separation Grid
App 20200243305A1 - | 2020-07-30 |
Preheat processes for millisecond anneal system
Grant 10,727,140 - Lieberer , et al. | 2020-07-28 |
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
App 20200234983A1 - | 2020-07-23 |
Ozone Treatment for Selective Silicon Nitride Etch Over Silicon
App 20200234969A1 - | 2020-07-23 |
Electrostatic Shield for Inductive Plasma Sources
App 20200227239 - Savas; Stephen Edward ; et al. | 2020-07-16 |
Strip Process for High Aspect Ratio Structure
App 20200218158A1 - | 2020-07-09 |
Silicon Mandrel Etch After Native Oxide Punch-through
App 20200203182A1 - | 2020-06-25 |
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
App 20200203175A1 - | 2020-06-25 |
Surface Smoothing of Workpieces
App 20200203173A1 - | 2020-06-25 |
Silicon oxide selective dry etch process
Grant 10,692,730 - Zhang , et al. | 2020-06-23 |
Carbon Containing Hardmask Removal Process Using Sulfur Containing Process Gas
App 20200194277A1 - | 2020-06-18 |
Integration Of Materials Removal And Surface Treatment In Semiconductor Device Fabrication
App 20200185216A1 - | 2020-06-11 |
Pre-heat processes for millisecond anneal system
Grant 10,679,864 - Timans | 2020-06-09 |
Systems and Methods for Workpiece Processing
App 20200176288A1 - | 2020-06-04 |
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
App 20200161094A1 - | 2020-05-21 |
Systems And Methods For Workpiece Processing
App 20200161162A1 - | 2020-05-21 |
Water Vapor Based Fluorine Containing Plasma For Removal Of Hardmask
App 20200135554A1 - | 2020-04-30 |
Ozone for Selective Hydrophilic Surface Treatment
App 20200118813A1 - | 2020-04-16 |
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
App 20200098576 - Diao; Li ; et al. | 2020-03-26 |
Strip process for high aspect ratio structure
Grant 10,599,039 - Vaniapura , et al. | 2020-03-24 |
Oxide Removal From Titanium Nitride Surfaces
App 20200075313 - Wang; Jin J. ; et al. | 2020-03-05 |
Systems and methods for workpiece processing
Grant 10,580,672 - Yang , et al. | 2020-03-03 |
Atomic layer etch process using plasma in conjunction with a rapid thermal activation process
Grant 10,580,661 - Ma | 2020-03-03 |
Systems And Methods For Thermal Processing And Temperature Measurement Of A Workpiece At Low Temperatures
App 20200064198 - Bremensdorfer; Rolf ; et al. | 2020-02-27 |
Method for processing a workpiece using a multi-cycle thermal treatment process
Grant 10,573,532 - Yang , et al. Feb | 2020-02-25 |
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
App 20200043775 - Savas; Stephen E. | 2020-02-06 |
Post Etch Defluorination Process
App 20190393027 - Vaniapura; Vijay ; et al. | 2019-12-26 |
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
App 20190385862 - Yang; Michael X. ; et al. | 2019-12-19 |
Methods And Apparatus For Post Exposure Bake Processing Of A Workpiece
App 20190384178 - Yang; Michael X. | 2019-12-19 |
Generation of Hydrogen Reactive Species For Processing of Workpieces
App 20190378692 - Zhang; Qi ; et al. | 2019-12-12 |
Thermal Imaging Of Heat Sources In Thermal Processing Systems
App 20190316972 - Yang; Michael X. | 2019-10-17 |
Low Thermal Budget Annealing
App 20190318947 - Timans; Paul J. | 2019-10-17 |
Processing Of Workpieces With Reactive Species Generated Using Alkyl Halide
App 20190318937 - Yang; Michael X. ; et al. | 2019-10-17 |
Surface Treatment Of Silicon Or Silicon Germanium Surfaces Using Organic Radicals
App 20190304793 - Yang; Michael X. ; et al. | 2019-10-03 |
Method for high aspect ratio photoresist removal in pure reducing plasma
Grant 10,431,469 - Diao , et al. O | 2019-10-01 |
Support Plate for Localized Heating in Thermal Processing Systems
App 20190295869 - Bremensdorfer; Rolf ; et al. | 2019-09-26 |
Integration of materials removal and surface treatment in semiconductor device fabrication
Grant 10,403,492 - Yang , et al. Sep | 2019-09-03 |
Substrate breakage detection in a thermal processing system
Grant 10,388,552 - Cibere A | 2019-08-20 |
Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber
App 20190244825 - Nagorny; Vladimir | 2019-08-08 |
Fluid leakage detection for a millisecond anneal system
Grant 10,359,334 - Mueller , et al. | 2019-07-23 |
Substrate Breakage Detection in a Thermal Processing System
App 20190221462 - Cibere; Joseph | 2019-07-18 |
Pre-Heat Processes for Millisecond Anneal System
App 20190221442 - Timans; Paul | 2019-07-18 |
Surface treatment of silicon or silicon germanium surfaces using organic radicals
Grant 10,354,883 - Yang , et al. July 16, 2 | 2019-07-16 |
Surface Treatment Of Carbon Containing Films Using Organic Radicals
App 20190214262 - Yang; Michael X. ; et al. | 2019-07-11 |
Plasma Processing Apparatus and Methods
App 20190198301 - Ma; Shawming ; et al. | 2019-06-27 |
Surface Treatment of Substrates Using Passivation Layers
App 20190189420 - Gao; Tongchuan ; et al. | 2019-06-20 |
Processing of Semiconductors Using Vaporized Solvents
App 20190189479 - Meng; Shuang ; et al. | 2019-06-20 |
Controlling azimuthal uniformity of etch process in plasma processing chamber
Grant 10,297,457 - Nagorny | 2019-05-21 |
Thermal Processing of Closed Shape Workpieces
App 20190127818 - Bremensdorfer; Rolf ; et al. | 2019-05-02 |
Inductively Coupled Plasma Wafer Bevel Strip Apparatus
App 20190131112 - Ma; Shawming ; et al. | 2019-05-02 |
Surface treatment of carbon containing films using organic radicals
Grant 10,269,574 - Yang , et al. | 2019-04-23 |
Pre-heat processes for millisecond anneal system
Grant 10,262,873 - Timans | 2019-04-16 |
Surface Treatment Of Silicon And Carbon Containing Films By Remote Plasma With Organic Precursors
App 20190103270 - Yang; Michael X. ; et al. | 2019-04-04 |
Surface Treatment Of Silicon Or Silicon Germanium Surfaces Using Organic Radicals
App 20190103279 - Yang; Michael X. ; et al. | 2019-04-04 |
Surface Treatment Of Carbon Containing Films Using Organic Radicals
App 20190103280 - Yang; Michael X. ; et al. | 2019-04-04 |
Substrate breakage detection in a thermal processing system
Grant 10,242,894 - Cibere | 2019-03-26 |
Cooled Focus Ring for Plasma Processing Apparatus
App 20190088512 - Zucker; Martin L. | 2019-03-21 |
Surface treatment of substrates using passivation layers
Grant 10,217,626 - Gao , et al. Feb | 2019-02-26 |
System and process for calibrating pyrometers in thermal processing chambers
Grant 10,190,915 - Timans Ja | 2019-01-29 |
Plasma Processing Apparatus
App 20180358206 - Ma; Shawming ; et al. | 2018-12-13 |
Plasma Processing Apparatus With Post Plasma Gas Injection
App 20180358208 - Ma; Shawming ; et al. | 2018-12-13 |
Plasma Strip Tool With Multiple Gas Injection Zones
App 20180358204 - Ma; Shawming ; et al. | 2018-12-13 |
Plasma Strip Tool With Uniformity Control
App 20180358210 - Ma; Shawming ; et al. | 2018-12-13 |
Material Deposition Prevention on a Workpiece in a Process Chamber
App 20180286640 - Cue; Jeffrey ; et al. | 2018-10-04 |
Pedestal Assembly for Plasma Processing Apparatus
App 20180286639 - Zucker; Martin L. ; et al. | 2018-10-04 |
Plasma reactor with inductive excitation of plasma and efficient removal of heat from the excitation coil
Grant 10,090,134 - Godyak October 2, 2 | 2018-10-02 |
Implanted photoresist stripping process
Grant 10,078,266 - Liou , et al. September 18, 2 | 2018-09-18 |
Temperature Control Using Temperature Control Element Coupled to Faraday Shield
App 20180240652 - Ma; Yorkman ; et al. | 2018-08-23 |
System and method for protection of vacuum seals in plasma processing systems
Grant 10,049,858 - Nagorny , et al. August 14, 2 | 2018-08-14 |
Inductive plasma source with high coupling efficiency
Grant 10,037,867 - Godyak July 31, 2 | 2018-07-31 |
Substrate Breakage Detection in a Thermal Processing System
App 20180190523 - Cibere; Joseph | 2018-07-05 |
Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
App 20180166296 - Ma; Shawming | 2018-06-14 |
Systems and Methods for Workpiece Processing
App 20180108548 - Yang; Michael ; et al. | 2018-04-19 |
Substrate breakage detection in a thermal processing system
Grant 9,941,144 - Cibere April 10, 2 | 2018-04-10 |
Strip Process for High Aspect Ratio Structure
App 20180074409 - Vaniapura; Vijay M. ; et al. | 2018-03-15 |
Separation Grid for Plasma Chamber
App 20180053628 - Vaniapura; Vijay M. ; et al. | 2018-02-22 |
Inductive Plasma Source
App 20170372870 - Godyak; Valery A. ; et al. | 2017-12-28 |
Implanted Photoresist Stripping Process
App 20170248849 - Liou; Wei-Hua ; et al. | 2017-08-31 |
Inductively Coupled Plasma Source for Plasma Processing
App 20170243721 - Nagorny; Vladimir ; et al. | 2017-08-24 |
Pre-Heat Processes for Millisecond Anneal System
App 20170221722 - Timans; Paul | 2017-08-03 |
Variable Pattern Separation Grid for Plasma Chamber
App 20170207077 - Nagorny; Vladimir ; et al. | 2017-07-20 |
Fluid Leakage Detection for a Millisecond Anneal System
App 20170191897 - Mueller; Manuel ; et al. | 2017-07-06 |
Gas Flow Control for Millisecond Anneal System
App 20170191759 - Pfahler; Christian ; et al. | 2017-07-06 |
Electrode Tip for ARC Lamp
App 20170194133 - Lieberer; Markus ; et al. | 2017-07-06 |
Substrate Support in a Millisecond Anneal System
App 20170194178 - Cibere; Joseph | 2017-07-06 |
Chamber Wall Heating for a Millisecond Anneal System
App 20170194175 - Janisch; Joachim ; et al. | 2017-07-06 |
Substrate Breakage Detection in a Thermal Processing System
App 20170194177 - Cibere; Joseph | 2017-07-06 |
Nitrogen Injection for ARC Lamps
App 20170196046 - Bremensdorfer; Rolf ; et al. | 2017-07-06 |
Features for Improving Process Uniformity in a Millisecond Anneal System
App 20170194163 - Cosceev; Alexandr ; et al. | 2017-07-06 |
Preheat Processes for Millisecond Anneal System
App 20170194220 - Lieberer; Markus ; et al. | 2017-07-06 |
Inductively coupled plasma source for plasma processing
Grant 9,653,264 - Nagorny , et al. May 16, 2 | 2017-05-16 |
Selective reflectivity process chamber with customized wavelength response and method
Grant 9,633,876 - Timans , et al. April 25, 2 | 2017-04-25 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece
Grant 9,627,244 - Camm , et al. April 18, 2 | 2017-04-18 |
Low cost high throughput processing platform
Grant 9,493,306 - Niewmierzycki November 15, 2 | 2016-11-15 |
Repeatable heat-treating methods and apparatus
Grant 9,482,468 - Camm , et al. November 1, 2 | 2016-11-01 |
Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber
App 20160276230 - Nagorny; Vladimir | 2016-09-22 |
Mask removal process strategy for vertical NAND device
Grant 9,396,963 - Diao , et al. July 19, 2 | 2016-07-19 |
Methods, apparatus and media for determining a shape of an irradiance pulse to which a workpiece is to be exposed
Grant 9,279,727 - Cibere , et al. March 8, 2 | 2016-03-08 |
Apparatus and methods for generating electromagnetic radiation
Grant 9,245,730 - Kamdar , et al. January 26, 2 | 2016-01-26 |
System and Method for Protection of Vacuum Seals in Plasma Processing Systems
App 20160013025 - Nagorny; Vladimir ; et al. | 2016-01-14 |
High efficiency plasma source
Grant 9,214,319 - Nagorny , et al. December 15, 2 | 2015-12-15 |
Advanced multi-workpiece processing chamber
Grant 9,184,072 - Devine , et al. November 10, 2 | 2015-11-10 |
Inductive Plasma Source with High Coupling Efficiency
App 20150303032 - Godyak; Valery | 2015-10-22 |
Plasma Reactor with Inductive Excitation of Plasma and Efficient Removal of Heat from the Excitation Coil
App 20150200075 - Godyak; Valery | 2015-07-16 |
Workpiece breakage prevention method and apparatus
Grant 9,070,590 - Camm , et al. June 30, 2 | 2015-06-30 |
Method for High Aspect Ratio Photoresist Removal in Pure Reducing Plasma
App 20150144155 - Diao; Li ; et al. | 2015-05-28 |
Novel Mask Removal Process Strategy for Vertical NAND Device
App 20150126035 - Diao; Li ; et al. | 2015-05-07 |
System and Process for Calibrating Pyrometers in Thermal Processing Chambers
App 20150092813 - Timans; Paul Janis | 2015-04-02 |
Plasma reactor with inductie excitation of plasma and efficient removal of heat from the excitation coil
Grant 8,992,725 - Godyak March 31, 2 | 2015-03-31 |
Apparatus And Methods For Generating Electromagnetic Radiation
App 20150035436 - Kamdar; Amar B. ; et al. | 2015-02-05 |
Inductive plasma source with high coupling efficiency
Grant 08920600 - | 2014-12-30 |
Inductive plasma source with high coupling efficiency
Grant 8,920,600 - Godyak December 30, 2 | 2014-12-30 |
System and process for calibrating pyrometers in thermal processing chambers
Grant 8,918,303 - Timans December 23, 2 | 2014-12-23 |
Pulsed processing semiconductor heating methods using combinations of heating sources
Grant 8,837,923 - Timans , et al. September 16, 2 | 2014-09-16 |
Heating Configuration for Use in Thermal Processing Chambers
App 20140246422 - KOREN; ZION ; et al. | 2014-09-04 |
Methods for forming microlenses
Grant 8,801,947 - Wang , et al. August 12, 2 | 2014-08-12 |
Low Cost High Throughput Processing Platform
App 20140151195 - Niewmierzycki; Leszek | 2014-06-05 |
Method and system for determining optical properties of semiconductor wafers
Grant 8,696,197 - Timans April 15, 2 | 2014-04-15 |
Irradiance pulse heat-treating methods and apparatus
Grant 8,693,857 - Camm , et al. April 8, 2 | 2014-04-08 |
Low cost high throughput processing platform
Grant 8,668,422 - Niewmierzycki , et al. March 11, 2 | 2014-03-11 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
Grant 8,669,496 - Timans March 11, 2 | 2014-03-11 |
Methods for determining wafer temperature
Grant 8,668,383 - Timans March 11, 2 | 2014-03-11 |
Endeffectors for handling semiconductor wafers
Grant 8,622,451 - Mantz January 7, 2 | 2014-01-07 |
Methods for Forming Microlenses
App 20130323933 - Wang; Tinghao Frank ; et al. | 2013-12-05 |
Methods, Apparatus And Media For Determining A Shape Of An Irradiance Pulse To Which A Workpiece Is To Be Exposed
App 20130306871 - Cibere; Joseph ; et al. | 2013-11-21 |
Monitoring witness structures for temperature control in RTP systems
Grant 8,575,521 - Nenyei , et al. November 5, 2 | 2013-11-05 |
Rapid thermal processing using energy transfer layers
Grant 8,557,721 - Timans October 15, 2 | 2013-10-15 |
Slotted Electrostatic Shield Modification For Improved Etch And Cvd Process Uniformity
App 20130196510 - George; Rene ; et al. | 2013-08-01 |
Systems and methods for supporting a workpiece during heat-treating
Grant 8,454,356 - Camm , et al. June 4, 2 | 2013-06-04 |
Inductive plasma source with high coupling efficiency
Grant 8,444,870 - Godyak May 21, 2 | 2013-05-21 |
Methods and systems for supporting a workpiece and for heat-treating the workpiece
Grant 8,434,341 - Camm , et al. May 7, 2 | 2013-05-07 |
Slotted electrostatic shield modification for improved etch and CVD process uniformity
Grant 8,413,604 - George , et al. April 9, 2 | 2013-04-09 |
Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate
Grant 8,405,005 - Zucker , et al. March 26, 2 | 2013-03-26 |
High-intensity electromagnetic radiation apparatus and methods
Grant 8,384,274 - Camm , et al. February 26, 2 | 2013-02-26 |
System and Process for Calibrating Pyrometers in Thermal Processing Chambers
App 20130028286 - Timans; Paul Janis | 2013-01-31 |
Method and apparatus for determining measurement values
Grant 8,335,658 - Merkl December 18, 2 | 2012-12-18 |
Method And Apparatus For Growing Thin Oxide Films On Silicon While Minimizing Impact On Existing Structures
App 20120298039 - PEUSE; Bruce W. ; et al. | 2012-11-29 |
System and process for calibrating pyrometers in thermal processing chambers
Grant 8,296,091 - Timans October 23, 2 | 2012-10-23 |
System and Process For Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy
App 20120252229 - Timans; Paul Janis | 2012-10-04 |
Method And System For Determining Optical Properties Of Semiconductor Wafers
App 20120231558 - Timans; Paul Janis | 2012-09-13 |
Methods For Determining Wafer Temperature
App 20120201271 - Timans; Paul Janis | 2012-08-09 |
Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures
Grant 8,236,706 - Peuse , et al. August 7, 2 | 2012-08-07 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
Grant 8,222,570 - Timans July 17, 2 | 2012-07-17 |
Inductively Coupled Plasma Source For Plasma Processing
App 20120152901 - Nagorny; Vladimir ; et al. | 2012-06-21 |
Endeffectors For Handling Semiconductor Wafers
App 20120126555 - Mantz; Paul | 2012-05-24 |
Methods for determining wafer temperature
Grant 8,157,439 - Timans April 17, 2 | 2012-04-17 |
Method and system for determining optical properties of semiconductor wafers
Grant 8,152,365 - Timans April 10, 2 | 2012-04-10 |
Heating device for heating semiconductor wafers in thermal processing chambers
Grant 8,138,451 - Gat , et al. March 20, 2 | 2012-03-20 |
Rapid thermal processing using energy transfer layers
Grant 8,138,105 - Timans March 20, 2 | 2012-03-20 |
Endeffectors for handling semiconductor wafers
Grant 8,109,549 - Mantz February 7, 2 | 2012-02-07 |
Advanced processing technique and system for preserving tungsten in a device structure
Grant 8,093,157 - Diao , et al. January 10, 2 | 2012-01-10 |
Multi-workpiece processing chamber
Grant 8,066,815 - Devine , et al. November 29, 2 | 2011-11-29 |
System And Process For Calibrating Pyrometers In Thermal Processing Chambers
App 20110216803 - Timans; Paul Janis | 2011-09-08 |
Pulsed processing semiconductor heating methods and associated system using combinations of heating sources
Grant 8,000,587 - Timans , et al. August 16, 2 | 2011-08-16 |
Determining the temperature of silicon at high temperatures
Grant 7,976,216 - Timans July 12, 2 | 2011-07-12 |
Method and system for thermally processing a plurality of wafer-shaped objects
Grant 7,977,258 - Nenyei , et al. July 12, 2 | 2011-07-12 |
Workpiece support with fluid zones for temperature control
Grant 7,972,444 - Zucker , et al. July 5, 2 | 2011-07-05 |
System and process for calibrating pyrometers in thermal processing chambers
Grant 7,957,926 - Timans June 7, 2 | 2011-06-07 |
Post ion implant photoresist strip using a pattern fill and method
Grant 7,947,605 - George , et al. May 24, 2 | 2011-05-24 |
Heating configuration for use in thermal processing chambers
Grant 7,949,237 - Koren , et al. May 24, 2 | 2011-05-24 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
Grant 7,847,218 - Timans December 7, 2 | 2010-12-07 |
System And Method For Reducing Object Deformation During A Pulsed Heating Process
App 20100252547 - Timans; Paul Janis | 2010-10-07 |
System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing
Grant 7,799,685 - Savas , et al. September 21, 2 | 2010-09-21 |
System And Process For Calibrating Pyrometers In Thermal Processing Chambers
App 20100232470 - Timans; Paul Janis | 2010-09-16 |
Electrostatic Chuck System And Process For Radially Tuning The Temperature Profile Across The Surface Of A Substrate
App 20100193501 - Zucker; Martin L. ; et al. | 2010-08-05 |
Optimizing the thermal budget during a pulsed heating process
Grant 7,745,762 - Timans June 29, 2 | 2010-06-29 |
Method And Apparatus For Growing Thin Oxide Films On Silicon While Minimizing Impact On Existing Structures
App 20100151694 - Peuse; Bruce W. ; et al. | 2010-06-17 |
Selective reflectivity process chamber with customized wavelength response and method
Grant 7,737,385 - Timans , et al. June 15, 2 | 2010-06-15 |
System and process for calibrating pyrometers in thermal processing chambers
Grant 7,734,439 - Timans June 8, 2 | 2010-06-08 |
Method for the thermal treatment of disk-shaped substrates
Grant 7,704,898 - Nenyei , et al. April 27, 2 | 2010-04-27 |
Advanced low cost high throughput processing platform
Grant 7,658,586 - Niewmierzycki , et al. February 9, 2 | 2010-02-09 |
Endeffectors for handling semiconductor wafers
Grant 7,654,596 - Mantz February 2, 2 | 2010-02-02 |
Rapid thermal processing using energy transfer layers
Grant 7,642,205 - Timans January 5, 2 | 2010-01-05 |
Process and System For Varying the Exposure to a Chemical Ambient in a Process Chamber
App 20090325386 - Devine; Daniel J. ; et al. | 2009-12-31 |
Heating device for heating semiconductor wafers in thermal processing chambers
Grant 7,608,802 - Gat , et al. October 27, 2 | 2009-10-27 |
Methods for Determining Wafer Temperature
App 20090245320 - Timans; Paul Janis | 2009-10-01 |
Low cost high throughput processing platform
Grant 7,563,068 - Niewmierzycki , et al. July 21, 2 | 2009-07-21 |
Wafer tilt detection apparatus and method
Grant 7,561,258 - Xu , et al. July 14, 2 | 2009-07-14 |
Determining the Temperature of Silicon at High Temperatures
App 20090161724 - Timans; Paul Janis | 2009-06-25 |
Methods for determining wafer temperature
Grant 7,543,981 - Timans June 9, 2 | 2009-06-09 |
Workpiece Support With Fluid Zones For Temperature Control
App 20090114158 - Zucker; Martin L. ; et al. | 2009-05-07 |
System and Process for Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy
App 20090098742 - Timans; Paul Janis | 2009-04-16 |
System and Process for Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy
App 20080050688 - Timans; Paul Janis | 2008-02-28 |
Methods for determining wafer temperature
App 20080002753 - Timans; Paul Janis | 2008-01-03 |
Method and system for determining optical properties of semiconductor wafers
App 20070020784 - Timans; Paul Janis | 2007-01-25 |
Optimizing the thermal budget during a pulsed heating process
App 20060289433 - Timans; Paul Janis | 2006-12-28 |
Barrier enhancement process for copper interconnects
App 20060076244 - Ting; Chiu H. ; et al. | 2006-04-13 |
Wedge-shaped window for providing a pressure differential
App 20050268567 - Devine, Daniel J. ; et al. | 2005-12-08 |
Endeffectors for handling semiconductor wafers
App 20050006916 - Mantz, Paul | 2005-01-13 |
Electroless plating solution and process
App 20040142114 - Kong, Bob ; et al. | 2004-07-22 |
Apparatus and method for reducing stray light in substrate processing chambers
App 20040084437 - Timans, Paul Janis | 2004-05-06 |
Method of forming and/or modifying a dielectric film on a semiconductor surface
App 20040058557 - Eisele, Ignaz ; et al. | 2004-03-25 |
Heating configuration for use in thermal processing chambers
App 20040018008 - Koren, Zion ; et al. | 2004-01-29 |
System and process for calibrating pyrometers in thermal processing chambers
App 20030236642 - Timans, Paul Janis | 2003-12-25 |
Process and system for heating semiconductor substrates in a processing chamber containing a susceptor
App 20030209326 - Lee, Young Jai ; et al. | 2003-11-13 |
Rapid thermal processing system for integrated circuits
App 20030094446 - Tay, Sing-Pin ; et al. | 2003-05-22 |
Method for depositing a coating having a relatively high dielectric constant onto a substrate
App 20030031793 - Chang, Jane P. ; et al. | 2003-02-13 |
Barrier enhancement process for copper interconnects
App 20030010645 - Ting, Chiu H. ; et al. | 2003-01-16 |
Method of forming dielectric films
App 20020142624 - Levy, Sagy ; et al. | 2002-10-03 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
App 20020137311 - Timans, Paul Janis | 2002-09-26 |
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