MATSUI; Yukiteru

Patent Applications and Registrations

Patent applications and USPTO patent grants for MATSUI; Yukiteru.The latest application filed is for "polishing solution, polishing apparatus, and polishing method".

Company Profile

10.55.92

MATSUI; Yukiteru - Nagoya Aichi JP
Matsui; Yukiteru - Aichi JP
Matsui; Yukiteru - Nagoya JP
Matsui; Yukiteru - Aichi-ken JP
Matsui; Yukiteru - Kanagawa-ken JP
Matsui; Yukiteru - Yokohama N/A JP
Matsui; Yukiteru - Nagoya-Shi JP
Matsui; Yukiteru - Yokohama-shi JP
Matsui; Yukiteru - Yokohoma N/A JP
Matsui; Yukiteru - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Polishing Solution, Polishing Apparatus, And Polishing Method App 20220290009 - SAKASHITA; Mikiya ; et al.	2022-09-15
Polishing Apparatus And Polishing Method App 20220048155 - SAKASHITA; Mikiya ; et al.	2022-02-17
Polishing Method, Polishing Agent And Cleaning Agent For Polishing App 20210299814 - SAKASHITA; Mikiya ; et al.	2021-09-30
Polishing Pad, Semiconductor Fabricating Device And Fabricating Method Of Semiconductor Device App 20210260719 - KAWASAKI; Takahiko ; et al.	2021-08-26
Polishing Device, Polishing Head, Polishing Method, And Method Of Manufacturing Semiconductor Device App 20210170542 - SAKASHITA; Mikiya ; et al.	2021-06-10
Semiconductor device production method Grant 10,998,283 - Kawasaki , et al. May 4, 2	2021-05-04
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus Grant 10,991,588 - Gawase , et al. April 27, 2	2021-04-27
Method for manufacturing semiconductor device Grant 10,985,027 - Gawase , et al. April 20, 2	2021-04-20
Method For Manufacturing Semiconductor Device App 20210082711 - GAWASE; Akifumi ; et al.	2021-03-18
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus Grant 10,850,363 - Matsui , et al. December 1, 2	2020-12-01
Semiconductor Device Production Method App 20200035636 - KAWASAKI; Takahiro ; et al.	2020-01-30
Polishing Pad, Semiconductor Fabricating Device And Fabricating Method Of Semiconductor Device App 20190283206 - KAWASAKI; Takahiko ; et al.	2019-09-19
Planarization method and planarization apparatus Grant 10,283,383 - Gawase , et al.	2019-05-07
Dresser, method of manufacturing dresser, and method of manufacturing semiconductor device Grant 10,195,716 - Kawasaki , et al. Fe	2019-02-05
Manufacturing method of semiconductor device Grant 10,121,677 - Matsui , et al. November 6, 2	2018-11-06
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus App 20180277388 - MATSUI; Yukiteru ; et al.	2018-09-27
Semiconductor storage device Grant 10,079,153 - Gawase , et al. September 18, 2	2018-09-18
Abrasive cloth and polishing method Grant 10,010,997 - Gawase , et al. July 3, 2	2018-07-03
Manufacturing method of semiconductor device and semiconductor manufacturing apparatus Grant 10,008,390 - Matsui , et al. June 26, 2	2018-06-26
Substrate processing method Grant 9,937,602 - Otsuka , et al. April 10, 2	2018-04-10
Dresser, Method Of Manufacturing Dresser, And Method Of Manufacturing Semiconductor Device App 20180056482 - KAWASAKI; Takahiko ; et al.	2018-03-01
Manufacturing Method Of Semiconductor Device And Semiconductor Device Manufacturing Apparatus App 20180061654 - Gawase; Akifumi ; et al.	2018-03-01
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus Grant 9,837,279 - Gawase , et al. December 5, 2	2017-12-05
Semiconductor Storage Device App 20170250081 - GAWASE; Akifumi ; et al.	2017-08-31
Manufacturing Method Of Semiconductor Device And Slurry For Chemical Mechanical Polishing App 20170133238 - KAWASAKI; Takahiko ; et al.	2017-05-11
Manufacturing Method of Semiconductor Device and Semiconductor Device Manufacturing Apparatus App 20170076953 - GAWASE; Akifumi ; et al.	2017-03-16
Manufacturing method of semiconductor device Grant 9,558,961 - Gawase , et al. January 31, 2	2017-01-31
Substrate Processing Method App 20160375547 - OTSUKA; Yosuke ; et al.	2016-12-29
Manufacturing Method Of Semiconductor Device App 20160358787 - GAWASE; Akifumi ; et al.	2016-12-08
Manufacturing Method Of Semiconductor Device App 20160322231 - Matsui; Yukiteru ; et al.	2016-11-03
Retainer Ring, Polishing Apparatus, And Manufacturing Method Of Semiconductor Device App 20160229026 - KAWASAKI; Takahiko ; et al.	2016-08-11
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus App 20160207163 - MATSUI; Yukiteru ; et al.	2016-07-21
Abrasive cloth and polishing method App 20160129548 - GAWASE; Akifumi ; et al.	2016-05-12
Chemical Planarization Method And Apparatus App 20160064243 - GAWASE; Akifumi ; et al.	2016-03-03
Method For Chemical Planarization And Chemical Planarization Apparatus App 20160035598 - Kodera; Masako ; et al.	2016-02-04
Manufacturing Method Of Semiconductor Device And Semiconductor Manufacturing Apparatus App 20160027660 - MATSUI; YUKITERU ; et al.	2016-01-28
Planarization Method And Planarization Apparatus App 20150357212 - GAWASE; Akifumi ; et al.	2015-12-10
Method for chemical planarization and chemical planarization apparatus Grant 9,196,501 - Kodera , et al. November 24, 2	2015-11-24
Manufacturing method of semiconductor device Grant 9,174,322 - Matsui , et al. November 3, 2	2015-11-03
Substrate Processing Method App 20150290765 - OTSUKA; Yosuke ; et al.	2015-10-15
Planarization method and planarization apparatus Grant 9,144,879 - Gawase , et al. September 29, 2	2015-09-29
Manufacturing method of semiconductor device and polishing apparatus Grant 9,012,246 - Eda , et al. April 21, 2	2015-04-21
Planarizing method Grant 8,936,729 - Gawase , et al. January 20, 2	2015-01-20
Manufacturing Method Of Semiconductor Device App 20150004878 - Matsui; Yukiteru ; et al.	2015-01-01
Method of manufacturing semiconductor device Grant 8,871,644 - Matsui , et al. October 28, 2	2014-10-28
Method Of Manufacturing Semiconductor Device App 20140287586 - MATSUI; Yukiteru ; et al.	2014-09-25
Planarization Method And Planarization Apparatus App 20140220778 - GAWASE; Akifumi ; et al.	2014-08-07
Method For Chemical Planarization And Chemical Planarization Apparatus App 20140187042 - Matsui; Yukiteru ; et al.	2014-07-03
Semiconductor device and method of manufacturing the same Grant 8,754,433 - Matsui , et al. June 17, 2	2014-06-17
Polishing method and polishing apparatus Grant 8,740,667 - Kodera , et al. June 3, 2	2014-06-03
Method for chemical planarization and chemical planarization apparatus Grant 8,703,004 - Matsui , et al. April 22, 2	2014-04-22
Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device Grant 8,685,857 - Matsui , et al. April 1, 2	2014-04-01
Semiconductor Device Manufacturing Method App 20140073136 - MINAMIHABA; Gaku ; et al.	2014-03-13
Manufacturing Method Of Semiconductor Device And Polishing Apparatus App 20140004628 - EDA; Hajime ; et al.	2014-01-02
Method For Manufacturing Semiconductor Device App 20140004775 - EDA; Hajime ; et al.	2014-01-02
Semiconductor Device Manufacturing Method And Chemical Mechanical Polishing Method App 20130331004 - MINAMIHABA; Gaku ; et al.	2013-12-12
Semiconductor Device Manufacturing Method App 20130331005 - GAWASE; Akifumi ; et al.	2013-12-12
Semiconductor device manufacturing method Grant 8,575,030 - Minamihaba , et al. November 5, 2	2013-11-05
Method Of Manufacturing Semiconductor Device App 20130273817 - Minamihaba; Gaku ; et al.	2013-10-17
Method of manufacturing semiconductor device Grant 8,480,915 - Minamihaba , et al. July 9, 2	2013-07-09
Planarizing Method App 20130157464 - GAWASE; Akifumi ; et al.	2013-06-20
Method For Chemical Planarization And Chemical Planarization Apparatus App 20130119013 - MATSUI; Yukiteru ; et al.	2013-05-16
Method For Chemical Planarization And Chemical Planarization Apparatus App 20130115774 - Kodera; Masako ; et al.	2013-05-09
Polishing Method And Polishing Apparatus App 20130115855 - KODERA; Masako ; et al.	2013-05-09
Cmp Method, Cmp Apparatus And Method Of Manufacturing Semiconductor Device App 20130095661 - GAWASE; Akifumi ; et al.	2013-04-18
Semiconductor Device And Method Of Manufacturing The Same App 20130095656 - MATSUI; Yukiteru ; et al.	2013-04-18
Cmp Slurry And Method For Manufacturing Semiconductor Device App 20130078784 - MINAMIHABA; Gaku ; et al.	2013-03-28
Semiconductor Device Manufacturing Method And Polishing Apparatus App 20130045596 - EDA; Hajime ; et al.	2013-02-21
Method Of Manufacturing Semiconductor Device App 20130040456 - EDA; Hajime ; et al.	2013-02-14
Method Of Manufacturing Semiconductor Device App 20120258597 - Minamihaba; Gaku ; et al.	2012-10-11
Cmp Apparatus, Polishing Pad And Cmp Method App 20120220195 - GAWASE; Akifumi ; et al.	2012-08-30
Chemical mechanical polishing method and method of manufacturing semiconductor device Grant 8,119,517 - Shida , et al. February 21, 2	2012-02-21
Method of manufacturing semiconductor device Grant 8,114,776 - Eda , et al. February 14, 2	2012-02-14
Semiconductor Device Manufacturing Method App 20120034846 - MINAMIHABA; Gaku ; et al.	2012-02-09
Semiconductor Device And Method Of Manufacturing The Same App 20110294291 - Matsui; Yukiteru ; et al.	2011-12-01
Method of manufacturing semiconductor device Grant 7,985,685 - Matsui , et al. July 26, 2	2011-07-26
Polishing Device And Polishing Method App 20110081832 - Nakamura; Kenro ; et al.	2011-04-07
Method Of Manufacturing Semiconductor Device App 20110076833 - Eda; Hajime ; et al.	2011-03-31
Polishing Method, Polishing Apparatus, And Manufacturing Method Of Semiconductor Device App 20110070745 - MATSUI; Yukiteru ; et al.	2011-03-24
Fabricating method of nonvolatile semiconductor storage apparatus Grant 7,888,139 - Matsui , et al. February 15, 2	2011-02-15
Aqueous dispersion for CMP, polishing method and method for manufacturing semiconductor device Grant 7,833,431 - Minamihaba , et al. November 16, 2	2010-11-16
Method of manufacturing semiconductor device Grant 7,829,406 - Doi , et al. November 9, 2	2010-11-09
Fabricating Method Of Nonvolatile Semiconductor Storage Apparatus App 20100144062 - MATSUI; Yukiteru ; et al.	2010-06-10
Method of manufacturing a semiconductor device Grant 7,700,489 - Matsui , et al. April 20, 2	2010-04-20
Semiconductor Device Manufacturing Method App 20090258493 - MATSUI; Yukiteru ; et al.	2009-10-15
Chemical Mechanical Polishing Method And Method Of Manufacturing Semiconductor Device App 20090239373 - Shida; Hirotaka ; et al.	2009-09-24
Method Of Manufacturing Semiconductor Device App 20090156000 - MATSUI; Yukiteru ; et al.	2009-06-18
Method Of Manufacturing Semiconductor Device App 20090124076 - Matsui; Yukiteru ; et al.	2009-05-14
Method Of Manufacturing Semiconductor Device App 20090075487 - Doi; Shunsuke ; et al.	2009-03-19
Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device App 20090068841 - Matsui; Yukiteru ; et al.	2009-03-12
Slurry for CMP, polishing method and method of manufacturing semiconductor device Grant 7,459,398 - Minamihaba , et al. December 2, 2	2008-12-02
Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device Grant 7,452,819 - Matsui , et al. November 18, 2	2008-11-18
Method of manufacturing semiconductor device Grant 7,435,682 - Matsui , et al. October 14, 2	2008-10-14
Chemical Mechanical Polishing Method And Method For Manufacturing Semiconductor Device App 20080227297 - MATSUI; Yukiteru ; et al.	2008-09-18
Method for manufacturing semiconductor device Grant 7,416,942 - Matsui , et al. August 26, 2	2008-08-26
Method for chemically mechanically polishing organic film, method of manufacturing semiconductor device, and program therefor Grant 7,402,521 - Matsui , et al. July 22, 2	2008-07-22
Slurry for CMP, polishing method and method of manufacturing semiconductor device Grant 7,332,104 - Minamihaba , et al. February 19, 2	2008-02-19
Chemical mechanical polishing method App 20070284338 - Matsui; Yukiteru ; et al.	2007-12-13
Method for manufacturing semiconductor device App 20070224760 - Matsui; Yukiteru ; et al.	2007-09-27
Chemical Mechanical Polishing Method And Method Of Manufacturing Semiconductor Device App 20070128874 - SHIDA; Hirotaka ; et al.	2007-06-07
Aqueous Dispersion For Cmp, Polishing Method And Method For Manufacturing Semiconductor Device App 20070128873 - MINAMIHABA; Gaku ; et al.	2007-06-07
Methods for manufacturing semiconductor devices App 20070111433 - Hirasawa; Shinichi ; et al.	2007-05-17
Chemical mechanical polishing slurry and method of manufacturing semiconductor device by using the same Grant 7,186,654 - Matsui March 6, 2	2007-03-06
Slurry for CMP, polishing method and method of manufacturing semiconductor device Grant 7,166,017 - Minamihaba , et al. January 23, 2	2007-01-23
Method for chemically mechanically polishing organic film, method of manufacturing semiconductor device, and program therefor App 20070000872 - Matsui; Yukiteru ; et al.	2007-01-04
Slurry for CMP, polishing method and method of manufacturing semiconductor device App 20060197055 - Minamihaba; Gaku ; et al.	2006-09-07
Chemical mechanical polishing slurry containing abrasive particles exhibiting photocatalytic function Grant 7,071,108 - Matsui , et al. July 4, 2	2006-07-04
Slurry for CMP, polishing method and method of manufacturing semiconductor device Grant 7,060,621 - Minamihaba , et al. June 13, 2	2006-06-13
Polishing slurry for aluminum-based metal, and method of manufacturing semiconductor device Grant 7,052,620 - Matsui , et al. May 30, 2	2006-05-30
Slurry for CMP, polishing method and method of manufacturing semiconductor device App 20060030503 - Minamihaba; Gaku ; et al.	2006-02-09
Method of manufacturing semiconductor device App 20050266355 - Matsui, Yukiteru ; et al.	2005-12-01
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method Grant 6,935,928 - Uchikura , et al. August 30, 2	2005-08-30
Post-CMP treating liquid and method for manufacturing semiconductor device App 20050118819 - Minamihaba, Gaku ; et al.	2005-06-02
Method of manufacturing a semiconductor device App 20050106874 - Matsui, Yukiteru ; et al.	2005-05-19
Polishing member and method of manufacturing semiconductor device Grant 6,875,088 - Matsui , et al. April 5, 2	2005-04-05
Slurry for CMP, polishing method and method of manufacturing semiconductor device App 20050064796 - Minamihaba, Gaku ; et al.	2005-03-24
Post-CMP treating liquid and method for manufacturing semiconductor device Grant 6,858,539 - Minamihaba , et al. February 22, 2	2005-02-22
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method App 20050037693 - Uchikura, Kazuhito ; et al.	2005-02-17
Slurry for CMP, and method of manufacturing semiconductor device App 20050009322 - Matsui, Yukiteru ; et al.	2005-01-13
Slurry for CMP, polishing method and method of manufacturing semiconductor device App 20050003743 - Minamihaba, Gaku ; et al.	2005-01-06
Slurry for CMP, polishing method and method of manufacturing semiconductor device App 20040261323 - Minamihaba, Gaku ; et al.	2004-12-30
Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device App 20040253822 - Matsui, Yukiteru ; et al.	2004-12-16
Slurry for CMP, and method of manufacturing semiconductor device Grant 6,794,285 - Matsui , et al. September 21, 2	2004-09-21
Slurry For Cmp, And Method Of Manufacturing Semiconductor Device App 20040161932 - Matsui, Yukiteru ; et al.	2004-08-19
Chemical mechanical polishing slurry and method of manufacturing semiconductor device by using the same App 20040115944 - Matsui, Yukiteru	2004-06-17
Aqueous Dispersion, Aqueous Dispersion For Chemical Mechanical Polishing Used For Manufacture Of Semiconductor Devices, Method For Manufacture Of Semiconductor Devices, And Method For Formation Of Embedded Writing Grant 6,740,590 - Yano , et al. May 25, 2	2004-05-25
Post-CMP treating liquid and method for manufacturing semiconductor device App 20040082180 - Minamihaba, Gaku ; et al.	2004-04-29
Polishing member and method of manufacturing semiconductor device App 20040072505 - Matsui, Yukiteru ; et al.	2004-04-15
Polishing slurry for aluminum-based metal, and method of manufacturing semiconductor device App 20030173329 - Matsui, Yukiteru ; et al.	2003-09-18
Slurry for CMP, method of forming thereof and method of manufacturing semiconductor device including a CMP process App 20030165412 - Matsui, Yukiteru ; et al.	2003-09-04
Chemical mechanical polishing slurry containing abrasive particles exhibiting photocatalytic function App 20030022502 - Matsui, Yukiteru ; et al.	2003-01-30
Slurry for CMP, method of forming thereof and method of manufacturing semiconductor device including a CMP process App 20020006728 - Matsui, Yukiteru ; et al.	2002-01-17

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