| Patent | Date |
|---|
Method For Si Gap Fill By Pecvd
App 20220310448 - LIU; Xin ; et al. | 2022-09-29 |
Low temperature high-quality dielectric films
Grant 11,430,655 - Venkatasubramanian , et al. August 30, 2 | 2022-08-30 |
Self-aligned structures from sub-oxides
Grant 11,414,751 - Gandikota , et al. August 16, 2 | 2022-08-16 |
Conformal High Concentration Boron Doping Of Semiconductors
App 20220246432 - Gandikota; Srinivas ; et al. | 2022-08-04 |
Deposition of low-stress carbon-containing layers
Grant 11,404,263 - Wang , et al. August 2, 2 | 2022-08-02 |
Multicolor Approach To DRAM STI Active Cut Patterning
App 20220238531 - Singh; Tejinder ; et al. | 2022-07-28 |
Low-k Boron Carbonitride Films
App 20220223409 - Shen; Zeqing ; et al. | 2022-07-14 |
Low Temperature Graphene Growth
App 20220216058 - Wang; Jialiang ; et al. | 2022-07-07 |
Defect Free Germanium Oxide Gap Fill
App 20220189824 - Wang; Huiyuan ; et al. | 2022-06-16 |
Super-conformal Germanium Oxide Films
App 20220186365 - Wang; Huiyuan ; et al. | 2022-06-16 |
Method for Si gap fill by PECVD
Grant 11,361,991 - Liu , et al. June 14, 2 | 2022-06-14 |
Thermal deposition of doped silicon oxide
Grant 11,355,354 - Shen , et al. June 7, 2 | 2022-06-07 |
Conformal Silicon-germanium Film Deposition
App 20220165566 - Wang; Huiyuan ; et al. | 2022-05-26 |
Diamond-like carbon film
Grant 11,332,376 - Venkatasubramanian , et al. May 17, 2 | 2022-05-17 |
Multicolor approach to DRAM STI active cut patterning
Grant 11,335,690 - Singh , et al. May 17, 2 | 2022-05-17 |
Conformal high concentration boron doping of semiconductors
Grant 11,328,928 - Gandikota , et al. May 10, 2 | 2022-05-10 |
Depositing Low Roughness Diamond Films
App 20220127721 - Sahmuganathan; Vicknesh ; et al. | 2022-04-28 |
Conformal Silicon Oxide Film Deposition
App 20220130658 - Shen; Zeqing ; et al. | 2022-04-28 |
Hdp Sacrificial Carbon Gapfill
App 20220127718 - Shen; Zeqing ; et al. | 2022-04-28 |
Bottom-up approach to high aspect ratio hole formation in 3D memory structures
Grant 11,315,943 - Gopalraja , et al. April 26, 2 | 2022-04-26 |
Selective Deposition of Germanium
App 20220108888 - Wang; Huiyuan ; et al. | 2022-04-07 |
Doping Semiconductor Films
App 20220093390 - Aydin; Aykut ; et al. | 2022-03-24 |
Diffusion Barriers For Germanium
App 20220068640 - Wang; Huiyuan ; et al. | 2022-03-03 |
Tribological Properties Of Diamond Films
App 20220068643 - Sahmuganathan; Vicknesh ; et al. | 2022-03-03 |
Deposition Of Low-stress Carbon-containing Layers
App 20220044926 - Wang; Huiyuan ; et al. | 2022-02-10 |
Deposition Of Low-stress Boron-containing Layers
App 20220044927 - Wang; Huiyuan ; et al. | 2022-02-10 |
Conformal doped amorphous silicon as nucleation layer for metal deposition
Grant 11,244,824 - Cheng , et al. February 8, 2 | 2022-02-08 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing
Grant 11,236,418 - Cheng , et al. February 1, 2 | 2022-02-01 |
Molecular Layer Deposition Method And System
App 20220028686 - Bhuyan; Bhaskar ; et al. | 2022-01-27 |
Methods of etching metal oxides with less etch residue
Grant 11,232,955 - Mullick , et al. January 25, 2 | 2022-01-25 |
Flowable Film Formation And Treatments
App 20220020594 - Jiang; Shishi ; et al. | 2022-01-20 |
Methods For Producing High-density Doped-carbon Films For Hardmask And Other Patterning Applications
App 20210407801 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-12-30 |
Ultra-thin Films With Transition Metal Dichalcogenides
App 20210404056 - Roy; Susmit Singha ; et al. | 2021-12-30 |
High Pressure Oxidation of Metal Films
App 20210404046 - Mullick; Amrita B. ; et al. | 2021-12-30 |
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
App 20210358744 - Venkatasubramanian; Eswaranand ; et al. | 2021-11-18 |
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer
Grant 11,177,128 - Manna , et al. November 16, 2 | 2021-11-16 |
Selective deposition of carbon films and uses thereof
Grant 11,177,174 - Roy , et al. November 16, 2 | 2021-11-16 |
Self-aligned high aspect ratio structures and methods of making
Grant 11,177,164 - Roy , et al. November 16, 2 | 2021-11-16 |
Selective Deposition Of Silicon Using Deposition-Treat-Etch Process
App 20210351035 - Cheng; Rui ; et al. | 2021-11-11 |
Stack For 3d-nand Memory Cell
App 20210327891 - Koshizawa; Takehito ; et al. | 2021-10-21 |
High Bias Deposition of High Quality Gapfill
App 20210327752 - Gottheim; Samuel E. ; et al. | 2021-10-21 |
Catalytic Formation Of Boron And Carbon Films
App 20210305041 - Qi; Bo ; et al. | 2021-09-30 |
High pressure oxidation of metal films
Grant 11,131,015 - Mullick , et al. September 28, 2 | 2021-09-28 |
Hydrogen Free Silicon Dioxide
App 20210254210 - Shen; Zeqing ; et al. | 2021-08-19 |
Methods of forming self-aligned vias
Grant 11,094,544 - Thompson , et al. August 17, 2 | 2021-08-17 |
Doped and undoped vanadium oxides for low-k spacer applications
Grant 11,094,533 - Venkatasubramanian , et al. August 17, 2 | 2021-08-17 |
Selective deposition of silicon using deposition-treat-etch process
Grant 11,081,348 - Cheng , et al. August 3, 2 | 2021-08-03 |
Ultra-thin diffusion barriers
Grant 11,069,568 - Roy , et al. July 20, 2 | 2021-07-20 |
Selective atomic layer deposition of ruthenium
Grant 11,066,743 - Chen , et al. July 20, 2 | 2021-07-20 |
High bias deposition of high quality gapfill
Grant 11,062,939 - Gottheim , et al. July 13, 2 | 2021-07-13 |
Conformal Hermetic Film Deposition By Cvd
App 20210210339 - MANNA; Pramit ; et al. | 2021-07-08 |
Silicide Films Through Selective Deposition
App 20210202256 - Srinivasan; Swaminathan ; et al. | 2021-07-01 |
Conformal carbon film deposition
Grant 11,043,379 - Manna , et al. June 22, 2 | 2021-06-22 |
High-density low temperature carbon films for hardmask and other patterning applications
Grant 11,043,372 - Venkatasubramanian , et al. June 22, 2 | 2021-06-22 |
Graphene Diffusion Barrier
App 20210167021 - Wu; Yong ; et al. | 2021-06-03 |
Gapfill using reactive anneal
Grant 11,011,384 - Mallick , et al. May 18, 2 | 2021-05-18 |
Thermal silicon etch
Grant 11,004,689 - Li , et al. May 11, 2 | 2021-05-11 |
Multicolor Approach To DRAM STI Active Cut Patterning
App 20210134807 - Singh; Tejinder ; et al. | 2021-05-06 |
3D NAND Etch
App 20210118691 - Jiang; Shishi ; et al. | 2021-04-22 |
Diamond-like carbon as mandrel
Grant 10,954,129 - Koshizawa , et al. March 23, 2 | 2021-03-23 |
Selective and self-limiting tungsten etch process
Grant 10,950,498 - Roy , et al. March 16, 2 | 2021-03-16 |
Silicide films through selective deposition
Grant 10,950,450 - Srinivasan , et al. March 16, 2 | 2021-03-16 |
Geometric control of bottom-up pillars for patterning applications
Grant 10,930,503 - Duan , et al. February 23, 2 | 2021-02-23 |
Non-Conformal High Selectivity Film For Etch Critical Dimension Control
App 20210047733 - Qi; Bo ; et al. | 2021-02-18 |
Self-Aligned Structures From Sub-Oxides
App 20210047728 - Gandikota; Srinivas ; et al. | 2021-02-18 |
Bottom-Up Approach To High Aspect Ratio Hole Formation In 3D Memory Structures
App 20210050365 - Gopalraja; Praburam ; et al. | 2021-02-18 |
Low Temperature High-Quality Dielectric Films
App 20210043450 - Venkatasubramanian; Eswaranand ; et al. | 2021-02-11 |
Carbon Hard Masks For Patterning Applications And Methods Related Thereto
App 20210043449 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2021-02-11 |
Graphene diffusion barrier
Grant 10,916,505 - Wu , et al. February 9, 2 | 2021-02-09 |
Multicolor approach to DRAM STI active cut patterning
Grant 10,910,381 - Singh , et al. February 2, 2 | 2021-02-02 |
Methods For Gapfill In High Aspect Ratio Structures
App 20210028055 - Manna; Pramit ; et al. | 2021-01-28 |
Flowable Film Curing Using H2 Plasma
App 20210025058 - JIANG; Shishi ; et al. | 2021-01-28 |
Methods of Forming Tungsten Pillars
App 20210013038 - Mallick; Abhijit Basu ; et al. | 2021-01-14 |
3D NAND etch
Grant 10,886,140 - Jiang , et al. January 5, 2 | 2021-01-05 |
Methods for wordline separation in 3D-NAND devices
Grant 10,886,172 - Chen , et al. January 5, 2 | 2021-01-05 |
A Method For Si Gap Fill By Pecvd
App 20200411371 - LIU; Xin ; et al. | 2020-12-31 |
Low Deposition Rates For Flowable Pecvd
App 20200385865 - Jiang; Shishi ; et al. | 2020-12-10 |
Apparatus And Methods For Manufacturing Semiconductor Structures Using Protective Barrier Layer
App 20200388486 - MANNA; Pramit ; et al. | 2020-12-10 |
Metal deposition methods
Grant 10,851,454 - Wu , et al. December 1, 2 | 2020-12-01 |
Methods of lowering wordline resistance
Grant 10,854,511 - Chen , et al. December 1, 2 | 2020-12-01 |
Methods of forming self-aligned vias and air gaps
Grant 10,840,186 - Roy , et al. November 17, 2 | 2020-11-17 |
Low temperature high-quality dielectric films
Grant 10,840,088 - Venkatasubramanian , et al. November 17, 2 | 2020-11-17 |
Controlled growth of thin silicon oxide film at low temperature
Grant 10,818,490 - Jiang , et al. October 27, 2 | 2020-10-27 |
Diamond-Like Carbon Film
App 20200331762 - Venkatasubramanian; Eswaranand ; et al. | 2020-10-22 |
Conformal Doped Amorphous Silicon As Nucleation Layer For Metal Deposition
App 20200335334 - Cheng; Rui ; et al. | 2020-10-22 |
Methods for gapfill in high aspect ratio structures
Grant 10,811,303 - Manna , et al. October 20, 2 | 2020-10-20 |
Surface-selective atomic layer deposition using hydrosilylation passivation
Grant 10,790,141 - Chan , et al. September 29, 2 | 2020-09-29 |
Deposition of silicon and oxygen-containing films without an oxidizer
Grant 10,790,139 - Underwood , et al. September 29, 2 | 2020-09-29 |
Methods of forming tungsten pillars
Grant 10,784,107 - Mallick , et al. Sept | 2020-09-22 |
Critical dimension control for self-aligned contact patterning
Grant 10,770,349 - Mallick , et al. Sep | 2020-09-08 |
Volumetric Expansion Of Metal-Containing Films By Silicidation
App 20200279772 - Roy; Susmit Singha ; et al. | 2020-09-03 |
Diamond-like carbon film
Grant 10,745,282 - Venkatasubramanian , et al. A | 2020-08-18 |
Oxidative volumetric expansion of metals and metal containing compounds
Grant 10,741,435 - Roy , et al. A | 2020-08-11 |
Bottom-Up Growth of Silicon Oxide and Silicon Nitride Using Sequential Deposition-Etch-Treat Processing
App 20200248303 - Kind Code | 2020-08-06 |
Methods for Wordline Separation in 3D-NAND Devices
App 20200243382 - Chen; Yihong ; et al. | 2020-07-30 |
Silicide Films Through Selective Deposition
App 20200227265 - Srinivasan; Swaminathan ; et al. | 2020-07-16 |
Methods Of Etching Metal Oxides With Less Etch Residue
App 20200227275 - Mullick; Amrita B. ; et al. | 2020-07-16 |
Selectively deposited parylene masks and methods related thereto
Grant 10,714,339 - Wang , et al. | 2020-07-14 |
Deposition and treatment of films for patterning
Grant 10,699,952 - Basu , et al. | 2020-06-30 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film
Grant 10,699,903 - Manna , et al. | 2020-06-30 |
Ultra-thin Diffusion Barriers
App 20200194307 - ROY; Susmit Singha ; et al. | 2020-06-18 |
Self-Aligned High Aspect Ratio Structures And Methods Of Making
App 20200194304 - Roy; Susmit Singha ; et al. | 2020-06-18 |
Conformal Halogen Doping In 3D Structures Using Conformal Dopant Film Deposition
App 20200194571 - Cheng; Rui ; et al. | 2020-06-18 |
Selective Deposition Of Carbon Films And Uses Thereof
App 20200168503 - Roy; Susmit Singha ; et al. | 2020-05-28 |
Selective Deposition Of Silicon Using Deposition-Treat-Etch Process
App 20200144060 - Cheng; Rui ; et al. | 2020-05-07 |
Surface modification to improve amorphous silicon gapfill
Grant 10,643,841 - Manna , et al. | 2020-05-05 |
High Density Carbon Films For Patterning Applications
App 20200135466 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2020-04-30 |
Selective deposition for simplified process flow of pillar formation
Grant 10,636,659 - Chen , et al. | 2020-04-28 |
Seam healing using high pressure anneal
Grant 10,636,669 - Chen , et al. | 2020-04-28 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing
Grant 10,626,495 - Cheng , et al. | 2020-04-21 |
Methods for wordline separation in 3D-NAND devices
Grant 10,622,251 - Chen , et al. | 2020-04-14 |
Methods of etching metal oxides with less etch residue
Grant 10,622,221 - Mullick , et al. | 2020-04-14 |
Methods for gapfill in high aspect ratio structures
Grant 10,615,050 - Cheng , et al. | 2020-04-07 |
Silicide films through selective deposition
Grant 10,607,841 - Srinivasan , et al. | 2020-03-31 |
Fully Self-aligned Via
App 20200098633 - Zhang; Ying ; et al. | 2020-03-26 |
Ultra-thin diffusion barriers
Grant 10,600,684 - Roy , et al. | 2020-03-24 |
Surface Modification To Improve Amorphous Silicon Gapfill
App 20200075329 - MANNA; Pramit ; et al. | 2020-03-05 |
PECVD Tungsten Containing Hardmask Films And Methods Of Making
App 20200075333 - Roy; Susmit Singha ; et al. | 2020-03-05 |
Two-step process for silicon gapfill
Grant 10,580,642 - Mallick , et al. | 2020-03-03 |
Methods of producing self-aligned grown via
Grant 10,573,555 - Zhang , et al. Feb | 2020-02-25 |
Graphene Diffusion Barrier
App 20200051920 - Wu; Yong ; et al. | 2020-02-13 |
Two-step Process For Gapfilling High Aspect Ratio Trenches With Amorphous Silicon Film
App 20200051815 - MANNA; Pramit ; et al. | 2020-02-13 |
Seamless tungsten fill by tungsten oxidation-reduction
Grant 10,559,497 - Wu , et al. Feb | 2020-02-11 |
Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide
Grant 10,559,465 - Cheng , et al. Feb | 2020-02-11 |
Metal Deposition Methods
App 20200040448 - Wu; Yong ; et al. | 2020-02-06 |
Multicolor Approach To DRAM STI Active Cut Patterning
App 20200043932 - Singh; Tejinder ; et al. | 2020-02-06 |
Methods of producing fully self-aligned vias and contacts
Grant 10,553,485 - Zhang , et al. Fe | 2020-02-04 |
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
App 20200035486 - Venkatasubramanian; Eswaranand ; et al. | 2020-01-30 |
3D NAND Etch
App 20200035505 - Jiang; Shishi ; et al. | 2020-01-30 |
Selective and Self-Limiting Tungsten Etch Process
App 20200027785 - Roy; Susmit Singha ; et al. | 2020-01-23 |
Low Temperature High-Quality Dielectric Films
App 20200027726 - Venkatasubramanian; Eswaranand ; et al. | 2020-01-23 |
Dry stripping of boron carbide hardmask
Grant 10,529,585 - Manna , et al. J | 2020-01-07 |
PECVD tungsten containing hardmask films and methods of making
Grant 10,529,568 - Roy , et al. J | 2020-01-07 |
Fully self-aligned via
Grant 10,522,404 - Zhang , et al. Dec | 2019-12-31 |
Carbon Gapfill Films
App 20190393030 - Jiang; Shishi ; et al. | 2019-12-26 |
Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices
App 20190393042 - SINGHA ROY; Susmit ; et al. | 2019-12-26 |
Conformal High Concentration Boron Doping Of Semiconductors
App 20190385851 - GANDIKOTA; SRINIVAS ; et al. | 2019-12-19 |
Methods Of Forming Self-Aligned Vias
App 20190385849 - Thompson; David ; et al. | 2019-12-19 |
Conformal Carbon Film Deposition
App 20190385845 - Manna; Pramit ; et al. | 2019-12-19 |
High Bias Deposition of High Quality Gapfill
App 20190385907 - Gottheim; Samuel E. ; et al. | 2019-12-19 |
Schemes for selective deposition for patterning applications
Grant 10,510,546 - Basu , et al. Dec | 2019-12-17 |
Cyclic conformal deposition/anneal/etch for Si gapfill
Grant 10,510,589 - Cheng , et al. Dec | 2019-12-17 |
Methods of producing self-aligned vias
Grant 10,510,602 - Zhang , et al. Dec | 2019-12-17 |
Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures
Grant 10,490,411 - Leschkies , et al. Nov | 2019-11-26 |
Surface modification to improve amorphous silicon gapfill
Grant 10,483,102 - Manna , et al. Nov | 2019-11-19 |
Metal deposition methods
Grant 10,480,066 - Wu , et al. Nov | 2019-11-19 |
Apparatus for radical-based deposition of dielectric films
Grant 10,480,074 - Zhou , et al. Nov | 2019-11-19 |
Methods Of Forming Self-Aligned Vias And Air Gaps
App 20190348368 - Roy; Susmit Singha ; et al. | 2019-11-14 |
Fully Self-Aligned Via
App 20190348323 - Zhang; Ying ; et al. | 2019-11-14 |
Doped and undoped vanadium oxides for low-k spacer applications
Grant 10,475,642 - Venkatasubramanian , et al. Nov | 2019-11-12 |
Methods For Wordline Separation In 3d-nand Devices
App 20190333810 - Chen; Yihong ; et al. | 2019-10-31 |
Low Temperature Atomic Layer Deposition Of Silicon Nitride
App 20190330736 - Wang; Huiyuan ; et al. | 2019-10-31 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film
Grant 10,460,933 - Manna , et al. Oc | 2019-10-29 |
Photo-assisted deposition of flowable films
Grant 10,460,936 - Underwood , et al. Oc | 2019-10-29 |
Thermal Silicon Etch
App 20190326123 - Li; Zihui ; et al. | 2019-10-24 |
Fully self-aligned via
Grant 10,424,507 - Zhang , et al. Sept | 2019-09-24 |
Schemes for Selective Deposition for Patterning Applications
App 20190287807 - Basu; Atashi ; et al. | 2019-09-19 |
CVD based oxide-metal multi structure for 3D NAND memory devices
Grant 10,410,869 - Singha Roy , et al. Sept | 2019-09-10 |
Hybrid carbon hardmask for lateral hardmask recess reduction
Grant 10,410,864 - Kwon , et al. Sept | 2019-09-10 |
Methods of forming self-aligned vias
Grant 10,410,865 - Thompson , et al. Sept | 2019-09-10 |
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application
Grant 10,410,872 - Cheng , et al. Sept | 2019-09-10 |
Fully self-aligned via
Grant 10,410,921 - Zhang , et al. Sept | 2019-09-10 |
Metal Deposition Methods
App 20190271071 - Wu; Yong ; et al. | 2019-09-05 |
Methods of forming self-aligned vias and air gaps
Grant 10,403,542 - Roy , et al. Sep | 2019-09-03 |
Boron doped tungsten carbide for hardmask applications
Grant 10,403,502 - Venkatasubramanian , et al. Sep | 2019-09-03 |
Oxidative Volumetric Expansion Of Metals And Metal Containing Compounds
App 20190259652 - Roy; Susmit Singha ; et al. | 2019-08-22 |
Deposition And Treatment Of Films For Patterning
App 20190252252 - Basu; Atashi ; et al. | 2019-08-15 |
Geometric Control Of Bottom-Up Pillars For Patterning Applications
App 20190252188 - Duan; Ziqing ; et al. | 2019-08-15 |
Methods For Self-Aligned Patterning
App 20190252206 - Duan; Ziqing ; et al. | 2019-08-15 |
Carbon Film Gapfill For Patterning Application
App 20190237325 - WANG; Fei ; et al. | 2019-08-01 |
Seam Healing Using High Pressure Anneal
App 20190228982 - Chen; Yihong ; et al. | 2019-07-25 |
Selectively Deposited Parylene Masks And Methods Related Thereto
App 20190221422 - WANG; Fei ; et al. | 2019-07-18 |
Methods for wordline separation in 3D-NAND devices
Grant 10,354,916 - Chen , et al. July 16, 2 | 2019-07-16 |
Radical Assisted Cure Of Dielectric Films
App 20190214228 - CHEN; Yihong ; et al. | 2019-07-11 |
Titanium compound based hard mask films
Grant 10,347,488 - Cheng , et al. July 9, 2 | 2019-07-09 |
Schemes for selective deposition for patterning applications
Grant 10,347,495 - Basu , et al. July 9, 2 | 2019-07-09 |
Ultra-thin Diffusion Barriers
App 20190189506 - Roy; Susmit Singha ; et al. | 2019-06-20 |
Fully Self-Aligned Via
App 20190189512 - Zhang; Ying ; et al. | 2019-06-20 |
Silicide Films Through Selective Deposition
App 20190189453 - Srinivasan; Swaminathan ; et al. | 2019-06-20 |
Controlled Growth Of Thin Silicon Oxide Film At Low Temperature
App 20190189435 - JIANG; Shishi ; et al. | 2019-06-20 |
High Pressure Oxidation Of Metal Films
App 20190185983 - Mullick; Amrita B. ; et al. | 2019-06-20 |
Selective Atomic Layer Deposition Of Ruthenium
App 20190185993 - Chen; Yihong ; et al. | 2019-06-20 |
Methods Of Etching Metal Oxides With Less Etch Residue
App 20190189456 - Mullick; Amrita B. ; et al. | 2019-06-20 |
Oxidative volumetric expansion of metals and metal containing compounds
Grant 10,319,624 - Roy , et al. | 2019-06-11 |
Methods for self-aligned patterning
Grant 10,319,604 - Duan , et al. | 2019-06-11 |
Deposition and treatment of films for patterning
Grant 10,319,636 - Basu , et al. | 2019-06-11 |
Thermal silicon etch
Grant 10,319,600 - Li , et al. | 2019-06-11 |
Geometric control of bottom-up pillars for patterning applications
Grant 10,319,591 - Duan , et al. | 2019-06-11 |
Methods For Gapfill In High Aspect Ratio Structures
App 20190172723 - Cheng; Rui ; et al. | 2019-06-06 |
Hardmask layer for 3D NAND staircase structure in semiconductor applications
Grant 10,312,137 - Venkatasubramanian , et al. | 2019-06-04 |
Methods For Gapfill In High Aspect Ratio Structures
App 20190157134 - Manna; Pramit ; et al. | 2019-05-23 |
Flowable gapfill using solvents
Grant 10,280,507 - Arnepalli , et al. | 2019-05-07 |
Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide
Grant 10,276,379 - Cheng , et al. | 2019-04-30 |
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
Grant 10,236,197 - Janakiraman , et al. | 2019-03-19 |
Process Of Filling The High Aspect Ratio Trenches By Co-flowing Ligands During Thermal Cvd
App 20190074218 - MANNA; Pramit ; et al. | 2019-03-07 |
Methods Of Producing Self-Aligned Vias
App 20190067102 - Zhang; Ying ; et al. | 2019-02-28 |
Methods Of Producing Self-aligned Grown Via
App 20190067103 - Zhang; Ying ; et al. | 2019-02-28 |
Methods for gapfill in high aspect ratio structures
Grant 10,192,775 - Manna , et al. Ja | 2019-01-29 |
Pre-treatment Approach To Improve Continuity Of Ultra-thin Amorphous Silicon Film On Silicon Oxide
App 20190027362 - CHENG; Rui ; et al. | 2019-01-24 |
Cyclic Conformal Deposition/anneal/etch For Si Gapfill
App 20190019724 - CHENG; Rui ; et al. | 2019-01-17 |
Methods Of Forming Self-Aligned Vias
App 20190013202 - Thompson; David ; et al. | 2019-01-10 |
Selective deposition of silicon oxide films
Grant 10,176,980 - Manna , et al. J | 2019-01-08 |
Methods Of Producing Fully Self-Aligned Vias And Contacts
App 20180374750 - Zhang; Ying ; et al. | 2018-12-27 |
Method and Apparatus for Void Free SiN Gapfill
App 20180363133 - Arnepalli; Ranga Rao ; et al. | 2018-12-20 |
Diamond-Like Carbon Film
App 20180354804 - Venkatasubramanian; Eswaranand ; et al. | 2018-12-13 |
Diamond-Like Carbon As Mandrel
App 20180358229 - Koshizawa; Takehito ; et al. | 2018-12-13 |
High-density Low Temperature Carbon Films For Hardmask And Other Patterning Applications
App 20180358222 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2018-12-13 |
Seamless Tungsten Fill By Tungsten Oxidation-Reduction
App 20180358264 - Wu; Yong ; et al. | 2018-12-13 |
Methods Of Forming Self-Aligned Vias And Air Gaps
App 20180358260 - Roy; Susmit Singha ; et al. | 2018-12-13 |
Bottom-Up Growth Of Silicon Oxide And Silicon Nitride Using Sequential Deposition-Etch-Treat Processing
App 20180350668 - Cheng; Rui ; et al. | 2018-12-06 |
Dry Stripping Of Boron Carbide Hardmask
App 20180350621 - MANNA; Pramit ; et al. | 2018-12-06 |
Methods For Wordline Separation in 3D-NAND Devices
App 20180350671 - Chen; Yihong ; et al. | 2018-12-06 |
Selective Deposition Of Silicon Using Deposition-Treat-Etch Process
App 20180350597 - Cheng; Rui ; et al. | 2018-12-06 |
Methods Of Lowering Wordline Resistance
App 20180350606 - Chen; Yihong ; et al. | 2018-12-06 |
Quality Improvement Of Films Deposited On A Substrate
App 20180350563 - MANNA; Pramit ; et al. | 2018-12-06 |
Method For Enabling Self-aligned Lithography On Metal Contacts And Selective Deposition Using Free-standing Vertical Carbon Structures
App 20180337061 - LESCHKIES; Kurtis ; et al. | 2018-11-22 |
Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD
Grant 10,128,150 - Manna , et al. November 13, 2 | 2018-11-13 |
Methods of Forming Tungsten Pillars
App 20180323068 - Mallick; Abhijit Basu ; et al. | 2018-11-08 |
Selective Deposition Of Tungsten For Simplified Process Flow Of Tungsten Oxide Pillar Formation
App 20180308694 - Chen; Yihong ; et al. | 2018-10-25 |
Flowable Gapfill Using Solvents
App 20180298492 - Arnepalli; Ranga Rao ; et al. | 2018-10-18 |
Surface Modification To Improve Amorphous Silicon Gapfill
App 20180294154 - MANNA; Pramit ; et al. | 2018-10-11 |
Gapfill Using Reactive Anneal
App 20180294166 - Mallick; Abhijit Basu ; et al. | 2018-10-11 |
Treatment Approach To Improve Film Roughness By Improving Nucleation/adhesion Of Silicon Oxide
App 20180294157 - CHENG; Rui ; et al. | 2018-10-11 |
Two-step Process For Gapfilling High Aspect Ratio Trenches With Amorphous Silicon Film
App 20180286674 - MANNA; Pramit ; et al. | 2018-10-04 |
Two-Step Process for Silicon Gapfill
App 20180286669 - Mallick; Abhijit Basu ; et al. | 2018-10-04 |
Fully Self-Aligned Via
App 20180286749 - Zhang; Ying ; et al. | 2018-10-04 |
Hybrid Carbon Hardmask For Lateral Hardmask Recess Reduction
App 20180277370 - KWON; Thomas Jongwan ; et al. | 2018-09-27 |
Methods of forming self-aligned vias
Grant 10,083,834 - Thompson , et al. September 25, 2 | 2018-09-25 |
Surface-Selective Atomic Layer Deposition Using Hydrosilylation Passivation
App 20180254179 - Chan; Kelvin ; et al. | 2018-09-06 |
Critical Dimension Control For Self-Aligned Contact Patterning
App 20180240706 - Mallick; Abhijit Basu ; et al. | 2018-08-23 |
Schemes for Selective Deposition for Patterning Applications
App 20180218914 - Basu; Atashi ; et al. | 2018-08-02 |
Boron Doped Tungsten Carbide For Hardmask Applications
App 20180218902 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2018-08-02 |
Flowable gapfill using solvents
Grant 10,017,856 - Arnepalli , et al. July 10, 2 | 2018-07-10 |
Selectively lateral growth of silicon oxide thin film
Grant 10,002,757 - Chen , et al. June 19, 2 | 2018-06-19 |
Hybrid carbon hardmask for lateral hardmask recess reduction
Grant 9,991,118 - Kwon , et al. June 5, 2 | 2018-06-05 |
Deposition And Treatment Of Films For Patterning
App 20180144980 - Basu; Atashi ; et al. | 2018-05-24 |
Methods For Self-Aligned Patterning
App 20180130671 - Duan; Ziqing ; et al. | 2018-05-10 |
Geometric Control Of Bottom-Up Pillars For Patterning Applications
App 20180130657 - Duan; Ziqing ; et al. | 2018-05-10 |
UV-assisted material injection into porous films
Grant 9,947,576 - Underwood , et al. April 17, 2 | 2018-04-17 |
Methods Of Forming Self-Aligned Vias
App 20180096847 - Thompson; David ; et al. | 2018-04-05 |
Apparatus For Radical-based Deposition Of Dielectric Films
App 20180080125 - ZHOU; Jianhua ; et al. | 2018-03-22 |
Borane Mediated Dehydrogenation Process From Silane And Alkylsilane Species For Spacer And Hardmask Application
App 20180076042 - CHENG; Rui ; et al. | 2018-03-15 |
Photo-assisted Deposition Of Flowable Films
App 20180040473 - UNDERWOOD; Brian Saxton ; et al. | 2018-02-08 |
Deposition Of Flowable Silicon-Containing Films
App 20180025907 - Kalutarage; Lakmal C. ; et al. | 2018-01-25 |
Plasma treatment to improve adhesion between hardmask film and silicon oxide film
Grant 9,865,459 - Cheng , et al. January 9, 2 | 2018-01-09 |
Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices
App 20170372953 - ROY; Susmit Singha ; et al. | 2017-12-28 |
Flowable Amorphous Silicon Films For Gapfill Applications
App 20170372919 - Manna; Pramit ; et al. | 2017-12-28 |
Oxidative Volumetric Expansion Of Metals And Metal Containing Compounds
App 20170358483 - Roy; Susmit Singha ; et al. | 2017-12-14 |
Apparatus for radical-based deposition of dielectric films
Grant 9,840,777 - Zhou , et al. December 12, 2 | 2017-12-12 |
Hardmask Layer For 3d Nand Staircase Structure In Semiconductor Applications
App 20170352586 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2017-12-07 |
Selectively Lateral Growth Of Silicon Oxide Thin Film
App 20170323777 - CHEN; Yihong ; et al. | 2017-11-09 |
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
App 20170309476 - Venkatasubramanian; Eswaranand ; et al. | 2017-10-26 |
Methods For Gapfill In High Aspect Ratio Structures
App 20170271196 - Manna; Pramit ; et al. | 2017-09-21 |
Selectively lateral growth of silicon oxide thin film
Grant 9,741,558 - Chen , et al. August 22, 2 | 2017-08-22 |
PECVD Tungsten Containing Hardmask Films And Methods Of Making
App 20170207087 - Roy; Susmit Singha ; et al. | 2017-07-20 |
Hybrid Carbon Hardmask For Lateral Hardmask Recess Reduction
App 20170207088 - KWON; Thomas Jongwan ; et al. | 2017-07-20 |
Selectively Lateral Growth Of Silicon Oxide Thin Film
App 20170125239 - CHEN; Yihong ; et al. | 2017-05-04 |
Conformal doping in 3D si structure using conformal dopant deposition
Grant 9,640,400 - Cheng , et al. May 2, 2 | 2017-05-02 |
Deposition Of Conformal And Gap-Fill Amorphous Silicon Thin-Films
App 20170114453 - Chen; Yihong ; et al. | 2017-04-27 |
Conformal Doping In 3d Si Structure Using Conformal Dopant Deposition
App 20170110321 - CHENG; Rui ; et al. | 2017-04-20 |
Deposition of metal doped amorphous carbon film
Grant 9,624,577 - Manna , et al. April 18, 2 | 2017-04-18 |
Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications
Grant 9,613,908 - Padhi , et al. April 4, 2 | 2017-04-04 |
Titanium-Compound Based Hard Mask Films
App 20170084459 - Cheng; Rui ; et al. | 2017-03-23 |
Low temperature silicon nitride films using remote plasma CVD technology
Grant 9,583,333 - Chatterjee , et al. February 28, 2 | 2017-02-28 |
Low temperature cure modulus enhancement
Grant 9,583,332 - Manna , et al. February 28, 2 | 2017-02-28 |
Uv-assisted Material Injection Into Porous Films
App 20170018455 - Underwood; Brian Saxton ; et al. | 2017-01-19 |
Selective Deposition Of Silicon Oxide Films
App 20170004974 - MANNA; Pramit ; et al. | 2017-01-05 |
Flowable carbon for semiconductor processing
Grant 9,514,932 - Mallick , et al. December 6, 2 | 2016-12-06 |
Selectively lateral growth of silicon oxide thin film
Grant 9,508,545 - Chen , et al. November 29, 2 | 2016-11-29 |
Deposition Of Silicon And Oxygen-containing Films Without An Oxidizer
App 20160336174 - UNDERWOOD; Brian Saxton ; et al. | 2016-11-17 |
Plasma Treatment To Improve Adhesion Between Hardmask Film And Silicon Oxide Film
App 20160314960 - CHENG; Rui ; et al. | 2016-10-27 |
Process Of Filling The High Aspect Ratio Trenches By Co-flowing Ligands During Thermal Cvd
App 20160293483 - MANNA; Pramit ; et al. | 2016-10-06 |
Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor
Grant 9,417,515 - Barman , et al. August 16, 2 | 2016-08-16 |
Selectively Lateral Growth Of Silicon Oxide Thin Film
App 20160233084 - CHEN; Yihong ; et al. | 2016-08-11 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films
Grant 9,412,613 - Manna , et al. August 9, 2 | 2016-08-09 |
Deposition of heteroatom-doped carbon films
Grant 9,406,509 - Manna , et al. August 2, 2 | 2016-08-02 |
Wet oxidation process performed on a dielectric material formed from a flowable CVD process
Grant 9,390,914 - Wang , et al. July 12, 2 | 2016-07-12 |
Chamber coatings
Grant 9,384,950 - Duan , et al. July 5, 2 | 2016-07-05 |
Ultra-thin Dielectric Diffusion Barrier And Etch Stop Layer For Advanced Interconnect Applications
App 20160172239 - PADHI; Deenesh ; et al. | 2016-06-16 |
Metal-containing films as dielectric capping barrier for advanced interconnects
Grant 9,368,448 - Chen , et al. June 14, 2 | 2016-06-14 |
Flowable low-k dielectric gapfill treatment
Grant 9,362,107 - Thadani , et al. June 7, 2 | 2016-06-07 |
Radical Assisted Cure Of Dielectric Films
App 20160138161 - CHEN; Yihong ; et al. | 2016-05-19 |
Flowable silicon--carbon--oxygen layers for semiconductor processing
Grant 9,343,293 - Underwood , et al. May 17, 2 | 2016-05-17 |
Processing System Containing An Isolation Region separating a Deposition chamber from a treatment chamber
App 20160133489 - JANAKIRAMAN; Karthik ; et al. | 2016-05-12 |
Integrated cluster to enable next generation interconnect
Grant 9,318,383 - Naik , et al. April 19, 2 | 2016-04-19 |
Flowable Low-k Dielectric Gapfill Treatment
App 20160093488 - Thadani; Kiran V. ; et al. | 2016-03-31 |
Integrated Cluster To Enable Next Generation Interconnect
App 20160049331 - NAIK; Mehul B. ; et al. | 2016-02-18 |
Ultra-thin structure to protect copper and method of preparation
Grant 9,257,330 - Chatterjee , et al. February 9, 2 | 2016-02-09 |
Deposition Of Metal Doped Amorphous Carbon Film
App 20160027614 - MANNA; Pramit ; et al. | 2016-01-28 |
Integrated Pre-clean And Deposition Of Low-damage Layers
App 20160017487 - CHEN; Yihong ; et al. | 2016-01-21 |
Plasma-enhanced And Radical-based Cvd Of Porous Carbon-doped Oxide Films Assisted By Radical Curing
App 20160017495 - CHEN; Yihong ; et al. | 2016-01-21 |
Apparatus For Radical-based Deposition Of Dielectric Films
App 20150376788 - ZHOU; Jianhua ; et al. | 2015-12-31 |
Integrated cluster to enable next generation interconnect
Grant 9,184,093 - Naik , et al. November 10, 2 | 2015-11-10 |
Cleaning Process For Cleaning Amorphous Carbon Deposition Residuals Using Low Rf Bias Frequency Applications
App 20150228463 - MANNA; Pramit ; et al. | 2015-08-13 |
Chamber Coatings
App 20150221480 - DUAN; Ren-Guan ; et al. | 2015-08-06 |
Low Temperature Cure Modulus Enhancement
App 20150214039 - MANNA; Pramit ; et al. | 2015-07-30 |
Deposition Of Heteroatom-doped Carbon Films
App 20150206739 - MANNA; Pramit ; et al. | 2015-07-23 |
Carbon Film Stress Relaxation
App 20150200094 - Underwood; Brian Saxton ; et al. | 2015-07-16 |
Carbon Dioxide And Carbon Monoxide Mediated Curing Of Low K Films To Increase Hardness And Modulus
App 20150196933 - MANNA; Pramit ; et al. | 2015-07-16 |
Development Of High Etch Selective Hardmask Material By Ion Implantation Into Amorphous Carbon Films
App 20150194317 - MANNA; PRAMIT ; et al. | 2015-07-09 |
Photo-assisted Deposition Of Flowable Films
App 20150187563 - UNDERWOOD; BRIAN SAXTON ; et al. | 2015-07-02 |
Metal-containing Films As Dielectric Capping Barrier For Advanced Interconnects
App 20150179581 - CHEN; Yihong ; et al. | 2015-06-25 |
Enabling Radical-based Deposition Of Dielectric Films
App 20150167160 - CHEN; Yihong ; et al. | 2015-06-18 |
Ultra-thin Structure To Protect Copper And Method Of Preparation
App 20150147879 - Chatterjee; Amit ; et al. | 2015-05-28 |
Method Of Depositing A Low-temperature, No-damage Hdp Sic-like Film With High Wet Etch Resistance
App 20150140833 - THADANI; Kiran V. ; et al. | 2015-05-21 |
Low Temperature Silicon Nitride Films Using Remote Plasma Cvd Technology
App 20150126045 - CHATTERJEE; Amit ; et al. | 2015-05-07 |
HDD patterning using flowable CVD film
Grant 8,986,557 - Underwood , et al. March 24, 2 | 2015-03-24 |
Oxygen-doping for non-carbon radical-component CVD films
Grant 8,980,382 - Ingle , et al. March 17, 2 | 2015-03-17 |
Controlled air gap formation
Grant 8,921,235 - Thadani , et al. December 30, 2 | 2014-12-30 |
Low cost flowable dielectric films
Grant 8,889,566 - Chatterjee , et al. November 18, 2 | 2014-11-18 |
Flowable films using alternative silicon precursors
Grant 8,871,656 - Mallick , et al. October 28, 2 | 2014-10-28 |
Flowable Silicon-carbon-oxygen Layers For Semiconductor Processing
App 20140302688 - Underwood; Brian Saxton ; et al. | 2014-10-09 |
Integrated Cluster To Enable Next Generation Interconnect
App 20140273430 - NAIK; Mehul B. ; et al. | 2014-09-18 |
Ultra-smooth Layer Ultraviolet Lithography Mirrors And Blanks, And Manufacturing And Lithography Systems Therefor
App 20140268083 - Barman; Soumendra N. ; et al. | 2014-09-18 |
Controlled Air Gap Formation
App 20140248754 - Thadani; Kiran V. ; et al. | 2014-09-04 |
Hdd Patterning Using Flowable Cvd Film
App 20140231384 - UNDERWOOD; Brian Saxton ; et al. | 2014-08-21 |
Air gap formation
Grant 8,765,573 - Mallick , et al. July 1, 2 | 2014-07-01 |
Molecular layer deposition of silicon carbide
Grant 8,753,985 - Underwood , et al. June 17, 2 | 2014-06-17 |
Low Cost Flowable Dielectric Films
App 20140073144 - Chatterjee; Amit ; et al. | 2014-03-13 |
Flowable Films Using Alternative Silicon Precursors
App 20140051264 - Mallick; Abhijit Basu ; et al. | 2014-02-20 |
Flowable Carbon For Semiconductor Processing
App 20140045342 - Mallick; Abhijit Basu ; et al. | 2014-02-13 |
Embedded catalyst for atomic layer deposition of silicon oxide
Grant 8,580,699 - Mallick November 12, 2 | 2013-11-12 |
Molecular Layer Deposition Of Silicon Carbide
App 20130267079 - Underwood; Brian ; et al. | 2013-10-10 |
Flowable Silicon-carbon-nitrogen Layers For Semiconductor Processing
App 20130217240 - Mallick; Abhijit Basu ; et al. | 2013-08-22 |
Flowable Silicon-and-carbon-containing Layers For Semiconductor Processing
App 20130217239 - Mallick; Abhijit Basu ; et al. | 2013-08-22 |
Doping Of Dielectric Layers
App 20130217243 - Underwood; Brian S. ; et al. | 2013-08-22 |
Treatments For Decreasing Etch Rates After Flowable Deposition Of Silicon-carbon-and-nitrogen-containing Layers
App 20130217241 - Underwood; Brian S. ; et al. | 2013-08-22 |
Photoresist For Improved Lithographic Control
App 20130177847 - Chatterjee; Amit ; et al. | 2013-07-11 |
Capping layer for reduced outgassing
Grant 8,466,073 - Wang , et al. June 18, 2 | 2013-06-18 |
Radiation patternable CVD film
Grant 8,465,903 - Weidman , et al. June 18, 2 | 2013-06-18 |
In-situ ozone cure for radical-component CVD
Grant 8,304,351 - Wang , et al. November 6, 2 | 2012-11-06 |
High quality silicon oxide films by remote plasma CVD from disilane precursors
Grant 8,242,031 - Mallick , et al. August 14, 2 | 2012-08-14 |
Silicon-selective dry etch for carbon-containing films
Grant 8,211,808 - Sapre , et al. July 3, 2 | 2012-07-03 |
Methods for forming a silicon oxide layer over a substrate
Grant 7,943,531 - Nemani , et al. May 17, 2 | 2011-05-17 |
High quality silicon oxide films by remote plasma CVD from disilane precursors
Grant 7,867,923 - Mallick , et al. January 11, 2 | 2011-01-11 |
Curing methods for silicon dioxide multi-layers
Grant 7,825,044 - Mallick , et al. November 2, 2 | 2010-11-02 |
Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp II process
Grant 7,745,352 - Mallick , et al. June 29, 2 | 2010-06-29 |
Method and system for improving dielectric film quality for void free gap fill
Grant 7,541,297 - Mallick , et al. June 2, 2 | 2009-06-02 |
Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II--remote plasma enhanced deposition processes
Grant 7,498,273 - Mallick , et al. March 3, 2 | 2009-03-03 |
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