| Patent | Date |
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Sequential infiltration synthesis apparatus and a method of forming a patterned structure
Grant 11,447,861 - Maes , et al. September 20, 2 | 2022-09-20 |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
Grant 11,450,529 - Longrie , et al. September 20, 2 | 2022-09-20 |
Methods And Systems For Filling A Gap
App 20220285211 - Farm; Elina ; et al. | 2022-09-08 |
Selective Deposition Of Transition Metal-containing Material
App 20220254642 - Farm; Elina ; et al. | 2022-08-11 |
Transition Metal Deposition Method
App 20220195599 - Dezelah; Charles ; et al. | 2022-06-23 |
Molybdenum Deposition Method
App 20220139713 - Farm; Elina ; et al. | 2022-05-05 |
Method For Forming An Ultraviolet Radiation Responsive Metal Oxide-containing Film
App 20220102140 - Huotari; Hannu ; et al. | 2022-03-31 |
Method Of Cleaning A Surface
App 20220068634 - Deng; Shaoren ; et al. | 2022-03-03 |
Atomic Layer Deposition Of Iii-v Compounds To Form V-nand Devices
App 20220028870 - Blomberg; Tom E. ; et al. | 2022-01-27 |
Method for forming an ultraviolet radiation responsive metal oxide-containing film
Grant 11,217,444 - Huotari , et al. January 4, 2 | 2022-01-04 |
Selective Deposition Of Sioc Thin Films
App 20210398797 - Maes; Jan Willem ; et al. | 2021-12-23 |
Selective Passivation And Selective Deposition
App 20210358739 - Tois; Eva E. ; et al. | 2021-11-18 |
Selective Passivation And Selective Deposition
App 20210358745 - Maes; Jan Willem ; et al. | 2021-11-18 |
Selective deposition of SiOC thin films
Grant 11,139,163 - Maes , et al. October 5, 2 | 2021-10-05 |
Atomic layer deposition of III-V compounds to form V-NAND devices
Grant 11,139,308 - Blomberg , et al. October 5, 2 | 2021-10-05 |
Method of forming a germanium oxynitride film
Grant 11,101,370 - Tang , et al. August 24, 2 | 2021-08-24 |
Selective passivation and selective deposition
Grant 11,094,535 - Tois , et al. August 17, 2 | 2021-08-17 |
Method Of Forming An Enhanced Unexposed Photoresist Layer
App 20210247693 - Maes; Jan Willem ; et al. | 2021-08-12 |
Systems And Methods For Cobalt Metalization
App 20210193515 - Zhu; Chiyu ; et al. | 2021-06-24 |
Deposition Of Organic Films
App 20210175092 - Tois; Eva E. ; et al. | 2021-06-10 |
Method of forming an enhanced unexposed photoresist layer
Grant 11,022,879 - Maes , et al. June 1, 2 | 2021-06-01 |
Methods For Selectively Forming A Target Film On A Substrate Comprising A First Dielectric Surface And A Second Metallic Surface
App 20210159077 - Longrie; Delphine ; et al. | 2021-05-27 |
Selective Deposition Of Sioc Thin Films
App 20210134586 - Maes; Jan Willem ; et al. | 2021-05-06 |
Sequential Infiltration Synthesis Apparatus And A Method Of Forming A Patterned Structure
App 20210071298 - Maes; Jan Willem ; et al. | 2021-03-11 |
Deposition of organic films
Grant 10,923,361 - Tois , et al. February 16, 2 | 2021-02-16 |
Selective deposition of aluminum and nitrogen containing material
Grant 10,903,113 - Wang , et al. January 26, 2 | 2021-01-26 |
Sulfur-containing thin films
Grant 10,854,444 - Haukka , et al. December 1, 2 | 2020-12-01 |
Selective deposition of aluminum and nitrogen containing material
Grant 10,847,361 - Wang , et al. November 24, 2 | 2020-11-24 |
Selective Deposition Of Aluminum And Nitrogen Containing Material
App 20200343089 - Wang; Han ; et al. | 2020-10-29 |
Reaction chamber passivation and selective deposition of metallic films
Grant 10,793,946 - Longrie , et al. October 6, 2 | 2020-10-06 |
Reaction Chamber Passivation And Selective Deposition Of Metallic Films
App 20200291511 - Longrie; Delphine ; et al. | 2020-09-17 |
Selective Deposition Of Aluminum And Nitrogen Containing Material
App 20200266096 - Wang; Han ; et al. | 2020-08-20 |
Sulfur-containing Thin Films
App 20200266054 - Haukka; Suvi P. ; et al. | 2020-08-20 |
Combined anneal and selective deposition process
Grant 10,741,394 - Maes , et al. A | 2020-08-11 |
Method For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20200227325 - Xie; Qi ; et al. | 2020-07-16 |
Atomic layer deposition of antimony oxide films
Grant 10,699,899 - Matero , et al. | 2020-06-30 |
Process For Passivating Dielectric Films
App 20200181769 - Blomberg; Tom E. ; et al. | 2020-06-11 |
Method For Forming An Ultraviolet Radiation Responsive Metal Oxide-containing Film
App 20200176246 - Huotari; Hannu ; et al. | 2020-06-04 |
Source/drain performance through conformal solid state doping
Grant 10,665,452 - Xie , et al. | 2020-05-26 |
Methods for forming a semiconductor device and related semiconductor device structures
Grant 10,643,904 - Xie , et al. | 2020-05-05 |
Method for forming a semiconductor device structure comprising a gate fill metal
Grant 10,607,895 - Xie , et al. | 2020-03-31 |
Selective deposition of aluminum and nitrogen containing material
Grant 10,566,185 - Wang , et al. Feb | 2020-02-18 |
Deposition Of Organic Films
App 20200051829 - Tois; Eva E. ; et al. | 2020-02-13 |
Method of forming a directed self-assembled layer on a substrate
Grant 10,551,741 - Knaepen , et al. Fe | 2020-02-04 |
Sulfur-containing thin films
Grant 10,553,424 - Haukka , et al. Fe | 2020-02-04 |
Selective deposition of aluminum and nitrogen containing material
Grant 10,553,482 - Wang , et al. Fe | 2020-02-04 |
Process for passivating dielectric films
Grant 10,513,772 - Blomberg , et al. Dec | 2019-12-24 |
Method Of Forming A Germanium Oxynitride Film
App 20190378916 - Tang; Fu ; et al. | 2019-12-12 |
Methods for semiconductor passivation by nitridation after oxide removal
Grant 10,490,475 - Xie , et al. Nov | 2019-11-26 |
Reaction chamber passivation and selective deposition of metallic films
Grant 10,480,064 - Longrie , et al. Nov | 2019-11-19 |
Deposition of organic films
Grant 10,453,701 - Tois , et al. Oc | 2019-10-22 |
Sulfur-containing Thin Films
App 20190259605 - Haukka; Suvi P. ; et al. | 2019-08-22 |
Method of forming a germanium oxynitride film
Grant 10,367,080 - Tang , et al. July 30, 2 | 2019-07-30 |
Semiconductor structure and device formed using selective epitaxial process
Grant 10,361,201 - Xie , et al. | 2019-07-23 |
Method Of Forming An Enhanced Unexposed Photoresist Layer
App 20190163056 - Maes; Jan Willem ; et al. | 2019-05-30 |
Combined Anneal And Selective Deposition Process
App 20190157086 - MAES; Jan Willem ; et al. | 2019-05-23 |
Method Of Forming A Directed Self-assembled Layer On A Substrate
App 20190155159 - Knaepen; Werner ; et al. | 2019-05-23 |
Selective Deposition Of Aluminum And Nitrogen Containing Material
App 20190103303 - Wang; Han ; et al. | 2019-04-04 |
Atomic Layer Deposition Of Antimony Oxide Films
App 20190103266 - Matero; Raija H. ; et al. | 2019-04-04 |
Method For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20190088555 - Xie; Qi ; et al. | 2019-03-21 |
Reaction Chamber Passivation And Selective Deposition Of Metallic Films
App 20190055643 - Longrie; Delphine ; et al. | 2019-02-21 |
Combined anneal and selective deposition process
Grant 10,204,782 - Maes , et al. Feb | 2019-02-12 |
Sulfur-containing thin films
Grant 10,199,213 - Haukka , et al. Fe | 2019-02-05 |
Chalcogenide Films For Selector Devices
App 20190006586 - Maes; Jan Willem ; et al. | 2019-01-03 |
Methods for forming semiconductors by diffusion
Grant 10,141,189 - Profijt , et al. Nov | 2018-11-27 |
Selective deposition of aluminum and nitrogen containing material
Grant 10,121,699 - Wang , et al. November 6, 2 | 2018-11-06 |
Source/drain Performance Through Conformal Solid State Doping
App 20180308686 - Xie; Qi ; et al. | 2018-10-25 |
Atomic layer deposition of antimony oxide films
Grant 10,056,249 - Matero , et al. August 21, 2 | 2018-08-21 |
Selective Passivation And Selective Deposition
App 20180233350 - Tois; Eva E. ; et al. | 2018-08-16 |
Reaction chamber passivation and selective deposition of metallic films
Grant 10,041,166 - Longrie , et al. August 7, 2 | 2018-08-07 |
Source/drain performance through conformal solid state doping
Grant 10,032,628 - Xie , et al. July 24, 2 | 2018-07-24 |
Methods For Forming Semiconductors By Diffusion
App 20180190793 - Profijt; Harald ; et al. | 2018-07-05 |
Sequential Infiltration Synthesis Apparatus And A Method Of Forming A Patterned Structure
App 20180171475 - Maes; Jan Willem ; et al. | 2018-06-21 |
Sequential Infiltration Synthesis Apparatus
App 20180174826 - Raaijmakers; Ivo Johannes ; et al. | 2018-06-21 |
Methods For Forming A Semiconductor Device And Related Semiconductor Device Structures
App 20180122709 - Xie; Qi ; et al. | 2018-05-03 |
Reaction Chamber Passivation And Selective Deposition Of Metallic Films
App 20180080121 - Longrie; Delphine ; et al. | 2018-03-22 |
Method of forming a structure on a substrate
Grant 9,916,980 - Knaepen , et al. March 13, 2 | 2018-03-13 |
Sulfur-containing Thin Films
App 20180068846 - Haukka; Suvi P. ; et al. | 2018-03-08 |
Methods of vapor deposition with multiple vapor sources
Grant 9,873,942 - Pomarede , et al. January 23, 2 | 2018-01-23 |
Deposition Of Organic Films
App 20170352550 - Tois; Eva E. ; et al. | 2017-12-07 |
Method Of Forming A Germanium Oxynitride Film
App 20170317194 - Tang; Fu ; et al. | 2017-11-02 |
Source/drain Performance Through Conformal Solid State Doping
App 20170316933 - Xie; Qi ; et al. | 2017-11-02 |
Reaction chamber passivation and selective deposition of metallic films
Grant 9,803,277 - Longrie , et al. October 31, 2 | 2017-10-31 |
Combined Anneal And Selective Deposition Process
App 20170301542 - MAES; Jan Willem ; et al. | 2017-10-19 |
Combined Anneal And Selective Deposition Systems
App 20170298503 - MAES; Jan Willem ; et al. | 2017-10-19 |
Metal selenide and metal telluride thin films for semiconductor device applications
Grant 9,741,815 - Xie , et al. August 22, 2 | 2017-08-22 |
Sulfur-containing thin films
Grant 9,721,786 - Haukka , et al. August 1, 2 | 2017-08-01 |
Methods for semiconductor passivation by nitridation
Grant 9,711,350 - Xie , et al. July 18, 2 | 2017-07-18 |
Method for forming metal chalcogenide thin films on a semiconductor device
Grant 9,711,396 - Tang , et al. July 18, 2 | 2017-07-18 |
Atomic Layer Deposition Of Iii-v Compounds To Form V-nand Devices
App 20170186754 - Blomberg; Tom E. ; et al. | 2017-06-29 |
Selective Deposition Of Aluminum And Nitrogen Containing Material
App 20170154806 - Wang; Han ; et al. | 2017-06-01 |
Atomic Layer Deposition Of Antimony Oxide Films
App 20170140918 - Matero; Raija H. ; et al. | 2017-05-18 |
Implementing Atomic Layer Deposition For Gate Dielectrics
App 20170110313 - Tang; Fu ; et al. | 2017-04-20 |
Selective Deposition Of Aluminum And Nitrogen Containing Material
App 20170040164 - Wang; Han ; et al. | 2017-02-09 |
Cyclic aluminum nitride deposition in a batch reactor
Grant 9,552,979 - Knaepen , et al. January 24, 2 | 2017-01-24 |
Method of making a wire-based semiconductor device
Grant 9,553,148 - Xie , et al. January 24, 2 | 2017-01-24 |
Method For Forming Metal Chalcogenide Thin Films On A Semiconductor Device
App 20160372365 - Tang; Fu ; et al. | 2016-12-22 |
Metal Selenide And Metal Telluride Thin Films For Semiconductor Device Applications
App 20160372543 - Xie; Qi ; et al. | 2016-12-22 |
Method of making a resistive random access memory
Grant 9,520,562 - Xie , et al. December 13, 2 | 2016-12-13 |
Methods For Semiconductor Passivation By Nitridation After Oxide Removal
App 20160358835 - Xie; Qi ; et al. | 2016-12-08 |
Methods For Semiconductor Passivation By Nitridation
App 20160358772 - Xie; Qi ; et al. | 2016-12-08 |
Atomic layer deposition of antimony oxide films
Grant 9,514,934 - Matero , et al. December 6, 2 | 2016-12-06 |
Sulfur-containing thin films
Grant 9,478,419 - Haukka , et al. October 25, 2 | 2016-10-25 |
Method of making a resistive random access memory device
Grant 9,472,757 - Xie , et al. October 18, 2 | 2016-10-18 |
Method for forming source/drain contact structure with chalcogen passivation
Grant 9,461,134 - Xie , et al. October 4, 2 | 2016-10-04 |
Method For Forming Oxide Layer By Oxidizing Semiconductor Substrate With Hydrogen Peroxide
App 20160240373 - Tang; Fu ; et al. | 2016-08-18 |
Sulfur-containing Thin Films
App 20160203974 - Haukka; Suvi P. ; et al. | 2016-07-14 |
Method of making a resistive random access memory device with metal-doped resistive switching layer
Grant 9,385,164 - Xie , et al. July 5, 2 | 2016-07-05 |
Semiconductor Structure And Device And Methods Of Forming Same Using Selective Epitaxial Process
App 20160133628 - Xie; Qi ; et al. | 2016-05-12 |
Multiple Vapor Sources For Vapor Deposition
App 20160097121 - Pomarede; Christophe ; et al. | 2016-04-07 |
Sulfur-containing thin films
Grant 9,245,742 - Haukka , et al. January 26, 2 | 2016-01-26 |
Multiple vapor sources for vapor deposition
Grant 9,238,865 - Pomarede , et al. January 19, 2 | 2016-01-19 |
Semiconductor structure and device and methods of forming same using selective epitaxial process
Grant 9,240,412 - Xie , et al. January 19, 2 | 2016-01-19 |
Process for depositing electrode with high effective work function
Grant 9,136,180 - Machkaoutsan , et al. September 15, 2 | 2015-09-15 |
Atomic Layer Deposition Of Antimony Oxide Films
App 20150249005 - MATERO; RAIJA H. ; et al. | 2015-09-03 |
High concentration water pulses for atomic layer deposition
Grant 9,117,773 - Shero , et al. August 25, 2 | 2015-08-25 |
Method Of Making A Wire-based Semiconductor Device
App 20150214301 - Xie; Qi ; et al. | 2015-07-30 |
Sulfur-containing Thin Films
App 20150170907 - Haukka; Suvi P. ; et al. | 2015-06-18 |
Sulfur-containing Thin Films
App 20150170914 - Haukka; Suvi P. ; et al. | 2015-06-18 |
Method of making a wire-based semiconductor device
Grant 9,012,278 - Xie , et al. April 21, 2 | 2015-04-21 |
Atomic layer deposition of antimony oxide films
Grant 9,006,112 - Matero , et al. April 14, 2 | 2015-04-14 |
Semiconductor Structure And Device And Methods Of Forming Same Using Selective Epitaxial Process
App 20150091057 - Xie; Qi ; et al. | 2015-04-02 |
Method of making a resistive random access memory device
Grant 8,956,939 - Xie , et al. February 17, 2 | 2015-02-17 |
Method Of Making A Resistive Random Access Memory Device
App 20150021540 - Xie; Qi ; et al. | 2015-01-22 |
Method Of Making A Resistive Random Access Memory Device
App 20150021537 - XIE; Qi ; et al. | 2015-01-22 |
Cyclic Aluminum Nitride Deposition In A Batch Reactor
App 20140357090 - Knaepen; Werner ; et al. | 2014-12-04 |
Method Of Making A Resistive Random Access Memory Device With Metal-doped Resistive Switching Layer
App 20140322862 - Xie; Qi ; et al. | 2014-10-30 |
Method Of Making A Resistive Random Access Memory Device
App 20140322885 - Xie; Qi ; et al. | 2014-10-30 |
Silane and borane treatments for titanium carbide films
Grant 8,841,182 - Chen , et al. September 23, 2 | 2014-09-23 |
Silane And Borane Treatments For Titanium Carbide Films
App 20140273510 - Chen; Jerry ; et al. | 2014-09-18 |
Method Of Making A Wire-based Semiconductor Device
App 20140030859 - Xie; Qi ; et al. | 2014-01-30 |
Multiple Vapor Sources For Vapor Deposition
App 20130203267 - Pomarede; Christophe ; et al. | 2013-08-08 |
Atomic Layer Deposition Of Antimony Oxide Films
App 20130095664 - Matero; Raija H. ; et al. | 2013-04-18 |
Method for adjusting the threshold voltage of a gate stack of a PMOS device
Grant 8,399,344 - Pierreux , et al. March 19, 2 | 2013-03-19 |
Method of forming non-conformal layers
Grant 8,334,218 - Van Nooten , et al. December 18, 2 | 2012-12-18 |
Process For Depositing Electrode With High Effective Work Function
App 20120309181 - Machkaoutsan; Vladimir ; et al. | 2012-12-06 |
Process For Passivating Dielectric Films
App 20120269962 - Blomberg; Tom E. ; et al. | 2012-10-25 |
Method to enhance the initiation of film growth
Grant 7,927,933 - Maes , et al. April 19, 2 | 2011-04-19 |
Method For Adjusting The Threshold Voltage Of A Gate Stack Of A Pmos Device
App 20110081775 - Pierreux; Dieter ; et al. | 2011-04-07 |
High Concentration Water Pulses For Atomic Layer Deposition
App 20110053383 - Shero; Eric J. ; et al. | 2011-03-03 |
ALD of metal silicate films
Grant 7,795,160 - Wang , et al. September 14, 2 | 2010-09-14 |
Method Of Forming Non-conformal Layers
App 20100022099 - Van Nooten; Sebastian E. ; et al. | 2010-01-28 |
High stress nitride film and method for formation thereof
Grant 7,629,267 - Wan , et al. December 8, 2 | 2009-12-08 |
Remote plasma activated nitridation
Grant 7,629,270 - Swerts , et al. December 8, 2 | 2009-12-08 |
Method of forming non-conformal layers
Grant 7,608,549 - Van Nooten , et al. October 27, 2 | 2009-10-27 |
Method For Forming A Dielectric Stack
App 20090079016 - Chen; Peijun Jerry ; et al. | 2009-03-26 |
Method for forming a high-k dielectric stack
Grant 7,465,626 - Chen , et al. December 16, 2 | 2008-12-16 |
Dielectric Layers And Methods Of Forming The Same
App 20080093711 - Raaijmakers; Ivo ; et al. | 2008-04-24 |
Dielectric layers and methods of forming the same
Grant 7,323,422 - Raaijmakers , et al. January 29, 2 | 2008-01-29 |
ALD of metal silicate films
App 20080020593 - Wang; Chang-gong ; et al. | 2008-01-24 |
Method of forming non-conformal layers
App 20070026540 - Nooten; Sebastian E. van ; et al. | 2007-02-01 |
Silicon oxide cap over high dielectric constant films
App 20060211259 - Maes; Jan Willem ; et al. | 2006-09-21 |
High stress nitride film and method for formation thereof
App 20060199357 - Wan; Yuet Mei ; et al. | 2006-09-07 |
Method to enhance the initiation of film growth
App 20060180879 - Maes; Jan Willem ; et al. | 2006-08-17 |
Remote plasma activated nitridation
App 20060110943 - Swerts; Johan ; et al. | 2006-05-25 |
Method for forming a dielectric stack
App 20050269651 - Chen, Peijun Jerry ; et al. | 2005-12-08 |
Methods of depositing two or more layers on a substrate in situ
Grant 6,818,517 - Maes November 16, 2 | 2004-11-16 |
Dielectric layers and methods of forming the same
App 20030234417 - Raaijmakers, Ivo ; et al. | 2003-12-25 |
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