m-FSI LTD.
Patent Applications and Registrations
Patent applications and USPTO patent grants for m-FSI LTD..The latest application filed is for "regeneration method of etching solution, an etching method and an etching system".
- m-FSI LTD. - Tokyo JP
- m-FSI LTD. - Nakano-ku JP
- m-FSI LTD. - c/o Kyohan-Kudan Building 5-10, lidabashi 1-chom Tokyo JP
- m FSI LTD. - Chiyoda-ku JP
- m-FSI LTD. - 5-10, Iidabashi 1-chome Chiyoda-ku JP
- m . FSI LTD. - c/o Kyohan-Kudan Building, 5-10, Iidabashi 1-cho Tokyo JP
| Patent | Date |
|---|---|
| Regeneration method of etching solution, an etching method and an etching system App 20080087645 - Izuta; Nobuhiko ; et al. | 2008-04-17 |
| Equipment and method for measuring silicon concentration in phosphoric acid solution App 20060263251 - Watatsu; Haruru ; et al. | 2006-11-23 |
| Substrate treatment process and apparatus Grant 6,983,756 - Matsuno , et al. January 10, 2 | 2006-01-10 |
| Substrate cleaning apparatus App 20050183750 - Matsuno, Kousaku ; et al. | 2005-08-25 |
| Substrate cleaning apparatus App 20050183749 - Matsuno, Kousaku ; et al. | 2005-08-25 |
| Substrate cleaning apparatus App 20050150530 - Matsuno, Kousaku ; et al. | 2005-07-14 |
| Wet cleaning process and wet cleaning equipment Grant 6,866,723 - Ueda , et al. March 15, 2 | 2005-03-15 |
| Regeneration process of etching solution, etching process, and etching system App 20040200806 - Izuta, Nobuhiko ; et al. | 2004-10-14 |
| Substrate treatment process and apparatus App 20040194812 - Matsuno, Kousaku ; et al. | 2004-10-07 |
| Apparatus and method for preparing and supplying slurry for CMP machine App 20040049301 - Kawasaki, Masato | 2004-03-11 |
| Supporting fixture of substrate and drying method of substrate surface using the same App 20030056391 - Shikami, Satoshi | 2003-03-27 |
| Slurry mixing feeder and slurry mixing and feeding method App 20030031086 - Shikami, Satoshi ; et al. | 2003-02-13 |
| Substrate Cleaning apparatus App 20030005948 - Matsuno, Kousaku ; et al. | 2003-01-09 |
| Wet cleaning process and wet cleaning equipment App 20020036006 - Ueda, Takeji ; et al. | 2002-03-28 |
| Cleaning process for substrate surface App 20010053585 - Kikuchi, Satoshi ; et al. | 2001-12-20 |
| Substrate treatment process and apparatus App 20010009155 - Matsuno, Kousaku ; et al. | 2001-07-26 |
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