Lutz; Markus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lutz; Markus.The latest application filed is for "encapsulated microelectromechanical structure".

Company Profile

8.130.123

Lutz; Markus - Mountain View CA
Lutz; Markus - Moutain View CA
Lutz; Markus - Palo Alto CA
Lutz; Markus - Hoechst AT
Lutz; Markus - Los Altos CA
Lutz; Markus - Munchen DE
Lutz; Markus - Sunnyvale CA
Lutz; Markus - Gifhorn DE
Lutz, Markus - Jettingen DE
Lutz, Markus - Miranda CA
Lutz; Markus - Reutlingen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Stacked-die MEMS resonator Grant 11,370,656 - Gupta , et al. June 28, 2	2022-06-28
Ovenized MEMS Grant 11,374,535 - Arft , et al. June 28, 2	2022-06-28
Fixed-beacon time transfer system Grant 11,218,984 - Lutz , et al. January 4, 2	2022-01-04
Frequency compensated oscillator design for process tolerances Grant 11,146,228 - Lutz , et al. October 12, 2	2021-10-12
Encapsulated Microelectromechanical Structure App 20210221678 - Partridge; Aaron ; et al.	2021-07-22
Stacked-die Mems Resonator App 20210179421 - Gupta; Pavan ; et al.	2021-06-17
Manufacturing of integrated circuit resonator Grant 10,913,655 - Gupta , et al. February 9, 2	2021-02-09
Low-profile Stacked-die Mems Resonator System App 20200385261 - Gupta; Pavan ; et al.	2020-12-10
Encapsulated microelectromechanical structure Grant 10,766,768 - Partridge , et al. Sep	2020-09-08
Package structure for micromechanical resonator Grant 10,723,617 - Gupta , et al.	2020-07-28
Ovenized Mems App 20200186084 - Arft; Carl ; et al.	2020-06-11
Encapsulated Microelectromechanical Structure App 20200079646 - Partridge; Aaron ; et al.	2020-03-12
Dual-resonator semiconductor die Grant 10,476,477 - Grosjean , et al. Nov	2019-11-12
Encapsulated microelectromechanical structure Grant 10,450,190 - Partridge , et al. Oc	2019-10-22
Frequency compensated oscillator design for process tolerances Grant 10,439,579 - Lutz , et al. O	2019-10-08
Package Structure For Micromechanical Resonator App 20190292043 - Gupta; Pavan ; et al.	2019-09-26
Low-profile stacked-die MEMS resonator system Grant 10,287,162 - Gupta , et al.	2019-05-14
Encapsulated Microelectromechanical Structure App 20190055121 - Partridge; Aaron ; et al.	2019-02-21
Encapsulated microelectromechanical structure Grant 10,099,917 - Partridge , et al. October 16, 2	2018-10-16
Frequency Compensated Oscillator Design For Process Tolerances App 20180248533 - Lutz; Markus ; et al.	2018-08-30
Frequency Compensated Oscillator Design For Process Tolerances App 20180248532 - Lutz; Markus ; et al.	2018-08-30
Low-profile Stacked-die Mems Resonator System App 20180155186 - Gupta; Pavan ; et al.	2018-06-07
Frequency compensated oscillator design for process tolerances Grant 9,985,598 - Lutz , et al. May 29, 2	2018-05-29
Encapsulated Microelectromechanical Structure App 20180044176 - Partridge; Aaron ; et al.	2018-02-15
Stacked-die MEMS resonator system Grant 9,821,998 - Gupta , et al. November 21, 2	2017-11-21
Frequency compensated oscillator design for process tolerances Grant 9,800,222 - Lutz , et al. October 24, 2	2017-10-24
Electromechanical system having a controlled atmosphere, and method of fabricating same Grant 9,771,257 - Partridge , et al. September 26, 2	2017-09-26
Laterally-doped MEMS resonator Grant 9,774,313 - Grosjean , et al. September 26, 2	2017-09-26
Encapsulated microelectromechanical structure Grant 9,758,371 - Partridge , et al. September 12, 2	2017-09-12
Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same Grant 9,695,036 - Berger , et al. July 4, 2	2017-07-04
Actuator for movable furniture parts Grant 9,631,411 - Lutz April 25, 2	2017-04-25
Encapsulated Microelectromechanical Structure App 20170101310 - Partridge; Aaron ; et al.	2017-04-13
Microelectromechanical Resonator App 20170093361 - Grosjean; Charles I. ; et al.	2017-03-30
Stacked-die Mems Resonator System App 20170029269 - Gupta; Pavan ; et al.	2017-02-02
Encapsulated microelectromechanical structure Grant 9,440,845 - Partridge , et al. September 13, 2	2016-09-13
Wafer encapsulated microelectromechanical structure Grant 9,434,608 - Partridge , et al. September 6, 2	2016-09-06
Low-profile stacked-die MEMS resonator system Grant 9,371,221 - Gupta , et al. June 21, 2	2016-06-21
Encapsulated Microelectromechanical Structure App 20160167950 - Partridge; Aaron ; et al.	2016-06-16
Actuator For Movable Furniture Parts App 20160160551 - LUTZ; Markus	2016-06-09
Frequency Compensated Oscillator Design For Process Tolerances App 20150263699 - LUTZ; Markus ; et al.	2015-09-17
Frequency Compensated Oscillator Design For Process Tolerances App 20150263695 - LUTZ; Markus ; et al.	2015-09-17
Low-profile Stacked-die Mems Resonator System App 20150123220 - Gupta; Pavan ; et al.	2015-05-07
Integrated getter area for wafer level encapsulated microelectromechanical systems Grant 8,980,668 - Lutz , et al. March 17, 2	2015-03-17
Wafer Encapsulated Microelectromechanical Structure App 20150041928 - Partridge; Aaron ; et al.	2015-02-12
Stacked Die Package For Mems Resonator System App 20150035090 - Gupta; Pavan ; et al.	2015-02-05
Stacked die package for MEMS resonator system Grant 8,941,247 - Gupta , et al. January 27, 2	2015-01-27
MEMS device and method of manufacturing same Grant 8,916,407 - Grosjean , et al. December 23, 2	2014-12-23
Wafer encapsulated microelectromechanical structure and method of manufacturing same Grant 8,871,551 - Partridge , et al. October 28, 2	2014-10-28
Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same Grant 8,766,706 - Lutz , et al. July 1, 2	2014-07-01
Stacked die package for MEMS resonator system Grant 8,669,664 - Gupta , et al. March 11, 2	2014-03-11
Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same Grant 8,623,686 - Partridge , et al. January 7, 2	2014-01-07
Method And System For Dynamically Adjusting A Vehicle Mirror App 20130342926 - Lutz; Markus ; et al.	2013-12-26
Integrated Getter Area For Wafer Level Encapsulated Microelectromechanical Systems App 20130285162 - Lutz; Markus ; et al.	2013-10-31
Microelectromechanical Device Including An Encapsulation Layer Of Which A Portion Is Removed To Expose A Substantially Planar Surface Having A Portion That Is Disposed Outside And Above A Chamber And Including A Field Region On Which Integrated Circuits Are Formed, And Methods For Fabricating Same App 20130280842 - PARTRIDGE; Aaron ; et al.	2013-10-24
Methods For Trapping Charge In A Microelectromechanical System And Microelectromechanical System Employing Same App 20130106497 - Lutz; Markus ; et al.	2013-05-02
Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same Grant 8,421,167 - Partridge , et al. April 16, 2	2013-04-16
Stacked Die Package for MEMS Resonator System App 20130075853 - Gupta; Pavan ; et al.	2013-03-28
Integrated getter area for wafer level encapsulated microelectromechanical systems Grant 8,372,676 - Lutz , et al. February 12, 2	2013-02-12
Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same Grant 8,343,790 - Lutz , et al. January 1, 2	2013-01-01
Stacked die package for MEMS resonator system Grant 8,324,729 - Gupta , et al. December 4, 2	2012-12-04
MEMS resonator array structure and method of operating and using same Grant 8,324,986 - Lutz , et al. December 4, 2	2012-12-04
Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics Grant 8,287,956 - Partridge , et al. October 16, 2	2012-10-16
MEMS resonator structure including regions with different densities and method Grant 8,222,974 - Lutz , et al. July 17, 2	2012-07-17
Electromechanical System Having A Controlled Atmosphere, And Method Of Fabricating Same App 20110298065 - Partridge; Aaron ; et al.	2011-12-08
Stacked Die Package for MEMS Resonator System App 20110227175 - Gupta; Pavan ; et al.	2011-09-22
Microelectromechanical Device Including An Encapsulation Layer Of Which A Portion Is Removed To Expose A Substantially Planar Surface Having A Portion That Is Disposed Outside And Above A Chamber And Including A Field Region On Which Integrated Circuits Are Formed, And Methods For Fabricating Same App 20110221013 - Partridge; Aaron ; et al.	2011-09-15
Electromechanical system having a controlled atmosphere, and method of fabricating same Grant 8,018,077 - Partridge , et al. September 13, 2	2011-09-13
Mems Resonator Array Structure And Method Of Operating And Using Same App 20110199167 - LUTZ; Markus ; et al.	2011-08-18
Integrated getter area for wafer level encapsulated microelectromechanical systems App 20110165718 - Lutz; Markus ; et al.	2011-07-07
Integrated getter area for wafer level encapsulated microelectromechanical systems Grant 7,923,278 - Lutz , et al. April 12, 2	2011-04-12
Frequency and/or phase compensated microelectromechanical oscillator Grant 7,907,027 - Partridge , et al. March 15, 2	2011-03-15
Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same App 20110033967 - LUTZ; Markus ; et al.	2011-02-10
Mems Resonator Structure And Method App 20110018655 - Lutz; Markus ; et al.	2011-01-27
Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same Grant 7,859,067 - Partridge , et al. December 28, 2	2010-12-28
Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same Grant 7,824,943 - Lutz , et al. November 2, 2	2010-11-02
MEMS resonator structure and method Grant 7,777,596 - Lutz , et al. August 17, 2	2010-08-17
Microelectromechanical systems having stored charge and methods for fabricating and using same Grant 7,767,482 - Stark , et al. August 3, 2	2010-08-03
Microeletromechanical Systems Having Stored Charge And Methods For Fabricating And Using Same App 20100190285 - Stark; Brian H. ; et al.	2010-07-29
Multi-ring resonator system and method Grant 7,750,758 - Zhiyu , et al. July 6, 2	2010-07-06
Crack And Residue Free Conformal Deposited Silicon Oxide With Predictable And Uniform Etching Characteristics App 20100159627 - Partridge; Aaron ; et al.	2010-06-24
Electromechanical system having a controlled atmosphere, and method of fabricating same App 20090309175 - Partridge; Aaron ; et al.	2009-12-17
Episeal pressure sensor Grant 7,629,657 - Partridge , et al. December 8, 2	2009-12-08
Anti-stiction technique for electromechanical systems and electromechanical device employing same Grant 7,625,773 - Lutz , et al. December 1, 2	2009-12-01
Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics Grant 7,625,603 - Partridge , et al. December 1, 2	2009-12-01
Frequency And/or Phase Compensated Microelectromechanical Oscillator App 20090278619 - PARTRIDGE; Aaron ; et al.	2009-11-12
MEMS resonator array structure Grant 7,595,708 - Lutz , et al. September 29, 2	2009-09-29
Method for release of surface micromachined structures in an epitaxial reactor Grant 7,595,539 - Partridge , et al. September 29, 2	2009-09-29
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same Grant 7,579,206 - Lutz , et al. August 25, 2	2009-08-25
MEMS resonator array structure and method of operating and using same App 20090153258 - Lutz; Markus ; et al.	2009-06-18
MEMS resonator structure and method App 20090153267 - Lutz; Markus ; et al.	2009-06-18
Frequency and/or phase compensated microelectromechanical oscillator Grant 7,532,081 - Partridge , et al. May 12, 2	2009-05-12
Method of fabricating electromechanical device having a controlled atmosphere Grant 7,514,283 - Partridge , et al. April 7, 2	2009-04-07
Gap tuning for surface micromachined structures in an epitaxial reactor Grant 7,507,669 - Partridge , et al. March 24, 2	2009-03-24
Anti-stiction technique for electromechanical systems and electromechanical device employing same App 20090065928 - Lutz; Markus ; et al.	2009-03-12
Multi-Ring Resonator System and Method App 20090058561 - Pan; Zhiyu ; et al.	2009-03-05
Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same App 20080290494 - Lutz; Markus ; et al.	2008-11-27
Microelectromechanical systems having stored charge and methods for fabricating and using same Grant 7,456,042 - Stark , et al. November 25, 2	2008-11-25
Frequency and/or phase compensated microelectromechanical oscillator Grant 7,453,324 - Partridge , et al. November 18, 2	2008-11-18
Anti-stiction technique for electromechanical systems and electromechanical device employing same Grant 7,449,355 - Lutz , et al. November 11, 2	2008-11-11
Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same Grant 7,446,619 - Partridge , et al. November 4, 2	2008-11-04
Microelectromechanical oscillator having temperature measurement system, and method of operating same Grant 7,446,620 - Partridge , et al. November 4, 2	2008-11-04
Microelectromechanical systems, and methods for encapsualting and fabricating same App 20080237756 - Partridge; Aaron ; et al.	2008-10-02
Temperature controlled MEMS resonator and method for controlling resonator frequency Grant 7,427,905 - Lutz , et al. September 23, 2	2008-09-23
MEMS resonator array structure and method of operating and using same App 20080218295 - Lutz; Markus ; et al.	2008-09-11
Microelectromechanical resonator structure, and method of designing, operating and using same Grant 7,403,084 - Lutz , et al. July 22, 2	2008-07-22
Frequency and/or phase compensated microelectromechanical oscillator App 20080164953 - Partridge; Aaron ; et al.	2008-07-10
Frequency and/or phase compensated microelectromechanical oscillator App 20080150642 - Partridge; Aaron ; et al.	2008-06-26
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same App 20080108165 - Lutz; Markus ; et al.	2008-05-08
Microelectromechanical oscillator and method of operating same Grant 7,369,004 - Partridge , et al. May 6, 2	2008-05-06
Temperature compensation for silicon MEMS resonator Grant 7,362,197 - Lutz , et al. April 22, 2	2008-04-22
Microelectromechanical systems having trench isolated contacts, and methods for fabricating same Grant 7,352,040 - Partridge , et al. April 1, 2	2008-04-01
Breath-mode ring resonator structure, and method of designing, operating and using same Grant 7,323,952 - Pan , et al. January 29, 2	2008-01-29
In-plane mechanically coupled microelectromechanical tuning fork resonators Grant 7,319,372 - Pan , et al. January 15, 2	2008-01-15
Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same App 20080007362 - Partridge; Aaron ; et al.	2008-01-10
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same Grant 7,317,233 - Lutz , et al. January 8, 2	2008-01-08
Temperature controlled MEMS resonator and method for controlling resonator frequency App 20070296527 - Lutz; Markus ; et al.	2007-12-27
Microelectromechanical resonator structure, and method of designing, operating and using same App 20070296526 - Lutz; Markus ; et al.	2007-12-27
Microelectromechanical oscillator having temperature measurement system, and method of operating same App 20070290763 - Partridge; Aaron ; et al.	2007-12-20
Microelectromechanical Oscillator and method of operating same App 20070290764 - Partridge; Aaron ; et al.	2007-12-20
Microelectromechanical systems having stored charge and methods for fabricating and using same App 20070281379 - Stark; Brian H. ; et al.	2007-12-06
Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same App 20070281387 - Lutz; Markus ; et al.	2007-12-06
Microelectromechanical systems, and devices having thin film encapsulated mechanical structures Grant 7,288,824 - Partridge , et al. October 30, 2	2007-10-30
Temperature controlled MEMS resonator and method for controlling resonator frequency Grant 7,268,646 - Lutz , et al. September 11, 2	2007-09-11
Micromechanical component and corresponding production method Grant 7,259,436 - Offenberg , et al. August 21, 2	2007-08-21
Temperature compensation for silicon MEMS resonator App 20070188269 - Lutz; Markus ; et al.	2007-08-16
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070181962 - Partridge; Aaron ; et al.	2007-08-09
Method for release of surface micromachined structures in an epitaxial reactor App 20070178703 - Partridge; Aaron ; et al.	2007-08-02
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170531 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170532 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170438 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070172976 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170440 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170529 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170528 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170439 - Partridge; Aaron ; et al.	2007-07-26
Wafer encapsulated microelectromechanical structure and method of manufacturing same App 20070170530 - Partridge; Aaron ; et al.	2007-07-26
MEMS resonator array structure and method of operating and using same Grant 7,227,432 - Lutz , et al. June 5, 2	2007-06-05
Frequency and/or phase compensated microelectromechanical oscillator Grant 7,224,236 - Partridge , et al. May 29, 2	2007-05-29
Frequency and/or phase compensated microelectromechanical oscillator Grant 7,221,230 - Partridge , et al. May 22, 2	2007-05-22
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems Grant 7,221,033 - Lutz , et al. May 22, 2	2007-05-22
Method for adjusting the frequency of a MEMS resonator Grant 7,221,241 - Lutz , et al. May 22, 2	2007-05-22
Microelectromechanical resonator structure, and method of designing, operating and using same Grant 7,205,867 - Lutz , et al. April 17, 2	2007-04-17
Temperature compensation for silicon MEMS resonator Grant 7,202,761 - Lutz , et al. April 10, 2	2007-04-10
Breath-mode ring resonator structure, and method of designing, operating and using same App 20070052498 - Pan; Zhiyu ; et al.	2007-03-08
Method of making a nanogap for variable capacitive elements, and device having a nanogap Grant 7,172,917 - Partridge , et al. February 6, 2	2007-02-06
In-plane mechanically coupled microelectromechanical tuning fork resonators App 20070013464 - Pan; Zhiyu ; et al.	2007-01-18
Method for determining vehicle velocity Grant 7,164,973 - Arndt , et al. January 16, 2	2007-01-16
MEMS resonator array structure and method of operating and using same App 20070001783 - Lutz; Markus ; et al.	2007-01-04
Micromechanical component and method for production thereof App 20060270088 - Fischer; Frank ; et al.	2006-11-30
Microelectromechanical resonator structure, and method of designing, operating and using same App 20060261915 - Lutz; Markus ; et al.	2006-11-23
Integrated getter area for wafer level encapsulated microelectromechanical systems App 20060258039 - Lutz; Markus ; et al.	2006-11-16
Method for adjusting the frequency of a MEMS resonator App 20060255881 - Lutz; Markus ; et al.	2006-11-16
Micromechanical rotational rate sensor Grant 7,134,337 - Willig , et al. November 14, 2	2006-11-14
Anti-stiction technique for electromechanical systems and electromechanical device employing same App 20060246631 - Lutz; Markus ; et al.	2006-11-02
Integrated getter area for wafer level encapsulated microelectromechanical systems Grant 7,115,436 - Lutz , et al. October 3, 2	2006-10-03
Method for adjusting the frequency of a MEMS resonator Grant 7,102,467 - Lutz , et al. September 5, 2	2006-09-05
Temperature compensation for silicon MEMS resonator App 20060186971 - Lutz; Markus ; et al.	2006-08-24
Microelectromechanical systems and devices having thin film encapsulated mechanical structures Grant 7,075,160 - Partridge , et al. July 11, 2	2006-07-11
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems Grant 7,074,637 - Lutz , et al. July 11, 2	2006-07-11
Temperature compensation for silicon MEMS resonator Grant 7,071,793 - Lutz , et al. July 4, 2	2006-07-04
Temperature controlled MEMS resonator and method for controlling resonator frequency Grant 7,068,125 - Lutz , et al. June 27, 2	2006-06-27
Micromechanical component and method for producing the same Grant 7,063,796 - Lutz June 20, 2	2006-06-20
Microelectromechanical systems, and methods for encapsulating and fabricating same App 20060108652 - Partridge; Aaron ; et al.	2006-05-25
Micromechanical rotational rate sensor App 20060107738 - Willig; Rainer ; et al.	2006-05-25
Micromechanical component and method for producing the same Grant 7,041,225 - Lutz May 9, 2	2006-05-09
Roof component, in particular an inner liner for a vehicle roof, and a method of producing same Grant 7,000,980 - Lutz , et al. February 21, 2	2006-02-21
Frequency and/or phase compensated microelectromechanical oscillator App 20060033589 - Partridge; Aaron ; et al.	2006-02-16
Temperature controlled MEMS resonator and method for controlling resonator frequency App 20060033594 - Lutz; Markus ; et al.	2006-02-16
Frequency and/or phase compensated microelectromechanical oscillator Grant 6,995,622 - Partridge , et al. February 7, 2	2006-02-07
Frequency and/or phase compensated microelectromechanical oscillator App 20060022764 - Partridge; Aaron ; et al.	2006-02-02
Temperature compensation for silicon MEMS resonator Grant 6,987,432 - Lutz , et al. January 17, 2	2006-01-17
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems App 20050260783 - Lutz, Markus ; et al.	2005-11-24
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems App 20050255645 - Lutz, Markus ; et al.	2005-11-17
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same App 20050253209 - Lutz, Markus ; et al.	2005-11-17
Method for adjusting the frequency of a MEMS resonator App 20050242904 - Lutz, Markus ; et al.	2005-11-03
Method for joining a silicon plate to a second plate Grant 6,955,975 - Reichenbach , et al. October 18, 2	2005-10-18
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same Grant 6,952,041 - Lutz , et al. October 4, 2	2005-10-04
Temperature Controlled Mems Resonator And Method For Controlling Resonator Frequency App 20050195050 - Lutz, Markus ; et al.	2005-09-08
Micromechanical structure, in particular for an acceleration sensor Grant 6,940,632 - Kipp , et al. September 6, 2	2005-09-06
Method for release of surface micromachined structures in an epitaxial reactor Grant 6,939,809 - Partridge , et al. September 6, 2	2005-09-06
Method of fabricating microelectromechanical systems and devices having trench isolated contacts Grant 6,936,491 - Partridge , et al. August 30, 2	2005-08-30
Integrated getter area for wafer level encapsulated microelectromechanical systems App 20050179099 - Lutz, Markus ; et al.	2005-08-18
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems Grant 6,930,367 - Lutz , et al. August 16, 2	2005-08-16
Episeal pressure sensor and method for making an episeal pressure sensor Grant 6,928,879 - Partridge , et al. August 16, 2	2005-08-16
Temperature compensation for silicon MEMS resonator App 20050162239 - Lutz, Markus ; et al.	2005-07-28
Microelectromechanical systems having trench isolated contacts, and methods for fabricating same App 20050156260 - Partridge, Aaron ; et al.	2005-07-21
Frequency and/or phase compensated microelectromechanical oscillator App 20050151592 - Partridge, Aaron ; et al.	2005-07-14
Episeal pressure sensor and method for making an episeal pressure sensor App 20050142688 - Partridge, Aaron ; et al.	2005-06-30
Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics App 20050106318 - Partridge, Aaron ; et al.	2005-05-19
Lawful interception gateway App 20050094651 - Lutz, Markus ; et al.	2005-05-05
Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems App 20050095833 - Lutz, Markus ; et al.	2005-05-05
Frequency compensated oscillator design for process tolerances App 20050073078 - Lutz, Markus ; et al.	2005-04-07
Roof module for a motor vehicle Grant 6,851,744 - Niebuhr , et al. February 8, 2	2005-02-08
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same App 20050019974 - Lutz, Markus ; et al.	2005-01-27
Gap tuning for surface micromachined structures in an epitaxial reactor App 20050014374 - Partridge, Aaron ; et al.	2005-01-20
Microelectromechanical systems having trench isolated contacts, and methods for fabricating same App 20040245586 - Partridge, Aaron ; et al.	2004-12-09
Microelectromechanical systems, and methods for encapsualting and fabricating same App 20040248344 - Partridge, Aaron ; et al.	2004-12-09
Gap tuning for surface micromachined structures in an epitaxial reactor Grant 6,808,953 - Partridge , et al. October 26, 2	2004-10-26
Temperature compensation for silicon MEMS resonator App 20040207489 - Lutz, Markus ; et al.	2004-10-21
Method of Making a Nanogap for Variable Capacitive Elements, and Device having a Nanogap App 20040209435 - Partridge, Aaron ; et al.	2004-10-21
Method for determining vehicle velocity App 20040210354 - Arndt, Dietmar ; et al.	2004-10-21
Electromechanical system having a controlled atmosphere, and method of fabricating same App 20040183214 - Partridge, Aaron ; et al.	2004-09-23
Episeal pressure sensor and method for making an episeal pressure sensor App 20040163476 - Partridge, Aaron ; et al.	2004-08-26
Micromechanical roatational rate sensor App 20040154398 - Willig, Rainer ; et al.	2004-08-12
SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the method Grant 6,762,072 - Lutz July 13, 2	2004-07-13
Gap tuning for surface micromachined structures in an epitaxial reactor App 20040124483 - Partridge, Aaron ; et al.	2004-07-01
Method for release of surface micromachined structures in an epitaxial reactor App 20040124481 - Partridge, Aaron ; et al.	2004-07-01
Rotation speed sensor Grant 6,752,017 - Willig , et al. June 22, 2	2004-06-22
Method for joining a silicon plate to a second plate App 20040082145 - Reichenbach, Frank ; et al.	2004-04-29
Tire pressure and parameter monitoring system and method using accelerometers Grant 6,725,136 - Lutz , et al. April 20, 2	2004-04-20
Micromechanical component and method for producing the same App 20040050161 - Lutz, Markus	2004-03-18
Rotation rate sensor Grant 6,705,164 - Willig , et al. March 16, 2	2004-03-16
Rotational speed sensor Grant 6,691,571 - Willig , et al. February 17, 2	2004-02-17
Flip chip packaging process using laser-induced metal bonding technology, system utilizing the method, and device created by the method App 20030224581 - Lutz, Markus ; et al.	2003-12-04
Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor Grant 6,654,424 - Thomae , et al. November 25, 2	2003-11-25
Tire pressure and parameter monitoring system and method using accelerometers App 20030187555 - Lutz, Markus ; et al.	2003-10-02
Rotational speed sensor App 20030183007 - Willig, Rainer ; et al.	2003-10-02
Micromechanical component and method for producing the same App 20030173330 - Lutz, Markus	2003-09-18
SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the method App 20030170966 - Lutz, Markus	2003-09-11
Rotation speed sensor App 20030164040 - Willig, Rainer ; et al.	2003-09-04
Rotation rate sensor App 20030154788 - Willig, Rainer ; et al.	2003-08-21
Micromechanical spring structure, in particular, for a rotation rate sensor Grant 6,571,629 - Kipp , et al. June 3, 2	2003-06-03
Roof component, in particular an inner liner for a vehicle roof, and a method of producing same App 20030057739 - Lutz, Markus ; et al.	2003-03-27
Micromechanical component and corresponding production method App 20030049878 - Offenberg, Michael ; et al.	2003-03-13
Integrated adjustable capacitor Grant 6,524,923 - Funk , et al. February 25, 2	2003-02-25
Integrated pressure sensor Grant 6,521,965 - Lutz February 18, 2	2003-02-18
Sensor element Grant 6,462,566 - Schoefthaler , et al. October 8, 2	2002-10-08
Integrated adjustable capacitor App 20020135047 - Funk, Karsten ; et al.	2002-09-26
Decoupled multi-disk gyroscope Grant 6,443,008 - Funk , et al. September 3, 2	2002-09-03
Manufacturing method for micromechanical component Grant 6,187,607 - Offenberg , et al. February 13, 2	2001-02-13
Micromechanical comb structure Grant 6,122,964 - Mohaupt , et al. September 26, 2	2000-09-26
Method for manufacturing a rate-of-rotation sensor Grant 6,117,701 - Buchan , et al. September 12, 2	2000-09-12
Wafer stack and method of producing sensors Grant 6,106,735 - Kurle , et al. August 22, 2	2000-08-22
Acceleration sensor Grant 5,959,208 - Muenzel , et al. September 28, 1	1999-09-28
Method of producing acceleration sensors Grant 5,937,275 - Munzel , et al. August 10, 1	1999-08-10
Micromechanical rate of rotation sensor having ring with drive element and detection element Grant 5,889,207 - Lutz March 30, 1	1999-03-30
Rotary speed sensor Grant 5,728,936 - Lutz March 17, 1	1998-03-17
Process for manufacturing a sensor Grant 5,723,353 - Muenzel , et al. March 3, 1	1998-03-03
Angular velocity sensor with built-in limit stops Grant 5,721,377 - Kurle , et al. February 24, 1	1998-02-24
Rotational rate sensor with two acceleration sensors Grant 5,703,293 - Zabler , et al. December 30, 1	1997-12-30
Sensor comprising multilayer substrate Grant 5,631,422 - Sulzberger , et al. May 20, 1	1997-05-20
Acceleration sensor Grant 5,627,317 - Offenberg , et al. May 6, 1	1997-05-06
Rate-of-rotation sensor Grant 5,604,312 - Lutz February 18, 1	1997-02-18