Patent | Date |
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Photo-detecting Apparatus App 20220310685 - Na; Yun-Chung ;   et al. | 2022-09-29 |
Photo-detecting apparatus with multi-reset mechanism Grant 11,448,830 - Na , et al. September 20, 2 | 2022-09-20 |
Photo-Detecting Apparatus With Low Dark Current App 20220262974 - Lu; Yen-Cheng ;   et al. | 2022-08-18 |
Photodetecting Device For Detecting Different Wavelengths App 20220120611 - LU; YEN-CHENG ;   et al. | 2022-04-21 |
Photodetecting device for detecting different wavelengths Grant 11,255,724 - Lu , et al. February 22, 2 | 2022-02-22 |
Photo-detecting Apparatus With Low Dark Current App 20210391370 - Lu; Yen-Cheng ;   et al. | 2021-12-16 |
Light-sensing Apparatus And Light-sensing Method Thereof App 20210373168 - Cheng; Szu-Lin ;   et al. | 2021-12-02 |
Light-sensing apparatus and light-sensing method thereof Grant 11,105,928 - Cheng , et al. August 31, 2 | 2021-08-31 |
Method to mitigate defect printability for ID pattern Grant 11,086,227 - Lu , et al. August 10, 2 | 2021-08-10 |
Extreme ultraviolet lithography system, device, and method for printing low pattern density features Grant 10,976,655 - Lu , et al. April 13, 2 | 2021-04-13 |
Photo-detecting Apparatus With Low Dark Current App 20210066529 - LU; Yen-Cheng ;   et al. | 2021-03-04 |
Photo-current Amplification Apparatus App 20210058042 - Na; Yun-Chung ;   et al. | 2021-02-25 |
Extreme Ultraviolet Lithography System, Device, and Method for Printing Low Pattern Density Features App 20200319545 - Lu; Yen-Cheng ;   et al. | 2020-10-08 |
Light-sensing Apparatus And Light-sensing Method Thereof App 20200319345 - Cheng; Szu-Lin ;   et al. | 2020-10-08 |
Method to Mitigate Defect Printability for ID Pattern App 20200310250 - Lu; Yen-Cheng ;   et al. | 2020-10-01 |
Optoelectronic Device With Increased Open-circuit Voltage App 20200274017 - Na; Yun-Chung ;   et al. | 2020-08-27 |
Photodetecting Device For Detecting Different Wavelengths App 20200217715 - LU; YEN-CHENG ;   et al. | 2020-07-09 |
Extreme ultraviolet lithography system, device, and method for printing low pattern density features Grant 10,691,014 - Lu , et al. | 2020-06-23 |
Photo-detecting Apparatus With Multi-reset Mechanism Cross-reference To Related Applications App 20200192032 - Na; Yun-Chung ;   et al. | 2020-06-18 |
Semiconductor Device With Low Dark Noise App 20200194480 - Na; Yun-Chung ;   et al. | 2020-06-18 |
Method to mitigate defect printability for ID pattern Grant 10,684,552 - Lu , et al. | 2020-06-16 |
EUV lithography system and method with optimized throughput and stability Grant 10,520,823 - Lu , et al. Dec | 2019-12-31 |
Extreme Ultraviolet Lithography System, Device, and Method for Printing Low Pattern Density Features App 20190121228 - Lu; Yen-Cheng ;   et al. | 2019-04-25 |
EUV Lithography System and Method with Optimized Throughput and Stability App 20190121241 - Lu; Yen-Cheng ;   et al. | 2019-04-25 |
Extreme ultraviolet lithography system, device, and method for printing low pattern density features Grant 10,162,257 - Lu , et al. Dec | 2018-12-25 |
EUV lithography system and method with optimized throughput and stability Grant 10,156,790 - Lu , et al. Dec | 2018-12-18 |
Method to Mitigate Defect Printability for ID Pattern App 20180253008 - Lu; Yen-Cheng ;   et al. | 2018-09-06 |
Extreme Ultraviolet Lithography System, Device, And Method For Printing Low Pattern Density Features App 20180173089 - Lu; Yen-Cheng ;   et al. | 2018-06-21 |
Extreme ultraviolet lithography process and mask Grant 9,996,013 - Lu , et al. June 12, 2 | 2018-06-12 |
Method to mitigate defect printability for ID pattern Grant 9,964,850 - Lu , et al. May 8, 2 | 2018-05-08 |
Extreme ultraviolet lithography process and mask Grant 9,829,785 - Lu , et al. November 28, 2 | 2017-11-28 |
EUV Lithography System and Method with Optimized Throughput and Stability App 20170277040 - Lu; Yen-Cheng ;   et al. | 2017-09-28 |
Extreme ultraviolet lithography process Grant 9,760,015 - Yu , et al. September 12, 2 | 2017-09-12 |
Via definition scheme Grant 9,748,133 - Lu , et al. August 29, 2 | 2017-08-29 |
Extreme ultraviolet lithography process and mask Grant 9,733,562 - Lu , et al. August 15, 2 | 2017-08-15 |
Method to define multiple layer patterns with a single exposure by charged particle beam lithography Grant 9,726,983 - Lu , et al. August 8, 2 | 2017-08-08 |
Extreme ultraviolet lithography process and mask Grant 9,690,186 - Lu , et al. June 27, 2 | 2017-06-27 |
Photomask for forming multiple layer patterns with a single exposure Grant 9,685,367 - Lu , et al. June 20, 2 | 2017-06-20 |
EUV lithography system and method with optimized throughput and stability Grant 9,678,431 - Lu , et al. June 13, 2 | 2017-06-13 |
Method for forming different patterns in a semiconductor structure using a single mask Grant 9,679,803 - Huang , et al. June 13, 2 | 2017-06-13 |
Photomask For Forming Multiple Layer Patterns With A Single Exposure App 20170110366 - LU; Yen-Cheng ;   et al. | 2017-04-20 |
Extreme ultraviolet lithography collector contamination reduction Grant 9,625,824 - Lu , et al. April 18, 2 | 2017-04-18 |
Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity Grant 9,618,837 - Lu , et al. April 11, 2 | 2017-04-11 |
Method of fabricating an integrated circuit with enhanced defect repairability Grant 9,612,531 - Lu , et al. April 4, 2 | 2017-04-04 |
Extreme ultraviolet light (EUV) photomasks and fabrication methods thereof Grant 9,588,419 - Lu , et al. March 7, 2 | 2017-03-07 |
Extreme Ultraviolet Lithography Process And Mask With Reduced Shadow Effect And Enhanced Intensity App 20170052441 - LU; YEN-CHENG ;   et al. | 2017-02-23 |
Method and system for reducing pole imbalance by adjusting exposure intensity Grant 9,575,412 - Lu , et al. February 21, 2 | 2017-02-21 |
Method To Define Multiple Layer Patterns With A Single Exposure By Charged Particle Beam Lithography App 20170045827 - Lu; Yen-Cheng ;   et al. | 2017-02-16 |
Extreme ultraviolet lithography mask and multilayer deposition method for fabricating same Grant 9,557,636 - Lu , et al. January 31, 2 | 2017-01-31 |
Photomask with three states for forming multiple layer patterns with a single exposure Grant 9,535,316 - Lu , et al. January 3, 2 | 2017-01-03 |
Extreme ultraviolet lithography process to print low pattern density features Grant 9,535,334 - Lu , et al. January 3, 2 | 2017-01-03 |
Extreme Ultraviolet Lithography Process App 20160377983 - YU; Shinn-Sheng ;   et al. | 2016-12-29 |
Extreme ultraviolet lithography process and mask Grant 9,529,272 - Lu , et al. December 27, 2 | 2016-12-27 |
Via Definition Scheme App 20160329240 - Lu; Yen-Cheng ;   et al. | 2016-11-10 |
Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity Grant 9,488,905 - Lu , et al. November 8, 2 | 2016-11-08 |
Extreme Ultraviolet Lithography Collector Contamination Reduction App 20160320708 - LU; YEN-CHENG ;   et al. | 2016-11-03 |
Extreme Ultraviolet Lithography Process And Mask App 20160306272 - Lu; Yen-Cheng ;   et al. | 2016-10-20 |
EUV Lithography System and Method with Optimized Throughput and Stability App 20160274465 - LU; YEN-CHENG ;   et al. | 2016-09-22 |
Extreme ultraviolet lithography process and mask Grant 9,448,491 - Lu , et al. September 20, 2 | 2016-09-20 |
Extreme ultraviolet lithography process Grant 9,442,387 - Lu , et al. September 13, 2 | 2016-09-13 |
Mask for extreme ultraviolet lithography and method of fabricating same Grant 9,442,365 - Lu , et al. September 13, 2 | 2016-09-13 |
Extreme ultraviolet lithography process and mask Grant 9,442,384 - Lu , et al. September 13, 2 | 2016-09-13 |
Lithography method and structure for resolution enhancement with a two-state mask Grant 9,417,534 - Lu , et al. August 16, 2 | 2016-08-16 |
Via definition scheme Grant 9,412,647 - Lu , et al. August 9, 2 | 2016-08-09 |
Method to define multiple layer patterns with a single exposure by charged particle beam lithography Grant 9,405,195 - Lu , et al. August 2, 2 | 2016-08-02 |
Lithography Method and Structure for Resolution Enhancement with a Two-State Mask App 20160209757 - Lu; Yen-Cheng ;   et al. | 2016-07-21 |
Extreme ultraviolet lithography process and mask Grant 9,377,696 - Lu , et al. June 28, 2 | 2016-06-28 |
Extreme Ultraviolet Lithography Process and Mask with Reduced Shadow Effect and Enhanced Intensity App 20160161839 - LU; YEN-CHENG ;   et al. | 2016-06-09 |
Extreme ultraviolet lithography process and mask Grant 9,304,390 - Lu , et al. April 5, 2 | 2016-04-05 |
Mask for use in lithography Grant 9,285,671 - Lu , et al. March 15, 2 | 2016-03-15 |
Method of fabricating mask Grant 9,280,046 - Yen , et al. March 8, 2 | 2016-03-08 |
Extreme Ultraviolet Lithography Process and Mask App 20160048071 - LU; YEN-CHENG ;   et al. | 2016-02-18 |
Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity Grant 9,261,774 - Lu , et al. February 16, 2 | 2016-02-16 |
Method to Mitigate Defect Printability for ID Pattern App 20160033866 - Lu; Yen-Cheng ;   et al. | 2016-02-04 |
Metal and via definition scheme Grant 9,252,048 - Lu , et al. February 2, 2 | 2016-02-02 |
Extreme ultraviolet lithography process and mask Grant 9,244,366 - Lu , et al. January 26, 2 | 2016-01-26 |
Method for integrated circuit patterning Grant 9,229,326 - Lu , et al. January 5, 2 | 2016-01-05 |
Lithography and mask for resolution enhancement Grant 9,223,197 - Yu , et al. December 29, 2 | 2015-12-29 |
Extreme Ultraviolet Lithography Process and Mask App 20150346596 - Lu; Yen-Cheng ;   et al. | 2015-12-03 |
Method for mask fabrication and repair Grant 9,195,135 - Lu , et al. November 24, 2 | 2015-11-24 |
Extreme Ultraviolet Light (EUV) Photomasks and Fabrication Methods Thereof App 20150331307 - Lu; Yen-Cheng ;   et al. | 2015-11-19 |
Extreme ultraviolet lithography process and mask Grant 9,182,659 - Lu , et al. November 10, 2 | 2015-11-10 |
Method to Define Multiple Layer Patterns with a Single Exposure by Charged Particle Beam Lithography App 20150287596 - Lu; Yen-Cheng ;   et al. | 2015-10-08 |
Method and System for Reducing Pole Imbalance by Adjusting Exposure Intensity App 20150277234 - Lu; Yen-Cheng ;   et al. | 2015-10-01 |
Extreme ultraviolet lithography process and mask Grant 9,146,459 - Lu , et al. September 29, 2 | 2015-09-29 |
Method of Fabricating an Integrated Circuit with Enhanced Defect Repairability App 20150268561 - LU; YEN-CHENG ;   et al. | 2015-09-24 |
Method for Integrated Circuit Patterning App 20150262836 - LU; YEN-CHENG ;   et al. | 2015-09-17 |
Extreme ultraviolet lithography process and mask Grant 9,122,166 - Lu , et al. September 1, 2 | 2015-09-01 |
Extreme ultraviolet lithography mask Grant 9,116,435 - Yu , et al. August 25, 2 | 2015-08-25 |
Extreme Ultraviolet Lithography Process And Mask App 20150227059 - LU; YEN-CHENG ;   et al. | 2015-08-13 |
Extreme ultraviolet light (EUV) photomasks and fabrication methods thereof Grant 9,091,947 - Lu , et al. July 28, 2 | 2015-07-28 |
Method For Forming Different Patterns In A Semiconductor Structure Using A Single Mask App 20150200130 - HUANG; Tsung-Min ;   et al. | 2015-07-16 |
Method to define multiple layer patterns with a single exposure by E-beam lithography Grant 9,081,312 - Lu , et al. July 14, 2 | 2015-07-14 |
Extreme ultraviolet (EUV) mask, method of fabricating the EUV mask and method of inspecting the EUV mask Grant 9,081,288 - Shih , et al. July 14, 2 | 2015-07-14 |
Multiple exposures in extreme ultraviolet lithography Grant 9,075,313 - Yu , et al. July 7, 2 | 2015-07-07 |
Extreme Ultraviolet Lithography Process and Mask App 20150168845 - Lu; Yen-Cheng ;   et al. | 2015-06-18 |
Extreme Ultraviolet Lithography Process and Mask with Reduced Shadow Effect and Enhanced Intensity App 20150147687 - Lu; Yen-Cheng ;   et al. | 2015-05-28 |
Extreme Ultraviolet Lithography Process And Mask App 20150147686 - Lu; Yen-Cheng ;   et al. | 2015-05-28 |
Extreme ultraviolet lithography process and mask Grant 9,034,569 - Lu , et al. May 19, 2 | 2015-05-19 |
Extreme Ultraviolet Lithography Process to Print Low Pattern Density Features App 20150116685 - Lu; Yen-Cheng ;   et al. | 2015-04-30 |
Extreme Ultraviolet Lithography Process and Mask App 20150098069 - Lu; Yen-Cheng ;   et al. | 2015-04-09 |
Extreme Ultraviolet Lithography Process And Mask App 20150085268 - LU; Yen-Cheng ;   et al. | 2015-03-26 |
Via Definition Scheme App 20150069622 - Lu; Yen-Cheng ;   et al. | 2015-03-12 |
Metal and Via Definition Scheme App 20150072519 - Lu; Yen-Cheng ;   et al. | 2015-03-12 |
Extreme Ultraviolet Lithography Process and Mask App 20150072271 - Lu; Yen-Cheng ;   et al. | 2015-03-12 |
Extreme Ultraviolet (EUV) Mask, Method Of Fabricating The EUV Mask And Method Of Inspecting The EUV Mask App 20150037712 - Shih; Chih-Tsung ;   et al. | 2015-02-05 |
Extreme Ultraviolet Light (euv) Photomasks And Fabrication Methods Thereof App 20150024305 - Lu; Yen-Cheng ;   et al. | 2015-01-22 |
Extreme Ultraviolet Lithography Mask App 20150009482 - YU; SHINN-SHENG ;   et al. | 2015-01-08 |
Extreme Ultraviolet Lithography Mask and Multilayer Deposition Method for Fabricating Same App 20140377693 - Lu; Yen-Cheng ;   et al. | 2014-12-25 |
Photomask With Three States For Forming Multiple Layer Patterns With A Single Exposure App 20140342564 - Lu; Yen-Cheng ;   et al. | 2014-11-20 |
Method to Define Multiple Layer Patterns With a Single Exposure by E-Beam Lithography App 20140342272 - Lu; Yen-Cheng ;   et al. | 2014-11-20 |
Lithography Method and Structure for Resolution Enhancement with a Two-State Mask App 20140285789 - Lu; Yen-Cheng ;   et al. | 2014-09-25 |
Extreme ultraviolet lithography process and mask Grant 8,841,047 - Yu , et al. September 23, 2 | 2014-09-23 |
Method For Mask Fabrication And Repair App 20140272680 - Lu; Yen-Cheng ;   et al. | 2014-09-18 |
Multiple Exposures in Extreme Ultraviolet Lithography App 20140272720 - Yu; Shinn-Sheng ;   et al. | 2014-09-18 |
Mask for Extreme Ultraviolet Lithography and Method of Fabricating Same App 20140272686 - LU; YEN-CHENG ;   et al. | 2014-09-18 |
Lithography and Mask for Resolution Enhancement App 20140268087 - Yu; Shinn-Sheng ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Process and Mask App 20140268091 - LU; YEN-CHENG ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Process and Mask App 20140268092 - LU; YEN-CHENG ;   et al. | 2014-09-18 |
Method Of Fabricating Mask App 20140272683 - Yen; Anthony ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Process and Mask App 20140268086 - LU; YEN-CHENG ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Process and Mask App 20140272679 - Lu; Yen-Cheng ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Process and Mask App 20140272721 - LU; YEN-CHENG ;   et al. | 2014-09-18 |
Extreme Ultraviolet Lithography Projection Optics System and Associated Methods App 20140253892 - Yu; Shinn-Sheng ;   et al. | 2014-09-11 |
Extreme ultraviolet lithography mask and multilayer deposition method for fabricating same Grant 8,828,625 - Lu , et al. September 9, 2 | 2014-09-09 |
Extreme Ultraviolet Lithography Process App 20140218713 - Lu; Yen-Cheng ;   et al. | 2014-08-07 |
Method to define multiple layer patterns using a single exposure Grant 8,791,024 - Lu , et al. July 29, 2 | 2014-07-29 |
Method for mask fabrication and repair Grant 8,785,084 - Lu , et al. July 22, 2 | 2014-07-22 |
Phase shift mask for extreme ultraviolet lithography and method of fabricating same Grant 8,765,330 - Shih , et al. July 1, 2 | 2014-07-01 |
Mask for Use in Lithography App 20140113222 - Lu; Yen-Cheng ;   et al. | 2014-04-24 |
Method For Mask Fabrication And Repair App 20140065521 - Lu; Yen-Cheng ;   et al. | 2014-03-06 |
Phase Shift Mask for Extreme Ultraviolet Lithography and Method of Fabricating Same App 20140038086 - Shih; Chih-Tsung ;   et al. | 2014-02-06 |
Extreme Ultraviolet Lithography Mask and Multilayer Deposition Method for Fabricating Same App 20140038090 - Lu; Yen-Cheng ;   et al. | 2014-02-06 |
Extreme ultraviolet lithography process and mask Grant 8,628,897 - Lu , et al. January 14, 2 | 2014-01-14 |
Extreme Ultraviolet Lithography Process And Mask App 20140011120 - Lu; Yen-Cheng ;   et al. | 2014-01-09 |
Extreme Ultraviolet Lithography Process And Mask App 20130260288 - Yu; Shinn-Sheng ;   et al. | 2013-10-03 |
Method for controlling color contrast of a multi-wavelength light-emitting diode Grant 7,875,478 - Yeh , et al. January 25, 2 | 2011-01-25 |
Localized Surface Plasmon Resonance Sensor And Fabrication Method Thereof App 20110013192 - Yang; Chih-Chung ;   et al. | 2011-01-20 |
Light-emitting Device App 20100314606 - Yang; Chih-Chung ;   et al. | 2010-12-16 |
Light-Emitting Device App 20090114940 - Yang; Chih-Chung ;   et al. | 2009-05-07 |
Manufacturing method of poly-wavelength light-emitting diode of utilizing nano-crystals and the light-emitting device therefor App 20080157056 - Yeh; Dong-Ming ;   et al. | 2008-07-03 |
Method for controlling color contrast of a multi-wavelength light-emitting diode App 20080035909 - Lu; Chih-Feng ;   et al. | 2008-02-14 |