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Method for temperature control of a component Grant 11,372,341 - Lof , et al. June 28, 2 | 2022-06-28 |
Method For Temperature Control Of A Component App 20210286272 - Lof; Joeri ;   et al. | 2021-09-16 |
Method for temperature control of a component Grant 11,022,903 - Lof , et al. June 1, 2 | 2021-06-01 |
Lithographic apparatus and device manufacturing method Grant 10,962,891 - Lof , et al. March 30, 2 | 2021-03-30 |
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Method for temperature control of a component App 20200233318 - Lof; Joeri ;   et al. | 2020-07-23 |
Lithographic Apparatus And Device Manufacturing Method App 20200225590 - LOF; Joeri ;   et al. | 2020-07-16 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
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Lithographic apparatus and device manufacturing method Grant 10,503,084 - Lof , et al. Dec | 2019-12-10 |
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Lithographic Apparatus And Device Manufacturing Method App 20190302631 - LOF; Joeri ;   et al. | 2019-10-03 |
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Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator Grant 10,372,045 - Akkermans , et al. | 2019-08-06 |
Lithographic Apparatus And Device Manufacturing Method App 20190212661 - LOF; Joeri ;   et al. | 2019-07-11 |
Substrate handling system and lithographic apparatus Grant 10,345,723 - Vervoordeldonk , et al. July 9, 2 | 2019-07-09 |
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Lithographic Apparatus And Device Manufacturing Method App 20190086821 - STREEFKERK; Bob ;   et al. | 2019-03-21 |
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Substrate Handling System And Lithographic Apparatus App 20190033733 - VERVOORDELDONK; Michael Johannes ;   et al. | 2019-01-31 |
Lithographic apparatus and device manufacturing method Grant 10,191,389 - Lof , et al. Ja | 2019-01-29 |
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Lithographic apparatus and device manufacturing method Grant 10,151,989 - Streefkerk , et al. Dec | 2018-12-11 |
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Lithographic Apparatus And Device Manufacturing Method App 20180129143 - HOOGENDAM; Christiaan Alexander ;   et al. | 2018-05-10 |
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Lithographic Apparatus And Device Manufacturing Method App 20170343904 - LOF; Joeri ;   et al. | 2017-11-30 |
Lithographic Apparatus And Device Manufacturing Method App 20170329240 - STREEFKERK; Bob ;   et al. | 2017-11-16 |
Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
Lithographic Apparatus And Device Manufacturing Method App 20170242347 - HOOGENDAM; Christiaan Alexander ;   et al. | 2017-08-24 |
Lithographic apparatus and device manufacturing method Grant 9,740,107 - Lof , et al. August 22, 2 | 2017-08-22 |
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Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic apparatus and device manufacturing method Grant 9,588,442 - Hoogendam , et al. March 7, 2 | 2017-03-07 |
Lithographic Apparatus And Device Manufacturing Method App 20170010545 - LOF; Joeri ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Sensor System, Substrate Handling System And Lithographic Apparatus App 20160370716 - LOF; Joeri ;   et al. | 2016-12-22 |
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Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor Grant 9,329,500 - Staals , et al. May 3, 2 | 2016-05-03 |
Lithographic Apparatus And Device Manufacturing Method App 20160062248 - LOF; Joeri ;   et al. | 2016-03-03 |
Backscatter reduction in thin electron detectors Grant 9,269,531 - Stekelenburg , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And Device Manufacturing Method App 20150362844 - LOF; Joeri ;   et al. | 2015-12-17 |
Lithographic Apparatus And Device Manufacturing Method App 20150338748 - HOOGENDAM; Christiaan Alexander ;   et al. | 2015-11-26 |
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Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20150261102 - LOF; Joeri ;   et al. | 2015-09-17 |
Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator App 20150234297 - Akkermans; Johannes Antonius Gerardus ;   et al. | 2015-08-20 |
Lithographic apparatus and device manufacturing method Grant 9,097,987 - Hoogendam , et al. August 4, 2 | 2015-08-04 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet Grant 9,091,940 - Derksen , et al. July 28, 2 | 2015-07-28 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ;   et al. | 2015-06-18 |
Lithographic apparatus and device manufacturing method Grant 9,057,967 - Lof , et al. June 16, 2 | 2015-06-16 |
Lithographic Apparatus And Device Manufacturing Method App 20150070668 - STREEFKERK; Bob ;   et al. | 2015-03-12 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus Grant 8,975,599 - Staals , et al. March 10, 2 | 2015-03-10 |
Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
Lithographic apparatus and device manufacturing method Grant 8,913,223 - Streefkerk , et al. December 16, 2 | 2014-12-16 |
Lithographic apparatus and device manufacturing method Grant 8,823,920 - Streefkerk , et al. September 2, 2 | 2014-09-02 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure Grant 8,797,503 - Lof , et al. August 5, 2 | 2014-08-05 |
Backscatter Reduction in Thin Electron Detectors App 20140166879 - Stekelenburg; Michael Alwin William ;   et al. | 2014-06-19 |
Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
Lithographic apparatus and device manufacturing method Grant 8,711,323 - Streefkerk , et al. April 29, 2 | 2014-04-29 |
Backscatter reduction in thin electron detectors Grant 08618498 - | 2013-12-31 |
Backscatter reduction in thin electron detectors Grant 8,618,498 - Van Hoften , et al. December 31, 2 | 2013-12-31 |
Lithographic Apparatus And Device Manufacturing Method App 20130301017 - Derksen; Antonius Theodorus Anna Maria ;   et al. | 2013-11-14 |
Lithographic apparatus and device manufacturing method Grant 8,558,989 - Lof , et al. October 15, 2 | 2013-10-15 |
Lithographic Apparatus And Device Manufacturing Method App 20130250270 - LOF; Joeri ;   et al. | 2013-09-26 |
Lithographic Apparatus And Device Manufacturing Method App 20130235358 - HOOGENDAM; Christiaan Alexander ;   et al. | 2013-09-12 |
Method of protecting a radiation detector in a charged particle instrument Grant 8,492,715 - Otten , et al. July 23, 2 | 2013-07-23 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and device manufacturing method Grant 8,472,002 - Lof , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus And Device Manufacturing Method App 20130128256 - LOF; Joeri ;   et al. | 2013-05-23 |
Lithographic apparatus and device manufacturing method Grant 8,446,568 - Derksen , et al. May 21, 2 | 2013-05-21 |
Lithographic apparatus and device manufacturing method Grant 8,344,341 - Lof , et al. January 1, 2 | 2013-01-01 |
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ;   et al. | 2012-11-01 |
Method of protecting a radiation detector in a charged particle instrument App 20120256085 - Otten; Maximus Theodorus ;   et al. | 2012-10-11 |
Lithographic apparatus and device manufacturing method Grant 8,208,120 - Lof , et al. June 26, 2 | 2012-06-26 |
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Lithographic Apparatus And Device Manufacturing Method App 20120044468 - STREEFKERK; Bob ;   et al. | 2012-02-23 |
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Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ;   et al. | 2011-11-17 |
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Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110228241 - LOF; Joeri ;   et al. | 2011-09-22 |
Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ;   et al. | 2011-07-28 |
Immersion lithographic apparatus and device manufacturing method with gas supply Grant 7,982,850 - Lof , et al. July 19, 2 | 2011-07-19 |
Lithographic Apparatus And Device Manufacturing Method App 20110170077 - LOF; Joeri ;   et al. | 2011-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20110122376 - Derksen; Antonius Theodorus Anna Maria ;   et al. | 2011-05-26 |
Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
Imprint lithography Grant 7,931,844 - Lof April 26, 2 | 2011-04-26 |
Lithographic apparatus and device manufacturing method Grant 7,932,999 - Hoogendam , et al. April 26, 2 | 2011-04-26 |
Lithographic Apparatus And Device Manufacturing Method App 20110027721 - LOF; JOERI ;   et al. | 2011-02-03 |
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ;   et al. | 2011-01-13 |
Lithographic Apparatus And Device Manufacturing Method App 20110001942 - Lof; Joeri ;   et al. | 2011-01-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100302519 - STREEFKERK; Bob ;   et al. | 2010-12-02 |
Individual wafer history storage for overlay corrections Grant 7,808,613 - Lof October 5, 2 | 2010-10-05 |
Lithographic apparatus and device manufacturing method Grant 7,795,603 - Lof , et al. September 14, 2 | 2010-09-14 |
Image Sensor, Method for Image Detection and Computer Program Product App 20100195071 - Staals; Frank ;   et al. | 2010-08-05 |
Lithographic apparatus and device manufacturing method Grant 7,738,074 - Streefkerk , et al. June 15, 2 | 2010-06-15 |
Lithographic Apparatus And Device Manufacturing Method App 20090290135 - Lof; Joeri ;   et al. | 2009-11-26 |
Lithographic apparatus and device manufacturing method Grant 7,593,093 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method Grant 7,593,092 - Lof , et al. September 22, 2 | 2009-09-22 |
Lithographic apparatus and device manufacturing method App 20090184270 - Lof; Joeri ;   et al. | 2009-07-23 |
Imprint lithography App 20090039554 - Lof; Joeri | 2009-02-12 |
Lithographic apparatus and device manufacturing method Grant 7,482,611 - Lof , et al. January 27, 2 | 2009-01-27 |
Lithographic apparatus and device manufacturing method App 20090002652 - Lof; Joeri ;   et al. | 2009-01-01 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus App 20080273183 - Staals; Frank ;   et al. | 2008-11-06 |
Imprint lithography Grant 7,442,029 - Lof October 28, 2 | 2008-10-28 |
Lithographic apparatus and device manufacturing method App 20080218726 - Lof; Joeri ;   et al. | 2008-09-11 |
Lithographic apparatus and device manufacturing method App 20080218717 - Streefkerk; Bob ;   et al. | 2008-09-11 |
Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus Grant 7,420,676 - Lof , et al. September 2, 2 | 2008-09-02 |
Lithographic projection apparatus Grant 7,388,648 - Lof , et al. June 17, 2 | 2008-06-17 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,375,795 - Lof , et al. May 20, 2 | 2008-05-20 |
Lithographic apparatus and device manufacturing method Grant 7,372,541 - Lof , et al. May 13, 2 | 2008-05-13 |
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Individual wafer history storage for overlay corrections App 20080030701 - Lof; Joeri | 2008-02-07 |
Lithographic apparatus and device manufacturing method App 20070268471 - Lof; Joeri ;   et al. | 2007-11-22 |
Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool Grant 7,292,339 - Lof November 6, 2 | 2007-11-06 |
Lithographic apparatus and device manufacturing method Grant 7,274,029 - Lof , et al. September 25, 2 | 2007-09-25 |
Methods and systems for lithographic gray scaling Grant 7,253,881 - Lof , et al. August 7, 2 | 2007-08-07 |
Calibration method for a lithographic apparatus and device manufacturing method Grant 7,239,393 - Bleeker , et al. July 3, 2 | 2007-07-03 |
Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor Grant 7,233,384 - Venema , et al. June 19, 2 | 2007-06-19 |
Lithographic apparatus and device manufacturing method App 20070132972 - Streefkerk; Bob ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method App 20070132979 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method App 20070132970 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,224,436 - Derksen , et al. May 29, 2 | 2007-05-29 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Lithographic apparatus and device manufacturing method Grant 7,199,858 - Lof , et al. April 3, 2 | 2007-04-03 |
Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement Grant 7,197,828 - Lof , et al. April 3, 2 | 2007-04-03 |
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid Grant 7,193,232 - Lof , et al. March 20, 2 | 2007-03-20 |
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby Grant 7,193,231 - Lof , et al. March 20, 2 | 2007-03-20 |
Lithographic apparatus and device manufacturing method App 20070040133 - Lof; Joeri ;   et al. | 2007-02-22 |
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Lithographic apparatus and device manufacturing method App 20060232756 - Lof; Joeri ;   et al. | 2006-10-19 |
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Lithographic apparatus and device manufacturing method Grant 7,110,081 - Hoogendam , et al. September 19, 2 | 2006-09-19 |
Lithographic apparatus and device manufacturing method App 20060176458 - Maria Derksen; Antonius Theodorus Anna ;   et al. | 2006-08-10 |
Lithographic apparatus and device manufacturing method Grant 7,081,943 - Lof , et al. July 25, 2 | 2006-07-25 |
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Lithographic apparatus and device manufacturing method App 20060138358 - Lof; Joeri ;   et al. | 2006-06-29 |
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Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060132735 - Lof; Joeri ;   et al. | 2006-06-22 |
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Lithographic apparatus and device manufacturing method App 20060023189 - Lof; Joeri ;   et al. | 2006-02-02 |
Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus App 20060023214 - Lof; Joeri ;   et al. | 2006-02-02 |
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