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Void-free damascene copper deposition process and means of monitoring thereof Grant 7,678,258 - Andricacos , et al. March 16, 2 | 2010-03-16 |
Electroplated copper interconnection structure, process for making and electroplating bath Grant 7,227,265 - Andricacos , et al. June 5, 2 | 2007-06-05 |
Method for plating copper conductors and devices formed Grant 6,979,393 - Rodbell , et al. December 27, 2 | 2005-12-27 |
Void-free damascene copper deposition process and means of monitoring thereof App 20050006242 - Andricacos, Panayotis ;   et al. | 2005-01-13 |
Early Detection Of Contact Liner Integrity By Chemical Reaction App 20050010455 - Bauer, Lawrence JR. ;   et al. | 2005-01-13 |
Electroplated copper interconnection structure, process for making and electroplating bath App 20040178078 - Andricacos, Panayotis C. ;   et al. | 2004-09-16 |
Electroplated copper interconnection structure, process for making and electroplating bath App 20040178077 - Andricacos, Panayotis C. ;   et al. | 2004-09-16 |
Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support Grant 6,660,330 - Locke , et al. December 9, 2 | 2003-12-09 |
Seedlayer for plating metal in deep submicron structures Grant 6,600,230 - Uzoh , et al. July 29, 2 | 2003-07-29 |
Method of controlling additives in copper plating baths App 20030000850 - Horkans, Wilma Jean ;   et al. | 2003-01-02 |
Method of controlling chemical bath composition in a manufacturing environment Grant 6,471,845 - Dukovic , et al. October 29, 2 | 2002-10-29 |
Deformation-susceptible substrate holder for low-pressure MOCVD and process for use thereof App 20020146903 - Locke, Peter S. ;   et al. | 2002-10-10 |
Method to build multi level structure Grant 6,413,854 - Uzoh , et al. July 2, 2 | 2002-07-02 |
Electroless metal liner formation methods App 20020081842 - Sambucetti, Carlos J. ;   et al. | 2002-06-27 |
Method for plating copper conductors and devices formed App 20020066673 - Rodbell, Kenneth P. ;   et al. | 2002-06-06 |
Selective plating process Grant 6,368,484 - Volant , et al. April 9, 2 | 2002-04-09 |
Method of improving contact reliability for electroplating App 20020027082 - Andricacos, Panayotis C. ;   et al. | 2002-03-07 |
Method for plating copper conductors and devices formed Grant 6,344,129 - Rodbell , et al. February 5, 2 | 2002-02-05 |
Pattern-sensitive electrolytic metal plating Grant 6,344,125 - Locke , et al. February 5, 2 | 2002-02-05 |
Method to produce high quality metal fill in deep submicron vias and lines App 20010046565 - Uzoh, Cyprian E. ;   et al. | 2001-11-29 |
Method to produce high quality metal fill in deep submicron vias and lines Grant 6,258,717 - Uzoh , et al. July 10, 2 | 2001-07-10 |