loadpatents
name:-0.35012102127075
name:-0.34338307380676
name:-0.16041207313538
LIU; Ru-Gun Patent Filings

LIU; Ru-Gun

Patent Applications and Registrations

Patent applications and USPTO patent grants for LIU; Ru-Gun.The latest application filed is for "photo mask data correction method".

Company Profile
153.200.200
  • LIU; Ru-Gun - Zhubei City TW
  • Liu; Ru-Gun - Hsinchu County TW
  • Liu; Ru-Gun - Zhubei TW
  • LIU; Ru-Gun - Hsinchu TW
  • LIU; Ru-Gun - Zhubie City TW
  • Liu; Ru-Gun - Zhubie TW
  • Liu; Ru-Gun - Zhuibei City TW
  • Liu; Ru-Gun - Hsinchu Sounty TW
  • Liu; Ru-Gun - Hsin-Chu TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Photo Mask Data Correction Method
App 20220308439 - TIEN; Fu An ;   et al.
2022-09-29
Transistor with asymmetric source and drain regions
Grant 11,450,769 - Liao , et al. September 20, 2
2022-09-20
Method Of Manufacturing Semiconductor Devices
App 20220285168 - LIU; Ru-Gun ;   et al.
2022-09-08
Method for forming semiconductor device structure
Grant 11,437,239 - Lai , et al. September 6, 2
2022-09-06
Photolithography method and apparatus
Grant 11,429,027 - Yu , et al. August 30, 2
2022-08-30
Buried metal for FinFET device and method
Grant 11,424,154 - Chou , et al. August 23, 2
2022-08-23
Landing Metal Etch Process For Improved Overlay Control
App 20220262647 - HSIAO; Chih-Min ;   et al.
2022-08-18
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20220260931 - YU; Shinn-Sheng ;   et al.
2022-08-18
Method Of Forming A Semiconductor Device
App 20220262674 - Su; Yi-Nien ;   et al.
2022-08-18
Method of mask data synthesis and mask making
Grant 11,415,890 - Huang , et al. August 16, 2
2022-08-16
Method for coloring circuit layout and system for performing the same
Grant 11,392,742 - Chiang , et al. July 19, 2
2022-07-19
Methods for Forming Self-Aligned Interconnect Structures
App 20220223474 - Liu; Ru-Gun ;   et al.
2022-07-14
Method of fabricating semiconductor device with reduced trench distortions
Grant 11,387,113 - Yen , et al. July 12, 2
2022-07-12
Photo mask data correction method
Grant 11,360,379 - Tien , et al. June 14, 2
2022-06-14
Method for validating measurement data
Grant 11,353,324 - Chiu , et al. June 7, 2
2022-06-07
Method of manufacturing semiconductor devices
Grant 11,342,193 - Liu , et al. May 24, 2
2022-05-24
Optical Proximity Correction and Photomasks
App 20220155692 - Jheng; Dong-Yo ;   et al.
2022-05-19
Fine Line Patterning Methods
App 20220157605 - HUANG; Shih-Chun ;   et al.
2022-05-19
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
Grant 11,320,747 - Yu , et al. May 3, 2
2022-05-03
Landing metal etch process for improved overlay control
Grant 11,322,362 - Hsiao , et al. May 3, 2
2022-05-03
Method of forming a semiconductor device
Grant 11,322,393 - Su , et al. May 3, 2
2022-05-03
Method Of Making Semiconductor Device Which Includes Fins
App 20220108990 - CHEN; Chih-Liang ;   et al.
2022-04-07
Pattern formation method using a photo mask for manufacturing a semiconductor device
Grant 11,294,286 - Liu , et al. April 5, 2
2022-04-05
Directional processing to remove a layer or a material formed over a substrate
Grant 11,289,332 - Huang , et al. March 29, 2
2022-03-29
Methods for forming self-aligned interconnect structures
Grant 11,289,376 - Liu , et al. March 29, 2
2022-03-29
Optical proximity correction and photomasks
Grant 11,243,472 - Jheng , et al. February 8, 2
2022-02-08
Fine line patterning methods
Grant 11,239,078 - Huang , et al. February 1, 2
2022-02-01
Semiconductor device which includes fins and method of making same
Grant 11,222,899 - Chen , et al. January 11, 2
2022-01-11
Importing and exporting circuit layouts
Grant 11,204,897 - Tien , et al. December 21, 2
2021-12-21
Signal line patterning for standard cells
Grant 11,201,064 - Hsiao , et al. December 14, 2
2021-12-14
Method Of Operating Semiconductor Apparatus
App 20210382399 - CHANG; Shih-Ming ;   et al.
2021-12-09
Method Of Manufacturing Semiconductor Devices Using Directional Process
App 20210375639 - YEH; Ya-Wen ;   et al.
2021-12-02
Method For Mask Data Synthesis With Wafer Target Adjustment
App 20210373443 - HUANG; Hsu-Ting ;   et al.
2021-12-02
Via Rail Solution For High Power Electromigration
App 20210366844 - Sio; Kam-Tou ;   et al.
2021-11-25
Via Connection to a Partially Filled Trench
App 20210366726 - Chang; Shih-Ming ;   et al.
2021-11-25
Test Pattern Generation Systems And Methods
App 20210365625 - Tien; Fu-An ;   et al.
2021-11-25
Semiconductor Device And A Method For Fabricating The Same
App 20210366779 - LAI; Jui-Yao ;   et al.
2021-11-25
Directional Deposition for Semiconductor Fabrication
App 20210358752 - Huang; Shih-Chun ;   et al.
2021-11-18
Lithography Simulation Method
App 20210357571 - TIEN; Fu An ;   et al.
2021-11-18
Method Of Manufacturing Photo Masks
App 20210356872 - HSIEH; Ken-Hsien ;   et al.
2021-11-18
Pellicle structure for lithography mask
Grant 11,175,597 - Chang , et al. November 16, 2
2021-11-16
Pattern fidelity enhancement with directional patterning technology
Grant 11,158,509 - Shen , et al. October 26, 2
2021-10-26
Low-resistance interconnect structures
Grant 11,127,684 - Wang , et al. September 21, 2
2021-09-21
Lithography Process Monitoring Method
App 20210286274 - LEE; Chih-Jie ;   et al.
2021-09-16
Method Of Manufacturing Semiconductor Devices
App 20210280455 - LIU; Ru-Gun ;   et al.
2021-09-09
Local Interconnect Structure
App 20210280607 - CHEN; Chih-Liang ;   et al.
2021-09-09
Method OF FORMING METAL FEATURES
App 20210272807 - Chang; Po-Chin ;   et al.
2021-09-02
Line-end Extension Method And Device
App 20210272808 - HSIAO; Chih-Min ;   et al.
2021-09-02
Semiconductor apparatus and method of operating the same
Grant 11,106,140 - Chang , et al. August 31, 2
2021-08-31
Method of manufacturing semiconductor devices using directional process
Grant 11,094,556 - Yeh , et al. August 17, 2
2021-08-17
Method for mask data synthesis with wafer target adjustment
Grant 11,092,899 - Huang , et al. August 17, 2
2021-08-17
Test pattern generation systems and methods
Grant 11,093,683 - Tien , et al. August 17, 2
2021-08-17
Self Aligned Litho Etch Process Patterning Method
App 20210249267 - HSIAO; Chih-Min ;   et al.
2021-08-12
Semiconductor device and a method for fabricating the same
Grant 11,088,030 - Lai , et al. August 10, 2
2021-08-10
Via rail solution for high power electromigration
Grant 11,088,092 - Sio , et al. August 10, 2
2021-08-10
Via connection to a partially filled trench
Grant 11,087,994 - Chang , et al. August 10, 2
2021-08-10
Buried Metal Track and Methods Forming Same
App 20210242212 - Wang; Pochun ;   et al.
2021-08-05
Method For Fabricating Semiconductor Device
App 20210242136 - CHEN; Chiu-Hsiang ;   et al.
2021-08-05
Method of manufacturing photo masks
Grant 11,079,685 - Hsieh , et al. August 3, 2
2021-08-03
Lithography simulation method
Grant 11,080,458 - Tien , et al. August 3, 2
2021-08-03
Fin patterning methods for increased process margins
Grant 11,081,354 - Tseng , et al. August 3, 2
2021-08-03
Directional deposition for semiconductor fabrication
Grant 11,075,079 - Huang , et al. July 27, 2
2021-07-27
Method And System Of Manufacturing Conductors And Semiconductor Device Which Includes Conductors
App 20210225831 - SIO; Kam-Tou ;   et al.
2021-07-22
Method For Forming Semiconductor Device Structure
App 20210225649 - LAI; Chih-Ming ;   et al.
2021-07-22
Via rail solution for high power electromigration
Grant 11,063,005 - Sio , et al. July 13, 2
2021-07-13
Lithography model calibration
Grant 11,061,318 - Lo , et al. July 13, 2
2021-07-13
Buried Metal for FinFET Device and Method
App 20210193504 - Chou; Lei-Chun ;   et al.
2021-06-24
Method Of Mask Data Synthesis And Mask Making
App 20210191254 - HUANG; Hsu-Ting ;   et al.
2021-06-24
Dummy MOL removal for performance enhancement
Grant 11,043,426 - Yang , et al. June 22, 2
2021-06-22
Directional patterning method
Grant 11,043,381 - Chang , et al. June 22, 2
2021-06-22
Transistor with Asymmetric Source and Drain Regions
App 20210184036 - LIAO; HSIEN-YUAN ;   et al.
2021-06-17
Methods for Integrated Circuit Design and Fabrication
App 20210175081 - Ou; Tsong-Hua ;   et al.
2021-06-10
High-Density Semiconductor Device
App 20210166947 - Chou; Lei-Chun ;   et al.
2021-06-03
Dual power structure with connection pins
Grant 11,024,579 - Peng , et al. June 1, 2
2021-06-01
Local interconnect structure
Grant 11,018,157 - Chen , et al. May 25, 2
2021-05-25
Buried metal track and methods forming same
Grant 11,004,855 - Wang , et al. May 11, 2
2021-05-11
Method of manufacturing semiconductor devices
Grant 11,004,729 - Liu , et al. May 11, 2
2021-05-11
Capacitance reduction by metal cut design
Grant 11,004,738 - Lin , et al. May 11, 2
2021-05-11
Method of Forming a Semiconductor Device
App 20210134657 - Su; Yi-Nien ;   et al.
2021-05-06
Conductive line patterning
Grant 10,998,304 - Liu , et al. May 4, 2
2021-05-04
Method for fabricating semiconductor device
Grant 10,991,657 - Chen , et al. April 27, 2
2021-04-27
Self aligned litho etch process patterning method
Grant 10,991,583 - Hsiao , et al. April 27, 2
2021-04-27
Pattern Fidelity Enhancement
App 20210118674 - Shen; Yu-Tien ;   et al.
2021-04-22
Low-Resistance Interconnect Structures
App 20210118801 - Wang; Chao-Hsun ;   et al.
2021-04-22
System for and method of manufacturing an integrated circuit
Grant 10,977,421 - Lin , et al. April 13, 2
2021-04-13
Method and system of manufacturing conductors and semiconductor device which includes conductors
Grant 10,978,439 - Sio , et al. April 13, 2
2021-04-13
Photo Mask Data Correction Method
App 20210103211 - TIEN; Fu An ;   et al.
2021-04-08
Method for forming semiconductor device structure
Grant 10,971,363 - Lai , et al. April 6, 2
2021-04-06
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20210096475 - YU; Shinn-Sheng ;   et al.
2021-04-01
Method Of Manufacturing Semiconductor Devices
App 20210096473 - LIU; Ru-Gun ;   et al.
2021-04-01
Method of mask simulation model for OPC and mask making
Grant 10,962,875 - Huang , et al. March 30, 2
2021-03-30
Transistor with asymmetric source and drain regions
Grant 10,964,814 - Liao , et al. March 30, 2
2021-03-30
Lithography process monitoring method
Grant 10,962,892 - Lee , et al. March 30, 2
2021-03-30
Fin-like field effect transistor patterning methods for increasing process margins
Grant 10,957,551 - Tseng , et al. March 23, 2
2021-03-23
Semiconductor Device Including Source/drain Contact Having Height Below Gate Stack
App 20210082903 - YOUNG; Charles Chew-Yuen ;   et al.
2021-03-18
High-density semiconductor device
Grant 10,950,456 - Chou , et al. March 16, 2
2021-03-16
Method of mask data synthesis and mask making
Grant 10,942,443 - Huang , et al. March 9, 2
2021-03-09
Signal Line Patterning For Standard Cells
App 20210066091 - HSIAO; Chih-Min ;   et al.
2021-03-04
Advanced Metal Connection With Metal Cut
App 20210066182 - Chen; Chih-Liang ;   et al.
2021-03-04
Method Of Fabricating Semiconductor Device With Reduced Trench Distortions
App 20210057231 - Yen; Yung-Sung ;   et al.
2021-02-25
Methods for integrated circuit design and fabrication
Grant 10,930,505 - Ou , et al. February 23, 2
2021-02-23
Semiconductor device and a method for fabricating the same
Grant 10,916,475 - Lai , et al. February 9, 2
2021-02-09
Methods for Forming Self-Aligned Interconnect Structures
App 20210035862 - Liu; Ru-Gun ;   et al.
2021-02-04
Method For Coloring Circuit Layout And System For Performing The Same
App 20210019464 - CHIANG; Chia-Ping ;   et al.
2021-01-21
Semiconductor Apparatus And Method Of Operating The Same
App 20210018849 - Chang; Shih-Ming ;   et al.
2021-01-21
Method Of Manufacturing Semiconductor Devices
App 20210013048 - LIU; Ru-Gun ;   et al.
2021-01-14
Self aligned via and method for fabricating the same
Grant 10,879,120 - Chen , et al. December 29, 2
2020-12-29
Mask process correction
Grant 10,866,505 - Huang , et al. December 15, 2
2020-12-15
Photo mask data correction method
Grant 10,866,506 - Tien , et al. December 15, 2
2020-12-15
Buried metal for FinFET device and method
Grant 10,867,833 - Chou , et al. December 15, 2
2020-12-15
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
Grant 10,866,525 - Yu , et al. December 15, 2
2020-12-15
Methods of making mask using transmission cross coefficient (TCC) matrix of lithography process optical system
Grant 10,867,112 - Huang , et al. December 15, 2
2020-12-15
Method of forming a semiconductor device
Grant 10,867,840 - Su , et al. December 15, 2
2020-12-15
Metal Rail Conductors For Non-planar Semiconductor Devices
App 20200388706 - CHEN; Chih-Liang ;   et al.
2020-12-10
Pattern fidelity enhancement
Grant 10,861,698 - Shen , et al. December 8, 2
2020-12-08
Methodology for pattern density optimization
Grant 10,860,774 - Wang , et al. December 8, 2
2020-12-08
Power strap structure for high performance and low current density
Grant 10,861,790 - Chen , et al. December 8, 2
2020-12-08
Advanced metal connection with metal cut
Grant 10,847,460 - Chen , et al. November 24, 2
2020-11-24
Semiconductor device including source/drain contact having height below gate stack
Grant 10,833,061 - Young , et al. November 10, 2
2020-11-10
Integrated Circuit And Method Of Manufacturing Same
App 20200350250 - WANG; Pochun ;   et al.
2020-11-05
Method of fabricating semiconductor device with reduced trench distortions
Grant 10,818,509 - Yen , et al. October 27, 2
2020-10-27
Multiple patterning method for semiconductor devices
Grant 10,817,635 - Hsieh , et al. October 27, 2
2020-10-27
Fine Line Patterning Methods
App 20200335340 - HUANG; Shih-Chun ;   et al.
2020-10-22
Semiconductor Device Which Includes Fins And Method Of Making Same
App 20200335507 - CHEN; Chih-Liang ;   et al.
2020-10-22
Method for coloring circuit layout and system for performing the same
Grant 10,796,055 - Chiang , et al. October 6, 2
2020-10-06
Method of manufacturing semiconductor devices
Grant 10,790,155 - Liu , et al. September 29, 2
2020-09-29
Optical Proximity Correction and Photomasks
App 20200301289 - Jheng; Dong-Yo ;   et al.
2020-09-24
Dummy MOL removal for performance enhancement
Grant 10,784,168 - Yang , et al. Sept
2020-09-22
Spacer Etching Process For Integrated Circuit Design
App 20200286738 - LIU; RU-GUN ;   et al.
2020-09-10
Hybrid double patterning method for semiconductor manufacture
Grant 10,770,304 - Hsieh , et al. Sep
2020-09-08
Mechanisms for forming patterns using multiple lithography processes
Grant 10,770,303 - Chang , et al. Sep
2020-09-08
Pattern Fidelity Enhancement with Directional Patterning Technology
App 20200279743 - Shen; Yu-Tien ;   et al.
2020-09-03
Lithography Model Calibration
App 20200278604 - LO; Shih-Hsiang ;   et al.
2020-09-03
Lithographic technique for feature cut by line-end shrink
Grant 10,763,113 - Yen , et al. Sep
2020-09-01
Metal rail conductors for non-planar semiconductor devices
Grant 10,763,365 - Chen , et al. Sep
2020-09-01
Method for forming conductive lines
Grant 10,748,767 - Yen , et al. A
2020-08-18
Method for integrated circuit manufacturing
Grant 10,747,938 - Wang , et al. A
2020-08-18
Integrated circuit and method of manufacturing same
Grant 10,734,321 - Wang , et al.
2020-08-04
Directional Patterning Method
App 20200243336 - Chang; Po-Chin ;   et al.
2020-07-30
Methods of forming metal layer structures in semiconductor devices
Grant 10,727,113 - Hsiao , et al.
2020-07-28
Semiconductor device which includes Fins
Grant 10,714,485 - Chen , et al.
2020-07-14
Fine line patterning methods
Grant 10,707,081 - Huang , et al.
2020-07-07
Method for optimized wafer process simulation
Grant 10,698,320 - Liu , et al.
2020-06-30
System For And Method Of Manufacturing An Integrated Circuit
App 20200184139 - LIN; Wei-Cheng ;   et al.
2020-06-11
Optical proximity correction and photomasks
Grant 10,678,142 - Jheng , et al.
2020-06-09
Landing Metal Etch Process For Improved Overlay Control
App 20200176267 - HSIAO; Chih-Min ;   et al.
2020-06-04
Pellicle Structure For Lithography Mask
App 20200174382 - CHANG; Shih-Ming ;   et al.
2020-06-04
Method For Mask Data Synthesis With Wafer Target Adjustment
App 20200174380 - HUANG; Hsu-Ting ;   et al.
2020-06-04
Spacer etching process for integrated circuit design
Grant 10,665,467 - Liu , et al.
2020-05-26
Pattern fidelity enhancement with directional patterning technology
Grant 10,658,184 - Shen , et al.
2020-05-19
Fin Patterning Methods for Increased Process Margins
App 20200152464 - Tseng; Chin-Yuan ;   et al.
2020-05-14
Via Connection to a Partially Filled Trench
App 20200152476 - Chang; Shih-Ming ;   et al.
2020-05-14
Test Pattern Generation Systems And Methods
App 20200134131 - Tien; Fu-An ;   et al.
2020-04-30
Importing And Exporting Circuit Layouts
App 20200133924 - TIEN; Fu An ;   et al.
2020-04-30
Photo Mask Data Correction Method
App 20200133115 - TIEN; Fu An ;   et al.
2020-04-30
Method for Validating Measurement Data
App 20200124411 - Chiu; Chui-Jung ;   et al.
2020-04-23
Methods of Forming Metal Layer Structures in Semiconductor Devices
App 20200111702 - Hsiao; Ethan ;   et al.
2020-04-09
Lithography Simulation Method
App 20200103764 - TIEN; Fu An ;   et al.
2020-04-02
Method of Mask Simulation Model for OPC and Mask Making
App 20200103747 - Huang; Hsu-Ting ;   et al.
2020-04-02
Lithography Process Monitoring Method
App 20200103766 - LEE; Chih-Jie ;   et al.
2020-04-02
Method of Forming a Semiconductor Device
App 20200105585 - Su; Yi-Nien ;   et al.
2020-04-02
Self Aligned Litho Etch Process Patterning Method
App 20200105528 - HSIAO; Chih-Min ;   et al.
2020-04-02
Mask Process Correction
App 20200096857 - HUANG; Hsu-Ting ;   et al.
2020-03-26
Capacitance Reduction By Metal Cut Design
App 20200098631 - Lin; Yi-Hsiung ;   et al.
2020-03-26
Hybrid Double Patterning Method for Semiconductor Manufacture
App 20200083058 - Hsieh; Ken-Hsien ;   et al.
2020-03-12
Via Rail Solution For High Power Electromigration
App 20200083182 - Sio; Kam-Tou ;   et al.
2020-03-12
Method For Fabricating Semiconductor Device
App 20200066648 - CHEN; Chiu-Hsiang ;   et al.
2020-02-27
Method For Forming Semiconductor Device Structure
App 20200066523 - LAI; Chih-Ming ;   et al.
2020-02-27
Photolithography Method And Apparatus
App 20200057375 - YU; Shinn-Sheng ;   et al.
2020-02-20
System for and method of fabricating an integrated circuit
Grant 10,565,348 - Lin , et al. Feb
2020-02-18
Method For Coloring Circuit Layout And System For Performing The Same
App 20200050725 - CHIANG; Chia-Ping ;   et al.
2020-02-13
High-Density Semiconductor Device
App 20200043741 - Chou; Lei-Chun ;   et al.
2020-02-06
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20200041915 - YU; Shinn-Sheng ;   et al.
2020-02-06
Dummy Mol Removal For Performance Enhancement
App 20200020588 - Yang; Hui-Ting ;   et al.
2020-01-16
Advanced Metal Connection With Metal Cut
App 20200020625 - Chen; Chih-Liang ;   et al.
2020-01-16
Systems and methods for a sequential spacer scheme
Grant 10,535,646 - Chang , et al. Ja
2020-01-14
Fin patterning methods for increased process margins
Grant 10,535,520 - Tseng , et al. Ja
2020-01-14
Fin-Like Field Effect Transistor Patterning Methods for Increasing Process Margins
App 20200013630 - Tseng; Chin-Yuan ;   et al.
2020-01-09
Mask Making Method
App 20200004135 - HUANG; Hsu-Ting ;   et al.
2020-01-02
Method Of Manufacturing Semiconductor Devices
App 20200006078 - LIU; Ru-Gun ;   et al.
2020-01-02
Pattern Formation Method Using A Photo Mask For Manufacturing A Semiconductor Device
App 20200004137 - LIU; Ru-Gun ;   et al.
2020-01-02
Method Of Manufacturing Semiconductor Devices Using Directional Process
App 20200006085 - YEH; Ya-Wen ;   et al.
2020-01-02
Method Of Manufacturing Semiconductor Devices
App 20200006121 - LIU; Ru-Gun ;   et al.
2020-01-02
Method for validating measurement data
Grant 10,520,303 - Chiu , et al. Dec
2019-12-31
Pattern modification and patterning process
Grant 10,514,613 - Chang , et al. Dec
2019-12-24
Via connection to a partially filled trench
Grant 10,515,823 - Chang , et al. Dec
2019-12-24
Method for coloring circuit layout and system for performing the same
Grant 10,509,881 - Chiang , et al. Dec
2019-12-17
Via rail solution for high power electromigration
Grant 10,510,688 - Sio , et al. Dec
2019-12-17
Lithographic Technique For Feature Cut By Line-end Shrink
App 20190378712 - YEN; Yung-Sung ;   et al.
2019-12-12
Methods of forming metal layer structures in semiconductor devices
Grant 10,504,775 - Hsiao , et al. Dec
2019-12-10
Methods of Forming Metal Layer Structures in Semiconductor Devices
App 20190371655 - Hsiao; Ethan ;   et al.
2019-12-05
Method And System Of Manufacturing Conductors And Semiconductor Device Which Includes Conductors
App 20190371784 - SIO; Kam-Tou ;   et al.
2019-12-05
Methods for Integrated Circuit Design and Fabrication
App 20190371606 - Ou; Tsong-Hua ;   et al.
2019-12-05
Method for forming semiconductor device structure
Grant 10,497,565 - Lai , et al. De
2019-12-03
Method of mask simulation model for OPC and mask making
Grant 10,495,967 - Huang , et al. De
2019-12-03
Lithography system having invisible pellicle over mask
Grant 10,488,766 - Chen , et al. Nov
2019-11-26
Hybrid double patterning method for semiconductor manufacture
Grant 10,483,120 - Hsieh , et al. Nov
2019-11-19
Buried Metal Track and Methods Forming Same
App 20190341387 - Wang; Pochun ;   et al.
2019-11-07
Directional Processing To Remove A Layer Or A Material Formed Over A Substrate
App 20190341254 - HUANG; Shih-Chun ;   et al.
2019-11-07
Method for Integrated Circuit Manufacturing
App 20190340330 - Wang; Hung-Chun ;   et al.
2019-11-07
Advanced metal connection with metal cut
Grant 10,468,349 - Chen , et al. No
2019-11-05
System For And Method Of Fabricating An Integrated Circuit
App 20190325109 - LIN; Wei-Cheng ;   et al.
2019-10-24
High-density semiconductor device
Grant 10,446,406 - Chou , et al. Oc
2019-10-15
Buried metal track and methods forming same
Grant 10,446,555 - Wang , et al. Oc
2019-10-15
Source beam optimization method for improving lithography printability
Grant 10,417,376 - Huang , et al. Sept
2019-09-17
Fin-like field effect transistor patterning methods for increasing process margins
Grant 10,418,252 - Tseng , et al. Sept
2019-09-17
Methods for integrated circuit design and fabrication
Grant 10,410,863 - Ou , et al. Sept
2019-09-10
Multi-layer metal contacts
Grant 10,410,913 - Shieh , et al. Sept
2019-09-10
Mechanisms For Forming Patterns Using Multiple Lithography Processes
App 20190259600 - Chang; Shih-Ming ;   et al.
2019-08-22
Lithographic technique for feature cut by line-end shrink
Grant 10,388,523 - Yen , et al. A
2019-08-20
Method of manufacturing conductors and semiconductor device which includes conductors
Grant 10,388,644 - Sio , et al. A
2019-08-20
Hybrid Double Patterning Method for Semiconductor Manufacture
App 20190252200 - Hsieh; Ken-Hsien ;   et al.
2019-08-15
Dual Power Structure With Connection Pins
App 20190244901 - Peng; Shih-Wei ;   et al.
2019-08-08
Transistor with Asymmetric Source and Drain Regions
App 20190245084 - LIAO; HSIEN-YUAN ;   et al.
2019-08-08
Conductive Line Patterning
App 20190244950 - Liu; Ru-Gun ;   et al.
2019-08-08
System for and method of manufacturing a layout design of an integrated circuit
Grant 10,366,200 - Lin , et al. July 30, 2
2019-07-30
Method for integrated circuit manufacturing
Grant 10,360,339 - Wang , et al.
2019-07-23
Directional processing to remove a layer or a material formed over a substrate
Grant 10,354,874 - Huang , et al. July 16, 2
2019-07-16
Lithographic technique incorporating varied pattern materials
Grant 10,312,109 - Tseng , et al.
2019-06-04
Metal Rail Conductors For Non-planar Semiconductor Devices
App 20190165177 - CHEN; Chih-Liang ;   et al.
2019-05-30
Method Of Patterning
App 20190164772 - TSENG; Chin-Yuan ;   et al.
2019-05-30
Buried Metal for FinFET Device and Method
App 20190164805 - Chou; Lei-Chun ;   et al.
2019-05-30
Method For Forming Semiconductor Device Structure
App 20190157085 - LAI; Chih-Ming ;   et al.
2019-05-23
Directional Deposition for Semiconductor Fabrication
App 20190157084 - Huang; Shih-Chun ;   et al.
2019-05-23
Method Of Mask Data Synthesis And Mask Making
App 20190146328 - HUANG; Hsu-Ting ;   et al.
2019-05-16
Directional Processing To Remove A Layer Or A Material Formed Over A Substrate
App 20190148145 - Huang; Shih-Chun ;   et al.
2019-05-16
Fine Line Patterning Methods
App 20190148147 - Huang; Shih-Chun ;   et al.
2019-05-16
Lithography System Having Invisible Pellicle Over Mask
App 20190146362 - CHEN; Chiu-Hsiang ;   et al.
2019-05-16
Method Of Manufacturing Photo Masks
App 20190146333 - HSIEH; Ken-Hsien ;   et al.
2019-05-16
Optical Proximity Correction and Photomasks
App 20190146355 - Jheng; Dong-Yo ;   et al.
2019-05-16
Mask optimization for multi-layer contacts
Grant 10,283,495 - Liu , et al.
2019-05-07
Systems and Methods for a Sequential Spacer Scheme
App 20190131291 - Chang; Shih-Ming ;   et al.
2019-05-02
Transistor with asymmetric source and drain regions
Grant 10,276,716 - Liao , et al.
2019-04-30
Hybrid double patterning method for semiconductor manufacture
Grant 10,276,394 - Hsieh , et al.
2019-04-30
Method for patterning interconnects
Grant 10,276,377 - Yen , et al.
2019-04-30
Multiple patterning decomposition and manufacturing methods for IC
Grant 10,274,829 - Hsieh , et al.
2019-04-30
Dual power structure with connection pins
Grant 10,276,499 - Peng , et al.
2019-04-30
Mechanisms for forming patterns using multiple lithography processes
Grant 10,276,363 - Chang , et al.
2019-04-30
Method for Forming Conductive Lines
App 20190122887 - Yen; Yung-Sung ;   et al.
2019-04-25
Semiconductor Device Including Source/drain Contact Having Height Below Gate Stack
App 20190123036 - YOUNG; Charles Chew-Yuen ;   et al.
2019-04-25
Method of Fabricating Semiconductor Device with Reduced Trench Distortions
App 20190122895 - Yen; Yung-Sung ;   et al.
2019-04-25
Power Strap Structure For High Performance And Low Current Density
App 20190122987 - Chen; Chih-Liang ;   et al.
2019-04-25
Conductive line patterning
Grant 10,269,785 - Liu , et al.
2019-04-23
Semiconductor Device And A Method For Fabricating The Same
App 20190115261 - LAI; Jui-Yao ;   et al.
2019-04-18
Method For Coloring Circuit Layout And System For Performing The Same
App 20190095569 - CHIANG; CHIA-PING ;   et al.
2019-03-28
Method of Mask Simulation Model for OPC and Mask Making
App 20190094680 - Huang; Hsu-Ting ;   et al.
2019-03-28
Integrated Circuit And Method Of Manufacturing Same
App 20190096811 - WANG; Pochun ;   et al.
2019-03-28
Local Interconnect Structure
App 20190096909 - Chen; Chih-Liang ;   et al.
2019-03-28
Hybrid Double Patterning Method for Semiconductor Manufacture
App 20190080921 - Hsieh; Ken-Hsien ;   et al.
2019-03-14
Pattern Fidelity Enhancement
App 20190067000 - Shen; Yu-Tien ;   et al.
2019-02-28
Buried Metal Track and Methods Forming Same
App 20190067290 - Wang; Pochun ;   et al.
2019-02-28
Advanced Metal Connection With Metal Cut
App 20190051595 - Chen; Chih-Liang ;   et al.
2019-02-14
Multiple Patterning Method for Semiconductor Devices
App 20190042685 - Hsieh; Ken-Hsien ;   et al.
2019-02-07
Dummy Mol Removal For Performance Enhancement
App 20190043759 - Yang; Hui-Ting ;   et al.
2019-02-07
Semiconductor Device Which Includes Fins
App 20190019797 - CHEN; Chih-Liang ;   et al.
2019-01-17
Semiconductor device including source/drain contact having height below gate stack
Grant 10,177,133 - Young , et al. J
2019-01-08
Layout modification method and system
Grant 10,169,515 - Sio , et al. J
2019-01-01
Power strap structure for high performance and low current density
Grant 10,170,422 - Chen , et al. J
2019-01-01
Systems and methods for a sequential spacer scheme
Grant 10,163,885 - Chang , et al. Dec
2018-12-25
Method of fabricating semiconductor device with reduced trench distortions
Grant 10,163,654 - Yen , et al. Dec
2018-12-25
Method for forming conductive lines
Grant 10,163,634 - Yen , et al. Dec
2018-12-25
Via Rail Solution For High Power Electromigration
App 20180358309 - Sio; Kam-Tou ;   et al.
2018-12-13
Mechanisms for forming patterns using lithography processes
Grant 10,153,166 - Chang , et al. Dec
2018-12-11
Methodology For Pattern Density Optimization
App 20180349545 - Wang; Hung-Chun ;   et al.
2018-12-06
Lithography process and system with enhanced overlay quality
Grant 10,146,141 - Hung , et al. De
2018-12-04
Fin Patterning Methods for Increased Process Margins
App 20180315602 - Tseng; Chin-Yuan ;   et al.
2018-11-01
Advanced metal connection with metal cut
Grant 10,109,582 - Chen , et al. October 23, 2
2018-10-23
Semiconductor interconnect structure
Grant 10,096,544 - Lai , et al. October 9, 2
2018-10-09
Dummy MOL removal for performance enhancement
Grant 10,096,522 - Yang , et al. October 9, 2
2018-10-09
Lithographic Technique Incorporating Varied Pattern Materials
App 20180286698 - Tseng; Chin-Yuan ;   et al.
2018-10-04
Source Beam Optimization Method for Improving Lithography Printability
App 20180285512 - Huang; Hsu-Ting ;   et al.
2018-10-04
Lithographic Technique For Feature Cut By Line-end Shrink
App 20180277358 - YEN; Yung-Sung ;   et al.
2018-09-27
Target optimization method for improving lithography printability
Grant 10,083,270 - Chang , et al. September 25, 2
2018-09-25
Multiple patterning method for semiconductor devices
Grant 10,078,718 - Hsieh , et al. September 18, 2
2018-09-18
Method of manufacturing fins and semiconductor device which includes fins
Grant 10,074,657 - Chen , et al. September 11, 2
2018-09-11
Method for patterning a plurality of features for fin-like field-effect transistor (FinFET) devices
Grant 10,049,885 - Ng , et al. August 14, 2
2018-08-14
Methodology for pattern density optimization
Grant 10,049,178 - Wang , et al. August 14, 2
2018-08-14
Semiconductor device including a target integrated circuit pattern
Grant 10,049,919 - Wu , et al. August 14, 2
2018-08-14
Directional patterning methods
Grant 10,049,918 - Hung , et al. August 14, 2
2018-08-14
Environmental-surrounding-aware OPC
Grant 10,036,948 - Cheng , et al. July 31, 2
2018-07-31
High-density semiconductor device
Grant 10,032,759 - Chen , et al. July 24, 2
2018-07-24
Methods for patterning a target layer through fosse trenches using reverse sacrificial spacer lithography
Grant 10,032,664 - Chang , et al. July 24, 2
2018-07-24
Method and system to prepare, manufacture and inspect mask patterns for a semiconductor device
Grant 10,025,175 - Tsai , et al. July 17, 2
2018-07-17
Via Connection to a Partially Filled Trench
App 20180197750 - Chang; Shih-Ming ;   et al.
2018-07-12
Lithography using high selectivity spacers for pitch reduction
Grant 10,014,175 - Chang , et al. July 3, 2
2018-07-03
Power Strap Structure For High Performance And Low Current Density
App 20180174967 - Chen; Chih-Liang ;   et al.
2018-06-21
Pattern Fidelity Enhancement with Directional Patterning Technology
App 20180174853 - Shen; Yu-Tien ;   et al.
2018-06-21
Method for Optimized Wafer Process Simulation
App 20180165388 - Liu; Ru-Gun ;   et al.
2018-06-14
Multiple Patterning Decomposition And Manufacturing Methods For Ic
App 20180164695 - HSIEH; Ken-Hsien ;   et al.
2018-06-14
Target Optimization Method For Improving Lithography Printability
App 20180165397 - Chang; Shih-Ming ;   et al.
2018-06-14
Method of forming an interconnect structure for a semiconductor device
Grant 9,997,404 - Wu , et al. June 12, 2
2018-06-12
Source beam optimization method for improving lithography printability
Grant 9,990,460 - Huang , et al. June 5, 2
2018-06-05
Lithographic technique incorporating varied pattern materials
Grant 9,991,132 - Tseng , et al. June 5, 2
2018-06-05
Pattern Modification And Patterning Process
App 20180149982 - CHANG; Shih-Ming ;   et al.
2018-05-31
High-Density Semiconductor Device
App 20180151551 - Chen; Chih-Liang ;   et al.
2018-05-31
Method Of Manufacturing Conductors And Semiconductor Device Which Includes Conductors
App 20180151552 - SIO; Kam-Tou ;   et al.
2018-05-31
Self Aligned Via and Method for Fabricating the Same
App 20180151432 - Chen; Chih-Liang ;   et al.
2018-05-31
High-Density Semiconductor Device
App 20180151381 - Chou; Lei-Chun ;   et al.
2018-05-31
Lithographic technique for feature cut by line-end shrink
Grant 9,984,876 - Yen , et al. May 29, 2
2018-05-29
Photomask and method for fabricating integrated circuit
Grant 9,983,473 - Lin , et al. May 29, 2
2018-05-29
Methods for Integrated Circuit Design and Fabrication
App 20180138042 - Ou; Tsong-Hua ;   et al.
2018-05-17
Source Beam Optimization Method for Improving Lithography Printability
App 20180096094 - Huang; Hsu-Ting ;   et al.
2018-04-05
Directional Patterning Methods
App 20180090370 - Hung; Chi-Cheng ;   et al.
2018-03-29
Semiconductor device including source/drain contact having height below gate stack
Grant 9,917,050 - Chen , et al. March 13, 2
2018-03-13
Method for Validating Measurement Data
App 20180066939 - Chiu; Chui-Jung ;   et al.
2018-03-08
System For And Method Of Manufacturing A Layout Design Of An Integrated Circuit
App 20180068050 - LIN; Wei-Cheng ;   et al.
2018-03-08
Mandrel spacer patterning in multi-pitch integrated circuit manufacturing
Grant 9,911,606 - Chiang , et al. March 6, 2
2018-03-06
Power strap structure for high performance and low current density
Grant 9,911,697 - Chen , et al. March 6, 2
2018-03-06
Method of forming openings in a material layer
Grant 9,911,611 - Yen , et al. March 6, 2
2018-03-06
Via connection to a partially filled trench
Grant 9,911,623 - Chang , et al. March 6, 2
2018-03-06
Enhanced EUV lithography system
Grant 9,880,460 - Chang , et al. January 30, 2
2018-01-30
Dual Power Structure With Connection Pins
App 20180019207 - Peng; Shih-Wei ;   et al.
2018-01-18
Lithography Using High Selectivity Spacers for Pitch Reduction
App 20180012761 - Chang; Yu-Sheng ;   et al.
2018-01-11
Mechanisms for Forming Patterns Using Multiple Lithography Processes
App 20170372891 - Chang; Shih-Ming ;   et al.
2017-12-28
Methods for integrated circuit design and fabrication
Grant 9,852,908 - Ou , et al. December 26, 2
2017-12-26
Systems and Methods for a Sequential Spacer Scheme
App 20170358566 - Chang; Shih-Ming ;   et al.
2017-12-14
Transistor with Asymmetric Source and Drain Regions
App 20170345930 - LIAO; HSIEN-YUAN ;   et al.
2017-11-30
Method for Forming Conductive Lines
App 20170338115 - Yen; Yung-Sung ;   et al.
2017-11-23
Method for Patterning Interconnects
App 20170338146 - Yen; Yung-Sung ;   et al.
2017-11-23
Method for validating measurement data
Grant 9,823,066 - Chiu , et al. November 21, 2
2017-11-21
Dummy Mol Removal For Performance Enhancement
App 20170323832 - Yang; Hui-Ting ;   et al.
2017-11-09
Mandrel Spacer Patterning in Multi-Pitch Integrated Circuit Manufacturing
App 20170316938 - Chiang; Chia-Ping ;   et al.
2017-11-02
Method Of Manufacturing Fins And Semiconductor Device Which Includes Fins
App 20170317089 - CHEN; Chih-Liang ;   et al.
2017-11-02
Power Strap Structure For High Performance And Low Current Density
App 20170317027 - Chen; Chih-Liang ;   et al.
2017-11-02
Method of planarizing a film layer
Grant 9,799,529 - Yen , et al. October 24, 2
2017-10-24
Advanced Metal Connection With Metal Cut
App 20170301618 - Chen; Chih-Liang ;   et al.
2017-10-19
Dual power structure with connection pins
Grant 9,793,211 - Peng , et al. October 17, 2
2017-10-17
Lithography using high selectivity spacers for pitch reduction
Grant 9,773,676 - Chang , et al. September 26, 2
2017-09-26
Method of Forming Openings in a Material Layer
App 20170271160 - Yen; Yung-Sung ;   et al.
2017-09-21
A Method Of Planarizing A Film Layer
App 20170271169 - Yen; Yung-Sung ;   et al.
2017-09-21
Environmental-surrounding-aware Opc
App 20170262571 - Cheng; Wen-Li ;   et al.
2017-09-14
Mechanisms for forming patterns using multiple lithography processes
Grant 9,761,436 - Chang , et al. September 12, 2
2017-09-12
Layout optimization for integrated circuit design
Grant 9,754,073 - Chen , et al. September 5, 2
2017-09-05
Designed-based interconnect structure in semiconductor structure
Grant 9,754,881 - Chen , et al. September 5, 2
2017-09-05
Generating final mask pattern by performing inverse beam technology process
Grant 9,747,408 - Huang , et al. August 29, 2
2017-08-29
Systems and methods for a sequential spacer scheme
Grant 9,735,140 - Chang , et al. August 15, 2
2017-08-15
Method of forming features with various dimensions
Grant 9,728,407 - Hsieh , et al. August 8, 2
2017-08-08
Via-free interconnect structure with self-aligned metal line interconnections
Grant 9,716,032 - Tang , et al. July 25, 2
2017-07-25
Lithographic Technique For Feature Cut By Line-end Shrink
App 20170207081 - Yen; Yung-Sung ;   et al.
2017-07-20
Method of Forming Features with Various Dimensions
App 20170194146 - Hsieh; Ken-Hsien ;   et al.
2017-07-06
Semiconductor Device And A Method For Fabricating The Same
App 20170194211 - LAI; Jui-Yao ;   et al.
2017-07-06
Multiple Patterning Method for Semiconductor Devices
App 20170193147 - Hsieh; Ken-Hsien ;   et al.
2017-07-06
Method of patterning a film layer
Grant 9,684,236 - Hsieh , et al. June 20, 2
2017-06-20
Via Connection to a Partially Filled Trench
App 20170170110 - Chang; Shih-Ming ;   et al.
2017-06-15
High fin cut fabrication process
Grant 9,679,994 - Chou , et al. June 13, 2
2017-06-13
Environmental-surrounding-aware OPC
Grant 9,679,100 - Cheng , et al. June 13, 2
2017-06-13
Method Of Spacer Patterning To Form A Target Integrated Circuit Pattern
App 20170162435 - WU; Chieh-Han ;   et al.
2017-06-08
Photomask And Method For Fabricating Integrated Circuit
App 20170160633 - LIN; Chun-Yu ;   et al.
2017-06-08
Layout Modification Method And System
App 20170140086 - SIO; KAM-TOU ;   et al.
2017-05-18
Via Rail Solution for High Power Electromigration
App 20170117272 - Sio; Kam-Tou ;   et al.
2017-04-27
Dual Power Structure with Connection Pins
App 20170110405 - Peng; Shih-Wei ;   et al.
2017-04-20
Semiconductor device with self-aligned interconnects
Grant 9,627,310 - Chang , et al. April 18, 2
2017-04-18
Method of patterning features of a semiconductor device
Grant 9,627,262 - Chiu , et al. April 18, 2
2017-04-18
Photomask and method for fabricating integrated circuit
Grant 9,612,526 - Lin , et al. April 4, 2
2017-04-04
Lithographic technique for feature cut by line-end shrink
Grant 9,613,850 - Yen , et al. April 4, 2
2017-04-04
Method for checking and fixing double-patterning layout
Grant 9,594,866 - Wang , et al. March 14, 2
2017-03-14
Spacer Etching Process for Integrated Circuit Design
App 20170069505 - LIU; RU-GUN ;   et al.
2017-03-09
Self aligned patterning with multiple resist layers
Grant 9,581,900 - Shieh , et al. February 28, 2
2017-02-28
Method of Mask Data Synthesis and Mask Making
App 20170053056 - Huang; Hsu-Ting ;   et al.
2017-02-23
Environmental-surrounding-aware Opc
App 20170053055 - Cheng; Wen-Li ;   et al.
2017-02-23
Method of spacer patterning to form a target integrated circuit pattern
Grant 9,576,814 - Wu , et al. February 21, 2
2017-02-21
Structure And Method For Semiconductor Device
App 20170040259 - Chen; Chih-Liang ;   et al.
2017-02-09
Method for forming line end space structure using trimmed photo resist
Grant 9,564,327 - Lee , et al. February 7, 2
2017-02-07
Conductive Line Patterning
App 20170025401 - Liu; Ru-Gun ;   et al.
2017-01-26
System and method for pattern correction in e-beam lithography
Grant 9,529,959 - Wang , et al. December 27, 2
2016-12-27
Multiple directed self-assembly patterning process
Grant 9,530,660 - Tseng , et al. December 27, 2
2016-12-27
Multiple edge enabled patterning
Grant 9,524,939 - Shieh , et al. December 20, 2
2016-12-20
Method Of Forming An Interconnect Structure For A Semiconductor Device
App 20160365276 - WU; Yung-Hsu ;   et al.
2016-12-15
Method Of Fabricating Semiconductor Device With Reduced Trench Distortions
App 20160358788 - Yen; Yung-Sung ;   et al.
2016-12-08
Layout Optimization for Integrated Circuit Design
App 20160350473 - Chen; Huang-Yu ;   et al.
2016-12-01
Spacer etching process for integrated circuit design
Grant 9,502,261 - Liu , et al. November 22, 2
2016-11-22
Multiple Directed Self-Assembly Patterning Process
App 20160336186 - Tseng; Chin-Yuan ;   et al.
2016-11-17
Method for integrated circuit mask patterning
Grant 9,495,507 - Yu , et al. November 15, 2
2016-11-15
Enhanced EUV Lithography System
App 20160327854 - Chang; Ching-Hsu ;   et al.
2016-11-10
Method for Validating Measurement Data
App 20160320183 - Chiu; Chui-Jeng ;   et al.
2016-11-03
Method of forming semiconductor device including source/drain contact having height below gate stack
Grant 9,478,636 - Chen , et al. October 25, 2
2016-10-25
Adaptive fin design for FinFETs
Grant 9,478,540 - Ou , et al. October 25, 2
2016-10-25
Lithographic Technique Incorporating Varied Pattern Materials
App 20160307769 - Tseng; Chin-Yuan ;   et al.
2016-10-20
Conductive line patterning
Grant 9,472,501 - Liu , et al. October 18, 2
2016-10-18
Mask Optimization For Multi-Layer Contacts
App 20160293590 - Liu; Ru-Gun ;   et al.
2016-10-06
Methods For Integrated Circuit Design And Fabrication
App 20160293422 - Ou; Tsong-Hua ;   et al.
2016-10-06
Systems and Methods for a Sequential Spacer Scheme
App 20160284681 - Chang; Shih-Ming ;   et al.
2016-09-29
Self-aligned Semiconductor Fabrication With Fosse Features
App 20160284591 - Chang; Shih-Ming ;   et al.
2016-09-29
Methodology For Pattern Density Optimization
App 20160275232 - Wang; Hung-Chun ;   et al.
2016-09-22
Fin patterning methods for increased process margin
Grant 9,449,880 - Tseng , et al. September 20, 2
2016-09-20
Method for making a mask with a phase bar in an integrated circuit design layout
Grant 9,448,470 - Liu , et al. September 20, 2
2016-09-20
Structure And Method For Semiconductor Device
App 20160268244 - YOUNG; Charles Chew-Yuen ;   et al.
2016-09-15
Multi-Layer Metal Contacts
App 20160254183 - Shieh; Ming-Feng ;   et al.
2016-09-01
Fin Patterning Methods For Increased Process Margin
App 20160254191 - Tseng; Chin-Yuan ;   et al.
2016-09-01
Method of forming an interconnect structure for a semiconductor device
Grant 9,431,297 - Wu , et al. August 30, 2
2016-08-30
Method Of Fabricating Semiconductor Device
App 20160240430 - Yen; Yung-Sung ;   et al.
2016-08-18
Layout optimization for integrated circuit design
Grant 9,418,196 - Chen , et al. August 16, 2
2016-08-16
Providing electron beam proximity effect correction by simulating write operations of polygonal shapes
Grant 9,418,191 - Wang , et al. August 16, 2
2016-08-16
Method of fabricating semiconductor device with reduced trench distortions
Grant 9,418,868 - Yen , et al. August 16, 2
2016-08-16
Method of fabricating semiconductor device
Grant 9,412,649 - Yen , et al. August 9, 2
2016-08-09
Methodology for pattern density optimization
Grant 9,411,924 - Wang , et al. August 9, 2
2016-08-09
Method for validating measurement data
Grant 9,404,743 - Chiu , et al. August 2, 2
2016-08-02
Enhanced EUV lithography system
Grant 9,395,618 - Chang , et al. July 19, 2
2016-07-19

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