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High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
Grant 11,239,107 - Wang , et al. February 1, 2 | 2022-02-01 |
Wafer Boats For Supporting Semiconductor Wafers In A Furnace
App 20210407823 - Bhagavat; Sumeet S. ; et al. | 2021-12-30 |
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
Grant 11,183,420 - Liu November 23, 2 | 2021-11-23 |
High resistivity silicon-on-insulator structure and method of manufacture thereof
Grant 11,145,538 - Libbert , et al. October 12, 2 | 2021-10-12 |
High Resistivity Silicon-on-insulator Substrate Having Enhanced Charge Trapping Efficiency
App 20210013093 - Wang; Gang ; et al. | 2021-01-14 |
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
Grant 10,832,937 - Wang , et al. November 10, 2 | 2020-11-10 |
High Resistivity Silicon-on-insulator Substrate Having Enhanced Charge Trapping Efficiency
App 20200335389 - Wang; Gang ; et al. | 2020-10-22 |
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
Grant 10,811,308 - Liu October 20, 2 | 2020-10-20 |
High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed by He--N.sub.2 co-implantation
Grant 10,796,945 - Liu , et al. October 6, 2 | 2020-10-06 |
High Resistivity Silicon-on-insulator Wafer Manufacturing Method For Reducing Substrate Loss
App 20200266099 - Liu; Qingmin | 2020-08-20 |
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
Grant 10,741,437 - Wang , et al. A | 2020-08-11 |
High Resistivity Silicon-on-insulator Substrate Having Enhanced Charge Trapping Efficiency
App 20200126847 - Wang; Gang ; et al. | 2020-04-23 |
High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency
Grant 10,546,771 - Wang , et al. Ja | 2020-01-28 |
High Resistivity Silicon-on-insulator Structure And Method Of Manufacture Thereof
App 20200027778 - Libbert; Jeffery L. ; et al. | 2020-01-23 |
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
Grant 10,483,379 - Liu , et al. Nov | 2019-11-19 |
HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE TRAPPING LAYER FORMED BY He-N2 CO-IMPLANTATION
App 20190341296 - Liu; Qingmin ; et al. | 2019-11-07 |
High resistivity silicon-on-insulator structure and method of manufacture thereof
Grant 10,468,295 - Libbert , et al. No | 2019-11-05 |
Semiconductor wafer support ring for heat treatment
Grant 10,458,709 - Liu , et al. Oc | 2019-10-29 |
High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed by He--N.sub.2 co-implantation
Grant 10,403,541 - Liu , et al. Sep | 2019-09-03 |
High Resistivity Silicon-on-insulator Wafer Manufacturing Method For Reducing Substrate Loss
App 20190259654 - Liu; Qingmin | 2019-08-22 |
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
Grant 10,312,134 - Liu | 2019-06-04 |
High Resistivity Silicon-on-insulator Wafer Manufacturing Method For Reducing Substrate Loss
App 20190131169 - Liu; Qingmin | 2019-05-02 |
High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed by He-N.sub.2 co-implantation
Grant 10,224,233 - Liu , et al. | 2019-03-05 |
Semiconductor Wafer Support Ring For Heat Treatment
App 20180274862 - Liu; Qingmin ; et al. | 2018-09-27 |
High Resistivity Silicon-on-insulator Substrate Comprising A Charge Trapping Layer Formed By He-n2 Co-implantation
App 20180261496 - Liu; Qingmin ; et al. | 2018-09-13 |
Semiconductor wafer support ring for heat treatment
Grant 10,072,892 - Liu , et al. September 11, 2 | 2018-09-11 |
High Resistivity Silicon-on-insulator Structure And Method Of Manufacture Thereof
App 20180158721 - Libbert; Jeffery L. ; et al. | 2018-06-07 |
High Resistivity Silicon-on-insulator Wafer Manufacturing Method For Reducing Substrate Loss
App 20180138298 - Liu; Qingmin ; et al. | 2018-05-17 |
High Resistivity Silicon-on-insulator Substrate Having Enhanced Charge Trapping Efficiency
App 20180114720 - Wang; Gang ; et al. | 2018-04-26 |
High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss
Grant 9,899,499 - Liu , et al. February 20, 2 | 2018-02-20 |
Method of manufacturing high resistivity silicon-on-insulator substrate
Grant 9,853,133 - Thomas , et al. December 26, 2 | 2017-12-26 |
HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE TRAPPING LAYER FORMED BY He-N2 CO-IMPLANTATION
App 20170358484 - Liu; Qingmin ; et al. | 2017-12-14 |
Semiconductor Wafer Support Ring For Heat Treatment
App 20170115063 - Liu; Qingmin ; et al. | 2017-04-27 |
Methods For Preparing Layered Semiconductor Structures And Related Bonded Structures
App 20170025306 - Wang; Gang ; et al. | 2017-01-26 |
High Resistivity Silicon-on-insulator Wafer Manufacturing Method For Reducing Substrate Loss
App 20160071760 - Liu; Qingmin | 2016-03-10 |
High Resistivity Silicon-on-insulator Wafer Manufacturing Method For Reducing Substrate Loss
App 20160071958 - Liu; Qingmin ; et al. | 2016-03-10 |
Method Of Manufacturing High Resistivity Silicon-on-insulator Substrate
App 20160071959 - Thomas; Shawn George ; et al. | 2016-03-10 |
Semiconductor-on-insulator wafer manufacturing method for reducing light point defects and surface roughness
Grant 9,202,711 - Liu , et al. December 1, 2 | 2015-12-01 |
Semiconductor-on-insulator Wafer Manufacturing Method For Reducing Light Point Defects And Surface Roughness
App 20140273405 - Liu; Qingmin ; et al. | 2014-09-18 |
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