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Semiconductor device manufacturing methods
Grant 8,697,339 - Zhuang , et al. April 15, 2 | 2014-04-15 |
Metrology systems and methods for lithography processes
Grant 8,394,574 - Sarma , et al. March 12, 2 | 2013-03-12 |
Semiconductor devices and methods of manufacturing thereof
Grant 8,349,528 - Lipinski , et al. January 8, 2 | 2013-01-08 |
Metrology Systems and Methods for Lithography Processes
App 20120013884 - Sarma; Chandrasekhar ; et al. | 2012-01-19 |
Lithography masks and methods of manufacture thereof
Grant 8,071,261 - Gutmann , et al. December 6, 2 | 2011-12-06 |
Metrology systems and methods for lithography processes
Grant 8,067,135 - Sarma , et al. November 29, 2 | 2011-11-29 |
Semiconductor device having a polysilicon layer with a non-constant doping profile
Grant 8,063,406 - Zhuang , et al. November 22, 2 | 2011-11-22 |
Semiconductor Devices and Methods of Manufacturing Thereof
App 20110250530 - Lipinski; Matthias ; et al. | 2011-10-13 |
Semiconductor devices and methods of manufacturing thereof
Grant 8,007,985 - Lipinski , et al. August 30, 2 | 2011-08-30 |
Semiconductor Device Manufacturing Methods
App 20110183266 - Zhuang; Haoren ; et al. | 2011-07-28 |
Threshold voltage consistency and effective width in same-substrate device groups
Grant 7,892,939 - Hampp , et al. February 22, 2 | 2011-02-22 |
Method for Manufacturing a Semiconductor Device Having Doped and Undoped Polysilicon Layers
App 20110031563 - Zhuang; Haoren ; et al. | 2011-02-10 |
Method for manufacturing a semiconductor device having doped and undoped polysilicon layers
Grant 7,842,579 - Zhuang , et al. November 30, 2 | 2010-11-30 |
Metrology Systems and Methods for Lithography Processes
App 20100283052 - Sarma; Chandrasekhar ; et al. | 2010-11-11 |
Metrology systems and methods for lithography processes
Grant 7,794,903 - Sarma , et al. September 14, 2 | 2010-09-14 |
Feature Dimension Control in a Manufacturing Process
App 20100120177 - Zhuang; Haoren ; et al. | 2010-05-13 |
Feature dimension control in a manufacturing process
Grant 7,674,350 - Zhuang , et al. March 9, 2 | 2010-03-09 |
Threshold Voltage Consistency and Effective Width in Same-Substrate Device Groups
App 20090227086 - Hampp; Roland ; et al. | 2009-09-10 |
Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas
Grant 7,541,234 - Chang , et al. June 2, 2 | 2009-06-02 |
Lithography Masks and Methods of Manufacture Thereof
App 20090023078 - Gutmann; Alois ; et al. | 2009-01-22 |
Semiconductor device manufacturing methods
App 20080286698 - Zhuang; Haoren ; et al. | 2008-11-20 |
Methods of Forming Mask Patterns on Semiconductor Wafers that Compensate for Nonuniform Center-to-Edge Etch Rates During Photolithographic Processing
App 20080220609 - Chang; Chong Kwang ; et al. | 2008-09-11 |
Semiconductor Device with Pre-Anneal Sandwich Gate Structure, and Method of Manufacturing
App 20080173958 - Zhuang; Haoren ; et al. | 2008-07-24 |
Feature Dimension Control in a Manufacturing Process
App 20080176344 - Zhuang; Haoren ; et al. | 2008-07-24 |
Metrology systems and methods for lithography processes
App 20080044741 - Sarma; Chandrasekhar ; et al. | 2008-02-21 |
Process control systems and methods
App 20070239305 - Zhuang; Haoren ; et al. | 2007-10-11 |
Semiconductor devices and methods of manufacturing thereof
App 20070178388 - Lipinski; Matthias ; et al. | 2007-08-02 |
Process for generating a hard mask for the patterning of a layer
Grant 7,223,525 - Lipinski May 29, 2 | 2007-05-29 |
Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas
App 20070099126 - Chang; Chong Kwang ; et al. | 2007-05-03 |
Plasma encapsulation for electronic and microelectronic components such as organic light emitting diodes
Grant 6,933,538 - Hunze , et al. August 23, 2 | 2005-08-23 |
Process for generating a hard mask for the patterning of a layer, and hard mask for the patterning of a layer
App 20050106478 - Lipinski, Matthias | 2005-05-19 |
Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity
Grant 6,835,663 - Lipinski December 28, 2 | 2004-12-28 |
Tungsten hard mask
Grant 6,815,364 - Stojakovic , et al. November 9, 2 | 2004-11-09 |
System and method for performing a metal layer RIE process
App 20040203242 - Stojakovic, George ; et al. | 2004-10-14 |
Plasma encapsulation for electronic and microelectronic components such as oleds
App 20040046165 - Hunze, Arvid ; et al. | 2004-03-11 |
Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity
App 20040000534 - Lipinski, Matthias | 2004-01-01 |
Tungsten hard mask
App 20030064602 - Stojakovic, George ; et al. | 2003-04-03 |
Method of discharging reaction water in PEM fuel cells and fuel cell for carrying out the method
App 20010038933 - Gebhardt, Ulrich ; et al. | 2001-11-08 |
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