Lin; Y. Sean

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lin; Y. Sean.The latest application filed is for "multivariate fault detection improvement for electronic device manufacturing".

Company Profile

0.4.12

Lin; Y. Sean - Irvine CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Metrics independent and recipe independent fault classes Grant 8,010,321 - Lin , et al. August 30, 2	2011-08-30
Graphical user interface for presenting multivariate fault contributions Grant 7,831,326 - Lin , et al. November 9, 2	2010-11-09
Graphical user interface for presenting multivariate fault contributions Grant 7,765,020 - Lin , et al. July 27, 2	2010-07-27
Multivariate Fault Detection Improvement For Electronic Device Manufacturing App 20090282296 - LIN; Y. SEAN	2009-11-12
Metrics independent and recipe independent fault classes App 20080276128 - Lin; Y. Sean ; et al.	2008-11-06
Graphical user interface for presenting multivariate fault contributions App 20080276137 - Lin; Y. Sean ; et al.	2008-11-06
Graphical user interface for presenting multivariate fault contributions App 20080276136 - Lin; Y. Sean ; et al.	2008-11-06
Method And Apparatus For Dispense Of Chemical Vapor In A Track Lithography Tool App 20080069954 - Lin; Y. Sean	2008-03-20
Chemical dispense system App 20070272327 - Lin; Y. Sean	2007-11-29
Systems and Methods for Monitoring and Controlling Dispense Using a Digital Optical Sensor App 20070251450 - LIN; Y. Sean	2007-11-01
Method and apparatus for controlling dispense operations in a track lithography tool App 20070254094 - Lin; Y. Sean	2007-11-01
Systems and Methods for Detecting Abnormal Dispense of Semiconductor Process Fluids App 20070254092 - LIN; Y. Sean ; et al.	2007-11-01
Track lithography system with integrated photoresist pump, filter, and buffer vessel App 20070207259 - Kulkarni; Mayur G. ; et al.	2007-09-06
Method and apparatus for dispense pump calibration in a track lithography system App 20070154210 - Lin; Y. Sean	2007-07-05
Liquid delivery system and method Grant 6,752,547 - Britcher , et al. June 22, 2	2004-06-22
Liquid Delivery System And Method App 20040081457 - Britcher, Eric B. ; et al.	2004-04-29

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