| Patent | Date |
|---|
Resist Dispensing System And Method Of Use
App 20220308452 - CHANG; Ya-Ching ; et al. | 2022-09-29 |
Method Of Manufacturing Semiconductor Devices
App 20220285168 - LIU; Ru-Gun ; et al. | 2022-09-08 |
Multi-power management system and operation method thereof
Grant 11,435,817 - Lin , et al. September 6, 2 | 2022-09-06 |
Lithography apparatus and method for using the same
Grant 11,437,161 - Chang , et al. September 6, 2 | 2022-09-06 |
Photolithography method and apparatus
Grant 11,429,027 - Yu , et al. August 30, 2 | 2022-08-30 |
Extreme ultraviolet photoresist with high-efficiency electron transfer
Grant 11,422,465 - Lai , et al. August 23, 2 | 2022-08-23 |
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20220260931 - YU; Shinn-Sheng ; et al. | 2022-08-18 |
FinFETs and methods of forming FinFETs
Grant 11,411,113 - Lin , et al. August 9, 2 | 2022-08-09 |
Photoresist Developer And Method Of Developing Photoresist
App 20220244639 - ZI; An-Ren ; et al. | 2022-08-04 |
Method Of Manufacturing A Semiconductor Device
App 20220230889 - CHEN; Yen-Hao ; et al. | 2022-07-21 |
Grafting design for pattern post-treatment in semiconductor manufacturing
Grant 11,387,104 - Wang , et al. July 12, 2 | 2022-07-12 |
Extreme ultraviolet photoresist and method
Grant 11,378,884 - Liu , et al. July 5, 2 | 2022-07-05 |
Method of manufacturing semiconductor devices
Grant 11,342,193 - Liu , et al. May 24, 2 | 2022-05-24 |
Fine Line Patterning Methods
App 20220157605 - HUANG; Shih-Chun ; et al. | 2022-05-19 |
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
Grant 11,320,747 - Yu , et al. May 3, 2 | 2022-05-03 |
Humidity control in EUV lithography
Grant 11,307,504 - Zi , et al. April 19, 2 | 2022-04-19 |
Photoresist developer and method of developing photoresist
Grant 11,300,878 - Zi , et al. April 12, 2 | 2022-04-12 |
Pattern formation method using a photo mask for manufacturing a semiconductor device
Grant 11,294,286 - Liu , et al. April 5, 2 | 2022-04-05 |
Method of manufacturing a semiconductor device
Grant 11,295,961 - Chen , et al. April 5, 2 | 2022-04-05 |
Directional processing to remove a layer or a material formed over a substrate
Grant 11,289,332 - Huang , et al. March 29, 2 | 2022-03-29 |
Photoresist composition and method of forming photoresist pattern
Grant 11,287,740 - Zi , et al. March 29, 2 | 2022-03-29 |
Method for performing lithography process with post treatment
Grant 11,281,107 - Weng , et al. March 22, 2 | 2022-03-22 |
Method for manufacturing a semiconductor device and a coating material
Grant 11,276,568 - Chien , et al. March 15, 2 | 2022-03-15 |
Method of cleaning extreme ultraviolet lithography collector
Grant 11,262,659 - Zi , et al. March 1, 2 | 2022-03-01 |
Fine line patterning methods
Grant 11,239,078 - Huang , et al. February 1, 2 | 2022-02-01 |
Photoresist, developer, and method of forming photoresist pattern
Grant 11,215,924 - Zi , et al. January 4, 2 | 2022-01-04 |
Capping Layer For Gate Electrodes
App 20210384322 - LIN; Chin-Hsiang ; et al. | 2021-12-09 |
Dummy Fin Structures and Methods of Forming Same
App 20210375667 - Lin; Chin-Hsiang ; et al. | 2021-12-02 |
Method For Mask Data Synthesis With Wafer Target Adjustment
App 20210373443 - HUANG; Hsu-Ting ; et al. | 2021-12-02 |
Photoresist Developer And Method Of Manufacturing A Semiconductor Device
App 20210364924 - LIU; Chen-Yu ; et al. | 2021-11-25 |
Directional Deposition for Semiconductor Fabrication
App 20210358752 - Huang; Shih-Chun ; et al. | 2021-11-18 |
Photoresist Under-layer And Method Of Forming Photoresist Pattern
App 20210349391 - ZI; An-Ren ; et al. | 2021-11-11 |
Lithography Method For Positive Tone Development
App 20210341844 - WENG; Ming-Hui ; et al. | 2021-11-04 |
Resin, Photoresist Composition, And Method Of Manufacturing Semiconductor Device
App 20210341837 - WANG; Siao-Shan ; et al. | 2021-11-04 |
Wafer alignment mark scheme
Grant 11,162,777 - Tseng , et al. November 2, 2 | 2021-11-02 |
Capping layer for gate electrodes
Grant 11,164,956 - Lin , et al. November 2, 2 | 2021-11-02 |
Pattern fidelity enhancement with directional patterning technology
Grant 11,158,509 - Shen , et al. October 26, 2 | 2021-10-26 |
Multi-power Management System And Operation Method Thereof
App 20210325959 - Lin; Chin-Hsiang ; et al. | 2021-10-21 |
Method and apparatus for collecting information used in image-error compensation
Grant 11,150,561 - Cho , et al. October 19, 2 | 2021-10-19 |
Apparatus and method for generating an electromagnetic radiation
Grant 11,153,957 - Hsu , et al. October 19, 2 | 2021-10-19 |
Negative tone developer for extreme ultraviolet lithography
Grant 11,143,963 - Liu , et al. October 12, 2 | 2021-10-12 |
Method For Forming Vias And Method For Forming Contacts In Vias
App 20210313220 - LIN; Tzu-Yang ; et al. | 2021-10-07 |
Photoresist Composition And Method Of Manufacturing Semiconductor Device
App 20210311388 - LAI; Wei-Han ; et al. | 2021-10-07 |
Photoresist Composition And Method Of Manufacturing A Semiconductor Device
App 20210311393 - LIN; Tzu-Yang ; et al. | 2021-10-07 |
Semiconductor method of protecting wafer from bevel contamination
Grant 11,137,685 - Zi , et al. October 5, 2 | 2021-10-05 |
Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same
Grant 11,137,684 - Lin , et al. October 5, 2 | 2021-10-05 |
Lithography Mask with a Black Border Regions and Method of Fabricating the Same
App 20210294203 - Lin; Chin-Hsiang ; et al. | 2021-09-23 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20210294212 - ZI; An-Ren ; et al. | 2021-09-23 |
Layout Modification Method For Exposure Manufacturing Process
App 20210296303 - CHO; Hung-Wen ; et al. | 2021-09-23 |
Photosensitive groups in resist layer
Grant 11,127,592 - Chang , et al. September 21, 2 | 2021-09-21 |
Method For Forming Semiconductor Structure
App 20210286269 - WENG; Ming-Hui ; et al. | 2021-09-16 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20210278762 - ZI; An-Ren ; et al. | 2021-09-09 |
Method Of Manufacturing Semiconductor Devices
App 20210280455 - LIU; Ru-Gun ; et al. | 2021-09-09 |
Photoresist with gradient composition for improved uniformity
Grant 11,112,698 - Lilin , et al. September 7, 2 | 2021-09-07 |
Method For Forming Semiconductor Structure
App 20210263419 - LIN; Li-Yen ; et al. | 2021-08-26 |
Method for mask data synthesis with wafer target adjustment
Grant 11,092,899 - Huang , et al. August 17, 2 | 2021-08-17 |
Lithography method for positive tone development
Grant 11,079,681 - Weng , et al. August 3, 2 | 2021-08-03 |
Directional deposition for semiconductor fabrication
Grant 11,075,079 - Huang , et al. July 27, 2 | 2021-07-27 |
Dummy fin structures and methods of forming same
Grant 11,069,558 - Lin , et al. July 20, 2 | 2021-07-20 |
Underlayer Composition And Method Of Manufacturing A Semiconductor Device
App 20210200091 - HO; Chun-Chih ; et al. | 2021-07-01 |
Method for forming semiconductor structure
Grant 11,036,137 - Zi , et al. June 15, 2 | 2021-06-15 |
Method for forming vias and method for forming contacts in vias
Grant 11,037,820 - Lin , et al. June 15, 2 | 2021-06-15 |
Lithography mask with a black border regions and method of fabricating the same
Grant 11,029,593 - Lin , et al. June 8, 2 | 2021-06-08 |
Photoresist composition and method of forming photoresist pattern
Grant 11,029,602 - Zi , et al. June 8, 2 | 2021-06-08 |
Layout modification method for exposure manufacturing process
Grant 11,024,623 - Cho , et al. June 1, 2 | 2021-06-01 |
Bottom-up material formation for planarization
Grant 11,022,886 - Weng , et al. June 1, 2 | 2021-06-01 |
Photosensitive middle layer
Grant 11,022,885 - Ho , et al. June 1, 2 | 2021-06-01 |
Method Of Manufacturing A Semiconductor Device
App 20210159087 - CHEN; Yen-Hao ; et al. | 2021-05-27 |
Photoresist composition and method of forming photoresist pattern
Grant 11,016,386 - Zi , et al. May 25, 2 | 2021-05-25 |
Method for forming semiconductor structure
Grant 11,009,796 - Weng , et al. May 18, 2 | 2021-05-18 |
Extreme ultraviolet photoresist and method
Grant 11,003,076 - Chen , et al. May 11, 2 | 2021-05-11 |
Method of manufacturing semiconductor devices
Grant 11,004,729 - Liu , et al. May 11, 2 | 2021-05-11 |
Method for forming semiconductor structure
Grant 11,003,084 - Lin , et al. May 11, 2 | 2021-05-11 |
Method for forming semiconductor structure
Grant 10,990,013 - Zi , et al. April 27, 2 | 2021-04-27 |
Adhesion Layer For Multi-layer Photoresist
App 20210103218 - LIU; Chen-Yu ; et al. | 2021-04-08 |
Extreme Ultraviolet Photolithography Method With Developer Composition
App 20210103213 - Zi; An-Ren ; et al. | 2021-04-08 |
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20210096475 - YU; Shinn-Sheng ; et al. | 2021-04-01 |
Method Of Manufacturing A Semiconductor Device
App 20210074538 - ZI; An-Ren ; et al. | 2021-03-11 |
Method For Forming Patterned Photoresist
App 20210063888 - HO; Chun-Chih ; et al. | 2021-03-04 |
Capping Layer For Gate Electrodes
App 20210057543 - LIN; Chin-Hsiang ; et al. | 2021-02-25 |
Control System For Plasma Chamber Having Controllable Valve
App 20210010137 - SU; Yen-Shuo ; et al. | 2021-01-14 |
Method Of Manufacturing Semiconductor Devices
App 20210013048 - LIU; Ru-Gun ; et al. | 2021-01-14 |
Topographic planarization method for lithography process
Grant 10,879,108 - Lin , et al. December 29, 2 | 2020-12-29 |
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning
Grant 10,871,713 - Cho , et al. December 22, 2 | 2020-12-22 |
Methods of reducing pattern roughness in semiconductor fabrication
Grant 10,872,773 - Wang , et al. December 22, 2 | 2020-12-22 |
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
Grant 10,866,525 - Yu , et al. December 15, 2 | 2020-12-15 |
Lithography techniques for reducing resist swelling
Grant 10,866,517 - Weng , et al. December 15, 2 | 2020-12-15 |
Lithography process using photoresist material with photosensitive functional group
Grant 10,866,515 - Weng , et al. December 15, 2 | 2020-12-15 |
Extreme ultraviolet photolithography method with developer composition
Grant 10,866,511 - Zi , et al. December 15, 2 | 2020-12-15 |
Lithography mask with a black border region and method of fabricating the same
Grant 10,866,504 - Lin , et al. December 15, 2 | 2020-12-15 |
Adhesion layer for multi-layer photoresist
Grant 10,859,915 - Liu , et al. December 8, 2 | 2020-12-08 |
Method and apparatus for performing a polishing process in semiconductor fabrication
Grant 10,857,649 - Lee , et al. December 8, 2 | 2020-12-08 |
Material composition and methods thereof
Grant 10,863,630 - Wang , et al. December 8, 2 | 2020-12-08 |
Method For Forming Semiconductor Structure By Patterning Resist Layer Having Inorganic Material
App 20200365398 - ZI; An-Ren ; et al. | 2020-11-19 |
Integrated system, integrated system operation method and film treatment method
Grant 10,840,102 - Yu , et al. November 17, 2 | 2020-11-17 |
Method And Apparatus For Collecting Information Used In Image-error Compensation
App 20200348586 - CHO; Hung-Wen ; et al. | 2020-11-05 |
Layout Modification Method For Exposure Manufacturing Process
App 20200350306 - CHO; Hung-Wen ; et al. | 2020-11-05 |
FinFETs and Methods of Forming FinFETs
App 20200343384 - Lin; Chin-Hsiang ; et al. | 2020-10-29 |
Method Composition and Methods Thereof
App 20200335349 - Wang; Siao-Shan ; et al. | 2020-10-22 |
Fine Line Patterning Methods
App 20200335340 - HUANG; Shih-Chun ; et al. | 2020-10-22 |
Material composition and process for substrate modification
Grant 10,802,402 - Lai , et al. October 13, 2 | 2020-10-13 |
Method For Performing Lithography Process With Post Treatment
App 20200319560 - WENG; Ming-Hui ; et al. | 2020-10-08 |
Humidity Control in EUV Lithography
App 20200319565 - Zi; An-Ren ; et al. | 2020-10-08 |
Method for performing a photolithography process
Grant 10,796,910 - Ko , et al. October 6, 2 | 2020-10-06 |
Method of manufacturing semiconductor devices
Grant 10,790,155 - Liu , et al. September 29, 2 | 2020-09-29 |
Control system for plasma chamber having controllable valve and method of using the same
Grant 10,787,742 - Su , et al. September 29, 2 | 2020-09-29 |
Method For Forming Semiconductor Structure
App 20200301280 - ZI; An-Ren ; et al. | 2020-09-24 |
Grafting Design for Pattern Post-Treatment in Semiconductor Manufacturing
App 20200294801 - Wang; Siao-Shan ; et al. | 2020-09-17 |
Multi-layer photoresist
Grant 10,777,681 - Zi , et al. Sept | 2020-09-15 |
Resist solvents for photolithography applications
Grant 10,768,527 - Su , et al. Sep | 2020-09-08 |
Pattern Fidelity Enhancement with Directional Patterning Technology
App 20200279743 - Shen; Yu-Tien ; et al. | 2020-09-03 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20200272051 - HO; Chun-Chih ; et al. | 2020-08-27 |
Method Of Controlling Reticle Masking Blade Positioning To Minimize Impact On Critical Dimension Uniformity And Device For Contr
App 20200264515 - CHO; Hung-Wen ; et al. | 2020-08-20 |
Blocking layer material composition and methods thereof in semiconductor manufacturing
Grant 10,747,114 - Wang , et al. A | 2020-08-18 |
Pellicle fabrication methods and structures thereof
Grant 10,747,103 - Lin , et al. A | 2020-08-18 |
Semiconductor Method of Protecting Wafer from Bevel Contamination
App 20200257203 - A1 | 2020-08-13 |
Method for forming semiconductor structure by patterning resist layer having inorganic material
Grant 10,741,391 - Zi , et al. A | 2020-08-11 |
Layout modification method for exposure manufacturing process
Grant 10,720,419 - Cho , et al. | 2020-07-21 |
FinFETs and methods of forming FinFETs
Grant 10,714,620 - Lin , et al. | 2020-07-14 |
Method and apparatus for collecting information used in image-error compensation
Grant 10,712,651 - Cho , et al. | 2020-07-14 |
Fine line patterning methods
Grant 10,707,081 - Huang , et al. | 2020-07-07 |
Method for performing lithography process with post treatment
Grant 10,691,023 - Weng , et al. | 2020-06-23 |
Method for forming semiconductor structure by patterning assist layer having polymer
Grant 10,684,545 - Zi , et al. | 2020-06-16 |
Method For Mask Data Synthesis With Wafer Target Adjustment
App 20200174380 - HUANG; Hsu-Ting ; et al. | 2020-06-04 |
Method of planarizing a wafer
Grant 10,668,592 - Lee , et al. | 2020-06-02 |
Grafting design for pattern post-treatment in semiconductor manufacturing
Grant 10,672,610 - Wang , et al. | 2020-06-02 |
Material composition and methods thereof
Grant 10,672,619 - Wang , et al. | 2020-06-02 |
Lithography Method For Positive Tone Development
App 20200159110 - WENG; Ming-Hui ; et al. | 2020-05-21 |
Pattern fidelity enhancement with directional patterning technology
Grant 10,658,184 - Shen , et al. | 2020-05-19 |
Methods of Reducing Pattern Roughness in Semiconductor Fabrication
App 20200152468 - Wang; Chien-Wei ; et al. | 2020-05-14 |
Resist material and method for forming semiconductor structure using resist layer
Grant 10,649,339 - Chang , et al. | 2020-05-12 |
Material Composition And Methods Thereof
App 20200146154 - WANG; Siao-Shan ; et al. | 2020-05-07 |
Lithography Techniques for Reducing Resist Swelling
App 20200142316 - Weng; Ming-Hui ; et al. | 2020-05-07 |
Method of controlling reticle masking blade positioning to minimize impact on critical dimension uniformity and device for controlling reticle masking blade positioning
Grant 10,642,158 - Cho , et al. | 2020-05-05 |
Method For Manufacturing A Semiconductor Device And A Coating Material
App 20200135454 - CHIEN; Yu-Ling Chang ; et al. | 2020-04-30 |
Protective Composition And Method Of Forming Photoresist Pattern
App 20200135451 - ZI; An-Ren ; et al. | 2020-04-30 |
Wafer Alignment Mark Scheme
App 20200132436 - Tseng; Wei-Hsiang ; et al. | 2020-04-30 |
Apparatus And Method For Generating An Electromagnetic Radiation
App 20200137863 - HSU; TZU JENG ; et al. | 2020-04-30 |
Extreme Ultraviolet Photoresist and Method
App 20200133124 - Liu; Chen-Yu ; et al. | 2020-04-30 |
Method For Performing A Photolithography Process
App 20200135452 - KO; Tsung-Han ; et al. | 2020-04-30 |
Semiconductor method of protecting wafer from bevel contamination
Grant 10,635,000 - Zi , et al. | 2020-04-28 |
Negative Tone Developer for Extreme Ultraviolet Lithography
App 20200124971 - Liu; Chen-Yu ; et al. | 2020-04-23 |
Lithography Mask With Both Transmission-type And Reflective-type Overlay Marks And Method Of Fabricating The Same
App 20200124958 - Lin; Yun-Yue ; et al. | 2020-04-23 |
Extreme Ultraviolet Photoresist With High-Efficiency Electron Transfer
App 20200124964 - Lai; Wei-Han ; et al. | 2020-04-23 |
Method For Forming Vias And Method For Forming Contacts In Vias
App 20200126849 - LIN; Tzu-Yang ; et al. | 2020-04-23 |
Dummy Fin Structures And Methods Of Forming Same
App 20200118867 - Lin; Chin-Hsiang ; et al. | 2020-04-16 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20200105522 - LIU; Chen-Yu ; et al. | 2020-04-02 |
Adhesion Layer For Multi-layer Photoresist
App 20200098558 - LIU; Chen-Yu ; et al. | 2020-03-26 |
Photoresist, Developer, And Method Of Forming Photoresist Pattern
App 20200073238 - ZI; An-Ren ; et al. | 2020-03-05 |
Photosensitive Middle Layer
App 20200073243 - Ho; Chun-Chih ; et al. | 2020-03-05 |
Method Of Cleaning Extreme Ultraviolet Lithography Collector
App 20200073250 - ZI; An-Ren ; et al. | 2020-03-05 |
Method for performing a photolithography process
Grant 10,573,519 - Ko , et al. Feb | 2020-02-25 |
Photolithography Method And Apparatus
App 20200057375 - YU; Shinn-Sheng ; et al. | 2020-02-20 |
Resist Solvents for Photolithography Applications
App 20200050110 - Su; Yu-Chung ; et al. | 2020-02-13 |
Lithography Mask with a Black Border Regions and Method of Fabricating the Same
App 20200050098 - Lin; Chin-Hsiang ; et al. | 2020-02-13 |
Method Of Manufacturing A Semiconductor Device And Apparatus For Manufacturing The Semiconductor Device
App 20200041915 - YU; Shinn-Sheng ; et al. | 2020-02-06 |
Extreme Ultraviolet Lithography System
App 20200019070 - Weng; Ming-Hui ; et al. | 2020-01-16 |
Method For Forming Semiconductor Structure
App 20200013618 - WENG; Ming-Hui ; et al. | 2020-01-09 |
Extreme ultraviolet photoresist and method
Grant 10,527,941 - Liu , et al. J | 2020-01-07 |
Method for manufacturing a semiconductor device and a coating material
Grant 10,529,552 - Chien , et al. J | 2020-01-07 |
Method Of Manufacturing Semiconductor Devices
App 20200006121 - LIU; Ru-Gun ; et al. | 2020-01-02 |
Method Of Manufacturing Semiconductor Devices
App 20200006078 - LIU; Ru-Gun ; et al. | 2020-01-02 |
Pattern Formation Method Using A Photo Mask For Manufacturing A Semiconductor Device
App 20200004137 - LIU; Ru-Gun ; et al. | 2020-01-02 |
Lithography techniques for reducing resist swelling
Grant 10,520,822 - Weng , et al. Dec | 2019-12-31 |
Negative tone developer for extreme ultraviolet lithography
Grant 10,520,820 - Liu , et al. Dec | 2019-12-31 |
Lithography process with enhanced etch selectivity
Grant 10,520,821 - Liu , et al. Dec | 2019-12-31 |
Extreme ultraviolet lithography system
Grant 10,520,833 - Weng , et al. Dec | 2019-12-31 |
Extreme ultraviolet photoresist with high-efficiency electron transfer
Grant 10,520,813 - Lai , et al. Dec | 2019-12-31 |
Method for forming vias and method for forming contacts in vias
Grant 10,515,847 - Lin , et al. Dec | 2019-12-24 |
Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same
Grant 10,514,597 - Lin , et al. Dec | 2019-12-24 |
Material composition and methods thereof
Grant 10,517,179 - Wang , et al. Dec | 2019-12-24 |
Wafer alignment mark scheme
Grant 10,514,247 - Tseng , et al. Dec | 2019-12-24 |
Methods of reducing pattern roughness in semiconductor fabrication
Grant 10,515,812 - Wang , et al. Dec | 2019-12-24 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20190384170 - ZI; An-Ren ; et al. | 2019-12-19 |
Extreme Ultraviolet Photoresist and Method
App 20190384172 - Chen; Yen-Hao ; et al. | 2019-12-19 |
Blocking Layer Material Composition and Methods Thereof in Semiconductor Manufacturing
App 20190384177 - Wang; Siao-Shan ; et al. | 2019-12-19 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20190384171 - ZI; An-Ren ; et al. | 2019-12-19 |
Dummy fin structures and methods of forming same
Grant 10,510,580 - Lin , et al. Dec | 2019-12-17 |
Photosensitive Groups in Resist Layer
App 20190371600 - Chang; Ya-Ching ; et al. | 2019-12-05 |
Layout Modification Method For Exposure Manufacturing Process
App 20190348409 - CHO; Hung-Wen ; et al. | 2019-11-14 |
Directional Processing To Remove A Layer Or A Material Formed Over A Substrate
App 20190341254 - HUANG; Shih-Chun ; et al. | 2019-11-07 |
Multi-Layer Photoresist
App 20190334028 - Zi; An-Ren ; et al. | 2019-10-31 |
Extreme ultraviolet photoresist and method
Grant 10,401,728 - Chen , et al. Sep | 2019-09-03 |
Blocking layer material composition and methods thereof in semiconductor manufacturing
Grant 10,394,123 - Wang , et al. A | 2019-08-27 |
Multi-layer photoresist
Grant 10,381,481 - Zi , et al. A | 2019-08-13 |
Layout modification method for exposure manufacturing process
Grant 10,366,973 - Cho , et al. July 30, 2 | 2019-07-30 |
Directional processing to remove a layer or a material formed over a substrate
Grant 10,354,874 - Huang , et al. July 16, 2 | 2019-07-16 |
Material Composition And Process For Substrate Modification
App 20190206680 - LAI; Wei-Han ; et al. | 2019-07-04 |
Pellicle Fabrication Methods And Structures Thereof
App 20190204730 - LIN; Yun-Yue ; et al. | 2019-07-04 |
Lithography Mask With A Black Border Region And Method Of Fabricating The Same
App 20190196322 - Lin; Chin-Hsiang ; et al. | 2019-06-27 |
Method for forming semiconductor structure using modified resist layer
Grant 10,312,108 - Yang , et al. | 2019-06-04 |
Method Of Controlling Reticle Masking Blade Positioning To Minimize Impact On Critical Dimension Uniformity And Device For Contr
App 20190163046 - CHO; Hung-Wen ; et al. | 2019-05-30 |
Method For Manufacturing A Semiconductor Device And A Coating Material
App 20190164746 - CHIEN; Yu-Ling Chang ; et al. | 2019-05-30 |
Method For Forming Semiconductor Structure
App 20190155156 - ZI; An-Ren ; et al. | 2019-05-23 |
Directional Deposition for Semiconductor Fabrication
App 20190157084 - Huang; Shih-Chun ; et al. | 2019-05-23 |
Lithography Process Using Photoresist Material With Photosensitive Functional Group
App 20190157073 - WENG; Ming-Hui ; et al. | 2019-05-23 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20190146342 - ZI; An-Ren ; et al. | 2019-05-16 |
Fine Line Patterning Methods
App 20190148147 - Huang; Shih-Chun ; et al. | 2019-05-16 |
Directional Processing To Remove A Layer Or A Material Formed Over A Substrate
App 20190148145 - Huang; Shih-Chun ; et al. | 2019-05-16 |
Photoresist Developer And Method Of Developing Photoresist
App 20190146337 - ZI; An-Ren ; et al. | 2019-05-16 |
Method For Forming Semiconductor Structure
App 20190137883 - LIN; Li-Yen ; et al. | 2019-05-09 |
Method And Apparatus For Collecting Information Used In Image-error Compensation
App 20190137866 - CHO; Hung-Wen ; et al. | 2019-05-09 |
Layout Modification Method For Exposure Manufacturing Process
App 20190131290 - CHO; Hung-Wen ; et al. | 2019-05-02 |
Humidity control in EUV lithography
Grant 10,274,847 - Zi , et al. | 2019-04-30 |
FinFETs and Methods of Forming FinFETs
App 20190123204 - Lin; Chin-Hsiang ; et al. | 2019-04-25 |
Method For Forming Semiconductor Structure
App 20190122881 - ZI; An-Ren ; et al. | 2019-04-25 |
FinFET low resistivity contact formation method
Grant 10,269,628 - Wang , et al. | 2019-04-23 |
Method For Forming Vias And Method For Forming Contacts In Vias
App 20190103306 - LIN; Tzu-Yang ; et al. | 2019-04-04 |
Dummy Fin Structures And Methods Of Forming Same
App 20190103304 - Lin; Chin-Hsiang ; et al. | 2019-04-04 |
Humidity Control in EUV Lithography
App 20190094716 - Zi; An-Ren ; et al. | 2019-03-28 |
Method For Forming Semiconductor Structure
App 20190096675 - ZI; An-Ren ; et al. | 2019-03-28 |
Humidity Control In Euv Lithography
App 20190086818 - Zi; An-Ren ; et al. | 2019-03-21 |
Method For Performing A Photolithography Process
App 20190080901 - KO; Tsung-Han ; et al. | 2019-03-14 |
Semiconductor Method of Protecting Wafer from Bevel Contamination
App 20190064669 - Zi; An-Ren ; et al. | 2019-02-28 |
Method For Performing Lithography Process With Post Treatment
App 20190064673 - WENG; Ming-Hui ; et al. | 2019-02-28 |
Lithography Techniques for Reducing Resist Swelling
App 20190004430 - Weng; Ming-Hui ; et al. | 2019-01-03 |
FinFETs and methods of forming FinFETs
Grant 10,164,114 - Lin , et al. Dec | 2018-12-25 |
Pellicle fabrication methods and structures thereof
Grant 10,162,258 - Lin , et al. Dec | 2018-12-25 |
Method of test probe alignment control
Grant 10,161,965 - Chen , et al. Dec | 2018-12-25 |
Method of semiconductor device fabrication having application of material with cross-linkable component
Grant 10,163,648 - Lai , et al. Dec | 2018-12-25 |
Material composition and process for substrate modification
Grant 10,163,632 - Lai , et al. Dec | 2018-12-25 |
Extreme Ultraviolet Photoresist and Method
App 20180348639 - Liu; Chen-Yu ; et al. | 2018-12-06 |
Negative Tone Developer For Extreme Ultraviolet Lithography
App 20180341177 - Liu; Chen-Yu ; et al. | 2018-11-29 |
Extreme Ultraviolet Photoresist and Method
App 20180341175 - Chen; Yen-Hao ; et al. | 2018-11-29 |
Method Of Semiconductor Device Fabrication Having Application Of Material With Cross-linkable Component
App 20180337058 - LAI; Wei-Han ; et al. | 2018-11-22 |
Grafting Design for Pattern Post-Treatment in Semiconductor Manufacturing
App 20180337044 - Wang; Siao-Shan ; et al. | 2018-11-22 |
Bottom-Up Material Formation for Planarization
App 20180337036 - Weng; Ming-Hui ; et al. | 2018-11-22 |
Blocking Layer Material Composition and Methods Thereof in Semiconductor Manufacturing
App 20180335697 - Wang; Siao-Shan ; et al. | 2018-11-22 |
Patterning process with silicon mask layer
Grant 10,115,592 - Liu , et al. October 30, 2 | 2018-10-30 |
Hardmask composition and methods thereof
Grant 10,115,585 - Liu , et al. October 30, 2 | 2018-10-30 |
Self-aligned dual-metal silicide and germanide formation
Grant 10,115,597 - Tsai , et al. October 30, 2 | 2018-10-30 |
Method For Forming Semiconductor Structure Using Modified Resist Layer
App 20180292752 - YANG; Li-Po ; et al. | 2018-10-11 |
FinFETs and Methods of Forming FinFETs
App 20180277681 - Lin; Chin-Hsiang ; et al. | 2018-09-27 |
Under Layer Composition And Method Of Manufacturing Semiconductor Device
App 20180277359 - Liu; Chen-Yu ; et al. | 2018-09-27 |
Under layer composition and method of manufacturing semiconductor device
Grant 10,083,832 - Liu , et al. September 25, 2 | 2018-09-25 |
Semiconductor method of protecting wafer from bevel contamination
Grant 10,073,347 - Zi , et al. September 11, 2 | 2018-09-11 |
Method and system for tool condition monitoring based on a simulated inline measurement
Grant 10,047,439 - Tsai , et al. August 14, 2 | 2018-08-14 |
Directional patterning methods
Grant 10,049,918 - Hung , et al. August 14, 2 | 2018-08-14 |
Extreme ultraviolet photoresist and method
Grant 10,042,252 - Chen , et al. August 7, 2 | 2018-08-07 |
Material Composition and Methods Thereof
App 20180177055 - Wang; Siao-Shan ; et al. | 2018-06-21 |
Hardmask Composition And Methods Thereof
App 20180174831 - LIU; Chen-Yu ; et al. | 2018-06-21 |
Pattern Fidelity Enhancement with Directional Patterning Technology
App 20180174853 - Shen; Yu-Tien ; et al. | 2018-06-21 |
Extreme Ultraviolet Photolithography Method With Developer Composition
App 20180173096 - Zi; An-Ren ; et al. | 2018-06-21 |
Extreme Ultraviolet Photoresist With High-Efficiency Electron Transfer
App 20180173101 - Lai; Wei-Han ; et al. | 2018-06-21 |
Pellicle Fabrication Methods And Structures Thereof
App 20180173092 - LIN; Yun-Yue ; et al. | 2018-06-21 |
Material Composition And Process For Substrate Modification
App 20180174837 - LAI; Wei-Han ; et al. | 2018-06-21 |
Material Composition And Methods Thereof
App 20180174830 - WANG; Siao-Shan ; et al. | 2018-06-21 |
Patterning Process with Silicon Mask Layer
App 20180174828 - Liu; Chen-Yu ; et al. | 2018-06-21 |
Resist Material And Method For Forming Semiconductor Structure Using Resist Layer
App 20180164684 - CHANG; Ya-Ching ; et al. | 2018-06-14 |
Lithography Process With Enhanced Etch Selectivity
App 20180149976 - Liu; Chen-Yu ; et al. | 2018-05-31 |
Extreme Ultraviolet Photoresist and Method
App 20180149971 - Chen; Yen-Hao ; et al. | 2018-05-31 |
Lithography Mask With Both Transmission-type And Reflective-type Overlay Marks And Method Of Fabricating The Same
App 20180149959 - Lin; Yun-Yue ; et al. | 2018-05-31 |
Finfets and Methods of Forming Finfets
App 20180151738 - Lin; Chin-Hsiang ; et al. | 2018-05-31 |
Photoresist with Gradient Composition for Improved Uniformity
App 20180151351 - Lilin; Chang ; et al. | 2018-05-31 |
FinFETs and methods of forming FinFETs
Grant 9,985,134 - Lin , et al. May 29, 2 | 2018-05-29 |
Formation method of semiconductor device structure using patterning stacks
Grant 9,978,594 - Lin , et al. May 22, 2 | 2018-05-22 |
Semiconductor film formation apparatus and process
Grant 9,976,215 - Chou , et al. May 22, 2 | 2018-05-22 |
Topographic Planarization Method For Lithography Process
App 20180138050 - LIN; Tzu-Yang ; et al. | 2018-05-17 |
Formation Method Of Semiconductor Device Structure Using Patterning Stacks
App 20180138034 - LIN; Li-Yen ; et al. | 2018-05-17 |
Wafer Alignment Mark Scheme
App 20180128597 - Tseng; Wei-Hsiang ; et al. | 2018-05-10 |
Method of identifying airborne molecular contamination source
Grant 9,958,424 - Chuang , et al. May 1, 2 | 2018-05-01 |
Directional Patterning Methods
App 20180090370 - Hung; Chi-Cheng ; et al. | 2018-03-29 |
Developer for lithography
Grant 9,927,707 - Liu , et al. March 27, 2 | 2018-03-27 |
Control System For Plasma Chamber Having Controllable Valve And Method Of Using The Same
App 20180073144 - SU; Yen-Shuo ; et al. | 2018-03-15 |
Method of making a finFET device
Grant 9,899,496 - Sun , et al. February 20, 2 | 2018-02-20 |
Wafer processing system using multi-zone chuck
Grant 9,892,954 - Cheng , et al. February 13, 2 | 2018-02-13 |
Multi-zone EPD detectors
Grant 9,887,071 - Chen , et al. February 6, 2 | 2018-02-06 |
Wafer alignment mark scheme
Grant 9,863,754 - Tseng , et al. January 9, 2 | 2018-01-09 |
Ion implantation with charge and direction control
Grant 9,865,429 - Hwang , et al. January 9, 2 | 2018-01-09 |
Plasma chamber having an upper electrode having controllable valves and a method of using the same
Grant 9,840,778 - Su , et al. December 12, 2 | 2017-12-12 |
Semiconductor devices and methods of manufacture thereof
Grant 9,818,603 - Lin , et al. November 14, 2 | 2017-11-14 |
Chemical treatment for lithography improvement in a negative tone development process
Grant 9,810,990 - Lai , et al. November 7, 2 | 2017-11-07 |
Ion beam dimension control for ion implantation process and apparatus, and advanced process control
Grant 9,805,913 - Hwang , et al. October 31, 2 | 2017-10-31 |
Plasma etcher design with effective no-damage in-situ ash
Grant 9,786,471 - Xiao , et al. October 10, 2 | 2017-10-10 |
Dispensing apparatus and dispensing method
Grant 9,776,216 - Yu , et al. October 3, 2 | 2017-10-03 |
Apparatus and methods for movable megasonic wafer probe
Grant 9,764,364 - Chang Chien , et al. September 19, 2 | 2017-09-19 |
Non-planar transistors and methods of fabrication thereof
Grant 9,735,276 - Tung , et al. August 15, 2 | 2017-08-15 |
Qualitative fault detection and classification system for tool condition monitoring and associated methods
Grant 9,727,049 - Ho , et al. August 8, 2 | 2017-08-08 |
Lithography apparatus having dual reticle edge masking assemblies and method of use
Grant 9,709,904 - Wu , et al. July 18, 2 | 2017-07-18 |
Developer For Lithography
App 20170199464 - Liu; Chen-Yu ; et al. | 2017-07-13 |
Real-time calibration for wafer processing chamber lamp modules
Grant 9,698,065 - Chang , et al. July 4, 2 | 2017-07-04 |
Method of patterning a film layer
Grant 9,684,236 - Hsieh , et al. June 20, 2 | 2017-06-20 |
FinFet Low Resistivity Contact Formation Method
App 20170170061 - Wang; Sung-Li ; et al. | 2017-06-15 |
Lithographic plane check for mask processing
Grant 9,671,685 - Lin , et al. June 6, 2 | 2017-06-06 |
Self-Aligned Dual-Metal Silicide and Germanide Formation
App 20170140942 - Tsai; Chun Hsiung ; et al. | 2017-05-18 |
Wafer alignment mark scheme
Grant 9,640,487 - Tseng , et al. May 2, 2 | 2017-05-02 |
Semiconductor device having elevated structure
Grant 9,601,587 - Sun , et al. March 21, 2 | 2017-03-21 |
Method of making wafer assembly
Grant 9,601,324 - Huang , et al. March 21, 2 | 2017-03-21 |
Contact structure of semiconductor device
Grant 9,589,838 - Wang , et al. March 7, 2 | 2017-03-07 |
Method of fabricating an integrated circuit device
Grant 9,564,509 - Yeh , et al. February 7, 2 | 2017-02-07 |
Self-aligned dual-metal silicide and germanide formation
Grant 9,559,182 - Wann , et al. January 31, 2 | 2017-01-31 |
Systems and associated methods for tuning processing tools
Grant 9,519,285 - Tsai , et al. December 13, 2 | 2016-12-13 |
Novel Chemical Treatment For Lithography Improvement In A Negative Tone Development Process
App 20160274463 - Lai; Wei-Han ; et al. | 2016-09-22 |
Systems and methods for fabricating and orienting semiconductor wafers
Grant 9,449,864 - Lin , et al. September 20, 2 | 2016-09-20 |
Method for monitoring ion implantation
Grant 9,449,889 - Chang , et al. September 20, 2 | 2016-09-20 |
Source/drain stressor having enhanced carrier mobility and method for manufacturing same
Grant 9,425,286 - Lin , et al. August 23, 2 | 2016-08-23 |
Methods for real-time error detection in CMP processing
Grant 9,403,254 - Hwang , et al. August 2, 2 | 2016-08-02 |
Semiconductor test structures
Grant 9,377,503 - Tu , et al. June 28, 2 | 2016-06-28 |
Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabrication
Grant 9,366,969 - Liu , et al. June 14, 2 | 2016-06-14 |
Metal conductor chemical mechanical polish
Grant 9,368,452 - Huang , et al. June 14, 2 | 2016-06-14 |
Systems and methods of controlling semiconductor wafer fabrication processes
Grant 9,368,379 - Chen , et al. June 14, 2 | 2016-06-14 |
Integrated circuit manufacturing tool condition monitoring system and method
Grant 9,349,660 - Tsai , et al. May 24, 2 | 2016-05-24 |
Method Of Planarizing A Wafer
App 20160136776 - LEE; Bo-I ; et al. | 2016-05-19 |
Self-Aligned Dual-Metal Silicide and Germanide Formation
App 20160099331 - Wann; Clement Hsingjen ; et al. | 2016-04-07 |
Automated material handling system and method for semiconductor manufacturing
Grant 9,305,815 - Tung , et al. April 5, 2 | 2016-04-05 |
Semiconductor device cleaning method and apparatus
Grant 9,299,593 - Yeh , et al. March 29, 2 | 2016-03-29 |
Multi coil target design
Grant 9,279,179 - Tsai , et al. March 8, 2 | 2016-03-08 |
Semiconductor test structures
Grant 9,250,286 - Tu , et al. February 2, 2 | 2016-02-02 |
Systems and methods of automatic boundary control for semiconductor processes
Grant 9,250,619 - Hsu , et al. February 2, 2 | 2016-02-02 |
Real-Time Calibration for Wafer Processing Chamber Lamp Modules
App 20160027708 - Chang; Chih-Tien ; et al. | 2016-01-28 |
CVD conformal vacuum/pumping guiding design
Grant 9,234,278 - Chou , et al. January 12, 2 | 2016-01-12 |
Integration of bottom-up metal film deposition
Grant 9,214,543 - Lin , et al. December 15, 2 | 2015-12-15 |
Self-aligned dual-metal silicide and germanide formation
Grant 9,214,556 - Wann , et al. December 15, 2 | 2015-12-15 |
Litho cluster and modulization to enhance productivity
Grant 9,196,515 - Huang , et al. November 24, 2 | 2015-11-24 |
Method Of Making Wafer Assembly
App 20150318165 - HUANG; I-Hsiung ; et al. | 2015-11-05 |
Contact Structure of Semiconductor Device
App 20150303106 - Wang; Sung-Li ; et al. | 2015-10-22 |
Method and structure for advanced semiconductor channel substrate materials
Grant 9,165,835 - Yeh , et al. October 20, 2 | 2015-10-20 |
Lithography Apparatus Having Dual Reticle Edge Masking Assemblies And Method Of Use
App 20150293462 - WU; Tung-Li ; et al. | 2015-10-15 |
Real-time calibration for wafer processing chamber lamp modules
Grant 9,159,597 - Chang , et al. October 13, 2 | 2015-10-13 |
2D/3D analysis for abnormal tools and stages diagnosis
Grant 9,158,867 - Lin , et al. October 13, 2 | 2015-10-13 |
Ion Beam Dimension Control For Ion Implantation Process And Apparatus, And Advanced Process Control
App 20150270103 - HWANG; Chih-Hong ; et al. | 2015-09-24 |
CMP pad cleaning apparatus
Grant 9,138,861 - Wu , et al. September 22, 2 | 2015-09-22 |
Semiconductor Devices and Methods of Manufacture Thereof
App 20150255581 - Lin; Wei-Chi ; et al. | 2015-09-10 |
Wafer assembly with carrier wafer
Grant 9,111,982 - Huang , et al. August 18, 2 | 2015-08-18 |
Contact structure of semiconductor device
Grant 9,105,490 - Wang , et al. August 11, 2 | 2015-08-11 |
Wafer Alignment Mark Scheme
App 20150219448 - TSENG; Wei-Hsiang ; et al. | 2015-08-06 |
Method for Monitoring Ion Implantation
App 20150221561 - Chang; Chun-Lin ; et al. | 2015-08-06 |
Method Of Making A Finfet Device
App 20150221751 - Sun; Sey-Ping ; et al. | 2015-08-06 |
Contact structure of semiconductor device
Grant 9,099,494 - Wang , et al. August 4, 2 | 2015-08-04 |
Contrast enhancing exposure system and method for use in semiconductor fabrication
Grant 9,091,923 - Liu , et al. July 28, 2 | 2015-07-28 |
Lithography apparatus having dual reticle edge masking assemblies and method of use
Grant 9,081,297 - Wu , et al. July 14, 2 | 2015-07-14 |
Method of Test Probe Alignment Control
App 20150192616 - Chen; Jui-Long ; et al. | 2015-07-09 |
Ion beam dimension control for ion implantation process and apparatus, and advanced process control
Grant 9,070,534 - Hwang , et al. June 30, 2 | 2015-06-30 |
Non-planar transistors and methods of fabrication thereof
Grant 9,054,194 - Tung , et al. June 9, 2 | 2015-06-09 |
Dispensing Apparatus And Dispensing Method
App 20150144161 - YU; Weibo ; et al. | 2015-05-28 |
Integrated System, Integrated System Operation Method And Film Treatment Method
App 20150147826 - Yu; Weibo ; et al. | 2015-05-28 |
Contact Structure of Semiconductor Device
App 20150140763 - Wang; Sung-Li ; et al. | 2015-05-21 |
Semiconductor Device Having Elevated Structure
App 20150129990 - SUN; Sey-Ping ; et al. | 2015-05-14 |
Method Of Fabricating An Integrated Circuit Device
App 20150118807 - YEH; Ming-Hsi ; et al. | 2015-04-30 |
Apparatus and Methods for Movable Megasonic Wafer Probe
App 20150107634 - Chang Chien; Ying-Hsueh ; et al. | 2015-04-23 |
Litho Cluster And Modulization To Enhance Productivity
App 20150076371 - Huang; I-Hsiung ; et al. | 2015-03-19 |
ION Implantation with Charge and Direction Control
App 20150069913 - Hwang; Chih-Hong ; et al. | 2015-03-12 |
Self-Aligned Dual-Metal Silicide and Germanide Formation
App 20150041918 - Wann; Clement Hsingjen ; et al. | 2015-02-12 |
Systems And Methods For Fabricating And Orienting Semiconductor Wafers
App 20150009499 - LIN; Chin-Ming ; et al. | 2015-01-08 |
Wafer Alignment Mark Scheme
App 20150002846 - TSENG; Wei-Hsiang ; et al. | 2015-01-01 |
Contact Structure of Semiconductor Device Priority Claim
App 20140363943 - Wang; Sung-Li ; et al. | 2014-12-11 |
Beam Monitoring Device, Method, and System
App 20140306119 - Hwang; Chih-Hong ; et al. | 2014-10-16 |
Method of Making a FinFET Device
App 20140213048 - Sun; Sey-Ping ; et al. | 2014-07-31 |
Wafer Processing System Using Multi-zone Chuck
App 20140202383 - CHENG; Nai-Han ; et al. | 2014-07-24 |
Semiconductor Test Structures
App 20140203282 - Tu; An-Chun ; et al. | 2014-07-24 |
Tool Optimizing Tuning Systems And Associated Methods
App 20140207271 - Tsai; Po-Feng ; et al. | 2014-07-24 |
Semiconductor Test Structures
App 20140206113 - Tu; An-Chun ; et al. | 2014-07-24 |
Metal Conductor Chemical Mechanical Polish
App 20140159243 - Huang; Soon-Kang ; et al. | 2014-06-12 |
N/P METAL CRYSTAL ORIENTATION FOR HIGH-K METAL GATE Vt MODULATION
App 20140154848 - Lin; Su-Horng ; et al. | 2014-06-05 |
Contact Structure of Semiconductor Device
App 20140124842 - Wang; Sung-Li ; et al. | 2014-05-08 |
Source/Drain Stressor Having Enhanced Carrier Mobility and Method for Manufacturing Same
App 20140113424 - Lin; Chin-Hsiang ; et al. | 2014-04-24 |
2D/3D Analysis for Abnormal Tools and Stages Diagnosis
App 20140100684 - Lin; Chun-Hsien ; et al. | 2014-04-10 |
Method Of Identifying Airborne Molecular Contamination Source
App 20140095083 - Chuang; Tzu-Sou ; et al. | 2014-04-03 |
Contact Structure Of Semiconductor Device
App 20140084340 - Wang; Sung-Li ; et al. | 2014-03-27 |
Qualitative Fault Detection And Classification System For Tool Condition Monitoring And Associated Methods
App 20140067324 - Ho; Chia-Tong ; et al. | 2014-03-06 |
Method of Optimizing Design for Manufacturing (DFM)
App 20140033159 - Hui; Keuing ; et al. | 2014-01-30 |
Finlike Structures And Methods Of Making Same
App 20140024187 - Yeh; Ming-Hsi ; et al. | 2014-01-23 |
Lithography Process
App 20140017604 - Lee; Yung-Yao ; et al. | 2014-01-16 |
Method Of Test Probe Alignment Control
App 20130335109 - Chen; Jui-Long ; et al. | 2013-12-19 |
Plasma Chamber Having An Upper Electrode Having Controllable Valves And A Method Of Using The Same
App 20130319612 - SU; Yen-Shuo ; et al. | 2013-12-05 |
Loadport Bridge For Semiconductor Fabrication Tools
App 20130322990 - CHEN; Shih-Hung ; et al. | 2013-12-05 |
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