Patent | Date |
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Arrays Of Capacitors, Methods Used In Forming Integrated Circuitry, And Methods Used In Forming An Array Of Capacitors App 20220059536 - Light; Scott L. | 2022-02-24 |
Microelectronic Devices Including Semiconductive Pillar Structures, And Related Methods And Electronic Systems App 20220051700 - Lee; Si-Woo ;   et al. | 2022-02-17 |
Microelectronic Devices Including Semiconductive Pillar Structures, And Related Methods And Electronic Systems App 20220051699 - Fishburn; Fredrick D. ;   et al. | 2022-02-17 |
Arrays of capacitors, methods used in forming integrated circuitry, and methods used in forming an array of capacitors Grant 11,195,838 - Light December 7, 2 | 2021-12-07 |
Devices including conductive interconnect structures, related electronic systems, and related methods Grant 11,158,571 - Doebler , et al. October 26, 2 | 2021-10-26 |
Semiconductor devices comprising conductive patterns of varying dimensions and related systems Grant 10,998,224 - Light , et al. May 4, 2 | 2021-05-04 |
Arrays Of Capacitors, Methods Used In Forming Integrated Circuitry, And Methods Used In Forming An Array Of Capacitors App 20200373303 - Light; Scott L. | 2020-11-26 |
Semiconductor Constructions Comprising Dielectric Material, and Methods of Forming Dielectric Fill Within Openings Extending into Semiconductor Constructions App 20200357682 - Sandhu; Gurtej S. ;   et al. | 2020-11-12 |
Semiconductor constructions comprising dielectric material, and methods of forming dielectric fill within openings extending into semiconductor constructions Grant 10,763,155 - Sandhu , et al. Sep | 2020-09-01 |
Semiconductor Devices Including Conductive Interconnect Structures, Related Electronic Systems, And Related Methods App 20200203272 - Doebler; Jonathan T. ;   et al. | 2020-06-25 |
Conductive Patterns, Semiconductor Devices Comprising The Conductive Patterns, And Related Methods And Systems App 20200066578 - Light; Scott L. ;   et al. | 2020-02-27 |
Methods of forming a pattern Grant 10,522,395 - Light , et al. Dec | 2019-12-31 |
Semiconductor Constructions Comprising Dielectric Material, and Methods of Forming Dielectric Fill Within Openings Extending into Semiconductor Constructions App 20190067084 - Sandhu; Gurtej S. ;   et al. | 2019-02-28 |
Semiconductor constructions comprising dielectric material Grant 10,153,195 - Sandhu , et al. Dec | 2018-12-11 |
Semiconductor Constructions Comprising Dielectric Material, and Methods of Forming Dielectric Fill Within Openings Extending into Semiconductor Constructions App 20180337087 - Sandhu; Gurtej S. ;   et al. | 2018-11-22 |
Methods for forming semiconductor devices and semiconductor device structures Grant 9,583,381 - Khurana , et al. February 28, 2 | 2017-02-28 |
Methods of forming patterns for semiconductor device structures Grant 9,465,287 - Light , et al. October 11, 2 | 2016-10-11 |
Methods of forming line patterns in substrates Grant 9,330,914 - Light , et al. May 3, 2 | 2016-05-03 |
Methods Of Forming Patterns For Semiconductor Device Structures App 20160048074 - Light; Scott L. ;   et al. | 2016-02-18 |
Lithography methods, methods for forming patterning tools and patterning tools Grant 9,176,385 - Zhou , et al. November 3, 2 | 2015-11-03 |
Methods of forming a pattern on a substrate Grant 9,153,458 - Light , et al. October 6, 2 | 2015-10-06 |
Methods of Forming Line Patterns In Substrates App 20150099362 - Light; Scott L. ;   et al. | 2015-04-09 |
Methods of forming a pattern on a substrate Grant 8,969,214 - Light , et al. March 3, 2 | 2015-03-03 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography App 20150015860 - Light; Scott L. ;   et al. | 2015-01-15 |
Methods For Forming Sub-resolution Features In Semiconductor Devices App 20140370684 - Khurana; Ranjan ;   et al. | 2014-12-18 |
Methods of Forming a Pattern On a Substrate App 20140342563 - Light; Scott L. ;   et al. | 2014-11-20 |
Methods of forming a pattern on a substrate Grant 8,889,558 - Khurana , et al. November 18, 2 | 2014-11-18 |
Reticles, and methods of mitigating asymmetric lens heating in photolithography Grant 8,845,908 - Light , et al. September 30, 2 | 2014-09-30 |
Lithography Wave-front Control System And Method App 20140247476 - He; Yuan ;   et al. | 2014-09-04 |
Semiconductor constructions and methods of forming patterns Grant 8,815,497 - Millward , et al. August 26, 2 | 2014-08-26 |
Methods of Forming A Pattern On A Substrate App 20140162458 - Khurana; Ranjan ;   et al. | 2014-06-12 |
Lithography wave-front control system and method Grant 8,736,814 - He , et al. May 27, 2 | 2014-05-27 |
Methods of processing substrates Grant 8,728,721 - Light , et al. May 20, 2 | 2014-05-20 |
Lithography Methods, Methods For Forming Patterning Tools And Patterning Tools App 20140106280 - Zhou; Jianming ;   et al. | 2014-04-17 |
Methods of correcting for variation across substrates during photolithography Grant 8,658,336 - He , et al. February 25, 2 | 2014-02-25 |
Methods Of Forming a Pattern on a Substrate App 20140051251 - Light; Scott L. ;   et al. | 2014-02-20 |
Lithography methods, methods for forming patterning tools and patterning tools Grant 8,609,302 - Zhou , et al. December 17, 2 | 2013-12-17 |
Semiconductor Constructions And Methods Of Forming Patterns App 20130302981 - Millward; Dan ;   et al. | 2013-11-14 |
Methods of forming a pattern on a substrate Grant 8,575,032 - Light , et al. November 5, 2 | 2013-11-05 |
Methods Of Correcting For Variation Across Substrates During Photolithography App 20130288167 - He; Yuan ;   et al. | 2013-10-31 |
Imaging Devices, Methods Of Forming Same, And Methods Of Forming Semiconductor Device Structures App 20130252142 - He; Yuan ;   et al. | 2013-09-26 |
Semiconductor constructions and methods of forming patterns Grant 8,486,611 - Millward , et al. July 16, 2 | 2013-07-16 |
Lithography Methods, Methods For Forming Patterning Tools And Patterning Tools App 20130052566 - Zhou; Jianming ;   et al. | 2013-02-28 |
Methods Of Processing Substrates App 20130040245 - Light; Scott L. ;   et al. | 2013-02-14 |
Lithography Wave-front Control System And Method App 20120314196 - He; Yuan ;   et al. | 2012-12-13 |
Methods Of Forming A Pattern On A Substrate App 20120282778 - Light; Scott L. ;   et al. | 2012-11-08 |
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Photolithography App 20120052416 - Light; Scott L. ;   et al. | 2012-03-01 |
Semiconductor Constructions And Methods Of Forming Patterns App 20120015486 - Millward; Dan ;   et al. | 2012-01-19 |
Method and apparatus for irradiating a microlithographic substrate Grant 7,298,453 - Boettiger , et al. November 20, 2 | 2007-11-20 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates Grant 7,230,679 - Boettiger , et al. June 12, 2 | 2007-06-12 |
Method and apparatus for controlling radiation beam intensity directed to microlithograhic substrates App 20060181692 - Boettiger; Ulrich C. ;   et al. | 2006-08-17 |
Method and apparatus for irradiating a microlithographic substrate App 20060158631 - Boettiger; Ulrich C. ;   et al. | 2006-07-20 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates Grant 7,046,340 - Boettiger , et al. May 16, 2 | 2006-05-16 |
Method and apparatus for irradiating a microlithographic substrate Grant 7,038,762 - Boettiger , et al. May 2, 2 | 2006-05-02 |
Semiconductor constructions App 20050233588 - Boettiger, Ulrich C. ;   et al. | 2005-10-20 |
Methods of forming patterned compositions Grant 6,905,975 - Boettiger , et al. June 14, 2 | 2005-06-14 |
Method and apparatus for irradiating a microlithographic substrate App 20050041228 - Boettiger, Ulrich C. ;   et al. | 2005-02-24 |
Methods of forming patterned compositions App 20050000936 - Boettiger, Ulrich C. ;   et al. | 2005-01-06 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates App 20040234871 - Boettiger, Ulrich C. ;   et al. | 2004-11-25 |
Method for controlling radiation beam intensity directed to microlithographic substrates Grant 6,794,100 - Boettiger , et al. September 21, 2 | 2004-09-21 |
Method and apparatus for irradiating a microlithographic substrate Grant 6,784,975 - Boettiger , et al. August 31, 2 | 2004-08-31 |
Method and apparatus for shaping and/or orienting radiation irradiating a microlithographic substrate Grant 6,577,379 - Boettiger , et al. June 10, 2 | 2003-06-10 |
Method and device for improved lithographic critical dimension control Grant 6,545,829 - Boettiger , et al. April 8, 2 | 2003-04-08 |
Method and apparatus for irradiating a microlithographic substrate App 20030044693 - Boettiger, Ulrich C. ;   et al. | 2003-03-06 |
Method and apparatus for controlling radiation beam intensity directed to microlithographic substrates App 20030044701 - Boettiger, Ulrich C. ;   et al. | 2003-03-06 |
Method for improved lithographic critical dimension control Grant 6,465,141 - Boettiger , et al. October 15, 2 | 2002-10-15 |
Method and device for improved lithographic critical dimension control App 20020085297 - Boettiger, Ulrich C. ;   et al. | 2002-07-04 |
Method and device for improved lithographic critical dimension control App 20020041369 - Boettiger, Ulrich C. ;   et al. | 2002-04-11 |