Patent | Date |
---|
Apparatus and method for controlling a flow process material to a deposition chamber Grant 11,393,703 - Lerner , et al. July 19, 2 | 2022-07-19 |
Magnetized substrate carrier apparatus with shadow mask for deposition Grant 11,056,277 - Diehl , et al. July 6, 2 | 2021-07-06 |
Substrate carrier having hard mask Grant 11,047,039 - Lerner , et al. June 29, 2 | 2021-06-29 |
Reflector and susceptor assembly for chemical vapor deposition reactor Grant 10,932,323 - Burrows , et al. February 23, 2 | 2021-02-23 |
Magnetized Substrate Carrier Apparatus With Shadow Mask For Deposition App 20200211769 - DIEHL; DANIEL LEE ;   et al. | 2020-07-02 |
Segmented Showerhead For Uniform Delivery Of Multiple Precursors App 20200087790 - LERNER; ALEXANDER ;   et al. | 2020-03-19 |
Showerhead For Providing Multiple Materials To A Process Chamber App 20200048767 - KOTHNUR; PRASHANTH ;   et al. | 2020-02-13 |
Synchronous interface to asynchronous processes Grant 10,516,700 - Shkvarchuk , et al. Dec | 2019-12-24 |
Apparatus And Method For Controlling A Flow Process Material To A Deposition Chamber App 20190382890 - LERNER; ALEXANDER ;   et al. | 2019-12-19 |
Substrate Carrier Having Hard Mask App 20190211442 - LERNER; ALEXANDER ;   et al. | 2019-07-11 |
Tiled showerhead for a semiconductor chemical vapor deposition reactor Grant 10,066,297 - Higashi , et al. September 4, 2 | 2018-09-04 |
Synchronous Interface To Asynchronous Processes App 20180020025 - Shkvarchuk; Taras ;   et al. | 2018-01-18 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 9,794,298 - Lerner , et al. October 17, 2 | 2017-10-17 |
Synchronous interface to asynchronous processes Grant 9,674,226 - Shkvarchuk , et al. June 6, 2 | 2017-06-06 |
Reflector And Susceptor Assembly For Chemical Vapor Deposition Reactor App 20170037515 - Burrows; Brian ;   et al. | 2017-02-09 |
Method, System, and Computer Program Product for Facilitating Communication in an Interoperability Network App 20170034219 - Lerner; Alexander ;   et al. | 2017-02-02 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 9,473,536 - Lerner , et al. October 18, 2 | 2016-10-18 |
Substrate Processing Using Interleaved Load Lock Transfers App 20160281236 - Lerner; Alexander ;   et al. | 2016-09-29 |
Processing system architecture with single load lock chamber Grant 9,337,014 - Galburt , et al. May 10, 2 | 2016-05-10 |
Tiled Showerhead For A Semiconductor Chemical Vapor Deposition Reactor App 20160047042 - Higashi; Gregg ;   et al. | 2016-02-18 |
CVD reactor with gas flow virtual walls Grant 9,212,422 - Higashi , et al. December 15, 2 | 2015-12-15 |
Method of die singulation using laser ablation and induction of internal defects with a laser Grant 9,165,832 - Papanu , et al. October 20, 2 | 2015-10-20 |
Synchronous Interface To Asynchronous Processes App 20150222668 - Shkvarchuk; Taras ;   et al. | 2015-08-06 |
Method, System, and Computer Program Product for Facilitating Communication in an Interoperability Network App 20150172322 - Lerner; Alexander ;   et al. | 2015-06-18 |
Synchronous interface to asynchronous processes Grant 9,032,023 - Shkvarchuk , et al. May 12, 2 | 2015-05-12 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,966,577 - Lerner , et al. February 24, 2 | 2015-02-24 |
Rapid thermal processing lamphead with improved cooling Grant 8,698,049 - Ranish , et al. April 15, 2 | 2014-04-15 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20140053235 - Lerner; Alexander ;   et al. | 2014-02-20 |
Synchronous Interface To Asynchronous Processes App 20140040974 - Shkvarchuk; Taras ;   et al. | 2014-02-06 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,590,006 - Lerner , et al. November 19, 2 | 2013-11-19 |
System, method and computer program product for implementing at least one policy for facilitating communication among a plurality of entities Grant 8,522,306 - Lerner , et al. August 27, 2 | 2013-08-27 |
Method, system, and computer program product for network authorization Grant 8,516,541 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,546 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,540 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,549 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,542 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,544 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,543 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,547 - Lerner , et al. August 20, 2 | 2013-08-20 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,516,548 - Lerner , et al. August 20, 2 | 2013-08-20 |
Synchronous interface to asynchronous processes Grant 8,478,818 - Shkvarchuk , et al. July 2, 2 | 2013-07-02 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,453,202 - Lerner , et al. May 28, 2 | 2013-05-28 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,453,203 - Lerner , et al. May 28, 2 | 2013-05-28 |
Method, system, and computer program product for facilitating communication in an interoperability network Grant 8,453,201 - Lerner , et al. May 28, 2 | 2013-05-28 |
Policy management in an interoperability network Grant 8,453,196 - Lerner , et al. May 28, 2 | 2013-05-28 |
Cvd Reactor With Gas Flow Virtual Walls App 20130052346 - Higashi; Gregg ;   et al. | 2013-02-28 |
Rapid Thermal Processing Lamphead With Improved Cooling App 20130044493 - RANISH; JOSEPH M. ;   et al. | 2013-02-21 |
Synchronous Interface to Asynchronous Processes App 20120303698 - Shkvarchuk; Taras ;   et al. | 2012-11-29 |
Rapid thermal processing lamphead with improved cooling Grant 8,294,068 - Ranish , et al. October 23, 2 | 2012-10-23 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120239795 - Lerner; Alexander ;   et al. | 2012-09-20 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120240189 - Lerner; Alexander ;   et al. | 2012-09-20 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120240188 - Lerner; Alexander ;   et al. | 2012-09-20 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120240190 - Lerner; Alexander ;   et al. | 2012-09-20 |
Synchronous interface to asynchronous processes Grant 8,260,849 - Shkvarchuk , et al. September 4, 2 | 2012-09-04 |
System and method for locating of distal holes of an intramedullary nail Grant 8,231,629 - Lerner , et al. July 31, 2 | 2012-07-31 |
Temperature measurement and control of wafer support in thermal processing chamber Grant 8,222,574 - Sorabji , et al. July 17, 2 | 2012-07-17 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120117613 - Lerner; Alexander ;   et al. | 2012-05-10 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120117217 - Lerner; Alexander ;   et al. | 2012-05-10 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120079560 - Lerner; Alexander ;   et al. | 2012-03-29 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120060199 - Lerner; Alexander ;   et al. | 2012-03-08 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120060200 - Lerner; Alexander ;   et al. | 2012-03-08 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120059933 - Lerner; Alexander ;   et al. | 2012-03-08 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20120059925 - Lerner; Alexander ;   et al. | 2012-03-08 |
Single wafer dryer and drying methods Grant 7,980,255 - Achkire , et al. July 19, 2 | 2011-07-19 |
System, Method And Computer Program Product For Implementing At Least One Policy For Facilitating Communication Among A Plurality Of Entities App 20110131314 - Lerner; Alexander ;   et al. | 2011-06-02 |
Method and apparatus for verifying proper substrate positioning Grant 7,933,009 - Serebryanov , et al. April 26, 2 | 2011-04-26 |
Method, System, And Computer Program Product For Facilitating Communication In An Interoperability Network App 20100281515 - Lerner; Alexander ;   et al. | 2010-11-04 |
Method, System, And Computer Program Product For Network Authorization App 20100281516 - Lerner; Alexander ;   et al. | 2010-11-04 |
Synchronous Interface to Asynchronous Processes App 20100223301 - Shkvarchuk; Taras ;   et al. | 2010-09-02 |
Synchronous interface to asynchronous processes Grant 7,739,351 - Shkvarchuk , et al. June 15, 2 | 2010-06-15 |
Rapid Thermal Processing Lamphead With Improved Cooling App 20100059497 - RANISH; JOSEPH M. ;   et al. | 2010-03-11 |
Orthopedic Navigation System And Method App 20100030219 - Lerner; Alexander ;   et al. | 2010-02-04 |
Single Wafer Dryer And Drying Methods App 20100006124 - Achkire; Younes ;   et al. | 2010-01-14 |
System and Method for Locating of Distal Holes of an Intramedullary Nail App 20090306665 - Lerner; Alexander ;   et al. | 2009-12-10 |
Device And Method For Use In Aortic Valve Disease Treatment App 20090105812 - Levin; Boris ;   et al. | 2009-04-23 |
Method And Apparatus For Verifying Proper Substrate Positioning App 20090027657 - SEREBRYANOV; OLEG ;   et al. | 2009-01-29 |
Single Wafer Dryer And Drying Methods App 20070295371 - Achkire; Younes ;   et al. | 2007-12-27 |
Substrate centering apparatus and method Grant 7,256,132 - Lerner , et al. August 14, 2 | 2007-08-14 |
Roller that avoids substrate slippage App 20060189465 - Brown; Brian J. ;   et al. | 2006-08-24 |
Single wafer dryer and drying methods App 20060174921 - Achkire; Younes ;   et al. | 2006-08-10 |
Single wafer dryer and drying methods App 20050241684 - Achkire, Younes ;   et al. | 2005-11-03 |
Synchronous interface to asynchronous processes App 20050234928 - Shkvarchuk, Taras ;   et al. | 2005-10-20 |
Single wafer dryer and drying methods Grant 6,955,516 - Achkire , et al. October 18, 2 | 2005-10-18 |
Roller that avoids substrate slippage Grant 6,918,864 - Brown , et al. July 19, 2 | 2005-07-19 |
Roller that avoids substrate slippage App 20050109373 - Brown, Brian J. ;   et al. | 2005-05-26 |
Policy management in an interoperability network App 20050080914 - Lerner, Alexander ;   et al. | 2005-04-14 |
Rotary vacuum-chuck with venturi formed at base of rotating shaft Grant 6,736,408 - Olgado , et al. May 18, 2 | 2004-05-18 |
Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber Grant 6,728,989 - Lerner , et al. May 4, 2 | 2004-05-04 |
Protective barrier for cleaning chamber Grant 6,725,869 - White , et al. April 27, 2 | 2004-04-27 |
Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection Grant 6,720,263 - Olgado , et al. April 13, 2 | 2004-04-13 |
Substrate centering apparatus and method App 20040047720 - Lerner, Alexander | 2004-03-11 |
Rotary vacuum-chuck with water-assisted labyrinth seal Grant 6,634,650 - Lerner October 21, 2 | 2003-10-21 |
Rotary vacuum-chuck with venturi formed at base of rotating shaft App 20030141673 - Olgado, Donald J. K. ;   et al. | 2003-07-31 |
Single wafer dryer and drying methods App 20030121170 - Achkire, Younes ;   et al. | 2003-07-03 |
Flexible Sheath For Introducing A Medical Device Into A Duct App 20030114803 - LERNER, ALEXANDER | 2003-06-19 |
Rotary vacuum-chuck with water-assisted labyrinth seal App 20030094773 - Lerner, Alexander | 2003-05-22 |
Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection App 20030073310 - Olgado, Donald J.K. ;   et al. | 2003-04-17 |
Apparatus for fluid control with a substrate processing tank App 20030010364 - Lerner, Alexander ;   et al. | 2003-01-16 |
Method for managing a fluid level associated with a substrate processing tank Grant 6,464,799 - Lerner , et al. October 15, 2 | 2002-10-15 |
Megasonic resonator for disk cleaning and method for use thereof Grant 6,460,551 - Fishkin , et al. October 8, 2 | 2002-10-08 |
Protective barrier for cleaning chamber App 20020134404 - White, John M. ;   et al. | 2002-09-26 |
Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber App 20020100131 - Lerner, Alexander ;   et al. | 2002-08-01 |
Magnetically coupled substrate roller Grant 6,412,503 - Lerner , et al. July 2, 2 | 2002-07-02 |