Patent | Date |
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Corrector for correcting first-order chromatic aberrations of the first degree App 20060102848 - Rose; Harald | 2006-05-18 |
Corrector for correcting first-order chromatic aberrations of the first degree Grant 7,012,262 - Rose March 14, 2 | 2006-03-14 |
Material processing system and method App 20050103272 - Koops, Hans W.P. ;   et al. | 2005-05-19 |
Manipulator for an optical or particle-optical apparatus Grant 6,894,288 - Muller , et al. May 17, 2 | 2005-05-17 |
Particle beam system having a mirror corrector Grant 6,855,939 - Rose , et al. February 15, 2 | 2005-02-15 |
Corrector for correcting first-order chromatic aberrations of the first degree App 20050023480 - Rose, Harald | 2005-02-03 |
Electron microscopy system, electron microscopy method and focusing system for charged particles App 20050006582 - Steigerwald, Michael ;   et al. | 2005-01-13 |
Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source Grant 6,828,565 - Steigerwald December 7, 2 | 2004-12-07 |
Electron microscope with annular illuminating aperture Grant 6,797,956 - Benner September 28, 2 | 2004-09-28 |
Apparatus wherein ionizing radiation is generated Grant 6,787,779 - Tobias September 7, 2 | 2004-09-07 |
Corrector for correcting first-order chromatic aberrations of the first degree Grant 6,784,437 - Rose August 31, 2 | 2004-08-31 |
Electron beam source, electron optical apparatus using such beam source and method of operating an electron beam source App 20040124365 - Steigerwald, Michael | 2004-07-01 |
Particle-optical apparatus and method for operating the same App 20040113092 - Knippelmeyer, Rainer | 2004-06-17 |
Electron microscopy system App 20040108457 - Kienzle, Oliver ;   et al. | 2004-06-10 |
Particle-optical apparatus, electron microscopy system and electron lithography system App 20040105160 - Kienzle, Oliver ;   et al. | 2004-06-03 |
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system App 20040084621 - Kienzle, Oliver ;   et al. | 2004-05-06 |
Objective lens for an electron microscopy system and electron microscopy system App 20040084629 - Preikszas, Dirk ;   et al. | 2004-05-06 |
Particle-optical arrangements and particle-optical systems App 20040075053 - Preikszas, Dirk ;   et al. | 2004-04-22 |
Electron microscopy system and electron microscopy method App 20040075054 - Knippelmeyer, Rainer | 2004-04-22 |
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor App 20040065827 - Kienzle, Oliver ;   et al. | 2004-04-08 |
Applications operating with beams of charged particles App 20040056193 - Kienzle, Oliver ;   et al. | 2004-03-25 |
Particle beam device Grant 6,498,345 - Weimer , et al. December 24, 2 | 2002-12-24 |
Particle beam apparatus Grant 6,194,729 - Weimer February 27, 2 | 2001-02-27 |
Energy filter, particularly for an electron microscope Grant 6,040,576 - Benner March 21, 2 | 2000-03-21 |