Leenders; Martinus Hendrikus Antonius

Patent Applications and Registrations

Patent applications and USPTO patent grants for Leenders; Martinus Hendrikus Antonius.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".

Company Profile

33.152.114

Leenders; Martinus Hendrikus Antonius - Rhoon NL
Leenders; Martinus Hendrikus Antonius - Rotterdam NL
LEENDERS; Martinus Hendrikus Antonius - Rhoan NL
Leenders; Martinus Hendrikus Antonius - ER Rotterdam NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ; et al.	2022-09-15
Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2	2022-05-24
Lithographic apparatus and device manufacturing method Grant 11,327,404 - Donders , et al. May 10, 2	2022-05-10
Lithographic Apparatus And Device Manufacturing Method App 20220113641 - Leenders; Martinus Hendrikus Antonius ; et al.	2022-04-14
Lithographic apparatus and device manufacturing method Grant 11,209,738 - Leenders , et al. December 28, 2	2021-12-28
Lithographic apparatus and device manufacturing method Grant 11,016,394 - Streefkerk , et al. May 25, 2	2021-05-25
Mask assembly Grant 11,009,803 - Kruizinga , et al. May 18, 2	2021-05-18
Pellicle attachment apparatus Grant 11,003,098 - Van Der Meulen , et al. May 11, 2	2021-05-11
Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ; et al.	2021-04-15
Pellicle attachment apparatus Grant 10,969,701 - Van Der Meulen , et al. April 6, 2	2021-04-06
Lithographic Apparatus And Device Manufacturing Method App 20200401057 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2020-12-24
Lithographic Apparatus And Device Manufacturing Method App 20200310252 - STREEFKERK; Bob ; et al.	2020-10-01
Lithographic apparatus Grant 10,788,763 - Westerlaken , et al. September 29, 2	2020-09-29
Support apparatus, a lithographic apparatus and a device manufacturing method Grant 10,768,535 - Jeunink , et al. Sep	2020-09-08
Lithographic apparatus and device manufacturing method Grant 10,768,536 - Leenders , et al. Sep	2020-09-08
Method for manufacturing a membrane assembly Grant 10,712,656 - Houweling , et al.	2020-07-14
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al.	2020-07-07
Lithographic apparatus and device manufacturing method Grant 10,684,554 - Streefkerk , et al.	2020-06-16
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Grant 10,656,536 - Leenders , et al.	2020-05-19
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 10,649,349 - Leenders , et al.	2020-05-12
Lithographic apparatus Grant 10,649,341 - Van Den Dungen , et al.	2020-05-12
Support Apparatus, A Lithographic Apparatus And A Device Manufacturing Method App 20200142317 - JEUNINK; Andre Bernardus ; et al.	2020-05-07
Pellicle Attachment Apparatus App 20200096882 - VAN DER MEULEN; Frits ; et al.	2020-03-26
Mask Assembly App 20200057394 - KRUIZINGA; Matthias ; et al.	2020-02-20
Mask assembly Grant 10,558,129 - Kruizinga , et al. Feb	2020-02-11
Pellicle attachment apparatus Grant 10,539,886 - Van Der Meulen , et al. Ja	2020-01-21
Pellicle Attachment Apparatus App 20200012204 - Van Der Meulen; Frits ; et al.	2020-01-09
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,514,615 - Jeunink , et al. Dec	2019-12-24
Lithographic Apparatus And Device Manufacturing Method App 20190369502 - Donders; Sjoerd Nicolaas Lambertus ; et al.	2019-12-05
Lithographic apparatus and device manufacturing method Grant 10,488,759 - Streefkerk , et al. Nov	2019-11-26
Lithographic Apparatus And Device Manufacturing Method App 20190339623 - STREEFKERK; Bob ; et al.	2019-11-07
Lithographic apparatus and device manufacturing method Grant 10,451,973 - Streefkerk , et al. Oc	2019-10-22
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate Grant 10,444,632 - Slotboom , et al. Oc	2019-10-15
Lithographic apparatus and device manufacturing method Grant 10,386,725 - Donders , et al. A	2019-08-20
Lithographic apparatus and device manufacturing method Grant 10,353,296 - Streefkerk , et al. July 16, 2	2019-07-16
Lithographic Apparatus, A Dryer And A Method Of Removing Liquid From A Surface App 20190121247 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2019-04-25
Lithographic Apparatus And Device Manufacturing Method App 20190079419 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2019-03-14
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 10,185,231 - Leenders , et al. Ja	2019-01-22
Lithographic apparatus and a method of operating the apparatus Grant 10,175,585 - Watso , et al. J	2019-01-08
Mask Assembly App 20180329314 - KRUIZINGA; Matthias ; et al.	2018-11-15
Lithographic apparatus and device manufacturing method Grant 10,126,664 - Leenders , et al. November 13, 2	2018-11-13
Lithographic Apparatus And Device Manufacturing Method App 20180321594 - STREEFKERK; Bob ; et al.	2018-11-08
Method For Manufacturing A Membrane Assembly App 20180239240 - HOUWELING; Zomer Silvester ; et al.	2018-08-23
Lithographic Apparatus And Device Manufacturing Method App 20180239260 - Donders; Sjoerd Nicolaas Lambertus ; et al.	2018-08-23
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180231897 - JEUNINK; Andre Bernardus ; et al.	2018-08-16
Lithographic apparatus and device manufacturing method Grant 10,025,196 - Streefkerk , et al. July 17, 2	2018-07-17
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al.	2018-07-05
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate Grant 9,989,858 - Slotboom , et al. June 5, 2	2018-06-05
Lithographic apparatus and device manufacturing method Grant 9,952,514 - Donders , et al. April 24, 2	2018-04-24
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2	2018-02-27
Lithographic Apparatus And Device Manufacturing Method App 20170248854 - STREEFKERK; Bob ; et al.	2017-08-31
Lithographic Apparatus, A Dryer And A Method Of Removing Liquid From A Surface App 20170227856 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2017-08-10
Lithographic Apparatus And Device Manufacturing Method App 20170212432 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2017-07-27
Lithographic Apparatus And Device Manufacturing Method App 20170212422 - STREEFKERK; Bob ; et al.	2017-07-27
Substrate Support, Method For Loading A Substrate On A Substrate Support Location, Lithographic Apparatus And Device Manufacturing Method App 20170192359 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2017-07-06
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 9,632,425 - Leenders , et al. April 25, 2	2017-04-25
Real-time reticle curvature sensing Grant 9,632,429 - Ward , et al. April 25, 2	2017-04-25
Lithographic apparatus and device manufacturing method Grant 9,618,853 - Leenders , et al. April 11, 2	2017-04-11
Lithographic apparatus and device manufacturing method Grant 9,606,449 - Streefkerk , et al. March 28, 2	2017-03-28
Lithographic apparatus and contamination removal or prevention method Grant 9,599,908 - De Jong , et al. March 21, 2	2017-03-21
Lithographic Apparatus App 20170068175 - WESTERLAKEN; Jan Steven Christiaan ; et al.	2017-03-09
Lithographic apparatus and device manufacturing method Grant 9,581,916 - Ottens , et al. February 28, 2	2017-02-28
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-16
Lithographic Apparatus App 20170023870 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al.	2017-01-26
Lithographic apparatus Grant 9,513,568 - Westerlaken , et al. December 6, 2	2016-12-06
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2	2016-11-29
Apparatus Operable To Perform A Measurement Operation On A Substrate, Lithographic Apparatus, And Method Of Performing A Measurement Operation On A Substrate App 20160334713 - SLOTBOOM; Daan Maurits ; et al.	2016-11-17
Lithographic apparatus and device manufacturing method Grant 9,477,153 - Streefkerk , et al. October 25, 2	2016-10-25
Lithographic Apparatus And Device Manufacturing Method App 20160139514 - OTTENS; Joost Jeroen ; et al.	2016-05-19
Lithographic Apparatus And Device Manufacturing Method App 20160103399 - STREEFKERK; Bob ; et al.	2016-04-14
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder Grant 9,268,236 - Jacobs , et al. February 23, 2	2016-02-23
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20160033875 - DE JONG; Anthonius Martinus Cornelis Petrus ; et al.	2016-02-04
Lithographic apparatus and device manufacturing method Grant 9,229,335 - Streefkerk , et al. January 5, 2	2016-01-05
Lithographic Apparatus And Device Manufacturing Method App 20150355556 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2015-12-10
Lithographic apparatus and device manufacturing method Grant 9,188,882 - Ottens , et al. November 17, 2	2015-11-17
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al.	2015-11-12
Lithographic apparatus and contamination removal or prevention method Grant 9,158,206 - De Jong , et al. October 13, 2	2015-10-13
Lithographic apparatus and device manufacturing method Grant 9,146,478 - Streefkerk , et al. September 29, 2	2015-09-29
Lithographic apparatus and device manufacturing method Grant 9,140,996 - Leenders , et al. September 22, 2	2015-09-22
Lithographic Apparatus App 20150234294 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al.	2015-08-20
Real-Time Reticle Curvature Sensing App 20150220005 - Ward; Christopher Charles ; et al.	2015-08-06
Lithographic apparatus and device manufacturing method Grant 9,081,300 - Streefkerk , et al. July 14, 2	2015-07-14
Lithographic Apparatus App 20150168854 - Westerlaken; Jan Steven Christiaan ; et al.	2015-06-18
Lithographic apparatus Grant 9,036,127 - Van den Dungen , et al. May 19, 2	2015-05-19
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system Grant 9,019,466 - Leenders , et al. April 28, 2	2015-04-28
Clamping device and object loading method Grant 9,013,682 - Compen , et al. April 21, 2	2015-04-21
Lithographic Apparatus And A Method Of Operating The Apparatus App 20150055102 - WATSO; Robert Douglas ; et al.	2015-02-26
Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid Grant 8,953,141 - Leenders , et al. February 10, 2	2015-02-10
Lithographic Apparatus And Device Manufacturing Method App 20140375973 - STREEFKERK; Bob ; et al.	2014-12-25
Lithographic apparatus and device manufacturing method Grant 8,913,228 - Wijckmans , et al. December 16, 2	2014-12-16
Lithographic apparatus and device manufacturing method Grant 8,902,403 - Leenders , et al. December 2, 2	2014-12-02
Lithographic Apparatus And Device Manufacturing Method App 20140327893 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2014-11-06
Lithographic apparatus and device manufacturing method Grant 8,860,924 - Streefkerk , et al. October 14, 2	2014-10-14
Lithographic apparatus and device manufacturing method Grant 8,848,165 - Donders , et al. September 30, 2	2014-09-30
Lithographic apparatus and a method of operating the apparatus Grant 8,823,918 - Watso , et al. September 2, 2	2014-09-02
Lithographic apparatus, removable member and device manufacturing method Grant 8,823,919 - Dziomkina , et al. September 2, 2	2014-09-02
Lithographic apparatus and device manufacturing method Grant 8,786,823 - Leenders , et al. July 22, 2	2014-07-22
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 8,711,326 - Van Der Ham , et al. April 29, 2	2014-04-29
Lithographic apparatus and device manufacturing method Grant 8,687,168 - De Graaf , et al. April 1, 2	2014-04-01
Lithographic apparatus and device manufacturing method Grant 8,681,311 - Leenders , et al. March 25, 2	2014-03-25
Lithographic apparatus, removable member and device manufacturing method Grant 8,659,741 - De Graaf , et al. February 25, 2	2014-02-25
Lithographic apparatus, device manufacturing method and a control system Grant 8,564,760 - Leenders , et al. October 22, 2	2013-10-22
Lithographic apparatus and method Grant 8,564,763 - Jacobs , et al. October 22, 2	2013-10-22
Lithographic apparatus and device manufacturing method Grant 8,514,365 - De Jong , et al. August 20, 2	2013-08-20
Lithographic apparatus and device manufacturing method Grant 8,481,978 - Jansen , et al. July 9, 2	2013-07-09
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2	2013-05-21
Lithographic apparatus and a method of operating the apparatus Grant 8,432,531 - Hoekerd , et al. April 30, 2	2013-04-30
Lithographic apparatus and device manufacturing method Grant 8,427,629 - Luijten , et al. April 23, 2	2013-04-23
Lithographic apparatus Grant 8,421,996 - Leenders , et al. April 16, 2	2013-04-16
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method Grant 8,405,817 - Stavenga , et al. March 26, 2	2013-03-26
Lithographic Apparatus And Device Manufacturing Method App 20130070219 - STREEFKERK; Bob ; et al.	2013-03-21
Lithographic apparatus and device manufacturing method Grant 8,248,577 - Streefkerk , et al. August 21, 2	2012-08-21
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 8,237,912 - Boom , et al. August 7, 2	2012-08-07
Lithographic apparatus and substrate edge seal Grant 8,232,540 - Ottens , et al. July 31, 2	2012-07-31
Lithographic Apparatus And Device Manufacturing Method App 20120140192 - Donders; Sjoerd Nicolaas Lambertus ; et al.	2012-06-07
Lithographic Apparatus And Device Manufacturing Method App 20120127441 - Streefkerk; Bob ; et al.	2012-05-24
Lithographic apparatus and device manufacturing method Grant 8,144,305 - Leenders , et al. March 27, 2	2012-03-27
Lithographic apparatus and device manufacturing method Grant 8,138,486 - Jansen , et al. March 20, 2	2012-03-20
Lithographic apparatus and device manufacturing method Grant 8,120,749 - Donders , et al. February 21, 2	2012-02-21
Lithographic apparatus and device manufacturing method Grant 8,115,903 - Streefkerk , et al. February 14, 2	2012-02-14
Lithographic Apparatus And Device Manufacturing Method App 20120013873 - Streefkerk; Bob ; et al.	2012-01-19
Lithographic Apparatus And Device Manufacturing Method App 20120013871 - STREEFKERK; Bob ; et al.	2012-01-19
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20110292357 - Van Der Ham; Ronald ; et al.	2011-12-01
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ; et al.	2011-11-10
Lithographic Apparatus And Device Manufacturing Method App 20110273687 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2011-11-10
Lithographic Apparatus And Device Manufacturing Method App 20110241259 - OTTENS; Joost Jeroen ; et al.	2011-10-06
Lithographic Apparatus And Device Manufacturing Method App 20110235008 - Leenders; Martinus Hendrikus Antonius ; et al.	2011-09-29
Lithographic apparatus and device manufacturing method Grant 8,023,101 - Leenders , et al. September 20, 2	2011-09-20
Lithographic apparatus and substrate edge seal Grant 8,003,968 - Ottens , et al. August 23, 2	2011-08-23
Lithographic Apparatus, Removable Member And Device Manufacturing Method App 20110199592 - De Graff; Roelof Frederik ; et al.	2011-08-18
Liquid Filled Lens Element, Lithographic Apparatus Comprising Such An Element And Device Manufacturing Method App 20110194096 - BOOM; Herman ; et al.	2011-08-11
Lithographic Apparatus And Device Manufacturing Method App 20110188015 - DE GRAAF; Roelof Frederik ; et al.	2011-08-04
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20110188013 - DE JONG; Anthonius Martinus Cornelis Petrus ; et al.	2011-08-04
Lithographic Apparatus And Device Manufacturing Method App 20110183257 - JANSEN; Hans ; et al.	2011-07-28
Lithographic apparatus and device manufacturing method Grant 7,978,306 - Ottens , et al. July 12, 2	2011-07-12
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 7,969,549 - Boom , et al. June 28, 2	2011-06-28
Lithographic Apparatus, Removable Member And Device Manufacturing Method App 20110116060 - Dziomkina; Nina Vladimirovna ; et al.	2011-05-19
Lithographic Apparatus And Device Manufacturing Method App 20110096307 - Leenders; Martinus Hendrikus Antonius ; et al.	2011-04-28
Lithographic Apparatus And Device Manufacturing Method App 20110090474 - JANSEN; Hans ; et al.	2011-04-21
Lithographic apparatus and device manufacturing method Grant 7,928,407 - Jansen , et al. April 19, 2	2011-04-19
Lithographic apparatus and device manufacturing method Grant 7,929,112 - De Graaf , et al. April 19, 2	2011-04-19
Lithographic Apparatus And A Method Of Operating The Apparatus App 20110080567 - HOEKERD; Kornelis Tijmen ; et al.	2011-04-07
Lithographic apparatus and contamination removal or prevention method Grant 7,916,269 - De Jong , et al. March 29, 2	2011-03-29
Lithographic apparatus and device manufacturing method Grant 7,903,232 - Leenders , et al. March 8, 2	2011-03-08
Lithographic Apparatus, Device Manufacturing Method And A Control System App 20110025995 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2011-02-03
Lithographic apparatus and device manufacturing method Grant 7,864,292 - Leenders , et al. January 4, 2	2011-01-04
Lithographic Apparatus App 20100321653 - Leenders; Martinus Hendrikus Antonius ; et al.	2010-12-23
Lithographic apparatus, device manufacturing method and a control system Grant 7,839,483 - Leenders , et al. November 23, 2	2010-11-23
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly Grant 7,834,975 - Burghoorn , et al. November 16, 2	2010-11-16
Lithographic Apparatus And Device Manufacturing Method App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2010-09-30
Lithographic apparatus Grant 7,804,577 - Leenders , et al. September 28, 2	2010-09-28
Lithographic Apparatus, A Method Of Controlling The Apparatus And A Device Manufacturing Method App 20100214543 - Stavenga; Marco Koert ; et al.	2010-08-26
Clamping Device And Object Loading Method App 20100195080 - Compen; Rene Theodorus ; et al.	2010-08-05
Lithographic apparatus and device manufacturing method Grant 7,751,027 - Jacobs , et al. July 6, 2	2010-07-06
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ; et al.	2010-07-01
Lithographic Apparatus And Device Manufacturing Method App 20100044593 - JANSEN; Hans ; et al.	2010-02-25
Lithographic apparatus and device manufacturing method Grant 7,656,502 - Van Der Schoot , et al. February 2, 2	2010-02-02
Lithographic apparatus Grant 7,656,501 - Ten Kate , et al. February 2, 2	2010-02-02
Lithographic apparatus and device manufacturing method Grant 7,633,073 - Jansen , et al. December 15, 2	2009-12-15
Lithographic Apparatus And A Method Of Operating The Apparatus App 20090284715 - Watso; Robert Douglas ; et al.	2009-11-19
Lithographic Apparatus And Method App 20090279061 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2009-11-12
Lithographic Apparatus App 20090262318 - VAN DEN DUNGEN; Clemens Johannes Gerardus ; et al.	2009-10-22
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2	2009-10-13
Cleaning apparatus and immersion lithographic apparatus App 20090174870 - De Jong; Anthonius Martinus Cornelis Petrus ; et al.	2009-07-09
Immersion Lithographic Apparatus And Device Manufacturing Method App 20090161089 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2009-06-25
Lithographic Apparatus And Device Manufacturing Method App 20090153823 - LUIJTEN; Carlo Cornelis Maria ; et al.	2009-06-18
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly Grant 7,518,706 - Hauschild , et al. April 14, 2	2009-04-14
Lithographic apparatus and device manufacturing method App 20090086181 - Donders; Sjoerd Nicolaas Lambertus ; et al.	2009-04-02
Lithographic apparatus and device manufacturing method App 20090073408 - De Graaf; Roelof Frederik ; et al.	2009-03-19
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 7,492,443 - Van Der Werf , et al. February 17, 2	2009-02-17
Lithographic Apparatus, Reflective Member And A Method of Irradiating The Underside Of A Liquid Supply System App 20090027636 - LEENDERS; Martinus Hendrikus Antonius ; et al.	2009-01-29
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program Grant 7,480,028 - Van Der Veen , et al. January 20, 2	2009-01-20
Substrates and methods of using those substrates App 20090014030 - De Jong; Anthonius Martinus Cornelis Petrus ; et al.	2009-01-15
Lithographic apparatus and device manufacturing method Grant 7,474,379 - Donders , et al. January 6, 2	2009-01-06
Lithographic apparatus and device manufacturing method Grant 7,468,779 - De Graaf , et al. December 23, 2	2008-12-23
Lithographic apparatus and substrate edge seal App 20080284995 - Ottens; Joost Jeroen ; et al.	2008-11-20
Lithographic apparatus and device manufacturing method App 20080259295 - Streefkerk; Bob ; et al.	2008-10-23
Lithographic apparatus and device manufacturing method Grant 7,433,016 - Streefkerk , et al. October 7, 2	2008-10-07
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device Grant 7,423,733 - Van De Ven , et al. September 9, 2	2008-09-09
Lithographic apparatus and substrate edge seal Grant 7,420,194 - Ottens , et al. September 2, 2	2008-09-02
Lithographic apparatus, a dryer and a method of removing liquid from a surface App 20080192214 - Leenders; Martinus Hendrikus Antonius ; et al.	2008-08-14
Lithographic apparatus and device manufacturing method Grant 7,411,657 - Ottens , et al. August 12, 2	2008-08-12
Lithographic apparatus and device manufacturing method App 20080073602 - Jacobs; Hernes ; et al.	2008-03-27
Lithographic apparatus and lithographic apparatus cleaning method App 20080049201 - Stavenga; Marco Koert ; et al.	2008-02-28
Lithographic apparatus and device manufacturing method App 20080007704 - Leenders; Martinus Hendrikus Antonius ; et al.	2008-01-10
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method App 20080002168 - Boom; Herman ; et al.	2008-01-03
Lithographic apparatus and device manufacturing method App 20070243697 - Leenders; Martinus Hendrikus Antonius ; et al.	2007-10-18
Lithographic apparatus and device manufacturing method App 20070242245 - Wijckmans; Maurice ; et al.	2007-10-18
Lithographic apparatus and device manufacturing method Grant 7,265,366 - Van Der Pasch , et al. September 4, 2	2007-09-04
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20070159616 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al.	2007-07-12
Lithographic apparatus and substrate edge seal App 20070146665 - Ottens; Joost Jeroen ; et al.	2007-06-28
Lithographic apparatus and device manufacturing method App 20070114451 - Jansen; Hans ; et al.	2007-05-24
Lithographic apparatus and device manufacturing method App 20070114452 - Jansen; Hans ; et al.	2007-05-24
Lithographic apparatus App 20070109512 - Kate; Nicolaas Ten ; et al.	2007-05-17
Lithographic apparatus App 20070110213 - Leenders; Martinus Hendrikus Antonius ; et al.	2007-05-17
Lithographic apparatus and device manufacturing method App 20070070315 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2007-03-29
Position determination method and lithographic apparatus Grant 7,177,009 - Klinkhamer , et al. February 13, 2	2007-02-13
Lithographic apparatus, projection system, method of projecting and device manufacturing method Grant 7,170,580 - Leenders , et al. January 30, 2	2007-01-30
Lithographic apparatus and device manufacturing method App 20060290909 - Donders; Sjoerd Nicolaas Lambertus ; et al.	2006-12-28
Lithographic apparatus and device manufacturing method App 20060290908 - De Graaf; Roelof Frederik ; et al.	2006-12-28
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly App 20060279718 - Den Boef; Arie Jeffrey ; et al.	2006-12-14
Lithographic apparatus and device manufacturing method App 20060250601 - Streefkerk; Bob ; et al.	2006-11-09
Lithographic apparatus and device manufacturing method App 20060250590 - Streefkerk; Bob ; et al.	2006-11-09
Lithographic apparatus, device manufacturing method, and angular encoder Grant 7,119,886 - Leenders , et al. October 10, 2	2006-10-10
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,116,399 - Box , et al. October 3, 2	2006-10-03
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,095,479 - Stevens , et al. August 22, 2	2006-08-22
Device manufacturing method and computer program Grant 7,042,550 - Lowisch , et al. May 9, 2	2006-05-09
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ; et al.	2006-04-27
Position determination method and a lithographic apparatus App 20060072087 - Klinkhamer; Jacob Frederik Friso ; et al.	2006-04-06
Lithographic apparatus and device manufacturing method Grant 6,977,713 - Luttikhuis , et al. December 20, 2	2005-12-20
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program App 20050248740 - Veen, Michael Van Der ; et al.	2005-11-10
Lithographic apparatus and method of manufacturing a device Grant 6,956,222 - Gilissen , et al. October 18, 2	2005-10-18
Lithographic apparatus and device manufacturing method App 20050218342 - Van Der Pasch, Engelbertus Antonius Fransiscus ; et al.	2005-10-06
Lithographic apparatus and a measurement system Grant 6,940,587 - Van Der Laan , et al. September 6, 2	2005-09-06
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,930,760 - Van Elp , et al. August 16, 2	2005-08-16
Lithographic apparatus and device manufacturing method App 20050122490 - Luttikhuis, Bernardus Antonius Johannes ; et al.	2005-06-09
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 6,879,374 - Van Der Werf , et al. April 12, 2	2005-04-12
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby Grant 6,862,075 - Koster , et al. March 1, 2	2005-03-01
Lithographic apparatus, device manufacturing method, and angular encoder App 20050018162 - Leenders, Martinus Hendrikus Antonius ; et al.	2005-01-27
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050018154 - Box, Wilhelmus Josephus ; et al.	2005-01-27
Lithographic apparatus, projection system, method of projecting and device manufacturing method App 20040257549 - Leenders, Martinus Hendrikus Antonius ; et al.	2004-12-23
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 6,781,673 - Moors , et al. August 24, 2	2004-08-24
Device manufacturing method and computer program App 20040137677 - Lowisch, Martin ; et al.	2004-07-15
Lithographic apparatus and a measurement system App 20040114119 - Van Der Laan, Hans ; et al.	2004-06-17
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040109149 - Elp, Jan Van ; et al.	2004-06-10
Lithographic apparatus and device manufacturing method Grant 6,741,329 - Leenders , et al. May 25, 2	2004-05-25
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby App 20040032574 - Koster, Norbertus Benedictus ; et al.	2004-02-19
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,678,037 - Van Elp , et al. January 13, 2	2004-01-13
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby Grant 6,614,505 - Koster , et al. September 2, 2	2003-09-02
Device manufacturing method, device manufactured thereby and a mask for use in the method App 20030003383 - Van Der Werf, Jan Evert ; et al.	2003-01-02
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby App 20020154279 - Koster, Norbertus Benedictus ; et al.	2002-10-24
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020109828 - Moors, Johannes Hubertus Josephina ; et al.	2002-08-15
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020096647 - Moors, Johannes Hubertus Josephina ; et al.	2002-07-25
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020097385 - Van Elp, Jan ; et al.	2002-07-25