loadpatents
Patent applications and USPTO patent grants for Leenders; Martinus Hendrikus Antonius.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".
Patent | Date |
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Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ;   et al. | 2022-09-15 |
Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2 | 2022-05-24 |
Lithographic apparatus and device manufacturing method Grant 11,327,404 - Donders , et al. May 10, 2 | 2022-05-10 |
Lithographic Apparatus And Device Manufacturing Method App 20220113641 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2022-04-14 |
Lithographic apparatus and device manufacturing method Grant 11,209,738 - Leenders , et al. December 28, 2 | 2021-12-28 |
Lithographic apparatus and device manufacturing method Grant 11,016,394 - Streefkerk , et al. May 25, 2 | 2021-05-25 |
Mask assembly Grant 11,009,803 - Kruizinga , et al. May 18, 2 | 2021-05-18 |
Pellicle attachment apparatus Grant 11,003,098 - Van Der Meulen , et al. May 11, 2 | 2021-05-11 |
Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ;   et al. | 2021-04-15 |
Pellicle attachment apparatus Grant 10,969,701 - Van Der Meulen , et al. April 6, 2 | 2021-04-06 |
Lithographic Apparatus And Device Manufacturing Method App 20200401057 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2020-12-24 |
Lithographic Apparatus And Device Manufacturing Method App 20200310252 - STREEFKERK; Bob ;   et al. | 2020-10-01 |
Lithographic apparatus Grant 10,788,763 - Westerlaken , et al. September 29, 2 | 2020-09-29 |
Support apparatus, a lithographic apparatus and a device manufacturing method Grant 10,768,535 - Jeunink , et al. Sep | 2020-09-08 |
Lithographic apparatus and device manufacturing method Grant 10,768,536 - Leenders , et al. Sep | 2020-09-08 |
Method for manufacturing a membrane assembly Grant 10,712,656 - Houweling , et al. | 2020-07-14 |
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al. | 2020-07-07 |
Lithographic apparatus and device manufacturing method Grant 10,684,554 - Streefkerk , et al. | 2020-06-16 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Grant 10,656,536 - Leenders , et al. | 2020-05-19 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 10,649,349 - Leenders , et al. | 2020-05-12 |
Lithographic apparatus Grant 10,649,341 - Van Den Dungen , et al. | 2020-05-12 |
Support Apparatus, A Lithographic Apparatus And A Device Manufacturing Method App 20200142317 - JEUNINK; Andre Bernardus ;   et al. | 2020-05-07 |
Pellicle Attachment Apparatus App 20200096882 - VAN DER MEULEN; Frits ;   et al. | 2020-03-26 |
Mask Assembly App 20200057394 - KRUIZINGA; Matthias ;   et al. | 2020-02-20 |
Mask assembly Grant 10,558,129 - Kruizinga , et al. Feb | 2020-02-11 |
Pellicle attachment apparatus Grant 10,539,886 - Van Der Meulen , et al. Ja | 2020-01-21 |
Pellicle Attachment Apparatus App 20200012204 - Van Der Meulen; Frits ;   et al. | 2020-01-09 |
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,514,615 - Jeunink , et al. Dec | 2019-12-24 |
Lithographic Apparatus And Device Manufacturing Method App 20190369502 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2019-12-05 |
Lithographic apparatus and device manufacturing method Grant 10,488,759 - Streefkerk , et al. Nov | 2019-11-26 |
Lithographic Apparatus And Device Manufacturing Method App 20190339623 - STREEFKERK; Bob ;   et al. | 2019-11-07 |
Lithographic apparatus and device manufacturing method Grant 10,451,973 - Streefkerk , et al. Oc | 2019-10-22 |
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate Grant 10,444,632 - Slotboom , et al. Oc | 2019-10-15 |
Lithographic apparatus and device manufacturing method Grant 10,386,725 - Donders , et al. A | 2019-08-20 |
Lithographic apparatus and device manufacturing method Grant 10,353,296 - Streefkerk , et al. July 16, 2 | 2019-07-16 |
Lithographic Apparatus, A Dryer And A Method Of Removing Liquid From A Surface App 20190121247 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2019-04-25 |
Lithographic Apparatus And Device Manufacturing Method App 20190079419 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2019-03-14 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 10,185,231 - Leenders , et al. Ja | 2019-01-22 |
Lithographic apparatus and a method of operating the apparatus Grant 10,175,585 - Watso , et al. J | 2019-01-08 |
Mask Assembly App 20180329314 - KRUIZINGA; Matthias ;   et al. | 2018-11-15 |
Lithographic apparatus and device manufacturing method Grant 10,126,664 - Leenders , et al. November 13, 2 | 2018-11-13 |
Lithographic Apparatus And Device Manufacturing Method App 20180321594 - STREEFKERK; Bob ;   et al. | 2018-11-08 |
Method For Manufacturing A Membrane Assembly App 20180239240 - HOUWELING; Zomer Silvester ;   et al. | 2018-08-23 |
Lithographic Apparatus And Device Manufacturing Method App 20180239260 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2018-08-23 |
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180231897 - JEUNINK; Andre Bernardus ;   et al. | 2018-08-16 |
Lithographic apparatus and device manufacturing method Grant 10,025,196 - Streefkerk , et al. July 17, 2 | 2018-07-17 |
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ;   et al. | 2018-07-05 |
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate Grant 9,989,858 - Slotboom , et al. June 5, 2 | 2018-06-05 |
Lithographic apparatus and device manufacturing method Grant 9,952,514 - Donders , et al. April 24, 2 | 2018-04-24 |
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2 | 2018-02-27 |
Lithographic Apparatus And Device Manufacturing Method App 20170248854 - STREEFKERK; Bob ;   et al. | 2017-08-31 |
Lithographic Apparatus, A Dryer And A Method Of Removing Liquid From A Surface App 20170227856 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-08-10 |
Lithographic Apparatus And Device Manufacturing Method App 20170212432 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-07-27 |
Lithographic Apparatus And Device Manufacturing Method App 20170212422 - STREEFKERK; Bob ;   et al. | 2017-07-27 |
Substrate Support, Method For Loading A Substrate On A Substrate Support Location, Lithographic Apparatus And Device Manufacturing Method App 20170192359 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-07-06 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface Grant 9,632,425 - Leenders , et al. April 25, 2 | 2017-04-25 |
Real-time reticle curvature sensing Grant 9,632,429 - Ward , et al. April 25, 2 | 2017-04-25 |
Lithographic apparatus and device manufacturing method Grant 9,618,853 - Leenders , et al. April 11, 2 | 2017-04-11 |
Lithographic apparatus and device manufacturing method Grant 9,606,449 - Streefkerk , et al. March 28, 2 | 2017-03-28 |
Lithographic apparatus and contamination removal or prevention method Grant 9,599,908 - De Jong , et al. March 21, 2 | 2017-03-21 |
Lithographic Apparatus App 20170068175 - WESTERLAKEN; Jan Steven Christiaan ;   et al. | 2017-03-09 |
Lithographic apparatus and device manufacturing method Grant 9,581,916 - Ottens , et al. February 28, 2 | 2017-02-28 |
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-02-16 |
Lithographic Apparatus App 20170023870 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2017-01-26 |
Lithographic apparatus Grant 9,513,568 - Westerlaken , et al. December 6, 2 | 2016-12-06 |
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2 | 2016-11-29 |
Apparatus Operable To Perform A Measurement Operation On A Substrate, Lithographic Apparatus, And Method Of Performing A Measurement Operation On A Substrate App 20160334713 - SLOTBOOM; Daan Maurits ;   et al. | 2016-11-17 |
Lithographic apparatus and device manufacturing method Grant 9,477,153 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
Lithographic Apparatus And Device Manufacturing Method App 20160139514 - OTTENS; Joost Jeroen ;   et al. | 2016-05-19 |
Lithographic Apparatus And Device Manufacturing Method App 20160103399 - STREEFKERK; Bob ;   et al. | 2016-04-14 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder Grant 9,268,236 - Jacobs , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20160033875 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2016-02-04 |
Lithographic apparatus and device manufacturing method Grant 9,229,335 - Streefkerk , et al. January 5, 2 | 2016-01-05 |
Lithographic Apparatus And Device Manufacturing Method App 20150355556 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2015-12-10 |
Lithographic apparatus and device manufacturing method Grant 9,188,882 - Ottens , et al. November 17, 2 | 2015-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ;   et al. | 2015-11-12 |
Lithographic apparatus and contamination removal or prevention method Grant 9,158,206 - De Jong , et al. October 13, 2 | 2015-10-13 |
Lithographic apparatus and device manufacturing method Grant 9,146,478 - Streefkerk , et al. September 29, 2 | 2015-09-29 |
Lithographic apparatus and device manufacturing method Grant 9,140,996 - Leenders , et al. September 22, 2 | 2015-09-22 |
Lithographic Apparatus App 20150234294 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2015-08-20 |
Real-Time Reticle Curvature Sensing App 20150220005 - Ward; Christopher Charles ;   et al. | 2015-08-06 |
Lithographic apparatus and device manufacturing method Grant 9,081,300 - Streefkerk , et al. July 14, 2 | 2015-07-14 |
Lithographic Apparatus App 20150168854 - Westerlaken; Jan Steven Christiaan ;   et al. | 2015-06-18 |
Lithographic apparatus Grant 9,036,127 - Van den Dungen , et al. May 19, 2 | 2015-05-19 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system Grant 9,019,466 - Leenders , et al. April 28, 2 | 2015-04-28 |
Clamping device and object loading method Grant 9,013,682 - Compen , et al. April 21, 2 | 2015-04-21 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20150055102 - WATSO; Robert Douglas ;   et al. | 2015-02-26 |
Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid Grant 8,953,141 - Leenders , et al. February 10, 2 | 2015-02-10 |
Lithographic Apparatus And Device Manufacturing Method App 20140375973 - STREEFKERK; Bob ;   et al. | 2014-12-25 |
Lithographic apparatus and device manufacturing method Grant 8,913,228 - Wijckmans , et al. December 16, 2 | 2014-12-16 |
Lithographic apparatus and device manufacturing method Grant 8,902,403 - Leenders , et al. December 2, 2 | 2014-12-02 |
Lithographic Apparatus And Device Manufacturing Method App 20140327893 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2014-11-06 |
Lithographic apparatus and device manufacturing method Grant 8,860,924 - Streefkerk , et al. October 14, 2 | 2014-10-14 |
Lithographic apparatus and device manufacturing method Grant 8,848,165 - Donders , et al. September 30, 2 | 2014-09-30 |
Lithographic apparatus and a method of operating the apparatus Grant 8,823,918 - Watso , et al. September 2, 2 | 2014-09-02 |
Lithographic apparatus, removable member and device manufacturing method Grant 8,823,919 - Dziomkina , et al. September 2, 2 | 2014-09-02 |
Lithographic apparatus and device manufacturing method Grant 8,786,823 - Leenders , et al. July 22, 2 | 2014-07-22 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 8,711,326 - Van Der Ham , et al. April 29, 2 | 2014-04-29 |
Lithographic apparatus and device manufacturing method Grant 8,687,168 - De Graaf , et al. April 1, 2 | 2014-04-01 |
Lithographic apparatus and device manufacturing method Grant 8,681,311 - Leenders , et al. March 25, 2 | 2014-03-25 |
Lithographic apparatus, removable member and device manufacturing method Grant 8,659,741 - De Graaf , et al. February 25, 2 | 2014-02-25 |
Lithographic apparatus, device manufacturing method and a control system Grant 8,564,760 - Leenders , et al. October 22, 2 | 2013-10-22 |
Lithographic apparatus and method Grant 8,564,763 - Jacobs , et al. October 22, 2 | 2013-10-22 |
Lithographic apparatus and device manufacturing method Grant 8,514,365 - De Jong , et al. August 20, 2 | 2013-08-20 |
Lithographic apparatus and device manufacturing method Grant 8,481,978 - Jansen , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2 | 2013-05-21 |
Lithographic apparatus and a method of operating the apparatus Grant 8,432,531 - Hoekerd , et al. April 30, 2 | 2013-04-30 |
Lithographic apparatus and device manufacturing method Grant 8,427,629 - Luijten , et al. April 23, 2 | 2013-04-23 |
Lithographic apparatus Grant 8,421,996 - Leenders , et al. April 16, 2 | 2013-04-16 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method Grant 8,405,817 - Stavenga , et al. March 26, 2 | 2013-03-26 |
Lithographic Apparatus And Device Manufacturing Method App 20130070219 - STREEFKERK; Bob ;   et al. | 2013-03-21 |
Lithographic apparatus and device manufacturing method Grant 8,248,577 - Streefkerk , et al. August 21, 2 | 2012-08-21 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 8,237,912 - Boom , et al. August 7, 2 | 2012-08-07 |
Lithographic apparatus and substrate edge seal Grant 8,232,540 - Ottens , et al. July 31, 2 | 2012-07-31 |
Lithographic Apparatus And Device Manufacturing Method App 20120140192 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2012-06-07 |
Lithographic Apparatus And Device Manufacturing Method App 20120127441 - Streefkerk; Bob ;   et al. | 2012-05-24 |
Lithographic apparatus and device manufacturing method Grant 8,144,305 - Leenders , et al. March 27, 2 | 2012-03-27 |
Lithographic apparatus and device manufacturing method Grant 8,138,486 - Jansen , et al. March 20, 2 | 2012-03-20 |
Lithographic apparatus and device manufacturing method Grant 8,120,749 - Donders , et al. February 21, 2 | 2012-02-21 |
Lithographic apparatus and device manufacturing method Grant 8,115,903 - Streefkerk , et al. February 14, 2 | 2012-02-14 |
Lithographic Apparatus And Device Manufacturing Method App 20120013873 - Streefkerk; Bob ;   et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method App 20120013871 - STREEFKERK; Bob ;   et al. | 2012-01-19 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20110292357 - Van Der Ham; Ronald ;   et al. | 2011-12-01 |
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110273687 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110241259 - OTTENS; Joost Jeroen ;   et al. | 2011-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20110235008 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2011-09-29 |
Lithographic apparatus and device manufacturing method Grant 8,023,101 - Leenders , et al. September 20, 2 | 2011-09-20 |
Lithographic apparatus and substrate edge seal Grant 8,003,968 - Ottens , et al. August 23, 2 | 2011-08-23 |
Lithographic Apparatus, Removable Member And Device Manufacturing Method App 20110199592 - De Graff; Roelof Frederik ;   et al. | 2011-08-18 |
Liquid Filled Lens Element, Lithographic Apparatus Comprising Such An Element And Device Manufacturing Method App 20110194096 - BOOM; Herman ;   et al. | 2011-08-11 |
Lithographic Apparatus And Device Manufacturing Method App 20110188015 - DE GRAAF; Roelof Frederik ;   et al. | 2011-08-04 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20110188013 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2011-08-04 |
Lithographic Apparatus And Device Manufacturing Method App 20110183257 - JANSEN; Hans ;   et al. | 2011-07-28 |
Lithographic apparatus and device manufacturing method Grant 7,978,306 - Ottens , et al. July 12, 2 | 2011-07-12 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 7,969,549 - Boom , et al. June 28, 2 | 2011-06-28 |
Lithographic Apparatus, Removable Member And Device Manufacturing Method App 20110116060 - Dziomkina; Nina Vladimirovna ;   et al. | 2011-05-19 |
Lithographic Apparatus And Device Manufacturing Method App 20110096307 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2011-04-28 |
Lithographic Apparatus And Device Manufacturing Method App 20110090474 - JANSEN; Hans ;   et al. | 2011-04-21 |
Lithographic apparatus and device manufacturing method Grant 7,928,407 - Jansen , et al. April 19, 2 | 2011-04-19 |
Lithographic apparatus and device manufacturing method Grant 7,929,112 - De Graaf , et al. April 19, 2 | 2011-04-19 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20110080567 - HOEKERD; Kornelis Tijmen ;   et al. | 2011-04-07 |
Lithographic apparatus and contamination removal or prevention method Grant 7,916,269 - De Jong , et al. March 29, 2 | 2011-03-29 |
Lithographic apparatus and device manufacturing method Grant 7,903,232 - Leenders , et al. March 8, 2 | 2011-03-08 |
Lithographic Apparatus, Device Manufacturing Method And A Control System App 20110025995 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2011-02-03 |
Lithographic apparatus and device manufacturing method Grant 7,864,292 - Leenders , et al. January 4, 2 | 2011-01-04 |
Lithographic Apparatus App 20100321653 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2010-12-23 |
Lithographic apparatus, device manufacturing method and a control system Grant 7,839,483 - Leenders , et al. November 23, 2 | 2010-11-23 |
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly Grant 7,834,975 - Burghoorn , et al. November 16, 2 | 2010-11-16 |
Lithographic Apparatus And Device Manufacturing Method App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ;   et al. | 2010-09-30 |
Lithographic apparatus Grant 7,804,577 - Leenders , et al. September 28, 2 | 2010-09-28 |
Lithographic Apparatus, A Method Of Controlling The Apparatus And A Device Manufacturing Method App 20100214543 - Stavenga; Marco Koert ;   et al. | 2010-08-26 |
Clamping Device And Object Loading Method App 20100195080 - Compen; Rene Theodorus ;   et al. | 2010-08-05 |
Lithographic apparatus and device manufacturing method Grant 7,751,027 - Jacobs , et al. July 6, 2 | 2010-07-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ;   et al. | 2010-07-01 |
Lithographic Apparatus And Device Manufacturing Method App 20100044593 - JANSEN; Hans ;   et al. | 2010-02-25 |
Lithographic apparatus and device manufacturing method Grant 7,656,502 - Van Der Schoot , et al. February 2, 2 | 2010-02-02 |
Lithographic apparatus Grant 7,656,501 - Ten Kate , et al. February 2, 2 | 2010-02-02 |
Lithographic apparatus and device manufacturing method Grant 7,633,073 - Jansen , et al. December 15, 2 | 2009-12-15 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20090284715 - Watso; Robert Douglas ;   et al. | 2009-11-19 |
Lithographic Apparatus And Method App 20090279061 - JACOBS; Johannes Henricus Wilhelmus ;   et al. | 2009-11-12 |
Lithographic Apparatus App 20090262318 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2009-10-22 |
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2 | 2009-10-13 |
Cleaning apparatus and immersion lithographic apparatus App 20090174870 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-07-09 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20090161089 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2009-06-25 |
Lithographic Apparatus And Device Manufacturing Method App 20090153823 - LUIJTEN; Carlo Cornelis Maria ;   et al. | 2009-06-18 |
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly Grant 7,518,706 - Hauschild , et al. April 14, 2 | 2009-04-14 |
Lithographic apparatus and device manufacturing method App 20090086181 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2009-04-02 |
Lithographic apparatus and device manufacturing method App 20090073408 - De Graaf; Roelof Frederik ;   et al. | 2009-03-19 |
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 7,492,443 - Van Der Werf , et al. February 17, 2 | 2009-02-17 |
Lithographic Apparatus, Reflective Member And A Method of Irradiating The Underside Of A Liquid Supply System App 20090027636 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2009-01-29 |
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program Grant 7,480,028 - Van Der Veen , et al. January 20, 2 | 2009-01-20 |
Substrates and methods of using those substrates App 20090014030 - De Jong; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-15 |
Lithographic apparatus and device manufacturing method Grant 7,474,379 - Donders , et al. January 6, 2 | 2009-01-06 |
Lithographic apparatus and device manufacturing method Grant 7,468,779 - De Graaf , et al. December 23, 2 | 2008-12-23 |
Lithographic apparatus and substrate edge seal App 20080284995 - Ottens; Joost Jeroen ;   et al. | 2008-11-20 |
Lithographic apparatus and device manufacturing method App 20080259295 - Streefkerk; Bob ;   et al. | 2008-10-23 |
Lithographic apparatus and device manufacturing method Grant 7,433,016 - Streefkerk , et al. October 7, 2 | 2008-10-07 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device Grant 7,423,733 - Van De Ven , et al. September 9, 2 | 2008-09-09 |
Lithographic apparatus and substrate edge seal Grant 7,420,194 - Ottens , et al. September 2, 2 | 2008-09-02 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface App 20080192214 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2008-08-14 |
Lithographic apparatus and device manufacturing method Grant 7,411,657 - Ottens , et al. August 12, 2 | 2008-08-12 |
Lithographic apparatus and device manufacturing method App 20080073602 - Jacobs; Hernes ;   et al. | 2008-03-27 |
Lithographic apparatus and lithographic apparatus cleaning method App 20080049201 - Stavenga; Marco Koert ;   et al. | 2008-02-28 |
Lithographic apparatus and device manufacturing method App 20080007704 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2008-01-10 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method App 20080002168 - Boom; Herman ;   et al. | 2008-01-03 |
Lithographic apparatus and device manufacturing method App 20070243697 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2007-10-18 |
Lithographic apparatus and device manufacturing method App 20070242245 - Wijckmans; Maurice ;   et al. | 2007-10-18 |
Lithographic apparatus and device manufacturing method Grant 7,265,366 - Van Der Pasch , et al. September 4, 2 | 2007-09-04 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20070159616 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ;   et al. | 2007-07-12 |
Lithographic apparatus and substrate edge seal App 20070146665 - Ottens; Joost Jeroen ;   et al. | 2007-06-28 |
Lithographic apparatus and device manufacturing method App 20070114451 - Jansen; Hans ;   et al. | 2007-05-24 |
Lithographic apparatus and device manufacturing method App 20070114452 - Jansen; Hans ;   et al. | 2007-05-24 |
Lithographic apparatus App 20070109512 - Kate; Nicolaas Ten ;   et al. | 2007-05-17 |
Lithographic apparatus App 20070110213 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2007-05-17 |
Lithographic apparatus and device manufacturing method App 20070070315 - Jacobs; Johannes Henricus Wilhelmus ;   et al. | 2007-03-29 |
Position determination method and lithographic apparatus Grant 7,177,009 - Klinkhamer , et al. February 13, 2 | 2007-02-13 |
Lithographic apparatus, projection system, method of projecting and device manufacturing method Grant 7,170,580 - Leenders , et al. January 30, 2 | 2007-01-30 |
Lithographic apparatus and device manufacturing method App 20060290909 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2006-12-28 |
Lithographic apparatus and device manufacturing method App 20060290908 - De Graaf; Roelof Frederik ;   et al. | 2006-12-28 |
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly App 20060279718 - Den Boef; Arie Jeffrey ;   et al. | 2006-12-14 |
Lithographic apparatus and device manufacturing method App 20060250601 - Streefkerk; Bob ;   et al. | 2006-11-09 |
Lithographic apparatus and device manufacturing method App 20060250590 - Streefkerk; Bob ;   et al. | 2006-11-09 |
Lithographic apparatus, device manufacturing method, and angular encoder Grant 7,119,886 - Leenders , et al. October 10, 2 | 2006-10-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,116,399 - Box , et al. October 3, 2 | 2006-10-03 |
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,095,479 - Stevens , et al. August 22, 2 | 2006-08-22 |
Device manufacturing method and computer program Grant 7,042,550 - Lowisch , et al. May 9, 2 | 2006-05-09 |
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ;   et al. | 2006-04-27 |
Position determination method and a lithographic apparatus App 20060072087 - Klinkhamer; Jacob Frederik Friso ;   et al. | 2006-04-06 |
Lithographic apparatus and device manufacturing method Grant 6,977,713 - Luttikhuis , et al. December 20, 2 | 2005-12-20 |
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program App 20050248740 - Veen, Michael Van Der ;   et al. | 2005-11-10 |
Lithographic apparatus and method of manufacturing a device Grant 6,956,222 - Gilissen , et al. October 18, 2 | 2005-10-18 |
Lithographic apparatus and device manufacturing method App 20050218342 - Van Der Pasch, Engelbertus Antonius Fransiscus ;   et al. | 2005-10-06 |
Lithographic apparatus and a measurement system Grant 6,940,587 - Van Der Laan , et al. September 6, 2 | 2005-09-06 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,930,760 - Van Elp , et al. August 16, 2 | 2005-08-16 |
Lithographic apparatus and device manufacturing method App 20050122490 - Luttikhuis, Bernardus Antonius Johannes ;   et al. | 2005-06-09 |
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 6,879,374 - Van Der Werf , et al. April 12, 2 | 2005-04-12 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby Grant 6,862,075 - Koster , et al. March 1, 2 | 2005-03-01 |
Lithographic apparatus, device manufacturing method, and angular encoder App 20050018162 - Leenders, Martinus Hendrikus Antonius ;   et al. | 2005-01-27 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050018154 - Box, Wilhelmus Josephus ;   et al. | 2005-01-27 |
Lithographic apparatus, projection system, method of projecting and device manufacturing method App 20040257549 - Leenders, Martinus Hendrikus Antonius ;   et al. | 2004-12-23 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 6,781,673 - Moors , et al. August 24, 2 | 2004-08-24 |
Device manufacturing method and computer program App 20040137677 - Lowisch, Martin ;   et al. | 2004-07-15 |
Lithographic apparatus and a measurement system App 20040114119 - Van Der Laan, Hans ;   et al. | 2004-06-17 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040109149 - Elp, Jan Van ;   et al. | 2004-06-10 |
Lithographic apparatus and device manufacturing method Grant 6,741,329 - Leenders , et al. May 25, 2 | 2004-05-25 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby App 20040032574 - Koster, Norbertus Benedictus ;   et al. | 2004-02-19 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,678,037 - Van Elp , et al. January 13, 2 | 2004-01-13 |
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby Grant 6,614,505 - Koster , et al. September 2, 2 | 2003-09-02 |
Device manufacturing method, device manufactured thereby and a mask for use in the method App 20030003383 - Van Der Werf, Jan Evert ;   et al. | 2003-01-02 |
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby App 20020154279 - Koster, Norbertus Benedictus ;   et al. | 2002-10-24 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020109828 - Moors, Johannes Hubertus Josephina ;   et al. | 2002-08-15 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020096647 - Moors, Johannes Hubertus Josephina ;   et al. | 2002-07-25 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020097385 - Van Elp, Jan ;   et al. | 2002-07-25 |
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