Patent | Date |
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Wafer-cleaning Apparatus Including A Window Protector And A Method Of Cleaning A Wafer App 20220230872 - JANG; Hunjae ;   et al. | 2022-07-21 |
Substrate Processing Method, Micropattern Forming Method, And Substrate Processing Apparatus App 20220208558 - PARK; Sangjine ;   et al. | 2022-06-30 |
Apparatus For Processing A Substrate App 20220199440 - Kim; Seohyun ;   et al. | 2022-06-23 |
Substrate cleaning apparatus and substrate cleaning method using the same Grant 11,342,203 - Jeong , et al. May 24, 2 | 2022-05-24 |
Substrate Heating Apparatus And Method For Processing A Substrate App 20220159788 - Kim; Taehong ;   et al. | 2022-05-19 |
Substrate Processing Apparatus, Semiconductor Manufacturing Equipment, And Substrate Processing Method App 20220075268 - Jeong; Jihoon ;   et al. | 2022-03-10 |
Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system Grant 11,189,503 - Kim , et al. November 30, 2 | 2021-11-30 |
Substrate-cleaning Apparatus Having Tiltable Roll Brush App 20210362198 - LEE; YONGHEE ;   et al. | 2021-11-25 |
Process Chamber and Substrate Processing Apparatus Including the Same App 20210217636 - Cho; Yong-Jhin ;   et al. | 2021-07-15 |
Thin Film Formation Apparatus And Method Using Plasma App 20210210342 - LEE; JUNYEONG ;   et al. | 2021-07-08 |
Process chamber and substrate processing apparatus including the same Grant 10,991,600 - Cho , et al. April 27, 2 | 2021-04-27 |
Substrate Cleaning Apparatus And Substrate Cleaning Method Using The Same App 20210020462 - JEONG; Jihoon ;   et al. | 2021-01-21 |
Rotary Body Module And Chemical Mechanical Polishing Apparatus Having The Same App 20210008686 - LEE; Yonghee ;   et al. | 2021-01-14 |
Conditioner, Chemical Mechanical Polishing Apparatus Including The Same And Method Of Manufacturing A Semiconductor Device Using The Apparatus App 20200346317 - HAN; Seungchul ;   et al. | 2020-11-05 |
Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate Grant 10,825,698 - Cho , et al. November 3, 2 | 2020-11-03 |
Substrate Drying Method, Photoresist Developing Method, Photolithography Method Including The Same, And Substrate Drying System App 20200152486 - KIM; Young-Hoo ;   et al. | 2020-05-14 |
Apparatus and methods for treating a substrate Grant 10,361,100 - Lee , et al. | 2019-07-23 |
Substrate treating apparatus Grant 10,186,427 - Kim , et al. Ja | 2019-01-22 |
Substrate Drying Apparatus, Facility Of Manufacturing Semiconductor Device, And Method Of Drying Substrate App 20180366348 - Cho; Yong-Jhin ;   et al. | 2018-12-20 |
Process Chamber and Substrate Processing Apparatus Including the Same App 20180366349 - Cho; Yong-Jhin ;   et al. | 2018-12-20 |
Metal etchant compositions and methods of fabricating a semiconductor device using the same Grant 10,155,903 - Lee , et al. Dec | 2018-12-18 |
Manufacturing method and fluid supply system for treating substrate Grant 9,941,110 - Oh , et al. April 10, 2 | 2018-04-10 |
Substrate Treating Apparatus App 20180096856 - KIM; Kyoung Hwan ;   et al. | 2018-04-05 |
Method and apparatus for purifying cleaning agent Grant 9,934,959 - Cho , et al. April 3, 2 | 2018-04-03 |
Substrate treating apparatus and method of treating substrate Grant 9,852,921 - Kim , et al. December 26, 2 | 2017-12-26 |
Method for treating substrate Grant 9,831,081 - Jeong , et al. November 28, 2 | 2017-11-28 |
Semiconductor Fabrication Apparatus Including a Plurality of Reaction Containers and Methods of Forming Layers on Semiconductor Substrate Using the Same App 20170298507 - Lee; Soyoung ;   et al. | 2017-10-19 |
Apparatus and a method for treating a substrate Grant 9,721,801 - Kim , et al. August 1, 2 | 2017-08-01 |
Etching composition Grant 9,677,002 - Bae , et al. June 13, 2 | 2017-06-13 |
Substrate treating apparatus Grant 9,627,233 - Kim , et al. April 18, 2 | 2017-04-18 |
Apparatus and Methods for Treating a Substrate App 20170084469 - Lee; Hyosan ;   et al. | 2017-03-23 |
Apparatus and methods for manufacturing semiconductor devices and treating substrates Grant 9,595,434 - Kim , et al. March 14, 2 | 2017-03-14 |
Method For Treating Substrate App 20170069485 - JEONG; Jihoon ;   et al. | 2017-03-09 |
Manufacturing Method And Fluid Supply System For Treating Substrate App 20170062208 - Oh; Jung-Min ;   et al. | 2017-03-02 |
Substrate Treating Apparatus And Method Of Treating Substrate App 20170062287 - KIM; Kyoung Hwan ;   et al. | 2017-03-02 |
Apparatus and methods for treating a substrate Grant 9,534,839 - Lee , et al. January 3, 2 | 2017-01-03 |
Liquid Chemical Supplying System, Substrate Processing System, And Substrate Processing Method App 20160368030 - KIM; Ingi ;   et al. | 2016-12-22 |
Manufacturing method and fluid supply system for treating substrate Grant 9,524,864 - Oh , et al. December 20, 2 | 2016-12-20 |
Metal Etchant Compositions And Methods Of Fabricating A Semiconductor Device Using The Same App 20160204001 - Lee; Hyosan ;   et al. | 2016-07-14 |
Apparatus And A Method For Treating A Substrate App 20160104629 - KIM; HONGJIN ;   et al. | 2016-04-14 |
Etching Composition App 20160032185 - BAE; Sang Won ;   et al. | 2016-02-04 |
Apparatus And Methods For Manufacturing Semiconductor Devices And Treating Substrates App 20160027637 - KIM; KYOUNGSEOB ;   et al. | 2016-01-28 |
Metal Etchant Compositions And Methods Of Fabricating A Semiconductor Device Using The Same App 20150368557 - Lee; Hyosan ;   et al. | 2015-12-24 |
Apparatus And Methods For Treating Substrates App 20150343495 - KIM; Kyoungseob ;   et al. | 2015-12-03 |
Substrate Treatment Apparatus Including Sealing Member Having Atypical Section App 20150303036 - JEONG; Jihoon ;   et al. | 2015-10-22 |
Etching composition and method of manufacturing semiconductor device using the same Grant 9,165,759 - Bae , et al. October 20, 2 | 2015-10-20 |
Method Of Rinsing And Drying Semiconductor Device And Method Of Manufacturing Semiconductor Device Using The Same App 20150287590 - OH; Jung-Min ;   et al. | 2015-10-08 |
Methods of manufacturing a three-dimensional semiconductor device Grant 9,153,597 - Kim , et al. October 6, 2 | 2015-10-06 |
Method And Apparatus For Purifying Cleaning Agent App 20150157955 - CHO; Yong-Jhin ;   et al. | 2015-06-11 |
Substrate treatment systems using supercritical fluid Grant 9,027,576 - Cho , et al. May 12, 2 | 2015-05-12 |
Substrate Treating Apparatus App 20140373881 - OH; Jung-Min ;   et al. | 2014-12-25 |
Substrate Treating Apparatus App 20140360041 - JEONG; Jihoon ;   et al. | 2014-12-11 |
Substrate Treating Apparatus App 20140291421 - Kim; SeokHoon ;   et al. | 2014-10-02 |
Substrate Treatment Systems Using Supercritical Fluid App 20140262024 - CHO; Yong-Jhin ;   et al. | 2014-09-18 |
Etching Composition And Method Of Manufacturing Semiconductor Device Using The Same App 20140141616 - BAE; Sang Won ;   et al. | 2014-05-22 |
Manufacturing Method And Fluid Supply System For Treating Substrate App 20130199051 - Oh; Jung-Min ;   et al. | 2013-08-08 |
Apparatus And A Method For Treating A Substrate App 20130199726 - KIM; Hongjin ;   et al. | 2013-08-08 |
Method Of Fabricating A Semiconductor Device App 20130183824 - KWON; Byoungho ;   et al. | 2013-07-18 |
Apparatus And Methods For Treating A Substrate App 20130145640 - Lee; Hyosan ;   et al. | 2013-06-13 |
Methods of Manufacturing a Three-Dimensional Semiconductor Device App 20130078776 - Kim; Young-Hoo ;   et al. | 2013-03-28 |
Wafer test method and wafer test apparatus Grant 8,228,089 - Kim , et al. July 24, 2 | 2012-07-24 |
Method and apparatus for controlled transient cavitation Grant 8,202,369 - Holsteyns , et al. June 19, 2 | 2012-06-19 |
Non-volatile memory device and method for fabricating non-volatile memory device Grant 8,120,089 - Kim , et al. February 21, 2 | 2012-02-21 |
Method of fabricating nonvolatile memory device Grant 8,076,198 - Lee , et al. December 13, 2 | 2011-12-13 |
Method of forming pattern structure Grant 7,968,454 - Park , et al. June 28, 2 | 2011-06-28 |
Wafer Test Method And Wafer Test Apparatus App 20100200431 - Kim; Youngok ;   et al. | 2010-08-12 |
Non-volatile Memory Device And Method For Fabricating Non-volatile Memory Device App 20100181610 - Kim; Young-Hoo ;   et al. | 2010-07-22 |
Method of forming pattern structure App 20100184288 - Park; Imsoo ;   et al. | 2010-07-22 |
Method of fabricating nonvolatile memory device App 20100178755 - Lee; Hyosan ;   et al. | 2010-07-15 |
Method and Apparatus for Controlled Transient Cavitation App 20080276960 - Holsteyns; Frank ;   et al. | 2008-11-13 |
Method and apparatus for controlled transient cavitation App 20060060991 - Holsteyns; Frank ;   et al. | 2006-03-23 |