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Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20220020577 - WANG; Xiaodong ;   et al. | 2022-01-20 |
Methods and apparatus for semi-dynamic bottom up reflow Grant 11,222,816 - Zhong , et al. January 11, 2 | 2022-01-11 |
Methods And Apparatus For Semi-dynamic Bottom Up Reflow App 20210391214 - ZHONG; Lanlan ;   et al. | 2021-12-16 |
Overhang Reduction Using Pulsed Bias App 20210391176 - Mebarki; Bencherki ;   et al. | 2021-12-16 |
Methods And Apparatus For Forming Dual Metal Interconnects App 20210320064 - PARIKH; SUKETU A. ;   et al. | 2021-10-14 |
Gap Fill Methods Using Catalyzed Deposition App 20210285102 - Yoon; Byunghoon ;   et al. | 2021-09-16 |
Selective Oxidation And Simplified Pre-clean App 20210287898 - Mebarki; Bencherki ;   et al. | 2021-09-16 |
Methods and apparatus for forming dual metal interconnects Grant 11,075,165 - Parikh , et al. July 27, 2 | 2021-07-27 |
Methods and apparatus for controlling ion fraction in physical vapor deposition processes Grant 11,037,768 - Wang , et al. June 15, 2 | 2021-06-15 |
Method Of Depositing Layers App 20210118729 - PETHE; Shirish ;   et al. | 2021-04-22 |
Film quality control in a linear scan physical vapor deposition process Grant 10,950,448 - Mebarki , et al. March 16, 2 | 2021-03-16 |
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20210071294 - WANG; Xiaodong ;   et al. | 2021-03-11 |
Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Grant 10,927,450 - Mebarki , et al. February 23, 2 | 2021-02-23 |
Methods and apparatus for patterning substrates using asymmetric physical vapor deposition Grant 10,927,451 - Mebarki , et al. February 23, 2 | 2021-02-23 |
Methods And Apparatus For Forming Dual Metal Interconnects App 20210020569 - PARIKH; SUKETU A. ;   et al. | 2021-01-21 |
Method and apparatus for asymmetric selective physical vapor deposition Grant 10,815,561 - Lee , et al. October 27, 2 | 2020-10-27 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200255937 - MEBARKI; BENCHERKI ;   et al. | 2020-08-13 |
Apparatus And Methods For Asymmetric Deposition Of Metal On High Aspect Ratio Nanostructures App 20200219720 - SHEU; BEN-LI ;   et al. | 2020-07-09 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200199741 - MEBARKI; BENCHERKI ;   et al. | 2020-06-25 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200135464 - KESAPRAGADA; SREE RANGASAI V. ;   et al. | 2020-04-30 |
Methods for asymmetric deposition of metal on high aspect ratio nanostructures Grant 10,636,655 - Sheu , et al. | 2020-04-28 |
Collimator For Selective Pvd Without Scanning App 20200051798 - MEBARKI; BENCHERKI ;   et al. | 2020-02-13 |
Multi-zone Collimator For Selective Pvd App 20190353919 - MEBARKI; BENCHERKI ;   et al. | 2019-11-21 |
Film Quality Control In A Linear Scan Physical Vapor Deposition Process App 20190311905 - Mebarki; Bencherki ;   et al. | 2019-10-10 |
Apparatus And Methods For Asymmetric Deposition Of Metal On High Aspect Ratio Nanostructures App 20190287791 - SHEU; BEN-LI ;   et al. | 2019-09-19 |
Method And Apparatus Of Forming Structures By Symmetric Selective Physical Vapor Deposition App 20190287772 - LEE; JOUNG JOO ;   et al. | 2019-09-19 |
Method And Apparatus For Asymmetric Selective Physical Vapor Deposition App 20190276926 - Lee; Joung Joo ;   et al. | 2019-09-12 |
Methods And Apparatus For Physical Vapor Deposition Via Linear Scanning With Ambient Control App 20190276929 - Mebarki; Bencherki ;   et al. | 2019-09-12 |
Methods And Apparatus For Physical Vapor Deposition Using Directional Linear Scanning App 20190276931 - Mebarki; Bencherki ;   et al. | 2019-09-12 |
Methods And Apparatus For Physical Vapor Deposition App 20190189465 - MILLER; KEITH A. ;   et al. | 2019-06-20 |
Methods and apparatus for filling substrate features with cobalt Grant 10,304,732 - Hou , et al. | 2019-05-28 |
Methods For Forming Capping Protection For An Interconnection Structure App 20190148150 - LEE; Joung Joo ;   et al. | 2019-05-16 |
Methods for pre-cleaning conductive materials on a substrate Grant 10,283,345 - Xie , et al. | 2019-05-07 |
Methods And Apparatus For Filling Substrate Features With Cobalt App 20190088540 - Hou; Wenting ;   et al. | 2019-03-21 |
Methods for igniting a plasma in a substrate processing chamber Grant 10,157,733 - Zhang , et al. Dec | 2018-12-18 |
Methods for forming cobalt-copper selective fill for an interconnect Grant 10,014,179 - Tao , et al. July 3, 2 | 2018-07-03 |
Methods and apparatus for improved metal ion filtering Grant 9,953,813 - Tang , et al. April 24, 2 | 2018-04-24 |
Reflective deposition rings and substrate processing chambers incorporating same Grant 9,905,443 - Subramani , et al. February 27, 2 | 2018-02-27 |
Bipolar collimator utilized in a physical vapor deposition chamber Grant 9,831,074 - Lee , et al. November 28, 2 | 2017-11-28 |
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20170253959 - WANG; Xiaodong ;   et al. | 2017-09-07 |
Methods For Igniting A Plasma In A Substrate Processing Chamber App 20170221685 - ZHANG; Shouyin ;   et al. | 2017-08-03 |
Methods For Pre-cleaning Conductive Materials On A Substrate App 20170098540 - XIE; Xiangjin ;   et al. | 2017-04-06 |
Methods for pre-cleaning conductive interconnect structures Grant 9,460,959 - Xie , et al. October 4, 2 | 2016-10-04 |
Methods For Forming Cobalt-copper Selective Fill For An Interconnect App 20160240432 - TAO; RONG ;   et al. | 2016-08-18 |
Methods for processing a substrate using multiple substrate support positions Grant 9,315,891 - Lee , et al. April 19, 2 | 2016-04-19 |
Methods And Apparatus For Improved Metal Ion Filtering App 20150357171 - TANG; XIANMIN ;   et al. | 2015-12-10 |
Bipolar Collimator Utilized In A Physical Vapor Deposition Chamber App 20150114823 - LEE; Joung Joo ;   et al. | 2015-04-30 |
Methods for forming interconnect structures Grant 8,841,211 - Lee , et al. September 23, 2 | 2014-09-23 |
Methods For Processing A Substrate Using Multiple Substrate Support Positions App 20140263169 - LEE; JOUNG JOO ;   et al. | 2014-09-18 |
Methods of forming layers on substrates Grant 8,476,162 - Ha , et al. July 2, 2 | 2013-07-02 |
Reflective Deposition Rings And Substrate Processing Chambers Incorporting Same App 20130055952 - SUBRAMANI; ANANTHA K. ;   et al. | 2013-03-07 |
Methods Of Forming Layers On Substrates App 20120108058 - HA; TAE HONG ;   et al. | 2012-05-03 |
Methods For Forming Interconnect Structures App 20110306200 - LEE; JOUNG JOO ;   et al. | 2011-12-15 |
Three-phase BLDC motor system and circuit and method for driving three-phase BLDC motor Grant 6,954,042 - Lee , et al. October 11, 2 | 2005-10-11 |
Three-phase BLDC motor system and circuit and method for driving three-phase BLDC motor App 20050001570 - Lee, Joung-Joo ;   et al. | 2005-01-06 |