| Patent | Date |
|---|
Method of manufacturing a metal wiring structure
Grant 8,304,343 - Choi , et al. November 6, 2 | 2012-11-06 |
Method Of Manufacturing A Metal Wiring Structure
App 20120009781 - Choi; Kyung-In ; et al. | 2012-01-12 |
Method of manufacturing a metal wiring structure
Grant 8,053,374 - Choi , et al. November 8, 2 | 2011-11-08 |
Etch stop structure and method of manufacture, and semiconductor device and method of manufacture
Grant 7,741,222 - You , et al. June 22, 2 | 2010-06-22 |
Method Of Manufacturing A Metal Wiring Structure
App 20100022086 - Choi; Kyung-In ; et al. | 2010-01-28 |
Recessed gate electrode and method of forming the same and semiconductor device having the recessed gate electrode and method of manufacturing the same
Grant 7,563,677 - Yoo , et al. July 21, 2 | 2009-07-21 |
Method of forming titanium nitride layer and method of fabricating capacitor using the same
Grant 7,524,724 - Kim , et al. April 28, 2 | 2009-04-28 |
Semiconductor memory device having low-resistance tungsten line and method of manufacturing the semiconductor memory device
Grant 7,504,725 - Kim , et al. March 17, 2 | 2009-03-17 |
Method of manufacturing a semiconductor device
Grant 7,410,869 - Leam , et al. August 12, 2 | 2008-08-12 |
Storage Capacitors For Semiconductor Devices
App 20080185624 - Kim; Rak-Hwan ; et al. | 2008-08-07 |
Methods of forming storage capacitors for semiconductor devices
Grant 7,364,967 - Kim , et al. April 29, 2 | 2008-04-29 |
Method for cleaning a processing chamber and method for manufacturing a semiconductor device
Grant 7,311,109 - Kim , et al. December 25, 2 | 2007-12-25 |
Semiconductor Memory Devices And Methods Of Fabricating The Same
App 20070272950 - KIM; Rak-Hwan ; et al. | 2007-11-29 |
Method of forming a storage electrode of a semiconductor device
Grant 7,238,585 - Kim , et al. July 3, 2 | 2007-07-03 |
Recessed Gate Electrode And Method Of Forming The Same And Semiconductor Device Having The Recessed Gate Electrode And Method Of Manufacturing The Same
App 20070059889 - Yoo; Dae-Han ; et al. | 2007-03-15 |
Method of manufacturing a semiconductor device
App 20070026651 - Leam; Hun-Hyeoung ; et al. | 2007-02-01 |
Method of forming a storage electrode of a semiconductor device
App 20070001209 - Kim; Kyoung-Seok ; et al. | 2007-01-04 |
Method of forming polycide layer and method of manufacturing semiconductor device having polycide layer
App 20060281289 - Kim; Young-Cheon ; et al. | 2006-12-14 |
Capacitor and methods of manufacturing the same
App 20060267019 - Kim; Kyoung-Seok ; et al. | 2006-11-30 |
Method of manufacturing a semiconductor device
Grant 7,135,407 - Shin , et al. November 14, 2 | 2006-11-14 |
Method of manufacturing transistor having recessed channel
Grant 7,125,774 - Kim , et al. October 24, 2 | 2006-10-24 |
Methods of fabricating integrated circuit conductive contact structures including grooves
Grant 7,122,468 - Shin , et al. October 17, 2 | 2006-10-17 |
Method of oxidizing a silicon substrate and method of forming an oxide layer using the same
Grant 7,119,029 - Shin , et al. October 10, 2 | 2006-10-10 |
Storage electrode of a semiconductor device and method of forming the same
Grant 7,119,392 - Kim , et al. October 10, 2 | 2006-10-10 |
Method of manufacturing a hemisperical grain silicon layer and method of manufacturing a semiconductor device using the same
App 20060160337 - Kim; Young-Jin ; et al. | 2006-07-20 |
Semiconductor device having a capping layer including cobalt and method of fabricating the same
App 20060145269 - Kim; Jung-Wook ; et al. | 2006-07-06 |
Storage capacitors for semiconductor devices and methods of forming the same
App 20060099760 - Kim; Rak-Hwan ; et al. | 2006-05-11 |
Semiconductor device having a capping layer including cobalt and method of fabricating the same
Grant 7,037,828 - Kim , et al. May 2, 2 | 2006-05-02 |
Etch stop structure and method of manufacture, and semiconductor device and method of manufacture
App 20060084275 - You; Young-Sub ; et al. | 2006-04-20 |
Method of forming a gate of a non-volatile memory device
Grant 7,008,844 - Kim , et al. March 7, 2 | 2006-03-07 |
Method of forming titanium nitride layer and method of fabricating capacitor using the same
App 20060014385 - Kim; Rak-Hwan ; et al. | 2006-01-19 |
Method of forming a dielectric layer and method of manufacturing a nonvolatile memory device using the same
App 20050266640 - You, Young-Sub ; et al. | 2005-12-01 |
Methods for forming metal interconnections for semiconductor devices having multiple metal depositions
Grant 6,964,922 - Lee , et al. November 15, 2 | 2005-11-15 |
Storage electrode of a semiconductor device and method of forming the same
App 20050221576 - Kim, Kyoung-Seok ; et al. | 2005-10-06 |
Method of manufacturing a metal oxide semiconductor transistor
Grant 6,913,979 - You , et al. July 5, 2 | 2005-07-05 |
Gap-fill method using high density plasma chemical vapor deposition process and method of manufacturing integrated circuit device
App 20050136686 - Kim, Do-Hyung ; et al. | 2005-06-23 |
Method of forming a contact in a semiconductor device
Grant 6,905,960 - Park , et al. June 14, 2 | 2005-06-14 |
Methods of fabricating integrated circuit conductive contact structures including grooves
App 20050121755 - Shin, Ju-Cheol ; et al. | 2005-06-09 |
Methods of fabricating a semiconductor device and forming a trench region in a semiconductor device
App 20050101143 - Lee, Seung-Jae ; et al. | 2005-05-12 |
Method of manufacturing transistor having recessed channel
App 20050054163 - Kim, Min ; et al. | 2005-03-10 |
Semiconductor device having a capping layer including cobalt and method of fabricating the same
App 20050046027 - Kim, Jung-Wook ; et al. | 2005-03-03 |
Semiconductor memory device having low-resistance tungsten line and method of manufacturing the semiconductor memory device
App 20050042829 - Kim, Rak-Hwan ; et al. | 2005-02-24 |
Method for forming a metal layer method for manufacturing a semiconductor device using the same
App 20040259344 - Park, Dong-Kyun ; et al. | 2004-12-23 |
Method of oxidizing a silicon substrate and method of forming an oxide layer using the same
App 20040224532 - Shin, Won-Sik ; et al. | 2004-11-11 |
Method of manufacturing a semiconductor device
App 20040198041 - Shin, Ju-Cheol ; et al. | 2004-10-07 |
Method for forming a conductive film and a conductive pattern of a semiconductor device
Grant 6,774,029 - Shin , et al. August 10, 2 | 2004-08-10 |
Semiconductor devices having multilevel interconnections and methods for manufacturing the same
Grant 6,747,354 - Kim , et al. June 8, 2 | 2004-06-08 |
Method for cleaning a processing chamber and method for manufacturing a semiconductor device
App 20040074515 - Kim, Jung-Wook ; et al. | 2004-04-22 |
Method of manufacturing a metal oxide semiconductor transistor
App 20040058556 - You, Young-Sub ; et al. | 2004-03-25 |
Method of forming a contact in a semiconductor device
App 20040053491 - Park, Hong-Mi ; et al. | 2004-03-18 |
Method for treating a surface of a reaction chamber
App 20040045503 - Lee, Jong-Myeong ; et al. | 2004-03-11 |
Method for forming a conductive film and a conductive pattern of a semiconductor device
App 20040038530 - Shin, Ju-Cheol ; et al. | 2004-02-26 |
Method of forming a gate of a non-volatile memory device
App 20040033653 - Kim, Bong-Hyun ; et al. | 2004-02-19 |
Methods for forming aluminum metal wirings
Grant 6,673,718 - Lee , et al. January 6, 2 | 2004-01-06 |
Integrated circuit conductive contact structures including grooves and fabrication methods thereof
App 20040000717 - Shin, Ju-Cheol ; et al. | 2004-01-01 |
Chemical vapor deposition method for depositing silicide and apparatus for performing the same
App 20030219536 - Shin, Ju-Cheol ; et al. | 2003-11-27 |
Methods for forming metal interconnections for semiconductor devices having multiple metal depositions
App 20030186539 - Lee, Jong-myeong ; et al. | 2003-10-02 |
Chemical vapor deposition method for depositing silicide and apparatus for performing the same
Grant 6,623,798 - Shin , et al. September 23, 2 | 2003-09-23 |
Semiconductor devices having multilevel interconnections and methods for manufacturing the same
App 20030160333 - Kim, Hyun-Young ; et al. | 2003-08-28 |
Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming a copper interconnect
Grant 6,607,654 - Lee , et al. August 19, 2 | 2003-08-19 |
Method of manufacturing an electrical interconnection of a semiconductor device using an erosion protecting plug in a contact hole of interlayer dielectric layer
Grant 6,372,616 - Yoo , et al. April 16, 2 | 2002-04-16 |
Method for forming damascene interconnection of semiconductor device and damascene interconnection fabricated thereby
App 20020041028 - Choi, Seung-Man ; et al. | 2002-04-11 |
Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming copper interconnect of semiconductor device using the same
App 20020036144 - Lee, Sun-Jung ; et al. | 2002-03-28 |
Chemical vapor deposition method for depositing silicide and apparatus for performing the same
App 20020014205 - Shin, Ju-Cheol ; et al. | 2002-02-07 |
Semiconductor device having capacitor and method of manufacturing the same
App 20010027004 - Park, Byung-Lyul ; et al. | 2001-10-04 |
Methods for fabricating CVD TiN barrier layers for capacitor structures
Grant 6,010,940 - Lee , et al. January 4, 2 | 2000-01-04 |
Stacked capacitors for integrated circuit devices and related methods
Grant 5,742,472 - Lee , et al. April 21, 1 | 1998-04-21 |
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