| Patent | Date |
|---|
Overlay applicator machine and method of providing the same
Grant 11,420,381 - Lane , et al. August 23, 2 | 2022-08-23 |
Methods And Apparatus For Processing A Substrate
App 20210296131 - Ramaswamy; Kartik ; et al. | 2021-09-23 |
Methods And Apparatus For Processing A Substrate
App 20210287907 - Ramaswamy; Kartik ; et al. | 2021-09-16 |
Overlay Applicator Machines And Methods Of Providing The Same
App 20210252770 - Lee; Eric ; et al. | 2021-08-19 |
Plasma deposition of carbon hardmask
Grant 11,043,375 - Yang , et al. June 22, 2 | 2021-06-22 |
Methods and apparatus for processing a substrate
Grant 11,043,387 - Ramaswamy , et al. June 22, 2 | 2021-06-22 |
Methods And Apparatus For Processing A Substrate
App 20210134599 - Ramaswamy; Kartik ; et al. | 2021-05-06 |
Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece
Grant 10,957,518 - Ramaswamy , et al. March 23, 2 | 2021-03-23 |
Overlay Applicator Machine And Method Of Providing The Same
App 20200393876 - Lane; Steven ; et al. | 2020-12-17 |
Chamber With Individually Controllable Plasma Generation Regions For A Reactor For Processing A Workpiece
App 20200312630 - Ramaswamy; Kartik ; et al. | 2020-10-01 |
Methods and apparatus for electron beam etching process
Grant 10,790,153 - Guo , et al. September 29, 2 | 2020-09-29 |
Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber
Grant 10,784,085 - Ramaswamy , et al. Sept | 2020-09-22 |
Etching methods
Grant 10,707,086 - Yang , et al. | 2020-07-07 |
Deposition or treatment of diamond-like carbon in a plasma reactor
Grant 10,544,505 - Yang , et al. Ja | 2020-01-28 |
Methods And Apparatus For Electron Beam Etching Process
App 20200006036 - GUO; Yue ; et al. | 2020-01-02 |
Etching Apparatus
App 20190393053 - YANG; Yang ; et al. | 2019-12-26 |
Method of real time in-situ chamber condition monitoring using sensors and RF communication
Grant 10,395,904 - Wong , et al. A | 2019-08-27 |
Diamond Like Carbon Layer Formed By An Electron Beam Plasma Process
App 20190228970 - YANG; Yang ; et al. | 2019-07-25 |
Etching Apparatus And Methods
App 20190221437 - YANG; Yang ; et al. | 2019-07-18 |
Magnet configurations for radial uniformity tuning of ICP plasmas
Grant 10,249,479 - Aubuchon , et al. | 2019-04-02 |
Diamond like carbon layer formed by an electron beam plasma process
Grant 10,249,495 - Yang , et al. | 2019-04-02 |
Method of Real Time In-Situ Chamber Condition Monitoring Using Sensors and Rf Communication
App 20190096641 - Wong; Lawrence ; et al. | 2019-03-28 |
Plasma Deposition Of Carbon Hardmask
App 20190057862 - YANG; Yang ; et al. | 2019-02-21 |
Inductively coupled plasma source
Grant 10,170,278 - Nguyen , et al. J | 2019-01-01 |
Multiple Electrode Substrate Support Assembly And Phase Control System
App 20180366306 - YANG; Yang ; et al. | 2018-12-20 |
Multiple electrode substrate support assembly and phase control system
Grant 10,153,139 - Yang , et al. Dec | 2018-12-11 |
Method of real time in-situ chamber condition monitoring using sensors and RF communication
Grant 10,141,166 - Wong , et al. Nov | 2018-11-27 |
Method and apparatus for controlling a magnetic field in a plasma chamber
Grant 10,115,566 - Lane , et al. October 30, 2 | 2018-10-30 |
Alternating Between Deposition And Treatment Of Diamond-like Carbon
App 20180274100 - Yang; Yang ; et al. | 2018-09-27 |
Plasma Reactor With Electron Beam Of Secondary Electrons
App 20180277340 - Yang; Yang ; et al. | 2018-09-27 |
Deposition Or Treatment Of Diamond-like Carbon In A Plasma Reactor
App 20180274089 - Yang; Yang ; et al. | 2018-09-27 |
Particle removal device and method of using the same
Grant 10,065,365 - Lane September 4, 2 | 2018-09-04 |
Method and apparatus for controlling plasma near the edge of a substrate
Grant 10,017,857 - Nguyen , et al. July 10, 2 | 2018-07-10 |
Overlay
Grant D812,063 - Lane , et al. March 6, 2 | 2018-03-06 |
Diamond Like Carbon Layer Formed By An Electron Beam Plasma Process
App 20170372899 - YANG; Yang ; et al. | 2017-12-28 |
Adjustable docking stand
Grant 9,829,918 - Suckle , et al. November 28, 2 | 2017-11-28 |
Particle Removal Device And Method Of Using The Same
App 20170326813 - Lane; Steven | 2017-11-16 |
Electron beam plasma source with reduced metal contamination
Grant 9,721,760 - Dorf , et al. August 1, 2 | 2017-08-01 |
Method And Apparatus For Controlling A Magnetic Field In A Plasma Chamber
App 20170162365 - LANE; STEVEN ; et al. | 2017-06-08 |
System and method for selective coil excitation in inductively coupled plasma processing reactors
Grant 9,659,751 - Ramaswamy , et al. May 23, 2 | 2017-05-23 |
Method and apparatus for controlling a magnetic field in a plasma chamber
Grant 9,613,783 - Lane , et al. April 4, 2 | 2017-04-04 |
Plasma Reactor For Processing A Workpiece With An Array Of Plasma Point Sources
App 20170092470 - Ramaswamy; Kartik ; et al. | 2017-03-30 |
Overlay
Grant D781,861 - Lane , et al. March 21, 2 | 2017-03-21 |
Electron beam plasma source with remote radical source
Grant 9,564,297 - Wu , et al. February 7, 2 | 2017-02-07 |
Adjustable Docking Stand
App 20170017270 - Suckle; Mitchell ; et al. | 2017-01-19 |
Multiple Electrode Substrate Support Assembly And Phase Control System
App 20160372307 - YANG; YANG ; et al. | 2016-12-22 |
Method And Apparatus For Controlling Plasma Near The Edge Of A Substrate
App 20160322242 - NGUYEN; Andrew ; et al. | 2016-11-03 |
Method of multiple zone symmetric gas injection for inductively coupled plasma
Grant 9,472,379 - Lane , et al. October 18, 2 | 2016-10-18 |
Particle Removal Device and Method of Using the Same
App 20160288458 - Lane; Steven | 2016-10-06 |
Adjustable docking stand and method of providing and using the same
Grant 9,454,183 - Suckle , et al. September 27, 2 | 2016-09-27 |
Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna
Grant 9,449,794 - Nguyen , et al. September 20, 2 | 2016-09-20 |
Electron beam plasma source with segmented suppression electrode for uniform plasma generation
Grant 9,443,700 - Dorf , et al. September 13, 2 | 2016-09-13 |
Plasma Processing Reactor With A Magnetic Electron-blocking Filter External Of The Chamber And Uniform Field Within The Chamber
App 20160225466 - Ramaswamy; Kartik ; et al. | 2016-08-04 |
Magnet Configurations For Radial Uniformity Tuning Of Icp Plasmas
App 20160225590 - Aubuchon; Joseph F. ; et al. | 2016-08-04 |
Overlay
Grant D751,557 - Lane March 15, 2 | 2016-03-15 |
Method Of Real Time In-situ Chamber Condition Monitoring Using Sensors And Rf Communication
App 20160048111 - Wong; Lawrence ; et al. | 2016-02-18 |
Anti-IL-18 antibodies and their uses
Grant 9,255,144 - Dobson , et al. February 9, 2 | 2016-02-09 |
Method And Apparatus For Controlling A Magnetic Field In A Plasma Chamber
App 20160027613 - LANE; STEVEN ; et al. | 2016-01-28 |
System And Method For Selective Coil Excitation In Inductively Coupled Plasma Processing Reactors
App 20160027616 - RAMASWAMY; KARTIK ; et al. | 2016-01-28 |
Method Of Multiple Zone Symmetric Gas Injection For Inductively Coupled Plasma
App 20150371824 - LANE; Steven ; et al. | 2015-12-24 |
Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator
Grant 9,111,722 - Dorf , et al. August 18, 2 | 2015-08-18 |
Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator
Grant 9,082,591 - Dorf , et al. July 14, 2 | 2015-07-14 |
Overlay Applicator, Applicator Machine, And Cradle, And Method Of Providing And Using The Same
App 20150107767 - Wadsworth; John F. ; et al. | 2015-04-23 |
Spatially Discrete Multi-loop Rf-driven Plasma Source Having Plural Independent Zones
App 20150075716 - Ramaswamy; Kartik ; et al. | 2015-03-19 |
Inductively Coupled Spatially Discrete Multi-loop Rf-driven Plasma Source
App 20150075717 - Ramaswamy; Kartik ; et al. | 2015-03-19 |
Overlay Applicator, Applicator Machine, And Cradle, And Method Of Providing And Using The Same
App 20150047773 - Wadsworth; John F. ; et al. | 2015-02-19 |
Overlay Applicator, Applicator Machine, And Cradle, And Method Of Providing And Using The Same
App 20150041069 - Wadsworth; John F. ; et al. | 2015-02-12 |
Adjustable Docking Stand And Method Of Providing And Using The Same
App 20150036283 - Suckle; Mitchell ; et al. | 2015-02-05 |
Electron Beam Plasma Source With Reduced Metal Contamination
App 20140338835 - Dorf; Leonid ; et al. | 2014-11-20 |
Electron Beam Plasma Source With Remote Radical Source
App 20140339980 - Wu; Ming-Feng ; et al. | 2014-11-20 |
Electron Beam Plasma Source With Segmented Suppression Electrode For Uniform Plasma Generation
App 20140265855 - Dorf; Leonid ; et al. | 2014-09-18 |
Symmetrical Inductively Coupled Plasma Source With Side Rf Feeds And Spiral Coil Antenna
App 20140232263 - Nguyen; Andrew ; et al. | 2014-08-21 |
Radial Transmission Line Based Plasma Source
App 20140202634 - Ramaswamy; Kartik ; et al. | 2014-07-24 |
Inductively Coupled Plasma Source
App 20140196849 - NGUYEN; ANDREW ; et al. | 2014-07-17 |
Method of differential counter electrode tuning in an RF plasma reactor
Grant 8,734,664 - Yang , et al. May 27, 2 | 2014-05-27 |
Electrical Accessory and Method of Providing Same
App 20140084126 - Duncan Seil; Oliver ; et al. | 2014-03-27 |
Differential Counter Electrode Tuning In A Plasma Reactor With An Rf-driven Ceiling Electrode
App 20140069584 - Yang; Yang ; et al. | 2014-03-13 |
Differential Counter Electrode Tuning In A Plasma Reactor With An Rf-driven Workpiece Support Electrode
App 20140034239 - Yang; Yang ; et al. | 2014-02-06 |
Method Of Differential Counter Electrode Tuning In An Rf Plasma Reactor
App 20140034612 - Yang; Yang ; et al. | 2014-02-06 |
Anti-il-18 Antibodies And Their Uses
App 20140004128 - Dobson; Claire ; et al. | 2014-01-02 |
Capacitively Coupled Plasma Source With Rf Coupled Grounded Electrode
App 20130292057 - Ramaswamy; Kartik ; et al. | 2013-11-07 |
Three-coil Inductively Coupled Plasma Source With Individually Controlled Coil Currents From A Single Rf Power Generator
App 20130278142 - Dorf; Leonid ; et al. | 2013-10-24 |
Three-coil Inductively Coupled Plasma Source With Individually Controlled Coil Currents From A Single Rf Power Generator
App 20130278141 - Dorf; Leonid ; et al. | 2013-10-24 |
Method of heat treating a steel bearing component
Grant 8,562,767 - Strandell , et al. October 22, 2 | 2013-10-22 |
Case Configured To Removably Couple To A Portable Electrical Device And Method Of Providing And Use Thereof
App 20130140312 - Lane; Steven ; et al. | 2013-06-06 |
Electrical Accessory and Method of Providing Same
App 20130112838 - Duncan Seil; Oliver ; et al. | 2013-05-09 |
Enclosure for network interface controller
Grant D672,351 - Camacho , et al. December 11, 2 | 2012-12-11 |
Case Configured to Removably Couple to a Portable Electrical Device and Method of Providing and Use Thereof
App 20110267748 - Lane; Steven ; et al. | 2011-11-03 |
Electrical Accessory and Method of Providing Same
App 20110255226 - Duncan Seil; Oliver ; et al. | 2011-10-20 |
Cable management device and method of cable management
Grant 8,014,170 - Mori , et al. September 6, 2 | 2011-09-06 |
Heat-Treatment Process for a Steel
App 20110073222 - Strandell; Ingemar ; et al. | 2011-03-31 |
Rolling Element or Ring Formed From a Bearing Steel
App 20100296764 - Strandell; Ingemar ; et al. | 2010-11-25 |
Folded Coaxial Resonators
App 20090257927 - RAMASWAMY; KARTIK ; et al. | 2009-10-15 |
Matching network characterization using variable impedance analysis
Grant 7,554,334 - Shannon , et al. June 30, 2 | 2009-06-30 |
Audio Receiving Device And Method Of Forming Same
App 20090154722 - De Jong; Chad ; et al. | 2009-06-18 |
Cable management device
Grant D593,034 - Mori , et al. May 26, 2 | 2009-05-26 |
Stackable hub with cable management feature
Grant D576,166 - Mori , et al. September 2, 2 | 2008-09-02 |
Matching Network Characterization Using Variable Impedance Analysis
App 20080087381 - SHANNON; STEVEN C. ; et al. | 2008-04-17 |
Cable management device and method of cable management
App 20070039755 - Mori; Kenneth ; et al. | 2007-02-22 |
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