Patent | Date |
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System Having A Micromechanical Clocking System Component App 20210364294 - Lammel; Gerhard ;   et al. | 2021-11-25 |
Method for operating an event counter Grant 10,612,938 - Strohrmann , et al. | 2020-04-07 |
Combined pressure and humidity sensor Grant 10,184,910 - Lammel , et al. Ja | 2019-01-22 |
Control device and method for operating a control device Grant 10,048,066 - Lammel , et al. August 14, 2 | 2018-08-14 |
Method For Operating An Event Counter App 20170146363 - Strohrmann; Anna Christina ;   et al. | 2017-05-25 |
Sensor time synchronization Grant 9,383,234 - Lammel , et al. July 5, 2 | 2016-07-05 |
Magnetic field sensor Grant 9,354,281 - Lammel , et al. May 31, 2 | 2016-05-31 |
Apparatus and method for measuring magnetic fields Grant 9,316,703 - Schatz , et al. April 19, 2 | 2016-04-19 |
Determination of positions Grant 9,285,408 - Lammel , et al. March 15, 2 | 2016-03-15 |
Sensor time Grant 9,214,952 - Claus , et al. December 15, 2 | 2015-12-15 |
Pedometer having automatic step length adjustment, method for operating a pedometer and application of said pedometer Grant 9,200,923 - Lammel , et al. December 1, 2 | 2015-12-01 |
Sensor Time App 20150123827 - Claus; Thomas ;   et al. | 2015-05-07 |
Control Device and Method for Operating a Control Device App 20150084435 - Lammel; Gerhard ;   et al. | 2015-03-26 |
Sensor Time Synchronization App 20150077217 - Lammel; Gerhard ;   et al. | 2015-03-19 |
Combined Pressure And Humidity Sensor App 20140116122 - Lammel; Gerhard ;   et al. | 2014-05-01 |
Apparatus And Method For Measuring Magnetic Fields App 20140077796 - Schatz; Frank ;   et al. | 2014-03-20 |
Determination Of Positions App 20130314104 - Lammel; Gerhard ;   et al. | 2013-11-28 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type Grant 8,492,850 - Lammel , et al. July 23, 2 | 2013-07-23 |
Micromechanical capacitive pressure transducer and production method Grant 8,492,855 - Lammel , et al. July 23, 2 | 2013-07-23 |
Method and device for identifying the free fall Grant 8,245,573 - Lammel August 21, 2 | 2012-08-21 |
Pedometer Having Automatic Step Length Adjustment, Method For Operating A Pedometer And Application Of Said Pedometer App 20120191410 - Lammel; Gerhard ;   et al. | 2012-07-26 |
Magnetic Field Sensor App 20120182010 - Lammel; Gerhard ;   et al. | 2012-07-19 |
Method For Manufacturing A Semiconductor Structure, And A Corresponding Semiconductor Structure App 20120132925 - Lammel; Gerhard ;   et al. | 2012-05-31 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure Grant 8,148,234 - Lammel , et al. April 3, 2 | 2012-04-03 |
Micromechanical semiconductor sensor Grant 7,843,025 - Benzel , et al. November 30, 2 | 2010-11-30 |
Semiconductor component configured as a diaphragm sensor Grant 7,755,152 - Benzel , et al. July 13, 2 | 2010-07-13 |
Method and Device for Identifying the Free Fall App 20100046115 - Lammel; Gerhard | 2010-02-25 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type App 20100035068 - Lammel; Gerhard ;   et al. | 2010-02-11 |
Micromechanical device and method for producing a micromechanical device Grant 7,647,832 - Muchow , et al. January 19, 2 | 2010-01-19 |
Method For Manufacturing A Semiconductor Component, As Well As A Semiconductor Component, In A Particular A Diaphragm Sensor App 20090256219 - BENZEL; Hubert ;   et al. | 2009-10-15 |
Method for Manufacturing a Semiconductor Structure, and a Corresponding Semiconductor Structure App 20090236610 - Lammel; Gerhard ;   et al. | 2009-09-24 |
Method for manufacturing a micromechanical sensor element Grant 7,572,661 - Benzel , et al. August 11, 2 | 2009-08-11 |
Method for manufacturing a diaphragm sensor Grant 7,569,412 - Benzel , et al. August 4, 2 | 2009-08-04 |
Method For Manufacturing A Semiconductor Component, As Well As A Semiconductor Component, In Particular A Membrane Sensor App 20090127640 - Benzel; Hubert ;   et al. | 2009-05-21 |
Micromechanical Capacitive Pressure Transducer and Production Method App 20090101997 - Lammel; Gerhard ;   et al. | 2009-04-23 |
Method for manufacturing a membrane sensor Grant 7,494,839 - Benzel , et al. February 24, 2 | 2009-02-24 |
Micromechanical component and method Grant 7,404,332 - Lammel , et al. July 29, 2 | 2008-07-29 |
Method of making a differential pressure sensor Grant 7,368,313 - Benzel , et al. May 6, 2 | 2008-05-06 |
Sensor element with trenched cavity Grant 7,354,786 - Benzel , et al. April 8, 2 | 2008-04-08 |
Micromechanical device and method for producing a micromechanical device App 20070126069 - Muchow; Joerg ;   et al. | 2007-06-07 |
Micromechanical component and method App 20060137460 - Lammel; Gerhard ;   et al. | 2006-06-29 |
Micromechanical sensor element App 20060063293 - Benzel; Hubert ;   et al. | 2006-03-23 |
Sensor element with trenched cavity App 20060057816 - Benzel; Hubert ;   et al. | 2006-03-16 |
Method and micromechanical component App 20060037932 - Lammel; Gerhard ;   et al. | 2006-02-23 |
Differential pressure sensor App 20050199973 - Benzel, Hubert ;   et al. | 2005-09-15 |
Method for manufacturing a semiconductor component, as well as a semiconductor component, in particular a membrane sensor App 20050181529 - Benzel, Hubert ;   et al. | 2005-08-18 |
Method for manufacturing a semicondutor component, as well as a semicondutor component, in particular a diaphragm sensor App 20050142687 - Benzel, Hubert ;   et al. | 2005-06-30 |