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Patent applications and USPTO patent grants for LaFlamme; Arthur H. JR..The latest application filed is for "apparatus and method for controlling process non-uniformity".
Patent | Date |
---|---|
Apparatus And Method For Controlling Process Non-uniformity App 20060096951 - Natzle; Wesley C. ;   et al. | 2006-05-11 |
Chemical processing system and method App 20060090850 - Laflamme; Arthur H. JR. ;   et al. | 2006-05-04 |
Processing system and method for treating a substrate App 20050269030 - Kent, Martin ;   et al. | 2005-12-08 |
Processing system and method for chemically treating a substrate App 20050211386 - Hamelin, Thomas ;   et al. | 2005-09-29 |
Method and apparatus for improved baffle plate App 20050098265 - Fink, Steven T. ;   et al. | 2005-05-12 |
Reduced maintenance chemical oxide removal (COR) processing system App 20040182315 - Laflamme, Arthur H. JR. ;   et al. | 2004-09-23 |
Electronic device processing equipment having contact gasket between chamber parts App 20020093148 - Golovato, Stephen N. ;   et al. | 2002-07-18 |
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