loadpatents
Patent applications and USPTO patent grants for Kumekawa; Masayuki.The latest application filed is for "substrate polishing apparatus and method".
Patent | Date |
---|---|
Method for regenerating ion exchanger Grant 8,133,380 - Saito , et al. March 13, 2 | 2012-03-13 |
Substrate Polishing Apparatus And Method App 20110237163 - Katsuoka; Seiji ;   et al. | 2011-09-29 |
Substrate polishing apparatus and method Grant 7,976,362 - Katsuoka , et al. July 12, 2 | 2011-07-12 |
Electrolytic processing apparatus and method Grant 7,655,118 - Shirakashi , et al. February 2, 2 | 2010-02-02 |
Electrolytic processing apparatus and electrolytic processing method Grant 7,638,030 - Nabeya , et al. December 29, 2 | 2009-12-29 |
Substrate Polishing Apparatus And Method App 20090291624 - KATSUOKA; Seiji ;   et al. | 2009-11-26 |
Substrate polishing apparatus and method Grant 7,585,205 - Katsuoka , et al. September 8, 2 | 2009-09-08 |
Electrolytic processing apparatus and substrate processing apparatus and method Grant 7,569,135 - Shirakashi , et al. August 4, 2 | 2009-08-04 |
Method and device for regenerating ion exchanger, and electrolytic processing apparatus App 20080314763 - Saito; Takayuki ;   et al. | 2008-12-25 |
Method and device for regenerating ion exchanger, and electrolytic processing apparatus Grant 7,427,345 - Saito , et al. September 23, 2 | 2008-09-23 |
Substrate polishing apparatus and method App 20080085658 - Katsuoka; Seiji ;   et al. | 2008-04-10 |
Substrate processing apparatus and method App 20070187259 - Kobata; Itsuki ;   et al. | 2007-08-16 |
Electrolytic processing apparatus and substrate processing apparatus and method App 20070181432 - Shirakashi; Mitsuhiko ;   et al. | 2007-08-09 |
Substrate processing apparatus and method Grant 7,208,076 - Kobata , et al. April 24, 2 | 2007-04-24 |
Electrolytic processing method App 20070034525 - Kumekawa; Masayuki ;   et al. | 2007-02-15 |
Electrolytic processing apparatus App 20070034502 - Kumekawa; Masayuki ;   et al. | 2007-02-15 |
Plating apparatus and method Grant 7,166,204 - Sendai , et al. January 23, 2 | 2007-01-23 |
Substrate processing apparatus and substrate processing method App 20060234508 - Shirakashi; Mitsuhiko ;   et al. | 2006-10-19 |
Electrolytic processing device and substrate processing apparatus Grant 7,101,465 - Kobata , et al. September 5, 2 | 2006-09-05 |
Substrate processing apparatus Grant 7,083,706 - Kumekawa August 1, 2 | 2006-08-01 |
Electrochemical machining device and electrochemical machining method App 20060144711 - Kobata; Itsuki ;   et al. | 2006-07-06 |
Chemical mechanical polishing endpoint detection system and method Grant 6,913,514 - Kimura , et al. July 5, 2 | 2005-07-05 |
Electrolytic processing apparatus and method App 20050121328 - Shirakashi, Mitsuhiko ;   et al. | 2005-06-09 |
Electrolytic processing apparatus and method App 20050115838 - Mori, Yuzo ;   et al. | 2005-06-02 |
Electrolytic processing apparatus and method App 20050051432 - Shirakashi, Mitsuhiko ;   et al. | 2005-03-10 |
Electrolytic processing apparatus and method App 20040256237 - Kobata, Itsuki ;   et al. | 2004-12-23 |
Substrate processing appartus and method App 20040231989 - Kobata, Itsuki ;   et al. | 2004-11-25 |
Electrolytic processing apparatus and substrate processing apparatus and method App 20040206634 - Shirakashi, Mitsuhiko ;   et al. | 2004-10-21 |
Chemical mechanical polishing endpoint detection system and method App 20040192169 - Kimura, Norio ;   et al. | 2004-09-30 |
Electrolytic processing apparatus and electrolytic processing method App 20040129569 - Nabeya, Osamu ;   et al. | 2004-07-08 |
Method and device for regenerating ion exchanger, and electrolytic processing apparatus App 20040112761 - Saito, Takayuki ;   et al. | 2004-06-17 |
Electrolytic processing device and substrate processing apparatus App 20030136668 - Kobata, Itsuki ;   et al. | 2003-07-24 |
Electrolytic processing device and substrate processing apparatus App 20030132103 - Kobata, Itsuki ;   et al. | 2003-07-17 |
Substrate processing apparatus App 20030089608 - Kumekawa, Masayuki | 2003-05-15 |
Method and apparatus for plating substrate and plating facility Grant 6,558,518 - Sendai , et al. May 6, 2 | 2003-05-06 |
Plating apparatus and method App 20030057098 - Sendai, Satoshi ;   et al. | 2003-03-27 |
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