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Method For Growing Beta-ga2o3-based Single Crystal Film, And Crystalline Layered Structure App 20210404086 - GOTO; Ken ;   et al. | 2021-12-30 |
Crystal laminate structure Grant 11,047,067 - Goto , et al. June 29, 2 | 2021-06-29 |
Semiconductor substrate, and epitaxial wafer and method for producing same Grant 10,985,016 - Goto , et al. April 20, 2 | 2021-04-20 |
Semiconductor element and crystalline laminate structure Grant 10,861,945 - Sasaki , et al. December 8, 2 | 2020-12-08 |
Group III nitride laminate and vertical semiconductor device having the laminate Grant 10,731,274 - Kumagai , et al. | 2020-08-04 |
Semiconductor Substrate, And Epitaxial Wafer And Method For Producing Same App 20200243332 - GOTO; Ken ;   et al. | 2020-07-30 |
Semiconductor substrate, epitaxial wafer, and method for manufacturing epitaxial wafer Grant 10,676,841 - Goto , et al. | 2020-06-09 |
Crystal Laminate Structure App 20200102667 - GOTO; Ken ;   et al. | 2020-04-02 |
Crystal laminate structure Grant 10,538,862 - Goto , et al. Ja | 2020-01-21 |
Group Iii Nitride Laminate And Vertical Semiconductor Device Having The Laminate App 20190323146 - KUMAGAI; Yoshinao ;   et al. | 2019-10-24 |
High voltage withstand Ga2O3-based single crystal schottky barrier diode Grant 10,199,512 - Sasaki , et al. Fe | 2019-02-05 |
Nitride semiconductor crystal, manufacturing method and manufacturing equipment Grant 10,125,433 - Koukitu , et al. November 13, 2 | 2018-11-13 |
Indium Gallium Nitride Light Emitting Devices App 20180269351 - Krames; Michael R. ;   et al. | 2018-09-20 |
High Withstand Voltage Schottky Barrier Diode App 20180254355 - SASAKI; Kohei ;   et al. | 2018-09-06 |
Indium gallium nitride light emitting devices Grant 9,978,904 - Krames , et al. May 22, 2 | 2018-05-22 |
Crystal Laminate Structure App 20180073164 - GOTO; Ken ;   et al. | 2018-03-15 |
Highly transparent aluminum nitride single crystalline layers and devices made therefrom Grant 9,840,790 - Koukitu , et al. December 12, 2 | 2017-12-12 |
Semiconductor Element And Crystalline Laminate Structure App 20170278933 - SASAKI; Kohei ;   et al. | 2017-09-28 |
Method for manufacturing aluminum-based group III nitride single crystal by hydride vapor phase epitaxy Grant 9,708,733 - Koukitsu , et al. July 18, 2 | 2017-07-18 |
Single-cystalline aluminum nitride substrate and a manufacturing method thereof Grant 9,691,942 - Koukitu , et al. June 27, 2 | 2017-06-27 |
Semiconductor Substrate, Epitaxial Wafer, And Method For Manufacturing Epitaxial Wafer App 20170145590 - GOTO; Ken ;   et al. | 2017-05-25 |
ZnO film production system and production method using ZnO film production system having heating units and control device Grant 9,611,545 - Kang , et al. April 4, 2 | 2017-04-04 |
METHOD FOR GROWING BETA-Ga2O3-BASED SINGLE CRYSTAL FILM, AND CRYSTALLINE LAYERED STRUCTURE App 20160265137 - GOTO; Ken ;   et al. | 2016-09-15 |
Nitride Semiconductor Crystal, Manufacturing Method And Manufacturing Equipment App 20160186361 - KOUKITU; Akinori ;   et al. | 2016-06-30 |
Method For Manufacturing Aluminum-based Group Iii Nitride Single Crystal App 20160108554 - KOUKITSU; Akinori ;   et al. | 2016-04-21 |
Method for producing gallium trichloride gas and method for producing nitride semiconductor crystal Grant 9,281,180 - Koukitu , et al. March 8, 2 | 2016-03-08 |
Highly Transparent Aluminum Nitride Single Crystalline Layers And Devices Made Therefrom App 20150247260 - Koukitu; Akinori ;   et al. | 2015-09-03 |
ZnO FILM PRODUCTION DEVICE, AND PRODUCTION METHOD App 20150225846 - Kang; Song yun ;   et al. | 2015-08-13 |
Method of producing a group III nitride crystal Grant 8,926,752 - Koukitu , et al. January 6, 2 | 2015-01-06 |
Single-Crystalline Aluminum Nitride Substrate and a Manufacturing Method Thereof App 20140346638 - Koukitu; Akinori ;   et al. | 2014-11-27 |
Epitaxial growth method of a zinc oxide based semiconductor layer, epitaxial crystal structure, epitaxial crystal growth apparatus, and semiconductor device Grant 8,822,263 - Koukitu , et al. September 2, 2 | 2014-09-02 |
Indium Gallium Nitride Light Emitting Devices App 20140103356 - KRAMES; Michael R. ;   et al. | 2014-04-17 |
Method For Producing Gallium Trichloride Gas And Method For Producing Nitride Semiconductor Crystal App 20130130477 - Koukuti; Akinori ;   et al. | 2013-05-23 |
n-Type conductive aluminum nitride semiconductor crystal and manufacturing method thereof Grant 8,129,208 - Koukitu , et al. March 6, 2 | 2012-03-06 |
Laminated Body And The Method For Production Thereof App 20110094438 - Koukitu; Akinori ;   et al. | 2011-04-28 |
Gallium nitride substrate and gallium nitride layer formation method Grant 7,915,149 - Nakahata , et al. March 29, 2 | 2011-03-29 |
METHOD FOR PRODUCING A LAMINATED BODY HAVING Al-BASED GROUP-III NITRIDE SINGLE CRYSTAL LAYER, LAMINATED BODY PRODUCED BY THE METHOD, METHOD FOR PRODUCING Al-BASED GROUP-III NITRIDE SINGLE CRYSTAL SUBSTRATE EMPLOYING THE LAMINATED BODY, AND ALUMINUM NITRIDE SINGLE CRYSTAL SUBSTRATE App 20110018104 - Nagashima; Toru ;   et al. | 2011-01-27 |
N-type Conductive Aluminum Nitride Semiconductor Crystal And Manufacturing Method Thereof App 20100320462 - Koukitu; Akinori ;   et al. | 2010-12-23 |
Gallium nitride baseplate and epitaxial substrate Grant 7,843,040 - Koukitu , et al. November 30, 2 | 2010-11-30 |
Method Of Producing A Group Iii Nitride Crystal App 20100093124 - Koukitu; Akinori ;   et al. | 2010-04-15 |
Epitaxial Growth Method, Epitaxial Crystal Structure, Epitaxial Crystal Growth Apparatus, And Semiconductor Device App 20100006836 - Koukitu; Akinori ;   et al. | 2010-01-14 |
Vapor phase growth method for A1-containing III-V group compound semiconductor, and method and device for producing A1-containing III-V group compound semiconductor Grant 7,645,340 - Koukitu , et al. January 12, 2 | 2010-01-12 |
Method and apparatus for AlGan vapor phase growth Grant 7,621,999 - Koukitu , et al. November 24, 2 | 2009-11-24 |
Gallium nitride baseplate, epitaxial substrate, and method of forming gallium nitride Grant 7,518,216 - Koukitu , et al. April 14, 2 | 2009-04-14 |
Gallium Nitride Baseplate and Epitaxial Substrate App 20090079036 - Koukitu; Akinori ;   et al. | 2009-03-26 |
Gallium Nitride Substrate And Gallium Nitride Layer Formation Method App 20080308814 - NAKAHATA; Seiji ;   et al. | 2008-12-18 |
Method And Apparatus For Algan Vapor Phase Growth App 20080063584 - Koukitu; Akinori ;   et al. | 2008-03-13 |
Gallium Nitride Baseplate, Epitaxial Substrate, and Method of Forming Gallium Nitride App 20070215982 - Koukitu; Akinori ;   et al. | 2007-09-20 |
Vapor phase growth method for al-containing III-V group compound semiconductor, and method and device for producing al-containing IIl-V group compound semiconductor App 20050166835 - Koukitsu, Akinori ;   et al. | 2005-08-04 |