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Lithographic apparatus and device manufacturing method Grant 11,003,096 - Sengers , et al. May 11, 2 | 2021-05-11 |
Lithographic apparatus and device manufacturing method Grant 10,678,139 - Lof , et al. | 2020-06-09 |
Lithographic Apparatus And Device Manufacturing Method App 20200124990 - SENGERS; Timotheus Franciscus ;   et al. | 2020-04-23 |
Lithographic apparatus and device manufacturing method Grant 10,514,618 - Sengers , et al. Dec | 2019-12-24 |
Lithographic Apparatus And Device Manufacturing Method App 20190250518 - LOF; Joeri ;   et al. | 2019-08-15 |
Lithographic apparatus and device manufacturing method Grant 10,180,629 - Lof , et al. Ja | 2019-01-15 |
Lithographic Apparatus And Device Manufacturing Method App 20180314169 - SENGERS; Timotheus Franciscus ;   et al. | 2018-11-01 |
Lithographic apparatus and device manufacturing method Grant 10,025,204 - Sengers , et al. July 17, 2 | 2018-07-17 |
Lithographic Apparatus And Device Manufacturing Method App 20170153556 - SENGERS; Timotheus Franciscus ;   et al. | 2017-06-01 |
Lithographic Apparatus And Device Manufacturing Method App 20170102621 - LOF; Joeri ;   et al. | 2017-04-13 |
Lithographic apparatus and device manufacturing method Grant 9,568,841 - Sengers , et al. February 14, 2 | 2017-02-14 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid Grant 9,541,843 - Lof , et al. January 10, 2 | 2017-01-10 |
Lithographic Apparatus And Device Manufacturing Method App 20160209761 - SENGERS; Timotheus Franciscus ;   et al. | 2016-07-21 |
Lithographic apparatus and device manufacturing method Grant 9,316,919 - Sengers , et al. April 19, 2 | 2016-04-19 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening Grant 9,152,058 - Lof , et al. October 6, 2 | 2015-10-06 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap Grant 9,081,299 - Lof , et al. July 14, 2 | 2015-07-14 |
Lithographic Apparatus And Device Manufacturing Method App 20150116683 - SENGERS; Timotheus Franciscus ;   et al. | 2015-04-30 |
Lithographic apparatus and device manufacturing method Grant 8,947,637 - Sengers , et al. February 3, 2 | 2015-02-03 |
Lithographic apparatus and device manufacturing method Grant 8,482,845 - Lof , et al. July 9, 2 | 2013-07-09 |
Lithographic Apparatus And Device Manufacturing Method App 20120274911 - LOF; Joeri ;   et al. | 2012-11-01 |
Lithographic apparatus and device manufacturing method Grant 8,154,708 - Lof , et al. April 10, 2 | 2012-04-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110317143 - SENGERS; Timotheus Franciscus ;   et al. | 2011-12-29 |
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method Grant 8,077,287 - Dams , et al. December 13, 2 | 2011-12-13 |
Lithographic Apparatus And Device Manufacturing Method App 20110285977 - LOF; Joeri ;   et al. | 2011-11-24 |
Lithographic Apparatus And Device Manufacturing Method App 20110279800 - Lof; Joeri ;   et al. | 2011-11-17 |
Lithographic apparatus and device manufacturing method Grant 8,035,798 - Sengers , et al. October 11, 2 | 2011-10-11 |
Lithographic apparatus and device manufacturing method Grant 7,907,255 - Sengers , et al. March 15, 2 | 2011-03-15 |
Lithographic Apparatus And Device Manufacturing Method App 20110007285 - Lof; Joeri ;   et al. | 2011-01-13 |
Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus Grant 7,599,811 - Van Hout , et al. October 6, 2 | 2009-10-06 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,459,690 - Van Der Werf , et al. December 2, 2 | 2008-12-02 |
Lithographic apparatus and device manufacturing method Grant 7,315,346 - Van Beek , et al. January 1, 2 | 2008-01-01 |
Sensor for Lithographic Apparatus and Method of Obtaining Measurements of Lithographic Apparatus App 20070273869 - Van Hout; Frits Jurgen ;   et al. | 2007-11-29 |
Radiation system, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,274,432 - Kroon September 25, 2 | 2007-09-25 |
Lithographic apparatus and device manufacturing method App 20070132979 - Lof; Joeri ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method App 20070132971 - Sengers; Timotheus Franciscus ;   et al. | 2007-06-14 |
Lithographic apparatus and device manufacturing method Grant 7,230,674 - Kroon , et al. June 12, 2 | 2007-06-12 |
Lithographic apparatus and device manufacturing method Grant 7,213,963 - Lof , et al. May 8, 2 | 2007-05-08 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,145,641 - Kroon , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,142,287 - Kroon , et al. November 28, 2 | 2006-11-28 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060219931 - Van Der Werf; Jan E. ;   et al. | 2006-10-05 |
Lithographic apparatus and device manufacturing method App 20060215132 - Kroon; Mark ;   et al. | 2006-09-28 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060176463 - Kroon; Mark ;   et al. | 2006-08-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,075,620 - Van Der Werf , et al. July 11, 2 | 2006-07-11 |
Radiation system, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060091327 - Kroon; Mark | 2006-05-04 |
Lithographic apparatus and device manufacturing method App 20050264778 - Lof, Joeri ;   et al. | 2005-12-01 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050140956 - Kroon, Mark ;   et al. | 2005-06-30 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,888,151 - Kroon , et al. May 3, 2 | 2005-05-03 |
Lithographic apparatus and device manufacturing method App 20050078287 - Sengers, Timotheus Franciscus ;   et al. | 2005-04-14 |
Method of preparing components, prepared component, lithographic apparatus and device manufacturing method App 20050008978 - Dams, Johannes Adrianus Antonius Theodorus ;   et al. | 2005-01-13 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040211922 - Kroon, Mark ;   et al. | 2004-10-28 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040190677 - Van Der Werf, Jan E. ;   et al. | 2004-09-30 |
Lithographic apparatus and device manufacturing method App 20040165160 - Van Beek, Michael Cornelis ;   et al. | 2004-08-26 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,747,282 - Kroon , et al. June 8, 2 | 2004-06-08 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,721,389 - Van Der Werf , et al. April 13, 2 | 2004-04-13 |
Method of forming a pattern of sub-micron broad features App 20030150737 - Van Delft, Falco Cornelius Marinus Jacobus Maria ;   et al. | 2003-08-14 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20030001107 - Kroon, Mark ;   et al. | 2003-01-02 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020037461 - Van Der Werf, Jan E. ;   et al. | 2002-03-28 |