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Electromechanical system having a controlled atmosphere, and method of fabricating same
Grant 9,771,257 - Partridge , et al. September 26, 2 | 2017-09-26 |
Semiconductor Device and Production Method for a Semiconductor Device
App 20140084408 - Bischopink; Georg ; et al. | 2014-03-27 |
Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same
Grant 8,623,686 - Partridge , et al. January 7, 2 | 2014-01-07 |
Microelectromechanical Device Including An Encapsulation Layer Of Which A Portion Is Removed To Expose A Substantially Planar Surface Having A Portion That Is Disposed Outside And Above A Chamber And Including A Field Region On Which Integrated Circuits Are Formed, And Methods For Fabricating Same
App 20130280842 - PARTRIDGE; Aaron ; et al. | 2013-10-24 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
Grant 8,492,850 - Lammel , et al. July 23, 2 | 2013-07-23 |
Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same
Grant 8,421,167 - Partridge , et al. April 16, 2 | 2013-04-16 |
Method For Producing A Capping Wafer For A Sensor
App 20130061674 - REICHENBACH; Frank ; et al. | 2013-03-14 |
Method for producing a capping wafer for a sensor
Grant 8,329,555 - Reichenbach , et al. December 11, 2 | 2012-12-11 |
Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics
Grant 8,287,956 - Partridge , et al. October 16, 2 | 2012-10-16 |
Method For Manufacturing A Semiconductor Structure, And A Corresponding Semiconductor Structure
App 20120132925 - Lammel; Gerhard ; et al. | 2012-05-31 |
Method for etching a layer on a substrate
Grant 8,182,707 - Laermer , et al. May 22, 2 | 2012-05-22 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure
Grant 8,148,234 - Lammel , et al. April 3, 2 | 2012-04-03 |
Electromechanical System Having A Controlled Atmosphere, And Method Of Fabricating Same
App 20110298065 - Partridge; Aaron ; et al. | 2011-12-08 |
Microelectromechanical Device Including An Encapsulation Layer Of Which A Portion Is Removed To Expose A Substantially Planar Surface Having A Portion That Is Disposed Outside And Above A Chamber And Including A Field Region On Which Integrated Circuits Are Formed, And Methods For Fabricating Same
App 20110221013 - Partridge; Aaron ; et al. | 2011-09-15 |
Electromechanical system having a controlled atmosphere, and method of fabricating same
Grant 8,018,077 - Partridge , et al. September 13, 2 | 2011-09-13 |
Microelectromechanical systems encapsulation process
Grant 7,898,046 - Ulm , et al. March 1, 2 | 2011-03-01 |
Method for producing a capping wafer for a sensor
App 20110012248 - Reichenbach; Frank ; et al. | 2011-01-20 |
Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same
Grant 7,859,067 - Partridge , et al. December 28, 2 | 2010-12-28 |
Method for producing a micromechanical component having a thin-layer capping
Grant 7,851,248 - Kronmueller , et al. December 14, 2 | 2010-12-14 |
Micromechanical component and corresponding method for its manufacture
Grant 7,834,409 - Reichenbach , et al. November 16, 2 | 2010-11-16 |
Crack And Residue Free Conformal Deposited Silicon Oxide With Predictable And Uniform Etching Characteristics
App 20100159627 - Partridge; Aaron ; et al. | 2010-06-24 |
Micromechanical Component Having An Anti-adhesive Layer
App 20100127339 - Laermer; Franz ; et al. | 2010-05-27 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
App 20100035068 - Lammel; Gerhard ; et al. | 2010-02-11 |
Method For Producing A Micromechanical Component Having A Thin-layer Capping
App 20100003790 - Kronmueller; Silvia ; et al. | 2010-01-07 |
Electromechanical system having a controlled atmosphere, and method of fabricating same
App 20090309175 - Partridge; Aaron ; et al. | 2009-12-17 |
Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics
Grant 7,625,603 - Partridge , et al. December 1, 2 | 2009-12-01 |
Microelectromechanical Systems Encapsulation Process
App 20090278214 - Ulm; Markus ; et al. | 2009-11-12 |
Method for Manufacturing a Semiconductor Structure, and a Corresponding Semiconductor Structure
App 20090236610 - Lammel; Gerhard ; et al. | 2009-09-24 |
Microelectromechanical systems encapsulation process with anti-stiction coating
Grant 7,582,514 - Vancura , et al. September 1, 2 | 2009-09-01 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
Grant 7,579,206 - Lutz , et al. August 25, 2 | 2009-08-25 |
Microelectromechanical systems encapsulation process
Grant 7,563,633 - Ulm , et al. July 21, 2 | 2009-07-21 |
Method of fabricating electromechanical device having a controlled atmosphere
Grant 7,514,283 - Partridge , et al. April 7, 2 | 2009-04-07 |
Micromechanical component and corresponding method for its manufacture
App 20090026561 - Reichenbach; Frank ; et al. | 2009-01-29 |
Method for Etching a Layer on a Substrate
App 20080311751 - Laermer; Franz ; et al. | 2008-12-18 |
Microelectromechanical systems, and methods for encapsualting and fabricating same
App 20080237756 - Partridge; Aaron ; et al. | 2008-10-02 |
Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture
Grant 7,382,031 - Kronmueller , et al. June 3, 2 | 2008-06-03 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
App 20080108165 - Lutz; Markus ; et al. | 2008-05-08 |
Microelectromechanical systems having trench isolated contacts, and methods for fabricating same
Grant 7,352,040 - Partridge , et al. April 1, 2 | 2008-04-01 |
Microelectromechanical systems encapsulation process
App 20080050845 - Ulm; Markus ; et al. | 2008-02-28 |
Microelectromechanical Systems Encapsulation Process with Anti-Stiction Coating
App 20080050861 - Vancura; Cyril ; et al. | 2008-02-28 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
Grant 7,317,233 - Lutz , et al. January 8, 2 | 2008-01-08 |
Microelectromechanical systems, and devices having thin film encapsulated mechanical structures
Grant 7,288,824 - Partridge , et al. October 30, 2 | 2007-10-30 |
Micromechanical component
Grant 7,270,868 - Pannek , et al. September 18, 2 | 2007-09-18 |
Microelectromechanical systems and devices having thin film encapsulated mechanical structures
Grant 7,075,160 - Partridge , et al. July 11, 2 | 2006-07-11 |
Microelectromechanical systems, and methods for encapsulating and fabricating same
App 20060108652 - Partridge; Aaron ; et al. | 2006-05-25 |
Component and method for producing the same
App 20060054972 - Kronmueller; Silvia ; et al. | 2006-03-16 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
App 20050253209 - Lutz, Markus ; et al. | 2005-11-17 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
Grant 6,952,041 - Lutz , et al. October 4, 2 | 2005-10-04 |
Method of fabricating microelectromechanical systems and devices having trench isolated contacts
Grant 6,936,491 - Partridge , et al. August 30, 2 | 2005-08-30 |
Microelectromechanical systems having trench isolated contacts, and methods for fabricating same
App 20050156260 - Partridge, Aaron ; et al. | 2005-07-21 |
Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics
App 20050106318 - Partridge, Aaron ; et al. | 2005-05-19 |
Method for manufacturing a microsystem
App 20050054134 - Frey, Wilhelm ; et al. | 2005-03-10 |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
App 20050019974 - Lutz, Markus ; et al. | 2005-01-27 |
Microelectromechanical systems having trench isolated contacts, and methods for fabricating same
App 20040245586 - Partridge, Aaron ; et al. | 2004-12-09 |
Microelectromechanical systems, and methods for encapsualting and fabricating same
App 20040248344 - Partridge, Aaron ; et al. | 2004-12-09 |
Electromechanical system having a controlled atmosphere, and method of fabricating same
App 20040183214 - Partridge, Aaron ; et al. | 2004-09-23 |
Component and method of manufacturing same
App 20040081802 - Pannek, Thorsten ; et al. | 2004-04-29 |
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