| Patent | Date |
|---|
Method of wiring layout, semiconductor device, program for supporting design of wiring layout, and method for manufacturing semiconductor device
Grant 9,977,855 - Kodama , et al. May 22, 2 | 2018-05-22 |
Method of wiring layout, semiconductor device, program for supporting design of wiring layout, and method for manufacturing semiconductor device
Grant 9,953,126 - Kodama , et al. April 24, 2 | 2018-04-24 |
Semiconductor device having contacts in drawing area and the contacts connected to word lines extending from element formation area
Grant 9,917,049 - Nakajima , et al. March 13, 2 | 2018-03-13 |
Microstructure device and method for manufacturing the same
Grant 9,698,157 - Kono , et al. July 4, 2 | 2017-07-04 |
Pattern data generation method, pattern verification method, and optical image calculation method
Grant 9,576,100 - Miyoshi , et al. February 21, 2 | 2017-02-21 |
Semiconductor Device And Method Of Manufacturing The Same
App 20160343658 - NAKAJIMA; Fumiharu ; et al. | 2016-11-24 |
Microstructure Device And Method For Manufacturing The Same
App 20160268278 - KONO; Yuko ; et al. | 2016-09-15 |
Method of fabricating semiconductor device and semiconductor device
Grant RE46,100 - Aburada , et al. August 9, 2 | 2016-08-09 |
Pattern generating method, pattern forming method, and pattern generating program
Grant 9,268,208 - Aburada , et al. February 23, 2 | 2016-02-23 |
Mask Pattern Correcting Method
App 20160026079 - KIMURA; Taiki ; et al. | 2016-01-28 |
Semiconductor Device And Method Of Manufacturing The Same
App 20160013097 - NAKAJIMA; Fumiharu ; et al. | 2016-01-14 |
Pattern forming method
Grant 9,207,531 - Nakamura , et al. December 8, 2 | 2015-12-08 |
Method of manufacturing semiconductor device using sidewall films for pitch multiplication in forming interconnects
Grant 9,177,854 - Nakajima , et al. November 3, 2 | 2015-11-03 |
Semiconductor Device And Design Apparatus For Semiconductor Device
App 20150263026 - KONO; Yuko ; et al. | 2015-09-17 |
Production method and evaluation apparatus for mask layout
Grant 9,086,634 - Kono , et al. July 21, 2 | 2015-07-21 |
Pattern Data Generation Method, Pattern Verification Method, And Optical Image Calculation Method
App 20150113485 - MIYOSHI; Seiro ; et al. | 2015-04-23 |
Pattern data generation method, pattern verification method, and optical image calculation method
Grant 8,984,454 - Miyoshi , et al. March 17, 2 | 2015-03-17 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device
App 20150021782 - KODAMA; Chikaaki ; et al. | 2015-01-22 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20150008584 - Hashimoto; Takaki ; et al. | 2015-01-08 |
Semiconductor device and manufacturing method of semiconductor device
Grant 8,865,589 - Hashimoto , et al. October 21, 2 | 2014-10-21 |
Production Method And Evaluation Apparatus For Mask Layout
App 20140242498 - Kono; Yuko ; et al. | 2014-08-28 |
Sub-resolution assist feature arranging method and computer program product and manufacturing method of semiconductor device
Grant 8,809,072 - Kodama , et al. August 19, 2 | 2014-08-19 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device
App 20140183702 - KODAMA; Chikaaki ; et al. | 2014-07-03 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device
App 20140131879 - KODAMA; Chikaaki ; et al. | 2014-05-15 |
Pattern Data Generation Method, Pattern Verification Method, And Optical Image Calculation Method
App 20140059502 - MIYOSHI; Seiro ; et al. | 2014-02-27 |
Semiconductor Device And Method Of Manufacturing The Same
App 20140017887 - NAKAJIMA; Fumiharu ; et al. | 2014-01-16 |
Method of correcting mask pattern, computer program product, and method of manufacturing semiconductor device
Grant 8,617,773 - Uno , et al. December 31, 2 | 2013-12-31 |
Method of manufacturing semiconductor device and computer readable medium for storing pattern size setting program
Grant 8,617,999 - Mashita , et al. December 31, 2 | 2013-12-31 |
Mask pattern generating method and computer program product
Grant 8,609,303 - Kodama , et al. December 17, 2 | 2013-12-17 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20130241073 - Hashimoto; Takaki ; et al. | 2013-09-19 |
Flare map calculating method and recording medium
Grant 8,527,914 - Uno , et al. September 3, 2 | 2013-09-03 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device
App 20130168827 - Kodama; Chikaaki ; et al. | 2013-07-04 |
Flare Map Calculating Method And Recording Medium
App 20130159944 - UNO; Taiga ; et al. | 2013-06-20 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device
App 20130126959 - Aburada; Ryota ; et al. | 2013-05-23 |
Pattern correcting method, mask forming method, and method of manufacturing semiconductor device
Grant 8,443,310 - Kajiwara , et al. May 14, 2 | 2013-05-14 |
Exposure determining method, method of manufacturing semiconductor device, and computer program product
Grant 8,440,376 - Kotani , et al. May 14, 2 | 2013-05-14 |
Original plate evaluation method, computer readable storage medium, and original plate manufacturing method
Grant 8,438,527 - Nakamura , et al. May 7, 2 | 2013-05-07 |
Design Data Optimization Method, Storage Medium Including Program For Design Data Optimization Method And Photomask Manufacturing Method
App 20130111416 - NAKAGAWA; Shinichi ; et al. | 2013-05-02 |
Design Method Of Wiring Layout, Semiconductor Device, Program For Supporting Design Of Wiring Layout, And Method For Manufacturing Semiconductor Device
App 20130062771 - KODAMA; Chikaaki ; et al. | 2013-03-14 |
Pattern Generating Method, Pattern Forming Method, And Pattern Generating Program
App 20130063707 - ABURADA; Ryota ; et al. | 2013-03-14 |
Original Plate Evaluation Method, Computer Readable Storage Medium, And Original Plate Manufacturing Method
App 20130055172 - Nakamura; Satomi ; et al. | 2013-02-28 |
Pattern generation method, computer-readable recording medium, and semiconductor device manufacturing method
Grant 8,347,241 - Nakajima , et al. January 1, 2 | 2013-01-01 |
Pattern dimension calculation method and computer program product
Grant 8,336,005 - Taguchi , et al. December 18, 2 | 2012-12-18 |
Semiconductor device
Grant 8,332,784 - Kotani December 11, 2 | 2012-12-11 |
Mask Inspection Method, Mask Production Method, Semiconductor Device Production Method, And Mask Inspection Device
App 20120311511 - TAGUCHI; Takafumi ; et al. | 2012-12-06 |
Pattern generating method, method of manufacturing semiconductor device, computer program product, and pattern-shape-determination-parameter generating method
Grant 8,307,310 - Kotani , et al. November 6, 2 | 2012-11-06 |
Method Of Correcting Mask Pattern, Computer Program Product, Mask Pattern Correcting Apparatus, And Method Of Manufacturing Semiconductor Device
App 20120244707 - Uno; Taiga ; et al. | 2012-09-27 |
Pattern Correcting Method, Mask Forming Method, And Method Of Manufacturing Semiconductor Device
App 20120246601 - KAJIWARA; Masanari ; et al. | 2012-09-27 |
Semiconductor Device And Method Of Manufacturing The Same
App 20120241834 - Nakajima; Fumiharu ; et al. | 2012-09-27 |
Method for making a design layout of a semiconductor integrated circuit
Grant RE43,659 - Kotani , et al. September 11, 2 | 2012-09-11 |
Pattern generating method, method of manufacturing semiconductor device, and recording medium
Grant 8,266,552 - Taguchi , et al. September 11, 2 | 2012-09-11 |
Method Of Optimizing Semiconductor Device Manufacturing Process, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer Readable Medium
App 20120198396 - KAJIWARA; Masanari ; et al. | 2012-08-02 |
Mask Pattern Generating Method, Manufacturing Method Of Semiconductor Device, And Computer Program Product
App 20120183906 - KODAMA; Chikaaki ; et al. | 2012-07-19 |
Method Of Manufacturing Semiconductor Device And Computer Readable Medium For Storing Pattern Size Setting Program
App 20120184109 - MASHITA; Hiromitsu ; et al. | 2012-07-19 |
Creating mask data of integrated circuit patterns using calculated etching conversion difference
Grant 8,196,071 - Mashita , et al. June 5, 2 | 2012-06-05 |
Pattern Forming Method
App 20120127454 - NAKAMURA; Hiroko ; et al. | 2012-05-24 |
Method of fabricating semiconductor device and semiconductor device
Grant 8,183,148 - Aburada , et al. May 22, 2 | 2012-05-22 |
Method of calculating pattern-failure-occurrence-region, computer program product, pattern-layout evaluating method, and semiconductor-device manufacturing method
Grant 8,171,433 - Takahashi , et al. May 1, 2 | 2012-05-01 |
Mask pattern data generation method, mask manufacturing method, semiconductor device manufacturing method, and pattern data generation program
Grant 8,146,022 - Mashita , et al. March 27, 2 | 2012-03-27 |
Method for manufacturing semiconductor device and computer readable medium for storing pattern size setting program
Grant 8,143,171 - Mashita , et al. March 27, 2 | 2012-03-27 |
Mask pattern correcting method, mask pattern inspecting method, photo mask manufacturing method, and semiconductor device manufacturing method
Grant 8,142,961 - Kotani , et al. March 27, 2 | 2012-03-27 |
Exposure Method And Method For Manufacturing Semiconductor Device
App 20120070985 - Hashimoto; Takaki ; et al. | 2012-03-22 |
Pattern Verification Method, Pattern Verification System, Mask Manufacturing Method and Semiconductor Device Manufacturing Method
App 20120054695 - IZUHA; Kyoko ; et al. | 2012-03-01 |
Semiconductor Device
App 20120047475 - Kotani; Toshiya | 2012-02-23 |
Mask pattern correcting method
Grant 8,122,385 - Fukuhara , et al. February 21, 2 | 2012-02-21 |
Process controller for semiconductor manufacturing, utilizing dangerous pattern identification and process capability determination
Grant 8,112,167 - Endo , et al. February 7, 2 | 2012-02-07 |
Pattern verification method, method of manufacturing semiconductor device, and recording media
Grant 8,108,824 - Kotani , et al. January 31, 2 | 2012-01-31 |
Method of forming contact hole pattern in semiconductor integrated circuit device
Grant 8,101,516 - Kotani , et al. January 24, 2 | 2012-01-24 |
Pattern Dimension Calculation Method And Computer Program Product
App 20110307845 - TAGUCHI; Takafumi ; et al. | 2011-12-15 |
Method and system for correcting a mask pattern design
Grant 8,078,996 - Izuha , et al. December 13, 2 | 2011-12-13 |
Sub-resolution Assist Feature Arranging Method And Computer Program Product And Manufacturing Method Of Semiconductor Device
App 20110294239 - KODAMA; Chikaaki ; et al. | 2011-12-01 |
Semiconductor device
Grant 8,065,637 - Kotani November 22, 2 | 2011-11-22 |
Mask data processing method for optimizing hierarchical structure
App 20110265047 - Kobayashi; Sachiko ; et al. | 2011-10-27 |
Method for correcting a mask pattern, system for correcting a mask pattern, program, method for manufacturing a photomask and method for manufacturing a semiconductor device
Grant 8,046,722 - Kotani , et al. October 25, 2 | 2011-10-25 |
Pattern forming method and system, and method of manufacturing a semiconductor device
Grant 8,042,067 - Nakano , et al. October 18, 2 | 2011-10-18 |
Mask pattern data creation method and mask
Grant 7,998,642 - Kodama , et al. August 16, 2 | 2011-08-16 |
Mask data processing method for optimizing hierarchical structure
Grant 7,996,794 - Kobayashi , et al. August 9, 2 | 2011-08-09 |
Exposure Determining Method, Method Of Manufacturing Semiconductor Device, And Computer Program Product
App 20110177458 - KOTANI; Toshiya ; et al. | 2011-07-21 |
Data processing method in semiconductor device, program of the same, and manufacturing method of semiconductor device
Grant 7,984,390 - Nakano , et al. July 19, 2 | 2011-07-19 |
Method Of Generating Mask Pattern, Mask Pattern Generating Program, And Method Of Manufacturing Semiconductor Device
App 20110154273 - ABURADA; Ryota ; et al. | 2011-06-23 |
Pattern-producing method for semiconductor device
Grant 7,966,584 - Kyoh , et al. June 21, 2 | 2011-06-21 |
Design Pattern correcting method, process proximity effect correcting method, and semiconductor device manufacturing method
Grant 7,949,967 - Kotani , et al. May 24, 2 | 2011-05-24 |
Photomask management method and photomask wash limit generating method
Grant 7,941,767 - Mukai , et al. May 10, 2 | 2011-05-10 |
Parameter adjustment method, semiconductor device manufacturing method, and recording medium
Grant 7,934,175 - Kotani , et al. April 26, 2 | 2011-04-26 |
Method for making a design layout and mask
Grant RE42,302 - Kotani , et al. April 19, 2 | 2011-04-19 |
Method of determining photo mask, method of manufacturing semiconductor device, and computer program product
Grant 7,925,090 - Kotani , et al. April 12, 2 | 2011-04-12 |
Semiconductor integrated circuit designing method and system using a design rule modification
Grant RE42,294 - Kotani , et al. April 12, 2 | 2011-04-12 |
Nonvolatile Semiconductor Storage Device And Method Of Manufacturing The Same
App 20110069531 - ABURADA; Ryota ; et al. | 2011-03-24 |
Pattern Generating Method, Manufacturing Method Of Mask, And Manufacturing Method Of Semiconductor Device
App 20110065028 - KODERA; Katsuyoshi ; et al. | 2011-03-17 |
Mask Pattern Determining Method, Mask Manufacturing Method, And Device Manufacturing Method
App 20110065030 - KOTANI; Toshiya ; et al. | 2011-03-17 |
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
Grant 7,903,264 - Hayasaki , et al. March 8, 2 | 2011-03-08 |
Pattern Determining Method
App 20110047518 - Aiba; Issui ; et al. | 2011-02-24 |
Pattern Evaluating Method, Pattern Generating Method, And Computer Program Product
App 20110029937 - KODERA; Katsuyoshi ; et al. | 2011-02-03 |
Semiconductor device pattern creation method, pattern data processing method, pattern data processing program, and semiconductor device manufacturing method
App 20100275174 - Nakano; Ayako ; et al. | 2010-10-28 |
Method Of Manufacturing Semiconductor Device And Exposure Device
App 20100266960 - MASHITA; Hiromitsu ; et al. | 2010-10-21 |
Semiconductor Device And Method For Manufacturing
App 20100264547 - YANAGIDAIRA; KOSUKE ; et al. | 2010-10-21 |
Pattern Generating Method, Method Of Manufacturing Semiconductor Device, And Computer Program Product
App 20100241261 - TAGUCHI; Takafumi ; et al. | 2010-09-23 |
Mask pattern correcting method, mask pattern inspecting method, photo mask manufacturing method, and semiconductor device manufacturing method
Grant 7,794,897 - Kotani , et al. September 14, 2 | 2010-09-14 |
Mask pattern preparation method, semiconductor device manufacturing method and recording medium
Grant 7,793,252 - Kotani , et al. September 7, 2 | 2010-09-07 |
Pattern data correction method, pattern checking method, pattern check program, photo mask producing method, and semiconductor device manufacturing method
Grant 7,788,626 - Nojima , et al. August 31, 2 | 2010-08-31 |
Semiconductor-device Manufacturing Method, Computer Program Product, And Exposure-parameter Creating Method
App 20100216064 - Takimoto; Michiya ; et al. | 2010-08-26 |
Semiconductor Memory Device
App 20100202181 - HASHIMOTO; Takaki ; et al. | 2010-08-12 |
Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device
App 20100193960 - Mashita; Hiromitsu ; et al. | 2010-08-05 |
Semiconductor device pattern creation method, pattern data processing program, and semiconductor device manufacturing method
Grant 7,770,145 - Nakano , et al. August 3, 2 | 2010-08-03 |
Pattern Generating Method, Method Of Manufacturing Semiconductor Device, Computer Program Product, And Pattern-shape-determination-parameter Generating Method
App 20100190342 - Kotani; Toshiya ; et al. | 2010-07-29 |
Pattern Data Creating Method, Computer Program Product, And Semiconductor Device Manufacturing Method
App 20100185313 - MASHITA; Hiromitsu ; et al. | 2010-07-22 |
Mask Verification Method, Method Of Manufacturing Semiconductor Device, And Computer Readable Medium
App 20100168895 - MASHITA; Hiromitsu ; et al. | 2010-07-01 |
Mask Pattern Correcting Method, Mask Pattern Inspecting Method, Photo Mask Manufacturing Method, And Semiconductor Device Manufacturing Method
App 20100159709 - KOTANI; Toshiya ; et al. | 2010-06-24 |
Semiconductor device and method for manufacturing
Grant 7,738,276 - Yanagidaira , et al. June 15, 2 | 2010-06-15 |
System, method and program for generating mask data, exposure mask and semiconductor device in consideration of optical proximity effects
Grant 7,716,628 - Tanaka , et al. May 11, 2 | 2010-05-11 |
Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device
Grant 7,716,617 - Mashita , et al. May 11, 2 | 2010-05-11 |
Method for manufacturing semiconductor device
Grant 7,713,833 - Mashita , et al. May 11, 2 | 2010-05-11 |
Semiconductor memory device
Grant 7,700,997 - Futatsuyama , et al. April 20, 2 | 2010-04-20 |
Method Of Calculating Pattern-failure-occurrence-region, Computer Program Product, Pattern-layout Evaluating Method, And Semiconductor-device Manufacturing Method
App 20100082144 - TAKAHASHI; Masanori ; et al. | 2010-04-01 |
Method For Manufacturing Semiconductor Device
App 20100081265 - Mashita; Hiromitsu ; et al. | 2010-04-01 |
Pattern creation method, mask manufacturing method and semiconductor device manufacturing method
Grant 7,669,172 - Ito , et al. February 23, 2 | 2010-02-23 |
Method Of Fabricating Semiconductor Device And Semiconductor Device
App 20100038795 - Aburada; Ryota ; et al. | 2010-02-18 |
Pattern Predicting Method, Recording Media And Method Of Fabricating Semiconductor Device
App 20100035168 - NAKAJIMA; Fumiharu ; et al. | 2010-02-11 |
Pattern Shape Predicting Method And Pattern Shape Predicting Apparatus
App 20100030545 - UNO; Taiga ; et al. | 2010-02-04 |
Mask Pattern Data Creation Method And Mask
App 20100021825 - KODAMA; Chikaaki ; et al. | 2010-01-28 |
Design Layout Data Creating Method, Computer Program Product, And Method Of Manufacturing Semiconductor Device
App 20100003819 - TAGUCHI; Takafumi ; et al. | 2010-01-07 |
Calculating method, verification method, verification program and verification system for edge deviation quantity, and semiconductor device manufacturing method
Grant 7,631,287 - Izuha , et al. December 8, 2 | 2009-12-08 |
Pattern forming method, computer program thereof, and semiconductor device manufacturing method using the computer program
Grant 7,614,026 - Kotani , et al. November 3, 2 | 2009-11-03 |
Method and system for correcting a mask pattern design
App 20090265680 - Izuha; Kyoko ; et al. | 2009-10-22 |
Pattern Verification Method, Method Of Manufacturing Semiconductor Device, And Recording Media
App 20090258446 - Kotani; Toshiya ; et al. | 2009-10-15 |
Method For Manufacturing Semiconductor Device And Computer Readable Medium For Storing Pattern Size Setting Program
App 20090258503 - Mashita; Hiromitsu ; et al. | 2009-10-15 |
Mask Pattern Data Generation Method, Mask Manufacturing Method, Semiconductor Device Manufacturing Method, And Pattern Data Generation Program
App 20090239177 - MASHITA; Hiromitsu ; et al. | 2009-09-24 |
Method and system for forming a mask pattern, method of manufacturing a semiconductor device, system forming a mask pattern on data, cell library and method of forming a photomask
Grant 7,594,216 - Kotani , et al. September 22, 2 | 2009-09-22 |
Mask pattern data generating method, photo mask manufacturing method, and semiconductor device manufacturing method
Grant 7,585,597 - Fujisawa , et al. September 8, 2 | 2009-09-08 |
Pattern-producing method for semiconductor device
App 20090199148 - Kyoh; Suigen ; et al. | 2009-08-06 |
Method and system for correcting a mask pattern design
Grant 7,571,417 - Izuha , et al. August 4, 2 | 2009-08-04 |
Process Controller, Process Control Method, And Computer-readable Recording Medium
App 20090192643 - Endo; Ayako ; et al. | 2009-07-30 |
Method for correcting a mask pattern, system for correcting a mask pattern, program, method for manufacturing a photomask and method for manufacturing a semiconductor device
App 20090186429 - Kotani; Toshiya ; et al. | 2009-07-23 |
Pattern Generation Method, Computer-readable Recording Medium, And Semiconductor Device Manufacturing Method
App 20090186424 - Nakajima; Fumiharu ; et al. | 2009-07-23 |
Mask pattern data producing method, patterning method, reticle correcting method, reticle manufacturing method, and semiconductor apparatus manufacturing method
Grant 7,560,197 - Nakamura , et al. July 14, 2 | 2009-07-14 |
Mask manufacturing system, mask data creating method and manufacturing method of semiconductor device
Grant 7,530,049 - Kobayashi , et al. May 5, 2 | 2009-05-05 |
Design pattern data preparing method, mask pattern data preparing method, mask manufacturing method, semiconductor device manufacturing method, and program recording medium
Grant 7,526,748 - Kotani , et al. April 28, 2 | 2009-04-28 |
Pattern-producing method for semiconductor device
Grant 7,523,437 - Kyoh , et al. April 21, 2 | 2009-04-21 |
Pattern Correction Method, Pattern Correction System, Mask Manufacturing Method, Semiconductor Device Manufacturing Method, Recording Medium, And Designed Pattern
App 20090077528 - KOTANI; TOSHIYA | 2009-03-19 |
Design Pattern Correcting Method, Design Pattern Forming Method, Process Proximity Effect Correcting Method, Semiconductor Device And Design Pattern Correcting Program
App 20090077529 - KOTANI; TOSHIYA ; et al. | 2009-03-19 |
Design Pattern Correcting Method, Design Pattern Forming Method, Process Proximity Effect Correcting Method, Semiconductor Device And Design Pattern Correcting Program
App 20090077530 - KOTANI; TOSHIYA ; et al. | 2009-03-19 |
Method for correcting a mask pattern, system for correcting a mask pattern, program, method for manufacturing a photomask and method for manufacturing a semiconductor device
Grant 7,506,301 - Kotani , et al. March 17, 2 | 2009-03-17 |
Method for inspecting a defect in a photomask, method for manufacturing a semiconductor device and method for producing a photomask
Grant 7,499,582 - Kotani , et al. March 3, 2 | 2009-03-03 |
Pattern forming method and semiconductor device manufactured by using said pattern forming method
Grant 7,482,661 - Kotani , et al. January 27, 2 | 2009-01-27 |
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
Grant 7,483,155 - Hayasaki , et al. January 27, 2 | 2009-01-27 |
Lithography simulation method, mask pattern preparation method, semiconductor device manufacturing method and recording medium
App 20090019418 - Kotani; Toshiya ; et al. | 2009-01-15 |
Semiconductor Device And Method For Manufacturing
App 20090014841 - YANAGIDAIRA; Kosuke ; et al. | 2009-01-15 |
Pattern Forming Method Using Two Layers Of Resist Patterns Stacked One On Top Of The Other
App 20090011370 - Nakamura; Hiroko ; et al. | 2009-01-08 |
Photomask Management Method And Photomask Wash Limit Generating Method
App 20080320434 - MUKAI; Hidefumi ; et al. | 2008-12-25 |
Mask Pattern Correcting Method
App 20080301621 - FUKUHARA; Kazuya ; et al. | 2008-12-04 |
Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern
Grant 7,458,057 - Kotani November 25, 2 | 2008-11-25 |
Pattern forming method and system, and method of manufacturing a semiconductor device
App 20080276216 - Nakano; Ayako ; et al. | 2008-11-06 |
Parameter Adjustment Method, Semiconductor Device Manufacturing Method, And Recording Medium
App 20080250381 - KOTANI; Toshiya ; et al. | 2008-10-09 |
Pattern Creation Method, Mask Manufacturing Method And Semiconductor Device Manufacturing Method
App 20080235650 - Ito; Takeshi ; et al. | 2008-09-25 |
Lithography simulation method and recording medium
Grant 7,426,712 - Kotani , et al. September 16, 2 | 2008-09-16 |
Mask Data Processing Method For Optimizing Hierarchical Structure
App 20080216045 - KOBAYASHI; Sachiko ; et al. | 2008-09-04 |
Pattern forming method and system, and method of manufacturing a semiconductor device
Grant 7,402,363 - Nakano , et al. July 22, 2 | 2008-07-22 |
Method and program for generating layout data of a semiconductor integrated circuit and method for manufacturing a semiconductor integrated circuit with optical proximity correction
Grant 7,370,314 - Minami , et al. May 6, 2 | 2008-05-06 |
Method of Forming Contact Hole Pattern in Semiconductor Integrated Circuit Device
App 20080070402 - Kotani; Toshiya ; et al. | 2008-03-20 |
Pattern correcting method, mask making method, method of manufacturing semiconductor device, pattern correction system, and computer-readable recording medium having pattern correction program recorded therein
Grant 7,337,426 - Kotani , et al. February 26, 2 | 2008-02-26 |
Calculating method, verification method, verification program and verification system for edge deviation quantity, and semiconductor device manufacturing method
App 20070226676 - Izuha; Kyoko ; et al. | 2007-09-27 |
Design pattern correction method and mask pattern producing method
Grant 7,266,801 - Kotani , et al. September 4, 2 | 2007-09-04 |
Method of determining photo mask, method of manufacturing semiconductor device, and computer program product
App 20070130560 - Kotani; Toshiya ; et al. | 2007-06-07 |
Mask manufacturing system, mask data creating method and manufacturing method of semiconductor device
App 20070124718 - Kobayashi; Sachiko ; et al. | 2007-05-31 |
Pattern dimension correction method and verification method using OPC, mask and semiconductor device fabricated by using the correction method, and system and software product for executing the correction method
Grant 7,213,226 - Kotani , et al. May 1, 2 | 2007-05-01 |
Calculating method, verification method, verification program and verification system for edge deviation quantity, and semiconductor device manufacturing method
Grant 7,200,833 - Izuha , et al. April 3, 2 | 2007-04-03 |
Pattern forming method, computer program thereof, and semiconductor device manufacturing method using the computer program
App 20070066025 - Kotani; Toshiya ; et al. | 2007-03-22 |
Design layout preparing method
Grant 7,194,704 - Kotani , et al. March 20, 2 | 2007-03-20 |
Method of setting process parameter and method of setting process parameter and/or design rule
Grant 7,181,707 - Kotani , et al. February 20, 2 | 2007-02-20 |
Data processing method in semiconductor device, program of the same, and manufacturing method of semiconductor device
App 20070028205 - Nakano; Ayako ; et al. | 2007-02-01 |
Lithography simulation method, mask pattern preparation method, semiconductor device manufacturing method and recording medium
App 20070019058 - Kotani; Toshiya ; et al. | 2007-01-25 |
Semiconductor device pattern creation method, pattern data processing method, pattern data processing program, and semiconductor device manufacturing method
App 20070003127 - Nakano; Ayako ; et al. | 2007-01-04 |
Method of setting process parameter and method of setting process parameter and/or design rule
Grant 7,120,882 - Kotani , et al. October 10, 2 | 2006-10-10 |
Semiconductor memory device
App 20060197136 - Futatsuyama; Takuya ; et al. | 2006-09-07 |
Method and program for generating layout data of a semiconductor integrated circuit and method for manufacturing a semiconductor integrated circuit with optical proximity correction
App 20060184908 - Minami; Fumihiro ; et al. | 2006-08-17 |
Method of manufacturing a photo mask and method of manufacturing a semiconductor device
Grant 7,090,949 - Nojima , et al. August 15, 2 | 2006-08-15 |
Semiconductor device, method for making pattern layout, method for making mask pattern, method for making layout, method for manufacturing photo mask, photo mask, and method for manufacturing semiconductor device
App 20060157833 - Mashita; Hiromitsu ; et al. | 2006-07-20 |
Pattern correction method of semiconductor device
Grant 7,065,739 - Kobayashi , et al. June 20, 2 | 2006-06-20 |
System, method and program for generating mask data, exposure mask and semiconductor device in consideration of optical proximity effects
App 20060129967 - Tanaka; Satoshi ; et al. | 2006-06-15 |
Mask pattern data generating method, photo mask manufacturing method, and semiconductor device manufacturing method
App 20060093926 - Fujisawa; Tadahito ; et al. | 2006-05-04 |
Method for correcting a mask pattern, system for correcting a mask pattern, program, method for manufacturing a photomask and method for manufacturing a semiconductor device
App 20060039597 - Kotani; Toshiya ; et al. | 2006-02-23 |
Design pattern data preparing method, mask pattern data preparing method, mask manufacturing method, semiconductor device manufacturing method, and program recording medium
App 20060033049 - Kotani; Toshiya ; et al. | 2006-02-16 |
Pattern data correction method, pattern checking method, pattern check program, photo mask producing method, and semiconductor device manufacturing method
App 20050273754 - Nojima, Shigeki ; et al. | 2005-12-08 |
Pattern correcting method, mask making method, method of manufacturing semiconductor device, pattern correction system, and computer-readable recording medium having pattern correction program recorded therein
App 20050257188 - Kotani, Toshiya ; et al. | 2005-11-17 |
Mask pattern correcting method, mask pattern inspecting method, photo mask manufacturing method, and semiconductor device manufacturing method
App 20050250022 - Kotani, Toshiya ; et al. | 2005-11-10 |
Design pattern correcting method, design pattern forming method, process proximity effect correcting method, semiconductor device and design pattern correcting program
App 20050251781 - Kotani, Toshiya ; et al. | 2005-11-10 |
Mask pattern generating method and manufacturing method of semiconductor apparatus
Grant 6,964,031 - Kotani , et al. November 8, 2 | 2005-11-08 |
Design pattern correction method and mask pattern producing method
App 20050235245 - Kotani, Toshiya ; et al. | 2005-10-20 |
Design layout preparing method
App 20050204322 - Kotani, Toshiya ; et al. | 2005-09-15 |
Mask pattern data producing method, patterning method, reticle correcting method, reticle manufacturing method, and semiconductor apparatus manufacturing method
App 20050196684 - Nakamura, Hiroko ; et al. | 2005-09-08 |
Pattern forming method and semiconductor device manufactured by using said pattern forming method
App 20050193364 - Kotani, Toshiya ; et al. | 2005-09-01 |
Method of setting process parameter and method of setting process parameter and/or design rule
App 20050177811 - Kotani, Toshiya ; et al. | 2005-08-11 |
Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
App 20050168758 - Hayasaki, Kei ; et al. | 2005-08-04 |
Pattern verification method, pattern verification system, mask manufacturing method and semiconductor device manufacturing method
App 20050153217 - Izuha, Kyoko ; et al. | 2005-07-14 |
Pattern-producing method for semiconductor device
App 20050134866 - Kyoh, Suigen ; et al. | 2005-06-23 |
Mask data generating apparatus, a computer implemented method for generating mask data and a computer program for controlling the mask data generating apparatus
Grant 6,907,596 - Kobayashi , et al. June 14, 2 | 2005-06-14 |
Pattern forming method and semiconductor device manufactured by using said pattern forming method
Grant 6,901,577 - Kotani , et al. May 31, 2 | 2005-05-31 |
Pattern dimension correction method and verification method using OPC, mask and semiconductor device fabricated by using the correction method, and system and software product for executing the correction method
App 20050081180 - Kotani, Toshiya ; et al. | 2005-04-14 |
Method and system for forming a mask pattern, method of manufacturing a semiconductor device, system forming a mask pattern on data, cell library and method of forming a photomask
App 20050064302 - Kotani, Toshiya ; et al. | 2005-03-24 |
Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern
App 20050031976 - Kotani, Toshiya | 2005-02-10 |
Mask pattern correction method, mask pattern creation system using the correction method, and computer-readable recording medium
Grant 6,853,743 - Kotani , et al. February 8, 2 | 2005-02-08 |
Method for inspecting a defect in a photomask, method for manufacturing a semiconductor device and method for producing a photomask
App 20050025351 - Kotani, Toshiya ; et al. | 2005-02-03 |
Pattern forming method and system, and method of manufacturing a semiconductor device
App 20040259005 - Nakano, Ayako ; et al. | 2004-12-23 |
Calculating method, verification method, verification program and verification system for edge deviation quantity, and semiconductor device manufacturing method
App 20040230939 - Izuha, Kyoko ; et al. | 2004-11-18 |
Method of manufacturing a photo mask and method of manufacturing a semiconductor device
App 20040146788 - Nojima, Shigeki ; et al. | 2004-07-29 |
Pattern formation method, mask for exposure used for pattern formation, and method of manufacturing the same
Grant 6,727,028 - Kotani , et al. April 27, 2 | 2004-04-27 |
Method of setting process parameter and method of setting process parameter and/or design rule
App 20040015794 - Kotani, Toshiya ; et al. | 2004-01-22 |
Mask data generating apparatus, a computer implemented method for generating mask data and a computer program for controlling the mask data generating apparatus
App 20030188288 - Kobayashi, Sachiko ; et al. | 2003-10-02 |
Pattern correction method and manufacturing method of semiconductor device
App 20030126582 - Kobayashi, Sachiko ; et al. | 2003-07-03 |
Mask trading system and method
App 20030078799 - Asano, Masafumi ; et al. | 2003-04-24 |
Mask pattern generating method and manufacturing method of semiconductor apparatus
App 20030074646 - Kotani, Toshiya ; et al. | 2003-04-17 |
Semiconductor integrated circuit designing method and system
Grant 6,507,931 - Kotani , et al. January 14, 2 | 2003-01-14 |
Pattern forming method and semiconductor device manufactured by ussing said pattern forming method
App 20030001155 - Kotani, Toshiya ; et al. | 2003-01-02 |
Pattern formation method, mask for exposure used for pattern formation, and method of manufacturing the same
App 20020160279 - Kotani, Toshiya ; et al. | 2002-10-31 |
Semiconductor integrated circuit designing method and system
App 20020002697 - Kotani, Toshiya ; et al. | 2002-01-03 |
Mask pattern correction method, mask pattern creation system using the correction method, and computer-readable recording medium
App 20010005566 - Kotani, Toshiya ; et al. | 2001-06-28 |
Mask pattern correction method and a recording medium which records a mask pattern correction program
Grant 6,221,539 - Kotani , et al. April 24, 2 | 2001-04-24 |
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