Patent | Date |
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Composition For Coating Photoresist Pattern And Method For Forming Fine Pattern Using The Same App 20180120707 - LEE; Sung Jae ;   et al. | 2018-05-03 |
Semiconductor integrated circuit device with a surface and method of manufacturing the same Grant 9,947,546 - Sim , et al. April 17, 2 | 2018-04-17 |
Semiconductor Integrated Circuit Device With A Surface And Method Of Manufacturing The Same App 20170207098 - SIM; Jae Hee ;   et al. | 2017-07-20 |
Composition For Coating Photoresist Pattern And Method For Forming Fine Pattern Using The Same App 20170102619 - LEE; Sung Jae ;   et al. | 2017-04-13 |
Composition For Coating Photoresist Pattern And Method For Forming Fine Pattern Using The Same App 20170032960 - Lee; Sung Jae ;   et al. | 2017-02-02 |
Capacitor of semiconductor device and method for fabricating the same Grant 7,749,895 - Kong July 6, 2 | 2010-07-06 |
Method for forming fine patterns of a semiconductor device Grant 7,674,708 - Kong March 9, 2 | 2010-03-09 |
Method for fabricating capacitor of semiconductor memory device using amorphous carbon Grant 7,582,525 - Kong , et al. September 1, 2 | 2009-09-01 |
Cleaning solution for removing photoresist Grant 7,563,753 - Lee , et al. July 21, 2 | 2009-07-21 |
Method for forming fine pattern in semiconductor device Grant 7,510,973 - Kong March 31, 2 | 2009-03-31 |
Method for forming a pattern on a semiconductor device and semiconductor device resulting from the same Grant 7,510,979 - Jung , et al. March 31, 2 | 2009-03-31 |
Semiconductor device and method for fabricating the same App 20080200024 - Kong; Keun Kyu | 2008-08-21 |
Liquid Composition for Immersion Lithography and Lithography Method Using the Same App 20080176047 - Kong; Keun Kyu ;   et al. | 2008-07-24 |
Method for forming fine pattern in semiconductor device App 20080160772 - Kong; Keun Kyu | 2008-07-03 |
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same Grant 7,329,477 - Jung , et al. February 12, 2 | 2008-02-12 |
Method For Forming A Pattern On A Semiconductor Device And Semiconductor Device Resulting From The Same App 20080020592 - JUNG; Jae-chang ;   et al. | 2008-01-24 |
Method For Forming Fine Patterns Of A Semiconductor Device App 20080009137 - KONG; Keun Kyu | 2008-01-10 |
Light Absorbent Agent Polymer Useful For Organic Anti-reflective Coating, And Preparation Method For The Same App 20070265406 - JUNG; Jae-chang ;   et al. | 2007-11-15 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same Grant 7,285,370 - Jung , et al. October 23, 2 | 2007-10-23 |
Cross-linking monomers for photoresist, and process for preparing photoresist polymers using the same Grant 7,208,260 - Jung , et al. April 24, 2 | 2007-04-24 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same Grant 7,186,496 - Jung , et al. March 6, 2 | 2007-03-06 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same Grant 7,160,668 - Jung , et al. January 9, 2 | 2007-01-09 |
Method for fabricating capacitor of semiconductor memory device using amorphous carbon App 20060141736 - Kong; Keun-Kyu ;   et al. | 2006-06-29 |
Light absorbent agent polymer for organic anti-reflective coating and preparation method and organic anti-reflective coating composition comprising the same Grant 7,033,729 - Jung , et al. April 25, 2 | 2006-04-25 |
Top-coating composition for photoresist and process for forming fine pattern using the same Grant 6,984,482 - Jung , et al. January 10, 2 | 2006-01-10 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same App 20060004161 - Jung; Jae-chang ;   et al. | 2006-01-05 |
Liquid composition for immersion lithography and lithography method using the same App 20050260528 - Kong, Keun Kyu ;   et al. | 2005-11-24 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same App 20050130061 - Jung, Jae-Chang ;   et al. | 2005-06-16 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same App 20050084798 - Jung, Jae-chang ;   et al. | 2005-04-21 |
Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same App 20050085078 - Jung, Jae Chang ;   et al. | 2005-04-21 |
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same App 20050069816 - Jung, Jae Chang ;   et al. | 2005-03-31 |
Pattern width slimming-inhibiting method of photoresist pattern using photoresist composition containing thermal acid generator Grant 6,787,285 - Kong , et al. September 7, 2 | 2004-09-07 |
Organic polymer for organic anti-reflective coating layer and preparation thereof Grant 6,770,720 - Jung , et al. August 3, 2 | 2004-08-03 |
Over-coating composition for photoresist, and processes for forming photoresist patterns using the same Grant 6,764,806 - Jung , et al. July 20, 2 | 2004-07-20 |
Method of inhibiting pattern collapse using a relacs material Grant 6,703,323 - Kong , et al. March 9, 2 | 2004-03-09 |
Process for forming photoresist pattern by using gas phase amine treatment Grant 6,664,031 - Jung , et al. December 16, 2 | 2003-12-16 |
Method of inhibiting pattern collapse using a relacs material App 20030143489 - Kong, Keun Kyu ;   et al. | 2003-07-31 |
Cleaning solution for removing photoresist App 20030130148 - Lee, Geun Su ;   et al. | 2003-07-10 |
Top-coating composition for photoresist and process for forming fine pattern using the same App 20030108815 - Jung, Jae Chang ;   et al. | 2003-06-12 |
Organic polymer for organic anti-reflective coating layer and preparation thereof App 20030100695 - Jung, Jae-chang ;   et al. | 2003-05-29 |
Cross-linking monomers for photoresist, and process for preparing photoresist polymers using the same App 20020177069 - Jung, Jae Chang ;   et al. | 2002-11-28 |
Photoresist monomers having stability to post exposure delay, polymers thereof and photoresist compositions containing the same Grant 6,455,225 - Kong , et al. September 24, 2 | 2002-09-24 |
Pattern width slimming-inhibiting method of photoresist pattern using photoresist composition containing thermal acid generator App 20020081504 - Kong, Keun Kyu ;   et al. | 2002-06-27 |
Photoresist composition containing photo base generator with photo acid generator Grant 6,395,451 - Jung , et al. May 28, 2 | 2002-05-28 |
Photoresist cross-linker and photoresist composition comprising the same Grant 6,368,773 - Jung , et al. April 9, 2 | 2002-04-09 |
Novel photoresist cross-linker and photoresist composition comprising the same App 20020019560 - Kong, Keun Kyu ;   et al. | 2002-02-14 |
Process for forming photoresist pattern by using gas phase amine treatment App 20010053590 - Jung, Jae Chang ;   et al. | 2001-12-20 |
Photoresist cross-linker and photoresist composition comprising the same Grant 6,322,948 - Jung , et al. November 27, 2 | 2001-11-27 |
Photoresist cross-linker and photoresist composition comprising the same Grant 6,312,868 - Kong , et al. November 6, 2 | 2001-11-06 |
Monomers for photoresist, polymers thereof, and photoresist compositions using the same Grant 6,291,131 - Jung , et al. September 18, 2 | 2001-09-18 |
Over-coating composition for photoresist, and processes for forming photoresist patterns using the same App 20010003030 - Jung, Jae Chang ;   et al. | 2001-06-07 |
Maleimide or alicyclic olefin-based monomers, copolymer resin of these monomers and photoresist using the resin Grant 6,165,672 - Jung , et al. December 26, 2 | 2000-12-26 |