Patent | Date |
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Electromechanical device with optical function separated from mechanical and electrical function Grant 9,001,412 - Chui , et al. April 7, 2 | 2015-04-07 |
Method of manufacturing MEMS devices providing air gap control Grant 8,964,280 - Tung , et al. February 24, 2 | 2015-02-24 |
Adaptive modifications in micro opto-electro-mechanical systems Grant 8,939,025 - Ronen , et al. January 27, 2 | 2015-01-27 |
Switching Device App 20140251770 - Kogut; Lior ;   et al. | 2014-09-11 |
Optomechanical MEMS device including a proof mass and an illumination mitigating mechanism Grant 8,581,165 - Ronen , et al. November 12, 2 | 2013-11-12 |
Tuning Movable Layer Stiffness With Features In The Movable Layer App 20130100518 - Tupelly; Chandra Shekar Reddy ;   et al. | 2013-04-25 |
Electromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20130069958 - Chui; Clarence ;   et al. | 2013-03-21 |
Electromechanical Device Configured To Minimize Stress-related Deformation And Methods For Fabricating Same App 20120287138 - Zhong; Fan ;   et al. | 2012-11-15 |
Adaptive Modifications In Micro Opto-electro-mechanical Systems App 20120272733 - Ronen; Aviv ;   et al. | 2012-11-01 |
MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same Grant 8,298,847 - Kogut , et al. October 30, 2 | 2012-10-30 |
MEMS devices with multi-component sacrificial layers Grant 8,300,299 - Tung , et al. October 30, 2 | 2012-10-30 |
Electromechanical device with optical function separated from mechanical and electrical function Grant 8,289,613 - Chui , et al. October 16, 2 | 2012-10-16 |
Electromechanical device configured to minimize stress-related deformation and methods for fabricating same Grant 8,229,253 - Zhong , et al. July 24, 2 | 2012-07-24 |
Method Of Manufacturing Mems Devices Providing Air Gap Control App 20120122259 - Tung; Ming-Hau ;   et al. | 2012-05-17 |
Analog Interferometric Modulator Device With Electrostatic Actuation And Release App 20120088027 - Kothari; Manish ;   et al. | 2012-04-12 |
Multicomponent Sacrificial Structure App 20120057216 - Flores; Lucio ;   et al. | 2012-03-08 |
Modulating the intensity of light from an interferometric reflector Grant 8,115,987 - Bita , et al. February 14, 2 | 2012-02-14 |
Method of manufacturing MEMS devices providing air gap control Grant 8,102,590 - Tung , et al. January 24, 2 | 2012-01-24 |
Analog interferometric modulator device with electrostatic actuation and release Grant 8,098,416 - Kothari , et al. January 17, 2 | 2012-01-17 |
Integrated imods and solar cells on a substrate Grant 8,094,363 - Sasagawa , et al. January 10, 2 | 2012-01-10 |
Mems Devices With Multi-component Sacrificial Layers App 20110205615 - Tung; Ming-Hau ;   et al. | 2011-08-25 |
Electromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20110188109 - Chui; Clarence ;   et al. | 2011-08-04 |
MEMS devices with multi-component sacrificial layers Grant 7,952,789 - Tung , et al. May 31, 2 | 2011-05-31 |
Method of manufacturing MEMS devices providing air gap control Grant 7,952,787 - Tung , et al. May 31, 2 | 2011-05-31 |
Microelectromechanical device and method utilizing a porous surface Grant 7,944,603 - Sasagawa , et al. May 17, 2 | 2011-05-17 |
Electromechanical device with optical function separated from mechanical and electrical function Grant 7,944,599 - Chui , et al. May 17, 2 | 2011-05-17 |
White interferometric modulators and methods for forming the same Grant 7,884,989 - Gally , et al. February 8, 2 | 2011-02-08 |
Support structures for free-standing electromechanical devices Grant 7,835,061 - Kogut , et al. November 16, 2 | 2010-11-16 |
Electromechanical Device Configured To Minimize Stress-related Deformation And Methods For Fabricating Same App 20100265563 - Zhong; Fan ;   et al. | 2010-10-21 |
Mems Devices Having Support Structures With Substantially Vertical Sidewalls And Methods For Fabricating The Same App 20100202039 - Kogut; Lior ;   et al. | 2010-08-12 |
Mems Devices With Multi-component Sacrificial Layers App 20100165442 - Tung; Ming-Hau ;   et al. | 2010-07-01 |
MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same Grant 7,747,109 - Zhong , et al. June 29, 2 | 2010-06-29 |
Microelectromechanical device and method utilizing conducting layers separated by stops Grant 7,742,220 - Kogut , et al. June 22, 2 | 2010-06-22 |
MEMS switches with deforming membranes Grant 7,724,417 - Lewis , et al. May 25, 2 | 2010-05-25 |
Analog Interferometric Modulator Device With Electrostatic Actuation And Release App 20100118382 - Kothari; Manish ;   et al. | 2010-05-13 |
MEMS devices requiring no mechanical support Grant 7,715,079 - Kogut , et al. May 11, 2 | 2010-05-11 |
Microelectromechanical device and method utilizing nanoparticles Grant 7,711,239 - Sasagawa , et al. May 4, 2 | 2010-05-04 |
MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same Grant 7,704,773 - Kogut , et al. April 27, 2 | 2010-04-27 |
Analog interferometric modulator device with electrostatic actuation and release Grant 7,649,671 - Kothari , et al. January 19, 2 | 2010-01-19 |
System and method for providing residual stress test structures Grant 7,636,151 - Kothari , et al. December 22, 2 | 2009-12-22 |
Integrated Imods And Solar Cells On A Substrate App 20090308452 - Sasagawa; Teruo ;   et al. | 2009-12-17 |
Non-planar surface structures and process for microelectromechanical systems Grant 7,623,287 - Sasagawa , et al. November 24, 2 | 2009-11-24 |
Method Of Manufacturing Mems Devices Providing Air Gap Control App 20090273823 - Tung; Ming-Hau ;   et al. | 2009-11-05 |
Microelectromechanical device with optical function separated from mechanical and electrical function Grant 7,612,932 - Chui , et al. November 3, 2 | 2009-11-03 |
Mems Device Having A Layer Movable At Asymmetric Rates App 20090256218 - Mignard; Marc ;   et al. | 2009-10-15 |
Integrated IMODS and solar cells on a substrate Grant 7,595,926 - Sasagawa , et al. September 29, 2 | 2009-09-29 |
Method Of Manufacturing Mems Devices Providing Air Gap Control App 20090213451 - Tung; Ming-Hau ;   et al. | 2009-08-27 |
Microelectromechanical device and method utilizing a porous surface Grant 7,564,613 - Sasagawa , et al. July 21, 2 | 2009-07-21 |
MEMS device having a layer movable at asymmetric rates Grant 7,550,810 - Mignard , et al. June 23, 2 | 2009-06-23 |
Mems Devices Requiring No Mechanical Support App 20090147343 - Kogut; Lior ;   et al. | 2009-06-11 |
Non-planar surface structures and process for microelectromechanical systems Grant 7,527,996 - Luo , et al. May 5, 2 | 2009-05-05 |
Method of manufacturing MEMS devices providing air gap control Grant 7,527,998 - Tung , et al. May 5, 2 | 2009-05-05 |
Mems Devices With Protective Coatings App 20090059345 - Tung; Ming-Hau ;   et al. | 2009-03-05 |
System And Method For Measuring Adhesion Forces In Mems Devices App 20090051369 - Kogut; Lior ;   et al. | 2009-02-26 |
Integrated Imods And Solar Cells On A Substrate App 20090009847 - Sasagawa; Teruo ;   et al. | 2009-01-08 |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers Grant 7,450,295 - Tung , et al. November 11, 2 | 2008-11-11 |
Microelectromechanical Device And Method Utilizing Conducting Layers Separated By Stops App 20080239455 - Kogut; Lior ;   et al. | 2008-10-02 |
Microelectromechanical Device And Method Utilizing A Porous Surface App 20080218843 - Sasagawa; Teruo ;   et al. | 2008-09-11 |
Microelectromechanical device and method utilizing a porous surface Grant 7,417,784 - Sasagawa , et al. August 26, 2 | 2008-08-26 |
Modulating The Intensity Of Light From An Interferometric Reflector App 20080186581 - Bita; Ion ;   et al. | 2008-08-07 |
MEMS switches with deforming membranes App 20080142347 - Lewis; Alan ;   et al. | 2008-06-19 |
Support structure for free-standing MEMS device and methods for forming the same Grant 7,385,744 - Kogut , et al. June 10, 2 | 2008-06-10 |
Support structure for free-standing MEMS device and methods for forming the same App 20080055707 - Kogut; Lior ;   et al. | 2008-03-06 |
Microelectromechanical Device And Method Utilizing A Porous Surface App 20080030825 - Sasagawa; Teruo ;   et al. | 2008-02-07 |
Microelectromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20080013144 - Chui; Clarence ;   et al. | 2008-01-17 |
Microelectromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20080013145 - Chui; Clarence ;   et al. | 2008-01-17 |
Support structure for free-standing MEMS device and methods for forming the same App 20080003710 - Kogut; Lior ;   et al. | 2008-01-03 |
Method of manufacturing MEMS devices providing air gap control App 20080003737 - Tung; Ming-Hau ;   et al. | 2008-01-03 |
Analog interferometric modulator device with electrostatic actuation and release App 20070279729 - Kothari; Manish ;   et al. | 2007-12-06 |
Non-planar surface structures and process for microelectromechanical systems App 20070249079 - Sasagawa; Teruo ;   et al. | 2007-10-25 |
Microelectromechanical device and method utilizing a porous surface App 20070247696 - Sasagawa; Teruo ;   et al. | 2007-10-25 |
Microelectromechanical device and method utilizing nanoparticles App 20070247401 - Sasagawa; Teruo ;   et al. | 2007-10-25 |
Non-planar surface structures and process for microelectromechanical systems App 20070249081 - Luo; Qi ;   et al. | 2007-10-25 |
Non-planar surface structures and process for microelectromechanical systems App 20070249078 - Tung; Ming-Hau ;   et al. | 2007-10-25 |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers App 20070206267 - Tung; Ming-Hau ;   et al. | 2007-09-06 |
MEMS device having a layer movable at asymmetric rates App 20070194630 - Mignard; Marc ;   et al. | 2007-08-23 |
System and method for providing residual stress test structures App 20070177129 - Kothari; Manish ;   et al. | 2007-08-02 |
White interferometric modulators and methods for forming the same App 20070121118 - Gally; Brian J. ;   et al. | 2007-05-31 |
MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same App 20070041076 - Zhong; Fan ;   et al. | 2007-02-22 |
MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same App 20070042524 - Kogut; Lior ;   et al. | 2007-02-22 |