| Patent | Date |
|---|
Chuck cleaner and cleaning method
Grant 11,084,069 - Kobayashi , et al. August 10, 2 | 2021-08-10 |
Chuck Cleaner And Cleaning Method
App 20190076888 - KOBAYASHI; Yoshihito ; et al. | 2019-03-14 |
Chuck cleaner and cleaning method
Grant 10,160,014 - Kobayashi , et al. Dec | 2018-12-25 |
Reticle chuck cleaner and reticle chuck cleaning method
Grant 9,808,841 - Kobayashi , et al. November 7, 2 | 2017-11-07 |
Electrostatic chuck cleaner, cleaning method, and exposure apparatus
Grant 9,599,909 - Kamo , et al. March 21, 2 | 2017-03-21 |
Mask cleaner and cleaning method
Grant 9,348,218 - Kobayashi May 24, 2 | 2016-05-24 |
Electrostatic Chuck Cleaner, Cleaning Method, And Exposure Apparatus
App 20150261104 - KAMO; TAKASHI ; et al. | 2015-09-17 |
Chuck Cleaner And Cleaning Method
App 20150107621 - Kobayashi; Yoshihito ; et al. | 2015-04-23 |
Reticle Chuck Cleaner And Reticle Chuck Cleaning Method
App 20140326278 - Kobayashi; Yoshihito ; et al. | 2014-11-06 |
Mask Cleaner And Cleaning Method
App 20140158157 - KOBAYASHI; Yoshihito | 2014-06-12 |
Method for manufacturing template and method for manufacturing semiconductor device
Grant 8,663,895 - Kobayashi March 4, 2 | 2014-03-04 |
Patterning method and method for manufacturing semiconductor device
Grant 8,551,393 - Kobayashi October 8, 2 | 2013-10-08 |
Sealant-attached Template, Method For Storing Template, Template Sealing Apparatus, And Template Unsealing Apparatus
App 20130224324 - KOBAYASHI; Yoshihito | 2013-08-29 |
Imprint Lithography Template, Method Of Fabricating An Imprint Lithography Template, And Method Of Forming A Pattern
App 20120244243 - KOBAYASHI; Yoshihito | 2012-09-27 |
Template, Method Of Forming Template, And Method Of Manufacturing Semiconductor Device
App 20120112370 - KOBAYASHI; Yoshihito | 2012-05-10 |
Method For Manufacturing Template And Method For Manufacturing Semiconductor Device
App 20110068083 - KOBAYASHI; Yoshihito | 2011-03-24 |
Patterning Method And Method For Manufacturing Semiconductor Device
App 20110034012 - KOBAYASHI; Yoshihito | 2011-02-10 |
Semiconductor Apparatus Manufacturing Method And Imprint Template
App 20100330807 - KOBAYASHI; Yoshihito | 2010-12-30 |
Electronic device test apparatus for successively testing electronic devices
Grant 7,800,393 - Ito , et al. September 21, 2 | 2010-09-21 |
Electronic Device Test Apparatus For Successively Testing Electronic Devices
App 20100148793 - ITO; Akihiko ; et al. | 2010-06-17 |
Electronic Device Test Apparatus And Method Of Testing Electronic Devices
App 20100147088 - Ito; Akihiko ; et al. | 2010-06-17 |
Electronic device test apparatus for successively testing electronic devices
Grant 7,612,575 - Ito , et al. November 3, 2 | 2009-11-03 |
Electronic Device Test Apparatus
App 20080038098 - Ito; Akihiko ; et al. | 2008-02-14 |
Semiconductor device testing apparatus and a test tray for use in the testing apparatus
Grant 6,856,128 - Ito , et al. February 15, 2 | 2005-02-15 |
Method of testing electronic components and testing apparatus for electronic components
Grant 6,728,652 - Kobayashi April 27, 2 | 2004-04-27 |
Tester For Semiconductor Devices And Test Tray Used For The Same
App 20020135356 - ITO, AKIHIKO ; et al. | 2002-09-26 |
Semiconductor device testing apparatus
Grant 6,384,593 - Kobayashi , et al. May 7, 2 | 2002-05-07 |
Semiconductor device testing apparatus and semiconductor device testing system having a plurality of semiconductor device testing apparatus
App 20020036161 - Nemoto, Shin ; et al. | 2002-03-28 |
Semiconductor device testing apparatus and a test tray for use in the testing apparatus
App 20020011836 - Ito, Akihiko ; et al. | 2002-01-31 |
Semiconductor device testing apparatus
Grant 6,320,398 - Ito , et al. November 20, 2 | 2001-11-20 |
Semiconductor device testing apparatus
Grant 6,104,183 - Kobayashi , et al. August 15, 2 | 2000-08-15 |
Device transfer and reinspection method for IC handler
Grant 6,075,216 - Nakamura , et al. June 13, 2 | 2000-06-13 |
Semiconductor device testing apparatus and semiconductor device testing system having a plurality of semiconductor device testing apparatus
Grant 6,066,822 - Nemoto , et al. May 23, 2 | 2000-05-23 |
Method of forming patterns for use in manufacturing electronic devices
Grant 5,814,432 - Kobayashi September 29, 1 | 1998-09-29 |
Device transfer apparatus and device reinspection method for IC handler
Grant 5,772,387 - Nakamura , et al. June 30, 1 | 1998-06-30 |
Test tray positioning stopper mechanism for automatic handler
Grant 5,625,287 - Nakamura , et al. April 29, 1 | 1997-04-29 |
Resist for forming patterns comprising an acid generating compound and a polymer having acid decomposable groups
Grant 5,403,695 - Hayase , et al. April 4, 1 | 1995-04-04 |
Pattern formation resist and pattern formation method
Grant 5,279,921 - Onishi , et al. January 18, 1 | 1994-01-18 |
IC test equipment
Grant 5,261,775 - Kobayashi November 16, 1 | 1993-11-16 |
Photosensitive composition
Grant 5,100,768 - Niki , et al. March 31, 1 | 1992-03-31 |
IC test equipment having input magazine replenisher
Grant 4,760,924 - Sato , et al. August 2, 1 | 1988-08-02 |
IC test equipment
Grant 4,715,501 - Sato , et al. December 29, 1 | 1987-12-29 |
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