Patent | Date |
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Methods Of Bandgap Analysis And Modeling For High K Metal Gate App 20190242938 - DAI; Min ;   et al. | 2019-08-08 |
Wafer Level Spectrometer App 20160011046 - Jensen; Earl M. ;   et al. | 2016-01-14 |
Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system Grant 8,621,945 - Zeng , et al. January 7, 2 | 2014-01-07 |
Method and apparatus for measuring the shape and thickness variation of a wafer by two single-shot phase-shifting interferometers Grant 8,537,369 - Tang September 17, 2 | 2013-09-17 |
Method and apparatus for inspecting reticles implementing parallel processing Grant 7,724,939 - Goldberg , et al. May 25, 2 | 2010-05-25 |
Chemical mechanical polishing test structures and methods for inspecting the same Grant 7,655,482 - Satya , et al. February 2, 2 | 2010-02-02 |
Multiple beam inspection apparatus and method Grant 7,486,393 - Kvamme , et al. February 3, 2 | 2009-02-03 |
Test Structures And Methods For Inspection Of Semiconductor Integrated Circuits App 20080246030 - Satya; Akella V.S. ;   et al. | 2008-10-09 |
Multiple Directional Scans Of Test Structures On Semiconductor Integrated Circuits App 20080237487 - Pinto; Gustavo A. ;   et al. | 2008-10-02 |
Chemical Mechanical Polishing Test Structures And Methods For Inspecting The Same App 20070111342 - Satya; Akella V. S. ;   et al. | 2007-05-17 |
Chemical mechanical polishing test structures and methods for inspecting the same Grant 7,179,661 - Satya , et al. February 20, 2 | 2007-02-20 |
Method And Apparatus For Inspecting Reticles Implementing Parallel Processing App 20060269119 - GOLDBERG; EDWARD M. ;   et al. | 2006-11-30 |
Method and apparatus for inspecting reticles implementing parallel processing Grant 7,106,895 - Goldberg , et al. September 12, 2 | 2006-09-12 |
Overlay alignment mark design Grant 7,102,749 - Bareket September 5, 2 | 2006-09-05 |
Multiple directional scans of test structures on semiconductor integrated circuits App 20050139767 - Pinto, Gustavo A. ;   et al. | 2005-06-30 |
Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices Grant 6,771,806 - Satya , et al. August 3, 2 | 2004-08-03 |
Mechanisms for making and inspecting reticles Grant 6,748,103 - Glasser , et al. June 8, 2 | 2004-06-08 |
Apparatus and methods for detecting killer particles during chemical mechanical polishing Grant 6,671,051 - Nikoonahad , et al. December 30, 2 | 2003-12-30 |
In-situ probe for optimizing electron beam inspection and metrology based on surface potential Grant 6,664,546 - McCord , et al. December 16, 2 | 2003-12-16 |
Dual probe test structures for semiconductor integrated circuits Grant 6,636,064 - Satya , et al. October 21, 2 | 2003-10-21 |
Stepper type test structures and methods for inspection of semiconductor integrated circuits Grant 6,633,174 - Satya , et al. October 14, 2 | 2003-10-14 |
Apparatus and methods for performing self-clearing optical measurements Grant 6,628,397 - Nikoonahad , et al. September 30, 2 | 2003-09-30 |
Apparatus and methods for secondary electron emission microscope with dual beam Grant 6,586,733 - Veneklasen , et al. July 1, 2 | 2003-07-01 |
Apparatus and methods for modeling process effects and imaging effects in scanning electron microscopy Grant 6,581,193 - McGhee , et al. June 17, 2 | 2003-06-17 |
Multiple directional scans of test structures on semiconductor integrated circuits Grant 6,566,885 - Pinto , et al. May 20, 2 | 2003-05-20 |
Mechanisms for making and inspecting reticles Grant 6,529,621 - Glasser , et al. March 4, 2 | 2003-03-04 |
Test structures and methods for inspection of semiconductor integrated circuits Grant 6,528,818 - Satya , et al. March 4, 2 | 2003-03-04 |
Continuous movement scans of test structures on semiconductor integrated circuits Grant 6,524,873 - Satya , et al. February 25, 2 | 2003-02-25 |
Apparatus and methods for collecting global data during a reticle inspection Grant 6,516,085 - Wiley , et al. February 4, 2 | 2003-02-04 |
In-situ End Point Detection For Semiconductor Wafer Polishing App 20030003605 - Chen, Haiguang ;   et al. | 2003-01-02 |
Scanning electron beam microscope Grant 6,066,849 - Masnaghetti , et al. May 23, 2 | 2000-05-23 |