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Immersion exposure apparatus and immersion exposure method, and device manufacturing method App 20110080568 - Kiuchi; Tohru | 2011-04-07 |
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Pattern Forming Device, Pattern Forming Method, And Device Manufacturing Method App 20110012294 - Kiuchi; Tohru ;   et al. | 2011-01-20 |
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Flexible Substrate, Manufacturing Method Of Display Element, And Manufacturing Apparatus Of Display Element App 20100143595 - NARA; Kei ;   et al. | 2010-06-10 |
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Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20090263736 - Inoue; Hideya ;   et al. | 2009-10-22 |
Exposure apparatus, exposure method, and device manufacturing method App 20090208885 - Kiuchi; Tohru | 2009-08-20 |
Exposure apparatus, exposure method, and device manufacturing method Grant 7,573,052 - Inoue , et al. August 11, 2 | 2009-08-11 |
Exposure apparatus, exposure method, and method for producing device App 20090002658 - Kiuchi; Tohru | 2009-01-01 |
Exposure apparatus and device manufacturing method App 20090002660 - Kiuchi; Tohru | 2009-01-01 |
Exposure method and electronic device manufacturing method App 20080299492 - Kiuchi; Tohru ;   et al. | 2008-12-04 |
Exposure apparatus and device manufacturing method Grant 7,433,019 - Kiuchi , et al. October 7, 2 | 2008-10-07 |
Exposure Apparatus, Exposure Method And Device Manufacturing Method App 20080210888 - INOUE; Hideya ;   et al. | 2008-09-04 |
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Immersion exposure apparatus and immersion exposure method, and device manufacturing method App 20080068571 - Kiuchi; Tohru | 2008-03-20 |
Gun grip controller Grant 7,220,160 - Kiuchi May 22, 2 | 2007-05-22 |
Exposure apparatus and device manufacturing method App 20060209278 - Kiuchi; Tohru ;   et al. | 2006-09-21 |
Gun grip controller App 20050181702 - Kiuchi, Tohru | 2005-08-18 |
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