loadpatents
Patent applications and USPTO patent grants for Kishkovich; Oleg P..The latest application filed is for "methods and apparatuses for controlling contamination of substrates".
Patent | Date |
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System for purging reticle storage Grant 8,776,841 - Kishkovich , et al. July 15, 2 | 2014-07-15 |
Filters employing both acidic polymers and physical-adsorption media Grant RE44,536 - Kishkovich , et al. October 15, 2 | 2013-10-15 |
System and method for removing contaminants Grant 8,398,753 - Sergi , et al. March 19, 2 | 2013-03-19 |
Methods And Apparatuses For Controlling Contamination Of Substrates App 20110114129 - Kishkovich; Oleg P. ;   et al. | 2011-05-19 |
Filtering system for a semiconductor processing tool Grant 7,922,791 - Grayfer , et al. April 12, 2 | 2011-04-12 |
System For Purging Reticle Storage App 20100294397 - Kishkovich; Oleg P. ;   et al. | 2010-11-25 |
Filtering system for a semiconductor processing tool App 20090320681 - Grayfer; Anatoly ;   et al. | 2009-12-31 |
Filters employing both acidic polymers and physical-adsorption media Grant 7,540,901 - Kishkovich , et al. June 2, 2 | 2009-06-02 |
Air handling and chemical filtration system and method App 20080257159 - Goodwin; William M. ;   et al. | 2008-10-23 |
Environmental control in a reticle SMIF pod Grant 7,400,383 - Halbmaier , et al. July 15, 2 | 2008-07-15 |
System And Method For Removing Contaminants App 20080078289 - Sergi; John E. ;   et al. | 2008-04-03 |
Air handling and chemical filtration system and method Grant 7,329,308 - Goodwin , et al. February 12, 2 | 2008-02-12 |
System and method of monitoring contamination App 20080009099 - Kishkovich; Oleg P. ;   et al. | 2008-01-10 |
Environmental control in a reticle SMIF pod App 20060266011 - Halbmaier; David L. ;   et al. | 2006-11-30 |
System and method for monitoring contamination Grant 7,092,077 - Kishkovich , et al. August 15, 2 | 2006-08-15 |
Filters employing both acidic polymers and physical-adsorption media App 20060169139 - Kishkovich; Oleg P. ;   et al. | 2006-08-03 |
Filters employing both acidic polymers and physical-adsorption media Grant 7,014,693 - Kishkovich , et al. March 21, 2 | 2006-03-21 |
Protection of semiconductor fabrication and similar sensitive processes App 20050106737 - Kishkovich, Oleg P. ;   et al. | 2005-05-19 |
Air handling and chemical filtration system and method App 20050081715 - Goodwin, William M. ;   et al. | 2005-04-21 |
Filters employing both acidic polymers and physical-adsorption media App 20050051030 - Kishkovich, Oleg P. ;   et al. | 2005-03-10 |
Detection of base contaminants in gas samples Grant 6,855,557 - Kishkovich , et al. February 15, 2 | 2005-02-15 |
System and method for monitoring contamination App 20040166679 - Kishkovich, Oleg P. ;   et al. | 2004-08-26 |
Methods using filters employing both acidic polymers and physical-adsorption media Grant 6,761,753 - Kishkovich , et al. July 13, 2 | 2004-07-13 |
System and method for determining and controlling contamination Grant 6,759,254 - Kishkovich , et al. July 6, 2 | 2004-07-06 |
Filters employing both acidic polymers and physical-adsorption media Grant 6,740,147 - Kishkovich , et al. May 25, 2 | 2004-05-25 |
System and method for monitoring contamination App 20040023419 - Kishkovich, Oleg P. ;   et al. | 2004-02-05 |
System and method for determining and controlling contamination Grant 6,620,630 - Kishkovich , et al. September 16, 2 | 2003-09-16 |
System and method for determining and controlling contamination App 20030113943 - Kishkovich, Oleg P. ;   et al. | 2003-06-19 |
System and method for determining and controlling contamination App 20030068834 - Kishkovich, Oleg P. ;   et al. | 2003-04-10 |
Protection of semiconductor fabrication and similar sensitive processes App 20020090735 - Kishkovich, Oleg P. ;   et al. | 2002-07-11 |
Filters employing both acidic polymers and physical-adsorption media App 20020078828 - Kishkovich, Oleg P. ;   et al. | 2002-06-27 |
Protection of semiconductor fabrication and similar sensitive processes Grant 6,296,806 - Kishkovich , et al. October 2, 2 | 2001-10-02 |
Detection of base contaminants in gas samples App 20010019844 - Kishkovich, Oleg P. ;   et al. | 2001-09-06 |
Detection of base contaminants in gas samples Grant 6,207,460 - Kishkovich , et al. March 27, 2 | 2001-03-27 |
System for detecting base contaminants in air Grant 6,096,267 - Kishkovich , et al. August 1, 2 | 2000-08-01 |
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