Kimba; Toshifumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kimba; Toshifumi.The latest application filed is for "optical film-thickness measuring apparatus and polishing apparatus".

Company Profile

8.78.84

Kimba; Toshifumi - Tokyo JP
Kimba; Toshifumi - Kanagawa-ken JP
Kimba; Toshifumi - Fujisawa JP
Kimba; Toshifumi - Fujisawa-shi JP
Kimba; Toshifumi - Kanagawa JP
Kimba; Toshifumi - Toyko N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Polishing apparatus Grant 11,413,720 - Takahashi , et al. August 16, 2	2022-08-16
Optical Film-thickness Measuring Apparatus And Polishing Apparatus App 20220105601 - Kinoshita; Masaki ; et al.	2022-04-07
Film Thickness Measurement Apparatus, Polishing Apparatus, And Film Thickness Measurement Method App 20210354262 - Satori; Hirotaka ; et al.	2021-11-18
Polishing apparatus and polishing method Grant 11,045,921 - Kimba , et al. June 29, 2	2021-06-29
Film-thickness measuring apparatus, polishing apparatus, and polishing method Grant 10,816,323 - Kimba October 27, 2	2020-10-27
Polishing Method And Polishing Apparatus App 20200282512 - Kimba; Toshifumi	2020-09-10
Polishing apparatus Grant 10,663,287 - Kimba , et al.	2020-05-26
Polishing Pad For Substrate Polishing Apparatus And Substrate Polishing Apparatus Having Polishing Pad App 20200001424 - Kimba; Toshifumi	2020-01-02
Polishing Apparatus App 20190219381 - KIMBA; Toshifumi ; et al.	2019-07-18
Polishing apparatus Grant 10,343,255 - Kobata , et al. July 9, 2	2019-07-09
Polishing Apparatus App 20190118331 - TAKAHASHI; Nobuyuki ; et al.	2019-04-25
Film thickness measuring method, film thickness measuring apparatus, polishing method, and polishing apparatus Grant 10,256,104 - Kimba	2019-04-09
Polishing Apparatus And Polishing Method App 20190022820 - KIMBA; Toshifumi ; et al.	2019-01-24
Film-thickness Measuring Apparatus, Polishing Apparatus, And Polishing Method App 20190017808 - KIMBA; Toshifumi	2019-01-17
Polishing Apparatus And Polishing Method App 20180339392 - KIMBA; Toshifumi ; et al.	2018-11-29
Polishing apparatus Grant 10,124,462 - Kimba November 13, 2	2018-11-13
Polishing Apparatus App 20180229346 - KOBATA; Itsuki ; et al.	2018-08-16
Polishing apparatus Grant 9,969,048 - Kobata , et al. May 15, 2	2018-05-15
Film Thickness Measuring Method, Film Thickness Measuring Apparatus, Polishing Method, And Polishing Apparatus App 20180130667 - KIMBA; Toshifumi	2018-05-10
Polishing method and polishing apparatus Grant 9,842,783 - Kimba December 12, 2	2017-12-12
Polishing Method And Polishing Apparatus App 20170103928 - KIMBA; Toshifumi	2017-04-13
Polishing method Grant 9,604,337 - Kimba March 28, 2	2017-03-28
Polishing method and polishing apparatus Grant 9,561,577 - Kimba February 7, 2	2017-02-07
Polishing Apparatus App 20160354894 - KIMBA; Toshifumi	2016-12-08
Polishing Apparatus App 20160325399 - KOBATA; Itsuki ; et al.	2016-11-10
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Polishing apparatus and polishing method Grant 9,401,293 - Kobata , et al. July 26, 2	2016-07-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Polishing Method App 20160129546 - KIMBA; Toshifumi	2016-05-12
Polishing method and polishing apparatus Grant 9,266,214 - Kimba February 23, 2	2016-02-23
Polishing Apparatus App 20150332943 - KOBATA; Itsuki ; et al.	2015-11-19
Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams Grant 9,136,091 - Kimba , et al. September 15, 2	2015-09-15
Polishing pad for substrate polishing apparatus Grant D731,448 - Kinoshita , et al. June 9, 2	2015-06-09
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Polishing Method And Polishing Apparatus App 20150017745 - KIMBA; Toshifumi ; et al.	2015-01-15
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Polishing Method And Polishing Apparatus App 20140323016 - KIMBA; Toshifumi	2014-10-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Polishing apparatus Grant 8,771,038 - Kimba , et al. July 8, 2	2014-07-08
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Electron Beam Apparatus For Inspecting A Pattern On A Sample Using Multiple Electron Beams App 20140107959 - KIMBA; Toshifumi ; et al.	2014-04-17
Method of monitoring progress of substrate polishing and polishing apparatus Grant 8,687,197 - Kimba April 1, 2	2014-04-01
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams Grant 8,639,463 - Kimba , et al. January 28, 2	2014-01-28
Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring method Grant 8,585,460 - Kobayashi , et al. November 19, 2	2013-11-19
Method Of Making Diagram For Use In Selection Of Wavelength Of Light For Polishing Endpoint Detection, Method And Apparatus For Selecting Wavelength Of Light For Polishing Endpoint Detection, Polishing Endpoint Detection Method, Polishing Endpoint Detection Apparatus, And Polishing Monitoring Method App 20130149938 - KOBAYASHI; Yoichi ; et al.	2013-06-13
Polishing Method And Polishing Apparatus App 20130109278 - KIMBA; Toshifumi	2013-05-02
Substrate processing apparatus Grant 8,414,355 - Kimba , et al. April 9, 2	2013-04-09
Xy-coordinate Compensation Apparatus And Method In Sample Pattern Inspection Apparatus App 20130056635 - KIMBA; Toshifumi ; et al.	2013-03-07
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
XY-coordinate compensation apparatus and method in sample pattern inspection apparatus Grant 8,280,664 - Kimba , et al. October 2, 2	2012-10-02
Polishing Apparatus And Polishing Method App 20120164917 - KOBATA; Itsuki ; et al.	2012-06-28
Polishing end point detection method, polishing end point detection apparatus, and polishing apparatus Grant 8,115,912 - Kimba February 14, 2	2012-02-14
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Method Of Monitoring Progress Of Substrate Polishing And Polishing Apparatus App 20120019830 - KIMBA; Toshifumi	2012-01-26
Polishing End Point Detection Method, Polishing End Point Detection Apparatus, And Polishing Apparatus App 20120009849 - KIMBA; Toshifumi	2012-01-12
Electron beam apparatus Grant 8,067,732 - Nakasuji , et al. November 29, 2	2011-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Polishing end point detection method, polishing end point detection apparatus and polishing apparatus Grant 8,045,142 - Kimba October 25, 2	2011-10-25
Sample inspection apparatus Grant 7,964,844 - Kimba June 21, 2	2011-06-21
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Polishing Apparatus App 20110034106 - Kimba; Toshifumi ; et al.	2011-02-10
Xy-coordinate Compensation Apparatus And Method In Sample Pattern Inspection Apparatus App 20100282956 - Kimba; Toshifumi ; et al.	2010-11-11
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring method App 20100093260 - Kobayashi; Yoichi ; et al.	2010-04-15
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 7,675,634 - Kimba , et al. March 9, 2	2010-03-09
Substrate processing apparatus App 20100022166 - Kimba; Toshifumi ; et al.	2010-01-28
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Electron Beam Apparatus App 20090218506 - Nakasuji; Mamoru ; et al.	2009-09-03
Sample Inspection Apparatus App 20090212214 - Kimba; Toshifumi	2009-08-27
Polishing end point detection method, polishing end point detection apparatus and polishing apparatus App 20090153859 - Kimba; Toshifumi	2009-06-18
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20090051939 - Kimba; Toshifumi ; et al.	2009-02-26
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20080315095 - Nakasuji; Mamoru ; et al.	2008-12-25
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 7,428,064 - Kimba , et al. September 23, 2	2008-09-23
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method Grant 7,425,703 - Nakasuji , et al. September 16, 2	2008-09-16
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples Grant 7,408,643 - Kimba , et al. August 5, 2	2008-08-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Defect inspection apparatus App 20080063258 - Kimba; Toshifumi	2008-03-13
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples App 20070236690 - Kimba; Toshifumi ; et al.	2007-10-11
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples Grant 7,248,353 - Kimba , et al. July 24, 2	2007-07-24
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method Grant 7,244,933 - Nakasuji , et al. July 17, 2	2007-07-17
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20060209308 - Kimba; Toshifumi ; et al.	2006-09-21
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 7,072,050 - Kimba , et al. July 4, 2	2006-07-04
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method App 20060102838 - Nakasuji; Mamoru ; et al.	2006-05-18
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method Grant 7,012,251 - Nakasuji , et al. March 14, 2	2006-03-14
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20050214958 - Nakasuji, Mamoru ; et al.	2005-09-29
Defect inspection apparatus App 20050205781 - Kimba, Toshifumi	2005-09-22
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples App 20050104017 - Kimba, Toshifumi ; et al.	2005-05-19
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method App 20050051724 - Nakasuji, Mamoru ; et al.	2005-03-10
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20040223166 - Kimba, Toshifumi ; et al.	2004-11-11
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus Grant 6,785,010 - Kimba , et al. August 31, 2	2004-08-31
Method and apparatus for measuring film thickness Grant 6,657,737 - Kimba , et al. December 2, 2	2003-12-02
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07
Method and apparatus for measuring film thickness App 20010052987 - Kimba, Toshifumi ; et al.	2001-12-20
Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus App 20010005265 - Kimba, Toshifumi ; et al.	2001-06-28
Multi-beam image forming system Grant 5,812,892 - Miyoshi , et al. September 22, 1	1998-09-22